PVD (Physical Vapor Deposition) carrier plate heating device

Abstract

The utility model discloses a PVD carrier plate heating device, which comprises a box body, the front side of the box body is rotatably connected with a box door, a heating structure is arranged in the box body, the outer side of the box body is fixedly connected with a cooling structure, the cooling structure comprises an air pump I, the air pump I is fixedly connected to the rear side of the box body, and the air pump I is fixedly connected with the box door. A first air pipe is fixedly connected between the first air pump and the box body, an air box and a cooling box are fixedly connected to the upper side of the box body, a second air pipe is fixedly connected between the first air pump and the air box, and a second air pump is fixedly connected to the right side of the box body. Compared with the prior art, through the arrangement of the cooling structure, the vacuum pump, the pipeline, the box body and the box door, clean cold air enters the box body and then is recycled to cool the heated PVD carrier plate, the situation that the PVD carrier plate is damaged by impurities in external cold air due to the fact that the external cold air is directly used is prevented, and the service life of the PVD carrier plate is prolonged.

Description

TECHNICAL FIELD

[0001] The utility model relates to PVD loading plate heating technical field, especially a kind of PVD loading plate heating device. BACKGROUND

[0002] PVD is physical vapor deposition, and its PVD loading plate heating device aims at improving coating quality and production efficiency of PVD process by accurately controlling the temperature of loading plate.

[0003] The existing PVD loading plate needs to be cooled after heating, and cold air is usually used for heating, but there are particulate impurities in the cold air, which can damage the PVD loading plate and reduce its service life. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a kind of PVD loading plate heating device, which can overcome the shortage of PVD loading plate being damaged by particulate impurities in the air during cooling with cold air.

[0005] To achieve the above purpose, a kind of PVD loading plate heating device is provided, comprising a box, the front side of the box is rotatably connected with a box door, the inside of the box is provided with a heating structure, the outside of the box is fixedly connected with a cooling structure.

[0006] The cooling structure comprises a gas pump one, the gas pump one is fixedly connected to the rear side of the box, the gas pump one and the box are fixedly connected with a gas pipe one, the upper side of the box is fixedly connected with a gas tank and a cooling tank, the gas pump one and the gas tank are fixedly connected with a gas pipe two, the right side of the box is fixedly connected with a gas pump two, the gas pump two and the box are fixedly connected with a gas pipe three, the gas pump two and the cooling tank are fixedly connected with a gas pipe four. It is beneficial to cool the PVD loading plate.

[0007] According to the PVD loading plate heating device, the front side of the box door is fixedly connected with a handle, the handle is set as U-shaped, and the front side of the box door is provided with a transparent glass block. It is beneficial to observe the heating condition in the box.

[0008] According to the PVD loading plate heating device, the left and right of the box are fixedly connected with a hydraulic rod two, and the output end of the hydraulic rod two is fixedly connected with a clamping plate through the box. It is convenient to clamp and fix the PVD loading plate.

[0009] According to the PVD loading plate heating device, the left side of the box is fixedly connected with a vacuum pump, and the vacuum pump and the box are fixedly connected with a pipeline. It is convenient to evacuate the air in the box.

[0010] According to the PVD carrier plate heating device, the heating structure comprises a hydraulic rod one, the hydraulic rod one is fixedly connected to the upper and lower sides in the box body, the hydraulic rod one is provided with two, the output end of the hydraulic rod one is fixedly connected with a moving block, a groove is formed in the outer side of the moving block, and an electric heating sheet is fixedly connected in the groove.

[0011] According to the PVD carrier plate heating device, the upper side of the moving block is fixedly connected with a temperature display.

[0012] According to the PVD carrier plate heating device, the gas tank and the cooling tank are fixedly connected with a gas pipe five, and the outer side of the gas pipe five is provided with a valve.

[0013] Compared with the prior art, the cooling structure, the vacuum pump, the pipeline, the box body and the box door are arranged, clean cold air is filled into the gas tank, and then the PVD carrier plate heated after being recycled is cooled, so that the case that the PVD carrier plate is damaged by impurities in the external cold air is prevented, and the service life of the PVD carrier plate is prolonged. BRIEF DESCRIPTION OF DRAWINGS

[0014] The utility model is further explained in connection with the drawings and embodiments;

[0015] Figure 1 It is the structure schematic diagram of the whole front view of the utility model PVD carrier plate heating device;

[0016] Figure 2 It is the structure schematic diagram of the heating structure of the utility model PVD carrier plate heating device;

[0017] Figure 3 It is the structure schematic diagram of the whole rear view of the utility model PVD carrier plate heating device;

[0018] Figure 4 It is the structure schematic diagram of the whole left view of the utility model PVD carrier plate heating device.

