Tool for leakage detection of special-shaped workpiece

Abstract

The tool comprises a fixing assembly, a workpiece to be detected is fixed on the fixing assembly, a detection assembly is arranged on the workpiece to be detected, the workpiece to be detected comprises a main body, a first counter bore groove, a second counter bore groove and a first through cavity are machined in the main body, and the first through cavity is provided with a second through cavity. The detection assembly comprises a cover plate, a sealing pressing block and a first plug, the cover plate is in sealed connection with the second counter bore groove, the sealing pressing block is in sealed connection with the first counter bore groove and provided with a connector, and the first plug is in sealed connection with the two ends of the first through cavity respectively; the first counter bore groove, the second counter bore groove and the first through cavity are communicated with one another by machining a plurality of vent holes and matching with a plurality of plugs. According to the device, after the plugs and the sealing pieces are installed, the connectors are connected with external high-pressure gas and a pressure gauge through gas pipes, the sealing performance of the three cavities in the main body can be detected at a time, and the detection efficiency is high.

Description

TECHNICAL FIELD

[0001] The utility model relates to the auxiliary tooling improvement design technical field of air tightness detector, especially to a tooling for special-shaped workpiece leak detection. BACKGROUND

[0002] The sealing tester is also called air tightness detector or leakage tester, and its basic principle is to detect whether there is air leakage in the cylinder by using air pressure difference, so as to judge whether the sealing performance meets the standard. Assuming that the inner cavity volume of a measured workpiece (or object) is V, and the cavity pressure is P, under the condition of constant temperature, after a few seconds or tens of seconds, its inner cavity volume does not change, and the cavity pressure drops by a certain value ΔP, at this time, it can be determined that the workpiece gas sealing performance is not good, or called "leakage workpiece", otherwise, it is considered that the workpiece gas sealing performance is good or called "non-leakage workpiece". In the actual detection process, generally, an allowable leakage value is given according to the specific application environment conditions and state of the workpiece, when the workpiece leakage value is less than the value, it is considered that the workpiece "has no leakage" and is a qualified product, only when the workpiece leakage value is greater than the value, it is considered "unqualified" or "serious leakage".

[0003] For the special-shaped workpiece for semiconductor equipment, generally, there are multiple chambers, the machining precision of the chambers is high, and the sealing performance needs to meet the standard, and the traditional chamber leakage measurement method generally detects each chamber separately, needs to be matched with multiple different clamps, the detection operation times are many, and the time consumption is relatively long, and the cost of the whole detection cycle is also high.

[0004] In the prior art, the patent with publication number CN208076105U discloses a kind of air tightness test fixture, comprising: air passage device with sealed cavity, with the detection device of air passage device connection;The air passage device is provided with the air passage for the sealed cavity and the intercommunication of outside;The detection device includes the connecting port communicated with the sealed cavity;When detecting, the opening of the measured object is connected with the connecting port, and the detection cavity is formed with the sealed cavity, the air passage is inhaled gas, and whether the detection cavity leaks is detected.The air tightness test fixture solves the problems of large volume of air tightness device in prior art, not sensitive, high cost and complex operation process. The method of air tightness detection is improved. The purpose of convenient and rapid detection of leakage hole is achieved, and the specific position of leakage hole can be better judged. The monitoring and management of workpiece are strengthened.

[0005] The patent with the publication number CN222561226U discloses a gas-tight detection tool for a smoke sampling module, which comprises an outer shell body, a joint opening of a smoke gas transmission pipeline is arranged at one end of the outer shell body, a sealing cover is embedded and arranged at one end of the joint opening, a hand screw bolt is arranged through the inner side of the sealing cover, a fixed support is fixedly arranged in the inner part of the outer shell body, and a smoke sampling module body is fixedly arranged in the inner part of the fixed support.

