Plasma radio frequency power supply

Abstract

The utility model relates to a plasma radio frequency power supply relates to radio frequency power supply technical field, it includes power supply shell, adjusting knob and electricity socket, adjusting knob is rotatingly provided on power supply shell, electricity socket is provided on power supply shell, adjusting knob and electricity socket are both electrically connected with power supply shell internal circuit, and the power supply shell internal circuit is electrically connected with the power supply shell. The power supply shell is detachably provided with a protective cover, the protective cover covers the adjusting knob and the electric socket, the protective cover is provided with a using groove, the inner wall of the using groove is provided with a sliding groove, a sliding plate is arranged in the sliding groove in a sliding mode, and the sliding plate can be inserted into and cover the using groove. The method has the effect of improving the overall applicability.

Description

Technical Field

[0001] This utility model relates to the field of radio frequency power supply technology, and in particular to a plasma radio frequency power supply. Background Technology

[0002] Radio frequency (RF) power supplies are power sources capable of generating sinusoidal voltages at a fixed frequency within the RF range (approximately 3kHz to 300GHz) with a certain power output. Plasma RF power supplies are devices that provide the necessary RF energy to plasma. RF power supplies are the driving source for plasma industrial equipment, primarily used in coating, plasma cleaning, and CO2 laser processes. The advantage of RF power supplies over high-frequency power supplies is the flexibility to change the discharge voltage by adjusting the matching angle. A 1kW RF power supply, after adjusting the matching angle using a matching adapter, can achieve an output voltage of 6kV. After the discharge stabilizes, the discharge voltage is further reduced by automatically adjusting the matching angle. This system can be applied in the semiconductor industry, including etching, RIE, parallel plate, ICP, RF sputtering, CVD, and PVD systems. The automatic matching adapter employs a unique "gradient descent high-speed tuning algorithm," which gradually slows down the adjustment speed as the tuning point approaches.

[0003] Existing plasma radio frequency power supplies typically consist of a power supply housing and several power sockets and adjustment knobs. However, in existing technologies, the power sockets and adjustment knobs protrude from the power supply housing. During field use and transportation, these components are easily damaged by impacts, causing them to become loose or even completely destroyed, rendering the power supply unusable. In particular, during movement and transport, the protruding power sockets and adjustment knobs are highly susceptible to damage from side impacts, indicating that the overall durability of the equipment needs improvement. Utility Model Content

[0004] To improve overall applicability, this application provides a plasma radio frequency power supply.

[0005] The plasma radio frequency power supply provided in this application adopts the following technical solution:

[0006] A plasma radio frequency power supply includes a power supply housing, an adjustment knob, and a power socket. The adjustment knob is rotatably mounted on the power supply housing, and the power socket is mounted on the power supply housing. Both the adjustment knob and the power socket are electrically connected to the internal circuitry of the power supply housing. The power supply housing is detachably equipped with a protective cover that covers the adjustment knob and the power socket. The protective cover has a usage slot, and the inner wall of the usage slot has a sliding groove. A sliding plate is slidably mounted in the sliding groove, and the sliding plate can be inserted into and cover the usage slot.

[0007] By adopting the above technical solution, the sliding plate covers the slot under the action of gravity, thereby shielding the adjustment knob and the power socket, reducing the possibility of the adjustment knob and the power socket being damaged by collision during transportation. When in use, sliding the sliding plate exposes the adjustment knob and the power socket through the slot, allowing them to be used. At the same time, the protective cover as a whole still shields the adjustment knob and the power socket, reducing the possibility of the adjustment knob and the power socket being damaged by collision during use, and improving the overall durability of the equipment.

[0008] Preferably, the power supply housing is provided with a connection panel, the adjustment knob is rotatably disposed on the connection panel, the power socket is disposed on the connection panel, both the adjustment knob and the power socket are electrically connected to the internal circuit of the connection panel, the connection panel is disposed inside a protective cover, the connection panel is provided with a connection plug, the connection plug is electrically connected to the internal circuit of the connection panel, the power supply housing is provided with a connection slot, the connection plug is inserted into the connection slot, and the connection plug is electrically connected to the internal circuit of the power supply housing.

