Gas spray header cleaning jig

Abstract

The utility model belongs to the technical field of spraying head cleaning, and particularly relates to a gas spraying head cleaning jig which comprises a jig body and a spraying head to be cleaned, the jig body is of a disc structure, the center of the jig body is sunken downwards, an installation cavity is formed in the jig body, the section of the installation cavity is in a step shape, and the spraying head to be cleaned is arranged in the installation cavity. A hollow groove is formed in the bottom of the mounting cavity and corresponds to a spraying hole of a nozzle to be cleaned, a sealing cover is mounted at the top of the jig body and seals the top of the mounting cavity, firstly, the gas spraying head is arranged in the mounting cavity of the jig, and sealing of the mounting cavity is guaranteed through the sealing cover and a sealing ring; the air pressure in the cavity is controlled through the vacuum pump so as to control the air cylinder above the movable push plate, then the jig enters the liquid medicine, the movable push plate is controlled through the vacuum pump to move up and down in the liquid medicine, reciprocating flushing of the liquid medicine is achieved, and deposition in a hole is thoroughly cleaned.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of spray head cleaning, and particularly relates to a gas spray head cleaning jig. BACKGROUND

[0002] In the semiconductor manufacturing process, the gas spray head is a key component, which plays an important role in uniform distribution of reaction gas in processes such as chemical vapor deposition (CVD). With use, the surface and internal channels of the gas spray head will be gradually contaminated by deposited impurities, particles and other pollutants, which will affect the uniformity of gas distribution, and further negatively affect the quality and yield of semiconductor manufacturing.

[0003] Currently, the process of cleaning the gas spray head faces some challenges. The traditional cleaning method often fails to thoroughly clean the complex structure of the gas spray head, especially the pollutants in the internal small channels. Cleaning is mainly carried out by chemical means. In order to ensure the cleaning effect and the consistency of the aperture loss of the cleaned parts, the main method adopted is the manual lifting method, that is, the parts are immersed in cleaning chemicals, and then manually lifted vertically. In this way, the chemicals flow through the holes under the action of gravity, thereby realizing chemical dissolution cleaning of the residual film on the hole wall. Although the manual lifting method can solve the problem of immersion of chemicals in the part holes, it still has unstable factors: the physical quality and experience differences between operators cannot ensure the stable consistency of the operation of each batch of parts, the loss of chemical efficiency and the reduction of gravity with the flow of chemicals cannot guarantee the stable consistency of the reaction. SUMMARY

[0004] In view of the problems existing in the prior art, the purpose of the utility model is to provide a gas spray head cleaning jig, which can realize effective cleaning of the gas spray head and improve the cleaning quality.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical scheme:

[0006] A gas spray head cleaning jig, comprising a jig main body and a to-be-cleaned spray head, the jig main body is in a disc structure and is concave downward in the center, an installation cavity is formed in the interior of the jig main body, the cross section of the installation cavity is in a stepped shape, the to-be-cleaned spray head is placed in the interior of the installation cavity, a hollow slot is formed in the bottom of the installation cavity, the hollow slot corresponds to the spray hole of the to-be-cleaned spray head, a sealing cover is installed on the top of the jig main body, the sealing cover seals the top of the installation cavity, a movable push plate is placed in the interior of the to-be-cleaned spray head, the movable push plate divides the cavity between the to-be-cleaned spray head and the sealing cover into two areas, a vacuum pump docking hole is formed in the center of the upper surface of the sealing cover, and the vacuum pump docking hole is connected with a vacuum pump through a hose.

[0007] Further, the first sealing ring is mounted on the inner lower surface of the installation cavity, and the first sealing ring seals the bottom edge of the to-be-cleaned spray head.

[0008] Further, the second sealing ring is mounted on the lower surface of the sealing cover and is arranged between the sealing cover and the to-be-cleaned spray head.

[0009] Further, three limiting grooves are uniformly arranged on the upper surface of the sealing cover, and notch grooves are uniformly arranged below the side surface of the jig main body, the bottom of the notch groove is open, and the notch groove corresponds to the limiting groove in a one-to-one manner.

[0010] Further, a threaded rod is vertically rotatably arranged in the notch groove, a knob is arranged at the bottom of the threaded rod, and a lifting block is slidably arranged in the notch groove, the lifting block is screwed on the threaded rod, and the lifting block exceeds the side surface of the jig main body.

[0011] Further, the lifting block is hingedly connected with an oscillating plate, the oscillating plate is arranged upwards, a clamping head is arranged inward at the top of the oscillating plate, and the clamping head is matched with the internal size of the limiting groove.

[0012] Further, handles are symmetrically arranged on the upper surface of the sealing cover.

[0013] Compared with the prior art, the beneficial effects of the utility model are as follows: first, the gas spraying head is arranged in the installation cavity of the jig, the sealing cover and the sealing ring are used to ensure the sealing of the installation cavity, the vacuum pump is used to control the air pressure in the cavity, the air cylinder above the movable push plate is controlled, then the jig is put into the liquid medicine, the movable push plate is controlled to move up and down in the internal upper and lower moving plates, the reciprocating washing of the liquid medicine is realized, and the deposition in the hole is thoroughly cleaned.