[0006] The present application provides a tool for leak detection of a special-shaped workpiece to solve one of the above problems. Utility model content

[0007] The utility model discloses a tool for leak detection of a special-shaped workpiece, which can detect the sealing performance of three cavities on the main body at one time after the connection head is connected with the external high-pressure gas and pressure gauge through the air pipe, and the detection efficiency is high.

[0008] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a tool for leak detection of a special-shaped workpiece, which comprises a fixed assembly, a workpiece to be detected is fixed on the fixed assembly, a detection assembly is arranged on the workpiece to be detected, the workpiece to be detected comprises a main body, a first counterbore groove, a second counterbore groove and a first through cavity are processed on the main body, the detection assembly comprises a cover plate, a sealing pressing block and a first plug, the cover plate is sealingly connected with the second counterbore groove, the sealing pressing block is sealingly connected with the first counterbore groove and is provided with a connection head, the first plug is sealingly connected with two ends of the first through cavity, respectively, and a plurality of air holes are processed between the first counterbore groove, the second counterbore groove and the first through cavity and are connected with each other by cooperating with a plurality of plugs.

[0009] Further, a plurality of first vertical air holes are processed in the first counterbore groove, a second transverse air hole is processed on the main body, and the second transverse air hole and the first vertical air hole are connected.

[0010] Further, the first transverse air hole and the first vertical air hole are connected, and the first longitudinal air hole and the second counterbore groove are connected.

[0011] Further, the main body is processed with a second longitudinal vent hole, which respectively communicates with the first and second transverse vent holes.

[0012] Further, the main body is processed with a third transverse vent hole, the first through cavity is provided with two and communicated through the third transverse vent hole, the main body is further provided with a third longitudinal vent hole, a fourth longitudinal vent hole and a second vertical vent hole, the third longitudinal vent hole communicates with the third transverse vent hole, the fourth longitudinal vent hole and the second transverse vent hole are communicated, and the second vertical vent hole respectively communicates with the third longitudinal vent hole and the fourth longitudinal vent hole.

[0013] Further, the first counterbore groove and the sealing block are provided with a sealing gasket and fixed by a screw.

[0014] Further, the second counterbore groove and the cover plate are provided with a waist-shaped sealing ring and fixed by a screw.

[0015] Further, the second counterbore groove is processed with a second through hole, and the second plug is installed at the second through hole.

[0016] Further, the fixing assembly comprises a bottom plate, two vertical plates are fixed on the bottom plate, a pad and a limiting column are arranged on the vertical plate, an end of the main body is processed with a limiting hole, and the limiting column is sleeved in the limiting hole and supports the end of the main body through the pad.

[0017] Further, the bottom plate is further provided with a clamping block, one end of the clamping block is clamped at the step position of the main body.

[0018] Compared with the prior art, the device has the beneficial effects that after the device is installed with various plugs and sealing members, the sealing performance of three cavities on the main body can be detected at one time, and the detection efficiency is high.

[0019] The connecting head is connected with external high-pressure gas and a pressure gauge through the air pipe, the air pressure is increased to 1.2-1.5Mp, the pressure is maintained for two hours, whether there is air leakage in the cavity is detected through the set pressure value of the pressure gauge, if the measured pressure is lower than the set value within two hours, it indicates that there is a problem with the sealing performance of the cavity. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 It is a perspective view of the utility model;

[0021] Figure 2 It is an explosion schematic of the utility model Figure 1 ;

[0022] Figure 3 It is an explosion schematic of the utility model Figure 2 ;

[0023] Figure 4 is a top view of the utility model;

[0024] Figure 5 is Figure 4 is a sectional view along A-A direction;

[0025] Figure 6 is Figure 4 is a sectional view along B-B direction.