[0019] LEGEND:

[0020] 1, box body, 2, box door, 3, handle, 4, heating structure, 401, hydraulic rod one, 402, moving block, 403, groove, 404, electric heating sheet, 405, temperature display, 5, cooling structure, 501, gas pump one, 502, gas pipe one, 503, gas tank, 504, gas pipe two, 505, gas pump two, 506, gas pipe three, 507, cooling tank, 508, gas pipe four, 509, gas pipe five, 6, hydraulic rod two, 7, clamping plate, 8, vacuum pump, 9, pipeline. Detailed Implementation

[0021] This section will describe in detail the specific embodiments of the present utility model. The preferred embodiments of the present utility model are shown in the accompanying drawings. The purpose of the drawings is to supplement the textual description with graphics, so that people can intuitively and vividly understand each technical feature and the overall technical solution of the present utility model, but they should not be construed as limiting the scope of protection of the present utility model.

[0022] Reference Figures 1-4The utility model discloses a kind of PVD carrier plate heating devices, it includes box 1, box door 2 is rotationally connected to the front side of box 1, heating structure 4 is provided in the inside of box 1, cooling structure 5 is fixedly connected to the outside of box 1, handle 3 is fixedly connected to the front side of box door 2, handle 3 is set to U shape, transparent glass block is provided to the front side of box door 2, hydraulic rod two 6 is fixedly connected to the left and right of box 1, hydraulic rod two 6 is fixedly connected with clamping plate 7 by the output end through box 1, vacuum pump 8 is fixedly connected to the left side of box 1, pipeline 9 is fixedly connected between vacuum pump 8 and box 1, heating structure 4 includes hydraulic rod one 401, hydraulic rod one 401 is fixedly connected to the inside of box 1 upper and lower sides, hydraulic rod one 401 is provided with two, the output end of hydraulic rod one 401 is fixedly connected with moving block 402, recess 403 is formed in the outside of moving block 402, recess 403 is fixedly connected with electric heating sheet 404 in the inside, the upper side of upper moving block 402 is fixedly connected with temperature display 405, PLC controller and hydraulic rod one 401, electric heating sheet 404, temperature display 405, air pump one 501, air pump two 505, hydraulic rod two 6, vacuum pump 8 electrically connected, convenient to control component work, after being fixedly clamped PVD carrier plate and being aligned electric heating sheet 404 in clamping plate 7, after being extracted by the air in the inside using vacuum pump 8, start lower hydraulic rod one 401, hydraulic rod one 401 moves with moving block 402, then moving block 402 moves to the lower side of PVD carrier plate, then slowly start hydraulic rod two 6, move clamping plate 7, release the clamping and fixing of PVD carrier plate, so PVD carrier plate is placed on the side of moving block 402, then start upper hydraulic rod one 401, hydraulic rod one 401 with upper electric heating sheet 404 goes close to the upper side of PVD carrier plate, with the electric heating sheet 404 in the two moving blocks 402 to clamp and fix PVD carrier plate, then start electric heating sheet 404 and heat PVD carrier plate, wherein temperature display 405 shows the temperature of electric heating sheet 404 heating PVD carrier plate, prevent temperature from being too high and damaging PVD carrier plate, after heating is completed, start hydraulic rod one 401 and move the upper moving block 402, then start hydraulic rod two 6 with clamping plate 7 and clamp and fix PVD carrier plate, then slowly start hydraulic rod one 401 and move the lower moving block 402, then the PVD carrier plate is clamped and fixed in the clamping plate 7 on both sides, then start cooling structure 5 and cool PVD carrier plate.