[0009] By adopting the above technical solution and setting up a connection panel, the installation and disassembly of the adjustment knob and the power socket are facilitated, improving the overall ease of use and the stability of the installation of the adjustment knob and the power socket.

[0010] Preferably, the power supply housing is provided with a controller electrically connected to the internal circuit of the power supply housing, and a display screen is provided on the connection panel. The display screen is electrically connected to the internal circuit of the connection panel, and the controller is used to control the display screen to display power data.

[0011] By adopting the above technical solution, the display screen can show data such as power level, making it convenient to manage various power parameters during use and improving ease of use.

[0012] Preferably, a connecting bolt is provided between the power supply housing and the connecting panel, the connecting bolt being used to mount the connecting panel onto the power supply housing.

[0013] By adopting the above technical solution, the connecting bolts can be easily installed and disassembled, thereby improving the convenience of equipment maintenance, facilitating the replacement of the connecting panel, and promoting the recycling of various equipment components.

[0014] Preferably, the protective cover is provided with a mounting block, the power supply housing is provided with a mounting groove, and the mounting block is inserted into the mounting groove.

[0015] By adopting the above technical solution, the installation block is inserted into the installation slot to improve the stability of the connection between the power supply housing and the protective cover.

[0016] Preferably, the power supply housing is provided with mounting bolts for mounting the mounting block onto the power supply housing.

[0017] By adopting the above technical solution, the mounting bolts facilitate the installation or removal of the protective cover, improve the convenience of replacing the protective cover, and also make it easier for maintenance personnel to perform overall maintenance on the equipment.

[0018] Preferably, the sliding plate is provided with finger grooves.

[0019] By adopting the above technical solution, the finger groove facilitates the sliding plate, improving the ease of use.

[0020] Preferably, the sliding plate is provided with a first magnetic sheet, and the inner wall of the sliding groove is provided with a second magnetic sheet, wherein the first magnetic sheet and the second magnetic sheet can be attached together and magnetically attracted to each other.

[0021] By adopting the above technical solution, when the sliding plate is used by adjusting the knob and power socket through the exposed groove, the sliding plate slides until the first magnetic piece adheres to and attracts the second magnetic piece, thereby fixing the sliding plate, reducing the impact of the sliding plate's movement on use, and improving the convenience of use.

[0022] In summary, this application includes at least one of the following beneficial technical effects:

[0023] 1. By setting up a power supply housing, adjustment knob, power socket, protective cover, usage slot, sliding slot, and sliding plate, the adjustment knob and power socket on the power supply housing are set inside the protective cover, thereby reducing the possibility of collision damage. At the same time, when in use, the sliding plate is pushed to slide in the sliding slot, so that the adjustment knob and power socket are exposed outside the usage slot for use. The shielding and protection of the protective cover reduces the possibility of collision damage to the power socket and adjustment knob during handling, movement, and use, thereby improving the overall durability of the equipment.

[0024] 2. By setting up a connection panel, controller, connection plug, connection slot, display screen, and connection bolts, the connection bolts install the connection panel on the power supply housing, and the connection plug is inserted into the connection slot, so that the internal circuits of the connection panel and the power supply housing are connected. The controller then displays the power supply housing circuit data on the display screen, which facilitates the management of power data during use and improves the convenience of using the RF power supply.

[0025] 3. By setting mounting slots, mounting blocks, and mounting bolts, the mounting blocks on the protective cover are inserted into the mounting slots of the power supply housing and installed on the power supply housing by the mounting bolts, which improves the stability of the assembly of the protective cover and the power supply housing, thereby improving the impact resistance and durability. At the same time, it facilitates the installation and removal of the protective cover and improves the convenience of maintenance. Attached Figure Description

[0026] Figure 1 This is an overall schematic diagram of a plasma radio frequency power supply provided in an embodiment of this application.

[0027] Figure 2 It is a cross-sectional view used to show the connection relationship between the power supply housing and the connection panel.

[0028] Figure 3 It is a cross-sectional view used to show the connection relationship between the positioning post and the connecting panel.

