Furnace core tool for furnace body

Abstract

The utility model relates to the field of semiconductor material processing, and discloses a furnace core tool for a furnace body, which comprises a middle shaft, moving parts are movably sleeved on the outer surface of the middle shaft close to the upper end and the lower end, and six connecting rods are rotatably arranged on the outer surfaces of the two moving parts close to the lower end. And plate fixing parts are rotationally arranged at one ends of the multiple connecting rods correspondingly, supporting plates are fixedly arranged on one sides of the multiple plate fixing parts correspondingly, the outer surfaces of the six supporting plates are sleeved with heating wires, and multiple ceramic parts are arranged on the outer surfaces of the heating wires. According to the utility model, after the heating wire provided with the ceramic piece is sleeved on the outer sides of the middle shaft and the moving piece, the supporting plate can be fixedly arranged on one side of the connecting rod arranged on the outer surface of the moving piece and the plate fixing piece, and meanwhile, after the arranged moving piece moves and is adjusted on the outer surface of the middle shaft, the supporting plate can be fixed. And the distance between the supporting plate and the heating wire can be adjusted.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of semiconductor material processing especially relates to a furnace core frock for furnace body. BACKGROUND

[0002] In recent years, with the rapid development of domestic semiconductor industry, more stringent requirements are put forward for the quality of semiconductor materials, especially the quality of single crystal growth and the reliability of production equipment. The typical furnace body structure is composed of spiral heating wire and ceramic parts, wherein the heating wire needs to be fixed uniformly around through multiple ceramic parts.

[0003] The inventor found that the prior art has the following problems in the process of implementing the present application: At present, in order to facilitate disassembly, the design gap of the traditional furnace core is much larger than the size of the ceramic part, resulting in uneven distribution of the support structure. Due to the different distances between adjacent ceramic parts, the lengths of the heating wires may not be uniform, and at the same time in a high temperature environment, the longer heating wires are prone to sag on the ceramic support, thereby causing short circuit between the heating wires, increasing production cost and time cost. Therefore, the technical personnel in the field provide a furnace core frock for furnace body to solve the problems raised in the background art. SUMMARY

[0004] The utility model discloses a furnace core frock for furnace body, which can fix the support plate on one side of the connecting rod and the plate fixing piece provided on the outer surface of the moving piece, and adjust the distance between the support plate and the heating wire by moving the moving piece on the outer surface of the middle shaft.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical scheme:

[0006] A furnace core frock for furnace body, comprising a middle shaft, a moving piece movably sleeved on the outer surface of the middle shaft at the upper end and the lower end, six connecting rods rotatably provided on the outer surface of the moving piece at the lower end, a plurality of plate fixing pieces rotatably provided at one end of the connecting rod, a support plate fixedly provided on one side of the plate fixing piece, a heating wire sleeved on the outer surface of the support plate, and a plurality of ceramic parts provided on the outer surface of the heating wire.

[0007] Further, a bolt is rotatably embedded on one side of the upper end of the outer surface of the moving piece, and the bolt is attached to the outer surface of the middle shaft at one end.

[0008] Further, a threaded sleeve is provided at the connection between the plate fixing piece, the moving piece and the connecting rod, and a nut is threadedly sleeved on one side of the outer surface of the threaded sleeve.

[0009] Further, one side of the six support plates near the upper end and the lower end is fixedly connected with the plate fixing part, and the six support plates are arranged in a circumferential manner around the central shaft and arranged on the outer surface of the moving part.

[0010] Further, the six support plates can be made of hardwood and PP plate.

[0011] Further, the outer surface of the heating wire is clamped with a mounting rack.

[0012] Further, a plurality of ceramic parts are uniformly fixed on the outer surface of the heating wire.

