Water-jet guided laser processing device

Abstract

The utility model discloses a water guide laser processing device which comprises a laser, a light beam shaper, a light beam coupling system, a fixing plate, a high-pressure water beam generating device, a water guide head and a multi-axis workbench. Bubbles in the water storage box are eliminated through the vent holes formed in the water storage box, laser beams in blue-green wave bands are transmitted through the quartz optical fibers, light beams output by the optical fibers are collimated and expanded through the light beam shaper, and finally the laser beams are focused and coupled into water beams of the water guide head through the light beam coupling system to be transmitted. The multi-axis workbench is used for clamping the light beam shaper, the light beam coupling system and the water guide head to move, and three-dimensional free-form surface machining of a large workpiece can be achieved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a kind of water guide laser processing devices, belong to laser processing technical field. BACKGROUND

[0002] In 1993, Swiss scientist Beruold Richerghagen proposed water guide laser technology, which couples high-power laser beam into water jet to act on workpiece surface for processing. Compared with traditional laser processing method, water guide laser processing has many advantages such as smooth and perpendicular cutting surface, no thermal effect, smooth surface and small processing damage, controllable processing depth and small taper, etc., especially suitable for high-precision processing of large depth-diameter ratio holes, avoiding the phenomenon of laser ablation material melting and adhering to the processing surface, or excessive power burning black carbonization. The position caused by stable water beam is the focus of processing, and precise processing can be realized without accurate focusing. At present, water guide laser processing has been widely used in hard and brittle material processing such as semiconductor, ceramic, hard alloy and composite material. However, water guide laser processing mainly uses light guide arm or flight optical system for transmission, which cannot be flexibly transmitted and is the bottleneck of its application, and cannot be used for processing of three-dimensional free curved surface of large components. SUMMARY

[0003] In order to solve the above problems, the utility model provides a kind of water guide laser processing device, utilizes quartz optical fiber to transmit blue-green wave band laser beam, focuses and couples into water guide head fine water beam after collimating and expanding, and utilizes multi-axis workbench clamping to realize three-dimensional free curved surface processing of large components.

[0004] As shown in the accompanying Figure 1 The utility model provides a kind of water guide laser processing device, which comprises a laser 1, a beam shaper 2, a beam coupling system, a fixed plate 7, a high-pressure water beam generating device, a water guide head and a multi-axis workbench 19. The high-pressure water generated by the high-pressure water beam generating device enters the water guide head and forms a high-pressure fine water beam jet. The laser beam output by the laser 1 is collimated and expanded by the beam shaper 2, and then focused and coupled into the high-pressure fine water beam generated by the water guide head by the beam coupling system. The multi-axis workbench 19 clamps the beam shaper 2, the beam coupling system, the fixed plate 7 and the water guide head to move, realizing three-dimensional free curved surface processing of large workpieces.

[0005] The laser 1 is preferably a blue light laser with optical fiber transmission or a green light laser with optical fiber transmission, with a fiber core outer diameter Dc not greater than 800 μm and a numerical aperture not greater than 0.22.

[0006] The beam shaper 2 is composed of a collimating lens with a focal length F not greater than 50 mm and a beam expander with an expansion ratio K. The laser beam output by the optical fiber is collimated by the collimating lens and then further expanded and collimated by the beam expander. The expansion ratio K of the beam expander satisfies the following conditions:

[0007]

[0008] wherein Dw is the diameter of the high-pressure water jet, and f is the focal length of the focusing lens 5;

