Injection pipe for CVD (Chemical Vapor Deposition) process

Abstract

The utility model relates to the technical field of wafer manufacturing, in particular to an injection pipe for a CVD (chemical vapor deposition) process, which comprises an L-shaped joint and a long straight pipe body, the joint is made of metal materials, the pipe body is made of non-metal materials, the joint and the pipe body are both of hollow structures with through holes, and the through holes are communicated with the through holes. The lower end of the pipe body is inserted into the short end of the connector, and the bottom face of the inserting end of the pipe body is attached to the inner bottom face of the short end of the connector, so that the connector is communicated with the through hole of the pipe body. The injection pipe is convenient to process, short in period, low in cost and good in sealing performance, and the joint is not easy to break.

Description

TECHNICAL FIELD

[0001] The utility model relates to round crystal manufacturing technical field, specifically, relate to a kind of injection pipe for CVD process. BACKGROUND

[0002] In the production process of integrated circuits, 8-inch and 12-inch vertical furnace are often needed, and various gases need to be transported from the outside to the reaction furnace tube to react uniformly with the wafer surface. The gas guide device for conveying gas is usually L-shaped and includes two parts. The short branch of the L structure (the pipe head) is used to connect the external gas pipe, and the long branch of the L structure (the pipe body) is used to introduce gas into the furnace tube. Usually, there are three to five gas guide pipes of different lengths in one reaction furnace tube to convey gas to different heights in the furnace tube, and the gas is uniformly distributed in the furnace tube by cooperating with the self-rotation of the boat in the furnace tube. Because of the narrow space in the reaction furnace tube, these gas guide pipes are arranged close to the inner wall of the reaction furnace body, and the gas guide pipes are only fastened by the mechanical structure at the bottom of the reaction furnace tube, and the wall-hugging part has no connection structure with the reaction furnace tube, and is in a free suspended state.

[0003] Currently, there are two main types of gas guide pipes (or injection pipes): one is made of non-metallic materials such as high-purity quartz or high-purity silicon throughout the body; the other is made of metal material for the pipe head and pure silicon or quartz material for the pipe body, using a side-inlet method, such as the structure in the utility model patent with publication number CN213507287U.

[0004] The first type of gas guide pipe has obvious shortcomings: 1. Material problem: the injection pipe is completely made of pure silicon or quartz material, which has relatively weak bending moment load capacity due to its poor toughness, especially at the installation interface of small diameter equipment, and the connection part is prone to breakage. 2. Cost and processing problem: compared with metal materials, the processing method of pure silicon or quartz is grinding, which has a longer processing cycle and significantly increased cost, and the pipe head is not reusable. 3. Installation problem: since the finished pipe head and pipe body of pure silicon or quartz material are integrated, it is not convenient to install in the existing reaction furnace installation environment.

[0005] The second type of gas guide pipe also has an inlet method problem: side-inlet, in order to ensure sealing, part of the metal pipe needs to be inserted into the non-metal pipe wall, which may cause two risks: first, due to the large difference in expansion coefficient between metal and non-metal, when the gap size is small, the non-metal pipe body may burst at high temperature; second, when the gap size is large, the fitting position becomes a suspended structure, causing gas leakage and sealing failure. UTILITY MODEL CONTENTS

[0006] The utility model wants to solve the technical problem that the existing injection pipe has problems in strength, processing convenience, sealing performance and use cost, in order to overcome the defects of the prior art, the utility model provides a CVD process injection pipe combined by metal L type joint and nonmetal pipe body.

[0007] The utility model provides a CVD process injection pipe: including the joint of L type and long straight type pipe body, the joint is made of metal material, the pipe body is made of nonmetal material, the joint and pipe body are all hollow structure including through hole, the lower end of pipe body inserts into the short end of joint and the bottom surface of pipe body insertion end is pasted with the bottom surface in the short end of joint, so that the through hole of joint and pipe body is communicated.

[0008] The utility model has the following advantages relative to the prior art: the long straight type pipe body made of nonmetal material is inserted into the metal joint, avoids the pipe body suspension, and the bottom surface of pipe body insertion end is pasted with the bottom surface in the short end of joint, so that the injection pipe is good in sealing whether the metal joint expands or not, the joint made of metal material is convenient to process, short in cycle, not easy to break, and low in cost.

[0009] In a possible implementation, the pipe body is made of pure silicon material. The pipe body made of pure silicon material is inserted into the vertical furnace for producing round crystal, and is not easy to be polluted.

[0010] In a possible implementation, the short end of the joint is provided with a insertion hole, and the insertion hole is communicated with the through hole of the joint.