[0013] The utility model has the advantages of the following beneficial effects:

[0014] The utility model discloses a furnace core tool for furnace body, after the moving part is movably sleeved on the outer surface of the central shaft, the plate fixing part can be rotatably arranged on the outer surface of the moving part through the connecting rod, and then the six plate fixing parts of the support plate fixedly arranged near the upper end and the lower end are arranged at the same angle position, so that the interval between the support plate and the heating wire can be adjusted by moving the moving part, thereby better installing and using the furnace core tool, and the support plate can be installed by using different materials according to different requirements, and the used plate can be reused and recycled, thereby improving the practicability of the furnace core tool. DRAWINGS

[0015] Figure 1 It is the axial measurement schematic view of the utility model;

[0016] Figure 2 It is Figure 1 The enlarged schematic view of A in the middle.

[0017] Legend:

[0018] 1, mounting rack, 2, support plate, 3, heating wire, 4, ceramic part, 5, central shaft, 6, plate fixing part, 7, connecting rod, 8, moving part, 9, bolt, 10, nut, 11, stud. DETAILED DESCRIPTION

[0019] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0020] Refer to Figures 1 to 2The utility model provides a furnace core frock for furnace body, including the middle axle 5, the upper end and the lower end of the outer surface of middle axle 5 are movably sleeved with moving piece 8, the lower end of the outer surface of two moving piece 8 is rotatably provided with six connecting rods 7, and the one end of multiple connecting rods 7 is rotatably provided with plate fixed part 6, and the one side of multiple plate fixed part 6 is fixedly provided with support plate 2, and the outer surface of six support plates 2 is sleeved with heating wire 3, and the outer surface of heating wire 3 is provided with multiple ceramic parts 4.

[0021] Specifically, after the moving piece 8 is movably sleeved on the outer surface of the middle axle 5, six rotating rods can be rotatably arranged on the outer surface of the moving piece 8. After the plate fixed part 6 is rotatably arranged at one end of the six connecting rods 7, the appropriate plate to be installed and fixed can be installed and fixed at the upper end and the lower end of the plate fixed frame on the same side. When the moving piece 8 is pulled, the moving piece 8 can push the installed and fixed support plate 2 through the connecting rod 7 to adjust the spacing, so that the support plate 2 can be better distributed in a circumferential shape on the inner surface of the heating wire 3. After the six ceramic parts 4 are evenly arranged on the outer surface of the heating wire 3, the heating wire 3 can be more evenly heated.

[0022] Referring to Figure 2 , the upper end of the outer surface of the moving piece 8 is rotatably embedded with a bolt 9 on one side, and the one end of the two bolts 9 is attached to the outer surface of the middle axle 5.

[0023] Specifically, after the bolt 9 is rotatably embedded on one side of the outer surface of the moving piece 8, the bolt 9 can be used to extrude the outer surface of the middle axle 5 after the height of the moving piece 8 is adjusted, so that the position of the moving piece 8 can be fixed.

[0024] Referring to Figure 2 , the connecting rod 7 is connected to the moving piece 8 and the fixed part on both sides, and the connecting rod 7 is provided with a threaded sleeve 11 on the outer surface of the connecting rod 7, and the threaded sleeve 11 is provided with a nut 10 on one side.

[0025] Specifically, after the threaded sleeve 11 is embedded in the connecting rod 7 and the fixed part and the moving piece 8, the threaded sleeve 11 can be threaded with the bolt 9 on the outer surface. After the moving piece 8 adjusts the support plate 2, the bolt 9 can be rotatably arranged to assist in fixing the rotation angle of the connecting rod 7.

[0026] Referring to Figure 1 , the upper end and the lower end of the one side of the six support plates 2 are fixedly connected to the plate fixed part 6, and the six support plates 2 are arranged in a circumferential shape on the outer surface of the moving piece 8 with the middle axle 5 as the center.

[0027] Specifically, the support plate 2 is fixedly installed on the upper end and the lower end of the same position on one side of the two plate fixing members 6, and the support plate 2 is arranged in a circumferential arrangement on the inner surface of the heating wire 3, and the support plate 2 can be disassembled and replaced according to the requirements, and the furnace core tooling is applicable.