[0014] The sealing cover and the jig main body are fixed through the three clamping heads, the clamping heads are matched with the limiting grooves, the extrusion degree is controlled through the threaded rod after the clamping heads are matched with the limiting grooves, the sealing of the sealing cover and the jig is ensured, and the installation and dismounting work is facilitated. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is a front view structural schematic diagram of the utility model;

[0016] Figure 2 It is a three-dimensional structural schematic diagram of the utility model;

[0017] Figure 3 It is an explosion structural schematic diagram of the utility model;

[0018] Figure 4 It is a front view structural schematic diagram of the utility model; Figure 3

[0019] Figure 5 It is a sectional view structural schematic diagram of the utility model; ​

[0020] Figure 6 The utility model discloses a Figure 2 The A area amplification structure schematic diagram of

[0021] In the drawing, the component list that each sign represents is as follows:

[0022] 1, jig main body;11, installation cavity;12, hollow groove;13, notch groove;2, first sealing ring;3, to be washed shower head;4, sealing cover;41, vacuum pump butt joint hole;42, handle;43, limiting groove;5, second sealing ring;6, movable push plate;7, threaded rod;8, lifting block;9, swing plate;10, chuck. Specific implementation

[0023] In order to make the purpose and the advantage of the utility model more clearly clear, the utility model is specifically explained below with examples. It should be understood that the following text is only used to describe one or several specific implementation modes of the utility model, and does not strictly limit the protection scope of the utility model specifically requested.

[0024] Reference Figures 1-5 As shown in the figure, a kind of gas shower head cleaning jig, including jig main body 1 and to be washed shower head 3, jig main body 1 is disc structure and center is concave, overall structure is similar with to be washed shower head 3, installation cavity 11 is set up in jig main body 1 interior, installation cavity 11 section is stepped, to be washed shower head 3 is placed in installation cavity 11 interior, hollow groove 12 is set up in installation cavity 11 bottom, hollow groove 12 corresponds with the spray hole of to be washed shower head 3, to clean the liquid can be passed through hollow groove 12 and is discharged, sealing cover 4 is installed on the top of jig main body 1, sealing cover 4 is sealed to the top of installation cavity 11, to ensure that inside is in sealed state, prevent gas leakage, movable push plate 6 is placed in to be washed shower head 3 interior, movable push plate 6 divides the cavity between to be washed shower head 3 and sealing cover 4 into two areas, vacuum pump butt joint hole 41 is set up on the top surface center of sealing cover 4, vacuum pump butt joint hole 41 is connected with vacuum pump by hose, the height of movable push plate 6 is controlled by controlling the air pressure of internal cavity, so that movable push plate 6 can move reciprocatingly, then realize the reciprocating throughput of liquid, realize flushing work, when cleaning, the jig is entered into liquid, and the liquid is mixed acid liquid.

[0025] Reference Figure 3 And Figure 5 As shown in the figure, first sealing ring 2 is installed in the lower surface in installation cavity 11 interior, first sealing ring 2 is sealed to the bottom edge of to be washed shower head 3, to prevent gas leakage, ensure that liquid can only pass through hollow groove 12 and enter the aperture of concave shower head.

[0026] Reference Figure 5As shown, the second sealing ring 5 is arranged on the lower surface of the sealing cover 4 and between the sealing cover 4 and the to-be-cleaned nozzle 3, so as to ensure the sealing between the to-be-cleaned nozzle 3 and the sealing cover 4, prevent air leakage, and ensure the effective control of the internal air pressure by the vacuum pump.

[0027] Referring to Figure 2 , Figure 3 and Figure 6 As shown, three limiting grooves 43 are uniformly arranged on the upper surface of the sealing cover 4, and a notch groove 13 is uniformly arranged on the lower surface of the jig body 1, the bottom of the notch groove 13 is open, the notch groove 13 corresponds to the limiting groove 43 one by one, a threaded rod 7 is vertically arranged in the notch groove 13, a knob is arranged at the bottom of the threaded rod 7, and a lifting block 8 is slidingly arranged in the notch groove 13, the lifting block 8 is screwed on the threaded rod 7, and the lifting block 8 exceeds the side surface of the jig body 1, and the height of the lifting block 8 can be controlled by rotating the knob, so that the sealing cover 4 is pressed by the swing plate 9.

[0028] Referring to Figure 6 As shown, the swing plate 9 is hinged to the outer side of the lifting block 8, the swing plate 9 is arranged upward, a clamping head 10 is arranged inward at the top of the swing plate 9, and the clamping head 10 is matched with the size of the limiting groove 43, so as to realize the sealing of the sealing cover 4 and the jig body 1.

[0029] Referring to Figure 2 As shown, the handle 42 is symmetrically arranged on the upper surface of the sealing cover 4, so as to facilitate direct taking and placing.