[0009] The light beam coupling system is composed of the adapter tube 3, the four-dimensional adjusting frame A4, the focusing lens 5 and the compression ring A6, and is used to focus and couple the laser beam from the light beam shaper 2 into the high-pressure water jet; the left side of the adapter tube 3 is connected with the light beam shaper 2 through threads, and the outer side is fixed on the four-dimensional adjusting frame A4 through threads; the focusing lens 5 is fixed on the right side of the adapter tube 3 by the compression ring A6, and the distance between the focusing lens 5 and the water guide head is adjusted by rotating the outer threads, so that the left port of the high-pressure water jet is located on the focal plane of the focusing lens 5; the four-dimensional adjusting frame A4 clamps the adapter tube 3 to realize the adjustment of the focused light beam in the vertical paper plane direction and the x direction, the adjustment of the focused light beam around the x direction and the adjustment of the focused light beam around the vertical paper plane direction, so that the focused light beam passing through the focusing lens 5 is perpendicular to the center of the left port of the high-pressure water jet; the focusing lens 5 is a meniscus lens with a focal length f not greater than 40 mm, the convex surface faces the left side, the surface is coated with an anti-reflection film of the corresponding wavelength of the laser 1, and the transmittance is not less than 99.5%; the central hole of the compression ring A6 is 2 mm smaller in diameter than the outer diameter of the focusing lens 5, and is used to fix the focusing lens 5;

[0010] The fixing plate 7 is a square flat plate made of metal with a thickness not less than 8 mm, is connected with the four-dimensional adjusting frame A4 and the four-dimensional adjusting frame B13 through screws, and is fixed on the multi-axis workbench 19 through screws;

[0011] The high-pressure water jet generating device is composed of the metering pump 12, the water pipe 11 and the water nozzle 10, and is used to generate and provide the high-pressure water with stable flow to the water guide head; the metering pump 12 is a double-plunger metering pump, the water supply flow is not greater than 20 L / H, the metering accuracy is not less than ±2%, and the maximum water supply pressure is not greater than 10 MPa; the water pipe 11 is a high-pressure water pipe with a pressure resistance not less than 30 MPa, and is used to transmit the high-pressure water generated by the metering pump 12 to the water storage box 9 through the water nozzle 10;

[0012] The water guide head is composed of the compression ring B8, the water storage box 9, the four-dimensional adjusting frame B13, the gasket A14, the water jet generating module 15, the screw 16, the gasket B17 and the window mirror 18, and sprays the high-pressure water jet with an outer diameter Dw not greater than 200 μm to the right;

[0013] The central hole of the compression ring B8 is 2 mm smaller in diameter than the outer diameter of the window mirror 18, and is used to fix the window mirror 18;

[0014] The water storage box 9 is a disc-shaped metal block made of stainless steel, the left end is water-tight by pressing the window mirror 18 and the gasket B17 with the pressing ring B8, the upper end is fixed with the water nozzle 10, the high-pressure water beam generated by the high-pressure water beam generating device enters the inside of the water storage box 9 through the water nozzle 10, the exhaust hole at the lower end is sealed by the screw 16, the bubbles in the water storage box 9 can be discharged by removing the screw 16, and the right side is connected with the fine water beam generating module 15 through threads, and the light beam emitted from the focusing lens 5 is focused on the center of the left port of the high-pressure fine water beam after passing through the window mirror 18;

[0015] The four-dimensional adjusting frame B13 clamps the fine water beam generating module 15 to realize the translation adjustment of the water guide head along the vertical paper surface direction and the x direction, the rotation adjustment around the x direction and the rotation adjustment around the vertical paper surface direction, so that the focused light beam passing through the focusing lens 5 is vertically incident on the center of the left port of the high-pressure fine water beam.

[0016] The gasket A14 and the gasket B17 are O-shaped rings made of silica gel, which are used for water sealing at the left end and the right end of the water storage box 9 respectively.

[0017] As shown in the accompanying Figure 2 The fine water beam generating module 15 has a groove with a width of 2 mm on the top and the side, contains a stainless steel mechanical part with a circular hole with an outer diameter of not more than 1.2Dw in the inside, is connected with the water storage box 9 and the four-dimensional adjusting frame B13 through threads respectively, and is used for generating a high-pressure fine water beam.

[0018] The window mirror 18 is a flat glass with a wavelength anti-reflection film coated on the left side, which is used as an optical window of the water storage box 9 and simultaneously realizes the sealing of the left port of the water storage box 9.