[0028] Referring to Figure 1 The six support plates 2 can be made of hardwood and PP plates, the mounting rack 1 is clamped on the outer surface of the heating wire 3, and the plurality of ceramic pieces 4 are uniformly fixed on the outer surface of the heating wire 3.

[0029] Specifically, the installed support plate 2 can be made of different materials, so that the furnace core tooling is applied to different equipment furnace bodies according to different materials, and the mounting rack 1 is clamped on one side of the heating wire 3, which can better install and fix the furnace core tooling. After the ceramic pieces 4 are uniformly arranged on the outer surface of the heating wire 3, the heating wire 3 between the plurality of ceramic pieces 4 can be uniformly heated.

[0030] Working principle: in use, the user can install and fix the support plate 2 to be used on one side of the upper end and the lower end of the same position of the two plate fixing members 6, after the installation of the support plate 2 is completed, the two moving pieces 8 are sleeved on the outer surface of the middle shaft 5, the support plate 2 and the middle shaft 5 are placed on the inner surface of the heating wire 3, the two moving pieces 8 are pulled, the moving piece 8 moves on the outer surface of the middle shaft 5, and the moving piece 8 is driven by the rotating connecting rod 7 to adjust the support plate 2, so that the support plate 2 and the inner wall of the heating wire 3 are close to each other. After adjustment, the bolt 9 provided in the moving piece 8 is rotated to fix the moving piece 8 on the outer surface of the middle shaft 5, so that the furnace core tooling can be better installed in the furnace body for use.

[0031] Finally, it should be noted that: the above only describes the preferred embodiments of the present application, and is not used to limit the present application, although the present application has been described in detail with reference to the foregoing embodiments, for those skilled in the art, the technical solutions recorded in the foregoing embodiments can be modified, or some technical features can be replaced, any modification, equivalent replacement, improvement, etc. within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A core tooling for a furnace core comprising a mandrel (5), characterized in that: The outer surface of the middle shaft (5) is movably sleeved with moving pieces (8) at the upper end and the lower end, the outer surface of the two moving pieces (8) is rotatably provided with six connecting rods (7) at the lower end, one end of the plurality of connecting rods (7) is rotatably provided with a plate fixing piece (6), one side of the plurality of plate fixing pieces (6) is fixedly provided with a supporting plate (2), the outer surface of the six supporting plates (2) is sleeved with a heating wire (3), and the outer surface of the heating wire (3) is provided with a plurality of ceramic pieces (4).

2. A core tooling for a furnace core according to claim 1, characterized in that: The outer surface of the two moving pieces (8) is rotatably embedded with a bolt (9) at the upper end on one side, and one end of the two bolts (9) is attached to the outer surface of the middle shaft (5).

3. A core tooling for a furnace core according to claim 1, characterized in that: The connecting rod (7) is provided with a threaded stud (11) at the two side connections of the plurality of plate fixing pieces (6) and the two moving pieces (8), and the outer surface of the plurality of threaded studs (11) is threadedly sleeved with a nut (10) on one side.

4. A core tooling for a furnace core according to claim 1, characterized in that: The six supporting plates (2) are fixedly connected to the plate fixing pieces (6) at the upper end and the lower end on one side, and are arranged in a circumferential manner around the middle shaft (5) on the outer surface of the moving piece (8).

5. A core tooling for a furnace core according to claim 1, characterized in that: The six supporting plates (2) can be made of hardwood and PP plate.

6. A core tooling for a furnace core according to claim 1, characterized in that: The outer surface of the heating wire (3) is clamped with a mounting bracket (1) on one side.

7. A core tooling for a furnace core according to claim 1, characterized in that: The plurality of ceramic pieces (4) are uniformly fixedly sleeved on the outer surface of the heating wire (3).

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