[0026] In the figure: 1, detection assembly; 10, connecting head; 11, cover plate; 12, second plug; 13, waist type sealing ring; 14, first plug; 15, sealing pressing block; 2, workpiece to be detected; 20, first counterbore groove; 201, first vertical air hole; 21, second counterbore groove; 211, first through hole; 212, first longitudinal air hole; 22, first transverse air hole; 23, second longitudinal air hole; 24, second transverse air hole; 25, first through cavity; 26, third longitudinal air hole; 27, fourth longitudinal air hole; 28, second vertical air hole; 29, third transverse air hole; 3, fixing assembly; 30, bottom plate; 31, vertical plate; 32, cushion block; 33, limiting column; 4, clamping block. DETAILED DESCRIPTION

[0027] In the description of the utility model, it needs to be understood that the orientation or position relation indicated by the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer" and the like is the orientation or position relation shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as a limitation on the utility model that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation. In addition, the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0028] In the description of the utility model, it needs to be understood that, unless otherwise explicitly specified and limited, the terms "fixing", "mounting", "connecting", "setting" and the like should be understood in a broad sense, for example, when an element is referred to as "fixed to" another element, it can be directly on another element or there can be a middle element. When an element is considered "mounted on" another element, it can be directly mounted on another element or there can be a middle element. When an element is considered "connected" to another element, it can be fixedly connected, or detachably connected, or integrally connected; it can be mechanically connected, or electrically connected; it can be directly connected, or indirectly connected through an intermediate medium, or it can be the internal communication of two elements.

[0029] For ordinary skilled persons in the art, the specific meanings of the above terms in the utility model can be understood according to the specific circumstances.

[0030] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0031] Embodiment one

[0032] Referring to Figures 1-6 The utility model discloses a tool for special-shaped workpiece leak detection, including fixed assembly 3, the fixed assembly 3 is fixed with the workpiece 2 to be detected, sets up detection assembly 1 on the workpiece 2 to be detected, the workpiece 2 to be detected includes main body, is processed with first counterbore groove 20, second counterbore groove 21 and first through cavity 25 on the main body, the detection assembly 1 includes cover plate 11, sealing press block 15 and first plug 14, the cover plate 11 is sealedly connected with second counterbore groove 21, sealing press block 15 is sealedly connected with first counterbore groove 20 and is installed with connecting head 10, and the both ends of first plug 14 are sealedly connected with first through cavity 25, and first counterbore groove 20, second counterbore groove 21 and first through cavity 25 are communicated with each other through processing multiple air holes and cooperating with several plugs.

[0033] For the workpiece 2 to be detected, due to the unique reason of the special structure and shape design, three chambers are processed on the main body, specifically first counterbore groove 20, second counterbore groove 21 and first through cavity 25, wherein the number of first counterbore groove 20 is one, the number of second counterbore groove 21 is two and is symmetrically designed, and first through cavity 25 is symmetrically provided with two and is of upper and lower through type structure. First counterbore groove 20, second counterbore groove 21 and first through cavity 25 are communicated with each other through processing multiple air holes, and the air holes include through holes and blind holes that do not penetrate the main body. Through the mutual penetration of the above-mentioned multiple transverse, longitudinal and vertical through holes and blind holes, the three chambers are kept in communication. In addition, each through hole and blind hole is plugged on the main body, specifically using the matched plug for plugging. After the installation and fixation of the workpiece 2 to be detected on the fixed assembly 3 are completed, the connecting head 10 is connected with the air pipe, the pressure gauge or the air tightness detector with the pressure gauge is installed on the air pipe, and the air pipe is also connected with the external high-pressure gas source and the air valve. When the leak detection operation of the workpiece 2 to be detected is carried out, the high-pressure gas is first sprayed into each cavity through the air pipe and the connecting head 10, the air pressure is increased to 1.2-1.5Mp, the pressure is kept for two hours, the pressure value set by the pressure gauge is observed, and it is judged whether there is air leakage phenomenon in the cavity, that is, if the measured pressure is lower than the set value within two hours, it indicates that the cavity sealing performance has a problem, otherwise, the sealing of each cavity is qualified.