[0019] The multi-axis workbench 19 is preferably a multi-axis robot or a multi-axis numerical control workbench, which is used for clamping the light beam shaper 2, the fixed plate 7, the light beam coupling system and the water guide head to move and realize three-dimensional machining of a workpiece.

[0020] The water guide laser processing device provided by the utility model has the beneficial effects that the exhaust hole is arranged on the water storage box to discharge the bubbles in the inside, the laser beam in the blue-green wave band is transmitted by using the quartz optical fiber, the light beam output by the optical fiber is collimated and expanded by using the light beam shaper, the laser beam is finally focused and coupled into the water beam of the water guide head by using the light beam coupling system, and the multi-axis workbench clamping the light beam shaper, the light beam coupling system and the water guide head can move to realize three-dimensional machining of a large workpiece. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 It is a schematic view of the water guide laser processing device.

[0022] Figure 2 It is a three-view of the fine water beam generating module.

[0023] Figure: 1 - laser, 2 - beam shaper, 3 - adapter tube, 4 - four-dimensional adjustment frame A, 5 - focusing lens, 6 - compression ring A, 7 - fixed plate, 8 - compression ring B, 9 - water storage box, 10 - water nozzle, 11 - water pipe, 12 - metering pump, 13 - four-dimensional adjustment frame B, 14 - gasket A, 15 - fine water jet generating block, 16 - screw, 17 - gasket B, 18 - window mirror, 19 - multi-axis workbench. DETAILED DESCRIPTION

[0024] Example 1: A water guide laser processing device.

[0025] As shown in the accompanying drawings Figure 1 The utility model provides a water guide laser processing device, which comprises a laser 1, a beam shaper 2, a beam coupling system, a fixed plate 7, a high-pressure water jet generating device, a water guide head and a multi-axis workbench 19. The high-pressure water generated by the high-pressure water jet generating device enters the water guide head and forms a high-pressure fine water jet. The laser beam output by the laser 1 is collimated and expanded by the beam shaper 2, and then focused and coupled into the high-pressure fine water jet generated by the water guide head by the beam coupling system. The multi-axis workbench 19 is used to hold and move the beam shaper 2, the beam coupling system, the fixed plate 7 and the water guide head to realize three-dimensional free-form surface machining of large workpieces.

[0026] The laser 1 is a blue light laser or a green light laser transmitted by an optical fiber. The outer diameter of the optical fiber core Dc is 400 μm, and the numerical aperture is 0.22.

[0027] The beam shaper 2 is composed of a collimating lens with a focal length F of 40 mm and a beam expander with an expansion ratio K of 5. The laser beam output by the optical fiber is collimated by the collimating lens and then further expanded and collimated by the beam expander.

[0028] The light beam coupling system is composed of an adapter tube 3, a four-dimensional adjusting frame A4, a focusing lens 5 and a compression ring A6, and is used for focusing and coupling the laser beam from the light beam shaper 2 into the high-pressure fine water beam; the left side of the adapter tube 3 is connected with the light beam shaper 2 through threads, the outer side is fixed on the four-dimensional adjusting frame A4 through threads, the focusing lens 5 is fixed on the right side of the adapter tube 3 by the compression ring A6, the spacing between the focusing lens 5 and the water guide head is adjusted by rotating the outer threads, so that the left port of the high-pressure fine water beam is located on the focal plane of the focusing lens 5; the four-dimensional adjusting frame A4 clamps the adapter tube 3 to realize the translation adjustment of the focused light beam along the vertical paper surface direction and the x direction, the rotation adjustment around the x direction and the vertical paper surface direction, so that the focused light beam passing through the focusing lens 5 is perpendicular to the center of the left port of the high-pressure fine water beam; the focusing lens 5 is a meniscus lens with an outer diameter of 20 mm and a focal length of 40 mm, the convex surface faces the left side, the surface is coated with an anti-reflection film of the corresponding wavelength of the laser 1, and the transmittance is 99.5%; the compression ring A6 has a central hole with a diameter of 18 mm, and is used for fixing the focusing lens 5;