[0011] In the above scheme, the diameter of the insertion hole is larger than that of the through hole, and the whole lower end of the pipe body can be inserted into the insertion hole.

[0012] In a possible implementation, the joint insertion hole is provided with an annular boss along the outer periphery of the through hole of the joint, the lower end of the pipe body is inserted into the insertion hole, and the through hole of the pipe body is sleeved on the annular boss, and there is a contact gap between the pipe body and the annular boss.

[0013] In the above scheme, the boss is embedded into the lower pipe segment of the nonmetal pipe body, and the bottom gas inlet and gas guiding effect can be realized, and the end surface of the lower segment of the nonmetal pipe body can be pasted with the bottom surface of the insertion hole of the metal head, so that the suspension structure formed by the side gas inlet is avoided. The contact gap exists to accommodate the heating expansion of the metal annular boss, so as to avoid that the silicon pipe body is expanded and broken by the expansion of the metal annular boss.

[0014] In one possible implementation, the short end of the joint comprises a fixed part with a semi-enclosing structure and a movable part with a block structure arranged left and right, a horizontal end of the movable part is integrally formed with the upper part of the semi-enclosing structure of the fixed part, the other horizontal end of the movable part is a free end and is fixed with the upper part of the semi-enclosing structure of the fixed part through a screw, and the fixed part and the movable part enclose the insertion hole.

[0015] In the above scheme, the movable part is twisted relative to the fixed part by the ductility of the metal, and after the lower end of the pipe body is inserted into the insertion hole, the pipe body is fixed by the movable part through screw locking. The bottom of the metal joint is a flat structure, which can better withstand the pressure of the adjustment screw at the bottom of the equipment and will not extrude the non-metal pipe body.

[0016] In one possible implementation, the free end of the movable part is provided with a fixing hole, the fixed part is provided with a screw hole corresponding to the fixing hole, and the screw hole and the fixing hole are locked through a screw.

[0017] In one possible implementation, a gas injection hole is formed in the side wall of the pipe body.

[0018] In one possible implementation, the pipe body comprises multiple segments, and each adjacent two segments are fixed by adhesion at the joint.

[0019] In one possible implementation, the joint is made of heat-resistant and corrosion-resistant material 316L stainless steel or inconel600 alloy.

[0020] In one possible implementation, the inner peripheral wall of the insertion hole is provided with an axially extending positioning flat surface, and the outer peripheral wall of the lower end of the pipe body is provided with a flat structure, so that the lower end of the pipe body is inserted into the insertion hole and circumferentially fixed with the insertion hole.

[0021] In the above scheme, the circumferential fixation makes the non-metallic circular pipe inserted into the insertion hole of the metal joint can be positioned by a straight edge, which can ensure the gas outlet angle of the gas holes on the wall of the non-metallic circular pipe.

[0022] The beneficial effects of the utility model are as follows:

[0023] 1. The metal material is used as the bearing joint, which is low in cost, short in processing period, and convenient to install, and greatly reduces the production cost compared with pure silicon or quartz material.

[0024] 2. The high strength characteristics of the metal material make the overall structure of the injection pipe high in strength, effectively reduce the possibility of damage, and improve the reliability of the product.

[0025] 3. Since the metal material is reusable, the injection pipe is no longer a disposable consumable, but can be repeatedly used, further reducing the use cost.

[0026] 4. Unique bottom air inlet design, combined with thermal expansion after gravity sealing principle, significantly enhanced sealing performance, ensure the accuracy of the airflow control, improve the stability and consistency of the reaction. BRIEF DESCRIPTION OF DRAWINGS

[0027] Figure 1 isometric view of the spray pipe of the present application Figure One ;

[0028] Figure 2 isometric view of the spray pipe of the present application Figure Two ;

[0029] Figure 3 isometric view of the spray pipe of the present application Figure One ;

[0030] Figure 4 isometric view of the spray pipe of the present application Figure One ;

[0031] Figure 5 isometric view of the spray pipe of the present application

[0032] Figure 6 isometric view of the spray pipe of the present application

[0033] Figure 7 isometric view of the spray pipe of the present application Figure 6 ;

[0034] In the figure, 1, joint; 2, pipe body; 3, screw; 101, long end; 102, short end; 11, fixed part; 12, movable part; 13, fixed hole; 14, boss; 15, threaded hole two; 16, insertion hole; 201, air outlet; 202, fastener; 203, lower end of the pipe body. DETAILED DESCRIPTION

[0035] In order to make the above-mentioned purpose, features and advantages of the present application more obvious and easy to understand, the specific embodiments of the present application are described in detail below. It should be noted that the following embodiments are only used to illustrate the implementation method and typical parameters of the present application, and are not used to limit the parameter range of the present application, and the reasonable changes derived therefrom are still within the protection scope of the claims of the present application.