[0034] Embodiment Two

[0035] With reference to Figures 1-6 On the basis of the technical scheme of Embodiment One, a tool for leak detection of a special-shaped workpiece is combined with Figures 2-6 It can be seen that the machining positions of the various air holes are divided into a transverse direction, a longitudinal direction and a vertical direction, which correspond to three directions of three-dimensional coordinates, respectively. Specifically, a plurality of first vertical air holes 201 are machined in the first counterbore groove 20, the first vertical air holes 201 are blind holes and do not need to be plugged, a second transverse air hole 24 is machined on the main body, the second transverse air hole 24 is provided with two through holes and needs to be plugged at both ends by installing a matching plug at the corresponding punching position on the main body, and the second transverse air hole 24 and the first vertical air hole 201 are connected in communication. In addition, a first transverse air hole 22 and a first longitudinal air hole 212 are machined on the main body and are in communication with each other, the first transverse air hole 22 is a through hole, the first longitudinal air hole 212 is provided with two through holes and is used to connect the first longitudinal air hole 212 and the second counterbore groove 21 in communication, the first transverse air hole 22 and the first vertical air hole 201 are connected in communication, and the first counterbore groove 20 and the second counterbore groove 21 are connected in communication.

[0036] Further, a second longitudinal air hole 23 is machined on the main body, the second longitudinal air hole 23 is a blind hole and needs to be installed with a corresponding plug, and the second longitudinal air hole 23 is connected in communication with the first transverse air hole 22 and the second transverse air hole 24, respectively, so that the first transverse air hole 22 and the two second transverse air holes 24 are kept in communication. In addition, a third transverse air hole 29 is machined on the main body, the third transverse air hole 29 is a blind hole and is installed with a plug, the first through cavity 25 is provided with two and is connected in communication through the third transverse air hole 29, and the main body is further provided with a third longitudinal air hole 26, a fourth longitudinal air hole 27 and a second vertical air hole 28, the third longitudinal air hole 26, the fourth longitudinal air hole 27 and the second vertical air hole 28 are blind holes and are installed with plugs, the third longitudinal air hole 26 is connected in communication with the third transverse air hole 29, the fourth longitudinal air hole 27 is connected in communication with the second transverse air hole 24, and the second vertical air hole 28 is connected in communication with the third longitudinal air hole 26 and the fourth longitudinal air hole 27, respectively, so that the two first through cavities 25 are kept in communication with the first counterbore groove 20.

[0037] Embodiment Three

[0038] With reference to Figures 1-6As shown, on the basis of the technical solutions in the above embodiment, a tool for leak detection of a special-shaped workpiece is provided, a sealing gasket is arranged between the first counterbore groove 20 and the sealing block 15 and is fixed by screw connection, which enhances the sealing effect of the sealing block 15. In addition, a waist-shaped sealing ring 13 is arranged between the second counterbore groove 21 and the cover plate 11 and is fixed by screw connection, which enhances the sealing effect of the cover plate 11. Further, the second counterbore groove 21 is processed with a second through hole, and the second plug 12 is installed at the second through hole to block the second through hole and ensure the sealing effect of the second counterbore groove 21.

[0039] For the specific structural design of the fixing assembly 3, the fixing assembly 3 comprises a bottom plate 30, two vertical plates 31 are fixed on the bottom plate 30, a pad 32 and a limiting column 33 are arranged on the vertical plate 31, a limiting hole is processed at the end of the main body, the limiting column 33 is sleeved in the limiting hole and supports the end of the main body through the pad 32, which can support and fix the workpiece 2 to be detected, and the size of the pad 32 is adjusted according to actual conditions. In addition, the bottom plate 30 is also provided with a clamping block 4, one end of the clamping block 4 is clamped at the stepped position of the main body, and the clamping block 4 plays an auxiliary clamping role for the workpiece 2 to be detected.

[0040] In the device of the utility model, the assembly and cooperation relationship of each component, various plugs, sealing rings and drilling processing are prior art or materials, and the skilled in the art can directly purchase or order according to the required product model and specification.