[0029] The fixing plate 7 is a square flat plate made of metal with a thickness of 8 mm, is connected with the four-dimensional adjusting frame A4 and the four-dimensional adjusting frame B13 through screws, and is fixed on the multi-axis workbench 19 through screws;

[0030] The high-pressure water beam generating device is composed of a metering pump 12, a water pipe 11 and a water nozzle 10, and is used for generating and providing the high-pressure water with stable flow to the water guide head; the metering pump 12 is a double-plunger metering pump, the water supply flow is not greater than 12 L / H, the metering accuracy is ±1%, and the maximum water supply pressure is 5 MPa; the water pipe 11 is a high-pressure water pipe with a pressure resistance not less than 30 MPa, and is used for transmitting the high-pressure water generated by the metering pump 12 to the water storage box 9 through the water nozzle 10;

[0031] The water guide head is composed of a compression ring B8, a water storage box 9, a four-dimensional adjusting frame B13, a gasket A14, a fine water beam generating module 15, a screw 16, a gasket B17 and a window mirror 18, and sprays the high-pressure fine water beam with an outer diameter Dw of 100 μm to the right;

[0032] The compression ring B8 has a central hole with a diameter of 18 mm, and is used for fixing the window mirror 18;

[0033] The water storage box 9 is a disc-shaped metal block made of stainless steel, the left end realizes water sealing by pressing the window mirror 18 and the gasket B17 with the compression ring B8, the upper end is fixed with the water nozzle 10, the high-pressure water generated by the high-pressure water beam generating device enters the inside of the water storage box 9 through the water nozzle 10, the exhaust hole at the lower end is sealed by the screw 16, the bubbles in the inside of the water storage box 9 can be discharged by removing the screw 16, and the right side is connected with the fine water beam generating module 15 through threads, the light beam emitted from the focusing lens 5 is focused on the center of the left port of the high-pressure fine water beam after passing through the window mirror 18;

[0034] The four-dimensional adjustment frame B13 clamps the fine water jet generating module 15 to realize the translational adjustment of the water guide head along the vertical paper plane and the x direction, the pitch adjustment around the x direction and the rotation adjustment around the vertical paper plane, so that the focused beam through the focusing lens 5 is vertically incident on the center of the left port of the high-pressure fine water jet.

[0035] The gaskets A14 and B17 are silicone O-rings, used to achieve water sealing at the left and right ends of the water storage box 9, respectively.

[0036] As attached Figure 2 As shown, the fine water jet generating module 15 has a 2mm wide groove on the top and side, and a stainless steel mechanical part with a 120μm outer diameter circular hole inside. It is connected to the water storage box 9 and the four-dimensional adjustment frame B13 by threads respectively, and is used to generate high pressure fine water jets.

[0037] The window mirror 18 is a flat glass with an anti-reflection film on the left side of the laser 1 output wavelength coated with a transmittance of 99.5% and an outer diameter of 20mm. It is used as an optical window for the water storage box 9 and also seals the left port of the water storage box 9.

[0038] The multi-axis worktable 19 is a multi-axis robot or a multi-axis CNC worktable, used to clamp the beam shaper 2, the fixing plate 7, the beam coupling system and the water guide head to realize the three-dimensional machining of the workpiece.

[0039] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and not to limit it; although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the various embodiments of this utility model.