[0036] In the description of the utility model, it is necessary to explain that the terms "left", "right", "inner", "outer", "front", "rear", "head", "tail" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the utility model product is usually placed during use, and are merely for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed in a particular orientation and be operated, and therefore cannot be understood as limiting the utility model.

[0037] In the description of the embodiments of the present application, unless otherwise explicitly specified and limited, the terms "connected", "connected" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrally connected, it can be mechanically connected, or it can be electrically connected, it can be directly connected, or it can be indirectly connected through an intermediate medium. For those skilled in the art, the specific meaning of the above terms in the embodiments of the present application can be understood according to the specific circumstances.

[0038] In the embodiments of the present application, unless otherwise explicitly specified and limited, the first feature is "on" or "under" the second feature, which can be direct contact between the first and second features, or indirect contact between the first and second features through an intermediate medium. Moreover, the first feature "above", "above" and "above" the second feature can be directly above or obliquely above the first feature, or only indicate that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature can be directly below or obliquely below the first feature, or only indicate that the horizontal height of the first feature is less than that of the second feature. Embodiments

[0039] As Figure 1 And Figure 2 And Figure 5 And Figure 6 , 7 As shown in the sectional view, a spray pipe for CVD process includes an L-shaped joint 1 and a long straight pipe body 2, both of which are hollow structures containing through holes for gas transmission. The long straight pipe body 2 is provided with a gas outlet hole 201 on the side wall, and the gas in the pipe enters the furnace from the gas outlet hole 201. The long straight pipe body 2 includes multiple sections, and each adjacent joint is fixed by bonding, and the joint is also fixed by fasteners. The fastener here is preferably two pure silicon fixing blocks, which are clamped after being coated with glue. The upper and lower pipe bodies 2 are also coated with glue and fixed together, so that their through holes are connected tightly.

[0040] Referring to Figure 3 And Figure 4The joint 1 includes a long end 101 and a short end 102, which are integrally formed and internally provided with a through hole, facilitating the L-shaped joint 1 to guide the gas from the outside of the furnace tube. In combination with Figure 1 and Figure 2 , the short end 102 of the joint 1 is provided with a insertion hole 16, which is in communication with the through hole of the joint 1, and the inner circumferential wall of the insertion hole 16 is provided with an axially extending positioning plane. The outer circumferential wall of the lower end 203 of the pipe body 2 is provided with a plane structure, so that the lower end 203 of the pipe body 2 is inserted into the insertion hole 1 and circumferentially fixed with the insertion hole 16. The lower end of the pipe body 2 is inserted into the short end 102 of the joint 1, and the insertion end bottom surface of the pipe body 1 is attached to the inner bottom surface of the short end 102 of the joint 1, so that the through holes of the joint 1 and the pipe body 2 are in communication. In this way, the external gas is first transmitted through the joint 1, and then enters the pipe body 2 for transmission, and is sprayed into the vertical furnace for preparing round crystals from the through hole or gas outlet hole 201. The annular boss 14 is protruded along the outer periphery of the through hole of the joint 1 in the insertion hole 16, and the lower end 203 of the pipe body 2 is inserted into the insertion hole 16, and the through hole of the pipe body 2 is sleeved on the annular boss 14.

[0041] Referring to Figure 3 and Figure 4 , the prominent feature of the utility model is that the joint 1 is an integral structure, the short end 102 of the joint 1 is cut left and right, and then cut up and down on one side to form a structure that the fixed part 11 semi-surrounds the movable part 12 and is connected to the movable part 12 through one end, and then the free end of the movable part 12 is disconnected with the fixed part 11 up and down, the fixed hole 13 is arranged on the free end of the movable part 12, the screw hole 15 is arranged on the fixed part 11, the screw hole 15 is matched with the fixed hole 13, and the locking function of the fixed part 11 and the movable part 12 can be realized by cooperating with the M3 screw. That is, the short end 102 of the joint 1 includes the fixed part 11 with a semi-surrounding structure and the movable part 12 with a block structure arranged left and right, one horizontal end of the movable part 12 is integrally formed with the upper part of the semi-surrounding structure of the fixed part 11, the other horizontal end of the movable part 12 is a free end and is fixed to the upper part of the semi-surrounding structure of the fixed part 11 through the screw 3, and the fixed part 11 and the movable part 12 surround the insertion hole 16. The free end of the movable part 12 is provided with a fixed hole 13, the fixed part 11 is provided with a screw hole 15 corresponding to the free end fixed hole 13, and the screw hole 15 and the fixed hole 13 are locked by a screw. Referring to Figure 1 and Figure 2 , the screw is arranged on the fixed hole 13 and the screw hole 15, so that the fixed part 11 and the movable part 12 surround the insertion hole 16 structure.