[0023] Cooling structure 5 includes air pump one 501, air pump one 501 is fixedly connected to the rear side of the box body 1, air pump one 501 and the box body 1 are fixedly connected with air pipe one 502, the upper side of the box body 1 is fixedly connected with air tank 503 and cooling tank 507, air pump one 501 and air tank 503 are fixedly connected with air pipe two 504, the right side of the box body 1 is fixedly connected with air pump two 505, air pump two 505 and the box body 1 are fixedly connected with air pipe three 506, air pump two 505 and cooling tank 507 are fixedly connected with air pipe four 508, air tank 503 and cooling tank 507 are fixedly connected with air pipe five 509, the outer side of air pipe five 509 is provided with a valve, when using cooling structure 5, the air tank 503 is filled with cold air, then air pump one 501 is started, the cold air is filled into the box body 1 through air pipe one 502 and air pipe two 504, then after the PVD carrier plate is cooled, air pump two 505 is started, the hot air in the tank is sucked into cooling tank 507 through air pipe three 506, air pipe four 508, cooling tank 507 uses water cooling to cool the hot air into cold air, when the cold air is obtained, the valve of air pipe five 509 is opened, air pump two 505 is started to blow cooling structure 5, vacuum pump 8, pipeline 9, box body 1 and box door 2, so that clean cold air is filled into air tank 503 and then is recycled to cool the heated PVD carrier plate, so that the PVD carrier plate is not damaged by impurities in the external cold air, and the service life of the PVD carrier plate is prolonged.

[0024] Working principle: when the staff heats the PVD carrier plate, the staff puts one side of the PVD carrier plate close to the clamping plate 7 on one side, then starts the hydraulic rod two 6 on the other side, the hydraulic rod two 6 drives the clamping plate 7 on the other side to clamp and fix the other side of the PVD carrier plate, then adjusts the position of the PVD carrier plate by starting the hydraulic rod two 6 on the other side, so that the PVD carrier plate is aligned with the electric heating sheet 404 of the heating structure 4, then starts the vacuum pump 8, the vacuum pump 8 sucks the tank to vacuum state through the pipeline 9, then starts the heating structure 4 to heat it, after heating, starts the hydraulic rod two 6 to clamp and fix the PVD carrier plate with the clamping plate 7, then starts the cooling structure 5 to cool the PVD carrier plate.

[0025] The utility model embodiment makes the detailed explanation in combination with the drawing, but the utility model is not limited to the above -mentioned embodiment, still can make various changes in the knowledge range of ordinary skill in the art person who has possessed under the premise of not departing from the utility model tenet.

Claims

1. A PVD carrier heating device, characterized in that, Includes a box body (1), a box door (2) is rotatably connected to the front side of the box body (1), a heating structure (4) is provided inside the box body (1), and a cooling structure (5) is fixedly connected to the outside of the box body (1). The cooling structure (5) includes an air pump (501), which is fixedly connected to the rear side of the housing (1). An air pipe (502) is fixedly connected between the air pump (501) and the housing (1). An air box (503) and a cooling box (507) are fixedly connected to the upper side of the housing (1). An air pipe (504) is fixedly connected between the air pump (501) and the air box (503). An air pump (505) is fixedly connected to the right side of the housing (1). An air pipe (506) is fixedly connected between the air pump (505) and the housing (1). An air pipe (508) is fixedly connected between the air pump (505) and the cooling box (507).

2. The PVD carrier heating device according to claim 1, characterized in that, A handle (3) is fixedly connected to the front side of the box door (2). The handle (3) is U-shaped, and a transparent glass block is provided on the front side of the box door (2).

3. The PVD carrier heating device according to claim 1, characterized in that, The box (1) is fixedly connected to the left and right sides by hydraulic rods (6), and the output end of the hydraulic rods (6) passes through the box (1) and is fixedly connected to a clamp (7).

4. The PVD carrier heating device according to claim 1, characterized in that, A vacuum pump (8) is fixedly connected to the left side of the housing (1), and a pipe (9) is fixedly connected between the vacuum pump (8) and the housing (1).

5. The PVD carrier heating device according to claim 1, characterized in that, The heating structure (4) includes a hydraulic rod (401), which is fixedly connected to the upper and lower sides inside the housing (1). There are two hydraulic rods (401). The output end of the hydraulic rod (401) is fixedly connected to a moving block (402). A groove (403) is provided on the outer side of the moving block (402). An electric heating element (404) is fixedly connected inside the groove (403).

6. The PVD carrier heating device according to claim 5, characterized in that, A temperature display (405) is fixedly connected to the upper side of the movable block (402).

7. The PVD carrier heating device according to claim 1, characterized in that, A five-pipe (509) is fixedly connected between the air box (503) and the cooling box (507), and a valve is provided on the outside of the five-pipe (509).

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