[0030] The working principle of the utility model is as follows: during work, the to-be-cleaned nozzle 3 is first placed in the installation cavity 11, and the small hole at the bottom of the to-be-cleaned nozzle 3 is matched with the hollow groove 12, then the to-be-cleaned nozzle 3 and the bottom of the jig body 1 are kept sealed due to the existence of the first sealing ring 2, air leakage is prevented, then the movable push plate 6 is arranged in the to-be-cleaned nozzle 3, the sealing cover 4 is arranged above the jig body 1 to seal the top of the installation cavity 11, the bottom of the sealing cover 4 is pressed to form a seal on the inner cavity of the to-be-cleaned nozzle 3, so that the to-be-cleaned nozzle 3 and the sealing cover 4 form two cavities divided by the movable push plate 6, then the vacuum pump connecting hole 41 is connected with the vacuum pump, the pressure change in the to-be-cleaned nozzle 3 is controlled, the height of the movable push plate 6 is controlled, then the jig is immersed in the cleaning liquid, and when the vacuum pump is used to pump, a vacuum is formed above the to-be-cleaned nozzle 3, the movable push plate 6 moves upward, and the cleaning liquid can be sucked into the to-be-cleaned nozzle 3, and vice versa, the sucked cleaning liquid can be squeezed out, and then the reciprocating movement is used to realize the flushing work of the hole diameter.

[0031] Three threaded rods 7 and swing plates 9 on the surface of the threaded rods 7 are installed on the side surface of the jig body 1. When the jig body 1 is sealed, the sealing cover 4 is first covered on the jig body 1, then the three swing plates 9 are controlled to rotate, so that the clamping heads 10 at the end thereof can enter the limiting groove 43 on the surface of the sealing cover 4, then the threaded rods 7 are rotated to control the lowering of the lifting blocks 8, and then the clamping heads 10 are pressed against the limiting groove 43, so as to ensure the sealing between the jig body 1 and the sealing cover 4.

[0032] The above is only the preferred embodiment of the present application, it should be pointed out that, for those skilled in the art, without departing from the principles of the present application, can make a number of improvements and refinements, these improvements and refinements should also be considered as the protection scope of the present application. The structures, devices and operation methods not specifically described and explained in the present application, if not specifically described and limited, are implemented according to the conventional means in the art.

Claims

1. A gas showerhead cleaning tool, comprising a tool body (1) and a showerhead (3) to be cleaned, characterized in that: The tool body (1) is in a disc structure and is concave in the center, an installation cavity (11) is arranged in the tool body (1), the cross section of the installation cavity (11) is in a stepped shape, the to-be-cleaned nozzle (3) is arranged in the installation cavity (11), a hollow groove (12) is arranged at the bottom of the installation cavity (11), the hollow groove (12) corresponds to the spray hole of the to-be-cleaned nozzle (3), a sealing cover (4) is arranged at the top of the tool body (1), the sealing cover (4) seals the top of the installation cavity (11), a movable push plate (6) is arranged in the to-be-cleaned nozzle (3), the movable push plate (6) divides the cavity between the to-be-cleaned nozzle (3) and the sealing cover (4) into two areas, a vacuum pump connecting hole (41) is arranged at the center of the upper surface of the sealing cover (4), and the vacuum pump connecting hole (41) is connected with a vacuum pump through a hose.

2. The gas showerhead cleaning tool of claim 1, wherein: A first sealing ring (2) is arranged at the lower surface in the installation cavity (11), and the first sealing ring (2) seals the bottom edge of the to-be-cleaned nozzle (3).

3. The gas showerhead cleaning tool of claim 1, wherein: A second sealing ring (5) is arranged at the lower surface of the sealing cover (4), and the second sealing ring (5) is arranged between the sealing cover (4) and the to-be-cleaned nozzle (3).

4. The gas showerhead cleaning tool of claim 1, wherein: Three limiting grooves (43) are uniformly arranged on the upper surface of the sealing cover (4), notch grooves (13) are uniformly arranged below the side surface of the tool body (1), the bottom of the notch groove (13) is open, and the notch groove (13) corresponds to the limiting groove (43) in a one-to-one manner.

5. The gas showerhead cleaning tool of claim 4, wherein: A threaded rod (7) is vertically rotatably arranged in the notch groove (13), the bottom of the threaded rod (7) is provided with a knob, a lifting block (8) is slidably arranged in the notch groove (13), the lifting block (8) is screwed on the threaded rod (7), and the lifting block (8) exceeds the side surface of the tool body (1).

6. The gas showerhead cleaning tool of claim 5, wherein: An oscillating plate (9) is hingedly connected to the outer side end of the lifting block (8), the oscillating plate (9) is arranged upward, a clamping head (10) is arranged inward at the top of the oscillating plate (9), and the clamping head (10) is matched with the inner size of the limiting groove (43).

7. The gas showerhead cleaning tool of claim 1, wherein: A handle (42) is symmetrically arranged on the upper surface of the sealing cover (4).

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