[0041] The above is only a preferred embodiment of the utility model, and the known specific structure and characteristics in the scheme are not described in detail. For those skilled in the art, the utility model is not limited to the details of the above embodiment, and can be realized in other specific forms without departing from the spirit or basic characteristics of the utility model. Therefore, from any point of view, the embodiment should be regarded as exemplary and non-limiting. Any skilled person in the art can make equivalent replacement or change according to the technical scheme and utility model concept of the utility model within the scope of the utility model disclosed by the utility model, which should be covered within the protection scope of the utility model.

Claims

1. A tooling for leak testing of a profiled workpiece, characterized in that, The utility model provides a kind of detection device for workpiece, including fixed component (3), fixed component (3) is fixed with the workpiece (2) to be detected, and detection component (1) is provided on the workpiece (2) to be detected, the workpiece (2) to be detected includes main body, and first counterbore groove (20), second counterbore groove (21) and first through cavity (25) are processed on the main body, and the detection component (1) includes cover plate (11), sealing press block (15) and first plug (14), cover plate (11) is sealedly connected with second counterbore groove (21), sealing press block (15) is sealedly connected with first counterbore groove (20) and is installed with connecting head (10), and first plug (14) is respectively sealedly connected with the two ends of first through cavity (25), and first counterbore groove (20), second counterbore groove (21) and first through cavity (25) are communicated by processing multiple air holes and cooperating with several plugs.

2. The tooling for leak testing of a profiled workpiece according to claim 1, wherein, Multiple first vertical air holes (201) are processed in the first counterbore groove (20), and the main body is processed with second transverse air hole (24), and the second transverse air hole (24) is communicated with the first vertical air hole (201).

3. The tooling for leak testing of a profiled workpiece according to claim 2, wherein, The main body is processed with first transverse air hole (22) and first longitudinal air hole (212) that are communicated with each other, the first transverse air hole (22) is communicated with the first vertical air hole (201), and the first longitudinal air hole (212) is communicated with the second counterbore groove (21).

4. The tooling for leak testing of a profiled workpiece according to claim 3, wherein, The main body is processed with second longitudinal air hole (23), and the second longitudinal air hole (23) is communicated with the first transverse air hole (22) and the second transverse air hole (24) respectively.

5. The tooling for leak testing of a profiled workpiece according to claim 4, wherein, The main body is processed with third transverse air hole (29), and the first through cavity (25) is provided with two and communicated through the third transverse air hole (29), and the main body is further provided with third longitudinal air hole (26), fourth longitudinal air hole (27) and second vertical air hole (28), the third longitudinal air hole (26) is communicated with the third transverse air hole (29), the fourth longitudinal air hole (27) is communicated with the second transverse air hole (24), and the second vertical air hole (28) is communicated with the third longitudinal air hole (26) and the fourth longitudinal air hole (27) respectively.

6. The tooling for leak testing of a profiled workpiece of claim 1, wherein, Sealing gasket is arranged between the first counterbore groove (20) and the sealing press block (15) and fixed by screw connection.

7. The tooling for leak testing of a profiled workpiece of claim 1, wherein, Waist type sealing ring (13) is arranged between the second counterbore groove (21) and the cover plate (11) and fixed by screw connection.

8. The tooling for leak testing of a profiled workpiece according to claim 7, wherein, The second counterbore groove (21) is processed with second through hole, and the second plug (12) is installed at the second through hole.

9. The tooling for leak testing of a profiled workpiece according to any one of claims 1 to 8, wherein, The fixed component (3) includes bottom plate (30), two vertical plates (31) are fixed on the bottom plate (30), and the vertical plate (31) is provided with cushion block (32) and limiting column (33), the end of the main body is processed with limiting hole, the limiting column (33) is sleeved in the limiting hole and supports the end of the main body through the cushion block (32).

10. The tooling for leak testing of a profiled workpiece according to claim 9, wherein, The bottom plate (30) is further provided with clamping block (4), and one end of the clamping block (4) is clamped at the step position of the main body.

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