[0029] Explanation of reference numerals in the attached drawings: 1. Power supply housing; 11. Connecting slot; 12. Mounting slot; 13. Positioning post; 14. Connecting bolt; 15. Mounting bolt; 2. Connecting panel; 21. Connecting plug; 22. Positioning slot; 23. Adjustment knob; 24. Power socket; 25. Display screen; 3. Protective cover; 31. Mounting block; 32. Usage slot; 33. Sliding slot; 331. Second magnetic plate; 34. Sliding plate; 341. Finger groove; 342. First magnetic plate. Detailed Implementation

[0030] The following is in conjunction with the appendix Figure 1-3 This application will be described in further detail.

[0031] This application discloses a plasma radio frequency power supply. (Refer to...) Figures 1 to 3 The device includes a power supply housing 1, a connection panel 2, an adjustment knob 23, and a power socket 24. The RF power supply circuit and other components are housed within the power supply housing 1. Several connection slots 11 are provided on the side wall of the power supply housing 1. Several connection plugs 21, electrically connected to the internal circuitry, are fixedly mounted on the connection panel 2. These plugs 21 are inserted into the connection slots 11, thus electrically connecting the internal circuitry of the connection panel 2 to the internal circuitry of the power supply housing 1. A controller, electrically connected to the internal circuitry, is located inside the power supply housing 1. The power socket 24 is mounted on the connection panel 2 and electrically connected to the internal circuitry and controller of the power supply housing 1 via the connection panel 2. The adjustment knob 23 is rotatably mounted on the connection panel 2 and electrically connected to the internal circuitry and controller of the power supply housing 1 via the connection panel 2. The controller adjusts the internal circuitry of the power supply housing 1 according to the rotation of the adjustment knob 23. A detachable protective cover 3 is provided on the power supply housing 1, shielding the adjustment knob 23 and the power socket 24. A through-hole 32 is provided in the protective cover 3, through which the adjustment knob 23 and the power socket 24 are exposed. The inner wall of the slot 32 is provided with a sliding groove 33, and a sliding plate 34 is slidably disposed in the sliding groove 33 to cover and insert into the slot 32. The power socket 24, adjustment knob 23 and connection panel 2 are shielded by the protective cover 3, thereby reducing the possibility of damage to the above components during handling and use, and improving the durability of the equipment.

[0032] To improve ease of use, refer to Figures 1 to 3 A display screen 25, electrically connected to the controller, is fixedly mounted on the connecting panel 2. The controller controls the display screen 25 to display power data. Multiple connecting bolts 14 are provided between the power supply housing 1 and the connecting panel 2, used to mount the connecting panel 2 onto the power supply housing 1. Multiple positioning posts 13 are fixedly mounted on the side wall of the power supply housing 1. A positioning groove 22 is provided through the connecting panel 2, and the positioning posts 13 adapt to pass through the positioning groove 22 and abut against the inner wall of the protective cover 3. In another embodiment, multiple positioning holes can be provided on the inner wall of the protective cover 3 for the positioning posts 13 to be inserted, improving assembly stability. The positioning posts 13 enhance the stability of the assembly between the power supply housing 1, the connecting panel 2, and the protective cover 3. By setting the display screen 25 to display various power parameters in a timely manner, it facilitates power control during use and improves ease of use.

[0033] For ease of use, please refer to Figures 1 to 3 A mounting block 31 is integrally fixed to the side wall of the protective cover 3 near the power supply housing 1. A mounting groove 12 is provided around the connecting panel 2 on the side wall of the power supply housing 1. The mounting block 31 is adapted to be inserted into the mounting groove 12. A mounting bolt 15 is provided on the outer side wall of the power supply housing 1 for mounting the mounting block 31 onto the power supply housing 1. The overall width of the sliding groove 33 is greater than the width of the use groove 32. The surface of the sliding plate 34 away from the power supply housing 1 has exposed finger grooves 341 to facilitate the sliding of the sliding plate 34. A first magnetic sheet 342 is fixedly provided on the surface of the sliding plate 34 away from the power supply housing 1 through a slot hole. A second magnetic sheet 331 is provided on the inner wall of the sliding groove 33 through a slot hole. The first magnetic sheet 342 can adhere to and attract the second magnetic sheet 331. When needed, the sliding plate 34 is slidable so that the first magnetic piece 342 attracts the second magnetic piece 331. At this time, the power socket 24, the adjustment knob 23 and the connection panel 2 are exposed by using the slot 32, which makes it convenient to use. At the same time, only one side of the power socket 24, the adjustment knob 23 and the connection panel 2 are exposed by using the slot 32, which reduces the possibility of being hit and improves the durability during use.