Claims

1. A water guided laser processing apparatus, characterized by The device comprises a laser (1), a beam shaper (2), a beam coupling system, a fixed plate (7), a high-pressure water beam generating device, a water guide head and a multi-axis worktable (19); the high-pressure water generated by the high-pressure water beam generating device enters the water guide head and forms a high-pressure fine water beam jet, the laser beam output by the laser (1) is focused and coupled into the high-pressure fine water beam generated by the water guide head after being collimated and expanded by the beam shaper (2) and the beam coupling system; the multi-axis worktable (19) is used to hold the beam shaper (2), the beam coupling system, the fixed plate (7) and the water guide head to move and realize three-dimensional free surface machining of large workpieces; The laser (1) is a blue light laser or a green light laser transmitted by an optical fiber, the fiber core outer diameter Dc is not greater than 800 μm, and the numerical aperture is not greater than 0.22; The beam shaper (2) is composed of a collimating lens with a focal length F not greater than 50 mm and a beam expander with an expansion ratio K, the laser beam output by the optical fiber is collimated by the collimating lens and then further expanded by the beam expander, and the expansion ratio K of the beam expander satisfies the following condition: （1） In the formula, Dw is the outer diameter of the high-pressure fine water beam, and f is the focal length of the focusing lens (5); The beam coupling system is composed of an adapter tube (3), a four-dimensional adjusting frame A (4), a focusing lens (5) and a pressure ring A (6); the left side of the adapter tube (3) is connected with the beam shaper (2) through threads, the outer side is fixed on the four-dimensional adjusting frame A (4) through threads, the focusing lens (5) is fixed on the right side of the adapter tube (3) by the pressure ring A (6), the distance between the focusing lens (5) and the water guide head is adjusted by rotating the outer threads, so that the left port of the high-pressure fine water beam is located on the focal plane of the focusing lens (5); the four-dimensional adjusting frame A (4) holds the adapter tube (3) to realize the translation adjustment of the focused beam along the vertical paper surface direction and the x direction, the rotation adjustment around the x direction and the vertical paper surface direction, so that the focused beam passing through the focusing lens (5) is perpendicular to the center of the left port of the high-pressure fine water beam; the focusing lens (5) is a meniscus lens with a focal length f not greater than 40 mm, the convex surface faces the left side, the surface is coated with an antireflection film of the corresponding wavelength of the laser (1), and the transmittance is not less than 99.5%; The fixed plate (7) is a square metal plate, which is connected with the four-dimensional adjusting frame A (4) and the four-dimensional adjusting frame B (13) through screws and is fixed on the multi-axis worktable (19) through screws; The high-pressure water beam generating device is composed of a metering pump (12), a water pipe (11), an overflow valve and a water nozzle (10); the metering pump (12) is a double-plunger metering pump, the water supply flow is not greater than 20 L / H, the metering accuracy is not less than ± 2%, and the maximum water supply pressure is not greater than 10 MPa; the water pipe (11) is a high-pressure water pipe with a pressure resistance not less than 30 MPa; The water guide head is composed of a pressure ring B (8), a water storage box (9), a four-dimensional adjusting frame B (13), a gasket A (14), a fine water beam generating module (15), a screw (16), a gasket B (17) and a window mirror (18), and a high-pressure fine water beam with an outer diameter Dw not greater than 200 μm is ejected to the right. The water storage box (9) is a disc-shaped metal block made of stainless steel, the left end is pressed against the window mirror (18) and the gasket B (17) by the pressing ring B (8) to achieve water sealing, the upper end is fixed with the water nozzle (10), the high-pressure water beam generated by the high-pressure water beam generating device enters the inside of the water storage box (9) after passing through the water nozzle (10), the exhaust hole at the lower end is sealed by the screw (16), and the bubbles in the water storage box (9) can be discharged by removing the screw (16), and the right side is connected with the water beam generating module (15) through threads, and the light beam emitted from the focusing lens (5) is focused on the center of the left port of the high-pressure water beam after passing through the window mirror (18); The four-dimensional adjusting frame B (13) clamps the water beam generating module (15) to realize the translation adjustment of the water guide head along the vertical paper surface direction and the x direction, the rotation adjustment around the x direction and the rotation adjustment around the vertical paper surface direction; The water beam generating module (15) is a stainless steel mechanical part with a 2mm wide groove on the top and the side, and contains a circular hole with an outer diameter of not more than 1.2Dw, which is connected with the water storage box (9) and the four-dimensional adjusting frame B (13) through threads; The window mirror (18) is a flat glass with a wavelength-increasing film coated on the left side to increase the transmittance of the laser (1) output; The multi-axis workbench (19) is a multi-axis robot or a multi-axis numerical control workbench, which is used for clamping the light beam shaper (2), the fixed plate (7), the light beam coupling system and the water guide head to realize the three-dimensional machining of the workpiece.

Images