[0042] The joint 1 is made of metal material, the pipe body 2 is made of non-metal material, preferably the pipe body 2 is made of pure silicon material, and the joint 1 is made of heat-resistant and corrosion-resistant material 316L stainless steel or inconel600 alloy. The long straight pipe body 2 made of non-metal material is inserted into the metal joint 1, avoiding the pipe body 2 hanging, the obtained spray pipe has good sealing performance, the joint 1 made of metal material is integrally formed, convenient to process, short processing cycle, the joint is not easy to break, and low cost. The metal joint 1 is used for butt joint with a furnace pipe, plays a role of fixing the spray pipe and bearing the straight spray pipe section. Because the thermal expansion coefficients of the silicon pipe and the metal are different, in the use environment of seven or eight hundred degrees, when the metal thermal expansion is large and the silicon pipe cannot be laterally screwed and extruded, the silicon pipe is tightly contacted with the metal head under the gravity of the silicon pipe, so that the principle of sealing air flow is realized.

[0043] The above is only a specific embodiment of the present application, but the protection scope of the present application is not limited to this, any person skilled in the art can easily think of changes or replacements within the technical range disclosed in the present application, which should be covered in the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A jet nozzle for CVD process, characterized in that, The device includes an L-shaped connector (1) and a long straight tube (2). The connector (1) is made of metal and the tube (2) is made of non-metal. Both the connector (1) and the tube (2) are hollow structures with through holes. The lower end of the tube (2) is inserted into the short end (102) of the connector (1) and the bottom surface of the inserted end of the tube (2) is in contact with the bottom surface of the short end (102) of the connector (1), so that the through holes of the connector (1) and the tube (2) are connected.

2. The jetting pipe for CVD process according to claim 1, characterized in that, The tube (2) is made of pure silicon material.

3. The jetting pipe for CVD process according to claim 1, characterized in that, The short end (102) of the connector (1) has a socket (16) which is connected to the through hole of the connector (1).

4. The jetting pipe for CVD process according to claim 3, characterized in that, An annular boss (14) is provided on the outer periphery of the through hole of the connector (1) inside the insertion hole (16). The lower end (203) of the tube body (2) is inserted into the insertion hole (16) and the through hole of the tube body (2) is sleeved on the annular boss (14). There is a contact gap between the tube body (2) and the annular boss (14).

5. The jetting pipe for CVD process according to claim 3, characterized in that, The short end (102) of the connector (1) includes a fixed part (11) with a semi-enclosed structure arranged on the left and right and a movable part (12) with a block structure. One horizontal end of the movable part (12) is integrally formed with the upper part of the semi-enclosed structure of the fixed part (11). The other horizontal end of the movable part (12) is a free end and is fixed to the upper part of the semi-enclosed structure of the fixed part (11) by screws (3). The fixed part (11) and the movable part (12) form the socket (16).

6. The jetting pipe for CVD process according to claim 5, characterized in that, The free end of the movable part (12) is provided with a fixing hole (13), and a screw hole (15) is provided at the place where the fixing part (11) corresponds to the fixing hole (13). The screw hole (15) and the fixing hole (13) are locked by a screw (3).

7. The jetting pipe for CVD process according to claim 1, characterized in that, The side wall of the tube (2) is provided with an air jet hole (201).

8. The jetting pipe for CVD process according to claim 1, characterized in that, The tube body (2) comprises multiple segments, and each pair of adjacent segments is fixed by adhesive bonding.

9. The jetting pipe for CVD process according to claim 1, characterized in that, The connector (1) is made of heat-resistant and corrosion-resistant 316L stainless steel or Inconel 600 alloy.

10. A jetting pipe for CVD process according to claim 3, characterized in that, The inner peripheral wall of the insertion hole (16) is provided with an axially extending positioning plane, and the outer peripheral wall of the lower end (203) of the tube body (2) is provided with a planar structure, so that the lower end (203) of the tube body (2) is inserted into the insertion hole (16) and circumferentially fixed with the insertion hole (16).

Images