[0034] The implementation principle of a plasma radio frequency power supply according to an embodiment of this application is as follows: After sliding the sliding plate 34, the power socket 24, adjustment knob 23, and connection panel 2 are exposed through the use slot 32 on the protective cover 3 for convenient use. During use, the protective cover 3 completely shields the power socket 24, adjustment knob 23, and connection panel 2 from the side, reducing the possibility of the power socket 24, adjustment knob 23, and connection panel 2 being damaged by collision. At the same time, when moving and transporting, the sliding plate 34 closes the use slot 32, thereby closing the power socket 24, adjustment knob 23, and connection panel 2, reducing the possibility of the power socket 24, adjustment knob 23, and connection panel 2 being damaged by collision during the movement, thereby improving the overall durability of the equipment.

[0035] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A plasma radio frequency power supply, characterized in that: The device includes a power housing (1), an adjustment knob (23), and a power socket (24). The adjustment knob (23) is rotatably mounted on the power housing (1), and the power socket (24) is mounted on the power housing (1). Both the adjustment knob (23) and the power socket (24) are electrically connected to the internal circuit of the power housing (1). The power housing (1) is detachably equipped with a protective cover (3). The protective cover (3) covers the adjustment knob (23) and the power socket (24). The protective cover (3) is provided with a usage slot (32). The inner wall of the usage slot (32) is provided with a sliding groove (33). A sliding plate (34) is slidably mounted in the sliding groove (33). The sliding plate (34) can be inserted into and cover the usage slot (32).

2. The plasma radio frequency power supply according to claim 1, characterized in that: The power supply housing (1) is provided with a connection panel (2), the adjustment knob (23) is rotatably mounted on the connection panel (2), the power socket (24) is mounted on the connection panel (2), the adjustment knob (23) and the power socket (24) are both electrically connected to the internal circuit of the connection panel (2), the connection panel (2) is mounted inside the protective cover (3), the connection panel (2) is provided with a connection plug (21), the connection plug (21) is electrically connected to the internal circuit of the connection panel (2), the power supply housing (1) is provided with a connection slot (11), the connection plug (21) is inserted into the connection slot (11), and the connection plug (21) is electrically connected to the internal circuit of the power supply housing (1).

3. A plasma radio frequency power supply according to claim 2, characterized in that: The power supply housing (1) is provided with a controller that is electrically connected to the internal circuit of the power supply housing (1). The connection panel (2) is provided with a display screen (25). The display screen (25) is electrically connected to the internal circuit of the connection panel (2). The controller is used to control the display screen (25) to display power data.

4. A plasma radio frequency power supply according to claim 2, characterized in that: A connecting bolt (14) is provided between the power supply housing (1) and the connecting panel (2), and the connecting bolt (14) is used to install the connecting panel (2) on the power supply housing (1).

5. A plasma radio frequency power supply according to claim 1, characterized in that: The protective cover (3) is provided with a mounting block (31), and the power housing (1) is provided with a mounting groove (12). The mounting block (31) is inserted into the mounting groove (12).

6. A plasma radio frequency power supply according to claim 5, characterized in that: The power supply housing (1) is provided with mounting bolts (15), which are used to mount the mounting block (31) onto the power supply housing (1).

7. A plasma radio frequency power supply according to claim 1, characterized in that: The sliding plate (34) is provided with finger grooves (341).

8. A plasma radio frequency power supply according to claim 1, characterized in that: The sliding plate (34) is provided with a first magnetic sheet (342), and the inner wall of the sliding groove (33) is provided with a second magnetic sheet (331). The first magnetic sheet (342) and the second magnetic sheet (331) can be attached together and magnetically attracted to each other.

Images