AFM probe, detection structure thereof and atomic force microscope
By incorporating a micro-mass sensor within the AFM probe to detect changes in the mass of the probe tip and shank, the problem of accurately locating wear and contamination of the AFM probe is solved. This achieves a low-cost, high-efficiency detection method, improving measurement and processing accuracy.
Patent Information
- Application Number
- CN202520086782.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-14
- Publication Date
- 2026-02-27
- Estimated Expiration
- 2035-01-14
AI Technical Summary
In existing technologies, it is difficult to accurately locate the wear and contamination of AFM probes, resulting in low detection efficiency and high costs. Furthermore, data anomalies not caused by probe malfunctions lead to unnecessary probe replacements, increasing usage costs.
A first micro-mass sensor and a second micro-mass sensor are installed inside the AFM probe to detect changes in the mass of the needle tip and the needle shank, respectively. The wear and contamination status is determined by a calculation and judgment unit, and an alarm unit is used to indicate abnormalities.
It enables low-cost and simple AFM probe wear and contamination detection, accurately locates anomalies, improves measurement and processing accuracy, reduces unnecessary probe replacements, and increases product yield.
Smart Images
Figure CN223955366U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to the field of semiconductor equipment, especially, relate to a kind of AFM probe and its detection structure and atomic force microscope. BACKGROUND
[0002] Atomic force microscope (Atomic Force Microscope, AFM) is an important instrument with atomic resolution surface topography, electromagnetic performance analysis, has wide application in the scanning imaging and manufacturing of nanostructure.
[0003] AFM probe often wears or contaminates in use, and the change of needle tip topography caused by the wear of AFM probe and the contamination of AFM probe will inevitably affect the precision of AFM measurement and processing, so it is necessary to monitor the wear and contamination of AFM probe.
[0004] In the prior art, ordinary microscope or scanning electron microscope (Scanning Electron Microscope, SEM) can be used to detect the wear and contamination of AFM probe, but this method is complex and high in cost. Another method is to use AFM probe to test the test sheet, and the measurement or processing result of the test sheet obtained by AFM machine is used to monitor the AFM probe daily, but this method cannot accurately locate whether the data anomaly of daily monitor is caused by probe anomaly; and the replacement of AFM probe caused by the daily monitor data anomaly caused by non-AFM probe will lead to unnecessary waste and increase the use cost of AFM.
[0005] Therefore, at present, a structure for accurately locating and low-cost, simple and convenient wear and contamination of AFM probe is urgently needed.
[0006] It should be noted that the above introduction to the technical background is only for the convenience of clearly and completely describing the technical scheme of the present application, and for the understanding of those skilled in the art, and cannot be considered as the prior art known to those skilled in the art only because these schemes are described in the background section of the present application. CONTENT OF THE UTILITY MODEL
[0007] In view of the above-mentioned shortcomings of the prior art, the purpose of the present application is to provide an AFM probe and its detection structure and atomic force microscope, to solve the problem that the wear and contamination of AFM probe in the prior art cannot be accurately located and the detection efficiency is low.
[0008] To achieve the above-mentioned purposes and other related purposes, the utility model provides the following technical scheme:
[0009] In a first aspect, the utility model provides a kind of AFM probe detection structure, the AFM probe detection structure includes: first micro mass sensor and second micro mass sensor;
[0010] The first micro mass sensor and the second micro mass sensor are used to detect AFM probe, the AFM probe includes needle tip and needle handle, the needle handle includes first end and second end, the first end of the needle handle is fixedly connected with the needle tip, the second end of the needle handle is fixedly connected with mobile structure, and the mobile structure can control the movement of the AFM probe formed by the needle tip and the needle handle;
[0011] The first micro mass sensor is located at the position where the needle tip is connected with the first end of the needle handle, and the second micro mass sensor is located at the position of the second end of the needle handle, the first micro mass sensor is used to detect the mass change of the needle tip, and the second micro mass sensor is used to detect the mass change of the AFM probe.
[0012] Optionally, the first micro mass sensor and the second micro mass sensor are both FBAR sensors.
[0013] Optionally, the first micro mass sensor is embedded in the position where the needle tip is connected with the first end of the needle handle, and the second micro mass sensor is embedded in the position of the second end of the needle handle.
[0014] Optionally, the AFM probe detection structure further includes a detection unit and a calculation unit, the detection unit is electrically connected with the first micro mass sensor and the second micro mass sensor respectively, for providing detection voltage to the first micro mass sensor and the second micro mass sensor;The calculation unit is electrically connected with the first micro mass sensor and the second micro mass sensor respectively, for receiving and calculating the first mass change amount corresponding to the first micro mass sensor and the second mass change amount corresponding to the second micro mass sensor compared with initial state at the same measurement time point;The first mass change amount is the value of the mass sensed by the first micro mass sensor at the measurement time point of AFM probe minus the mass sensed at initial state, and the second mass change amount is the value of the mass sensed by the second micro mass sensor at the measurement time point of AFM probe minus the mass sensed at initial state.
[0015] Optionally, the first micro mass sensor is electrically connected with a first input signal line and a first output signal line, and the second micro mass sensor is electrically connected with a second input signal line and a second output signal line; the detection unit is electrically connected with the first micro mass sensor through the first input signal line and electrically connected with the second micro mass sensor through the second input signal line, and the detection unit is configured to transmit an input voltage signal to the first input signal line and the second input signal line respectively to provide a detection voltage; the calculation unit is electrically connected with the first micro mass sensor through the first output signal line and electrically connected with the second micro mass sensor through the second output signal line, and the calculation unit is configured to receive a first output resonance frequency of the first output signal line and a second output resonance frequency of the second output signal line, and calculate the first mass change and the second mass change through the first output resonance frequency and the second output resonance frequency.
[0016] Optionally, the AFM probe detection structure further comprises a judgment unit electrically connected with the calculation unit to receive and process the first mass change and the second mass change obtained by the calculation unit; the judgment unit is configured to make a judgment conclusion according to the size of the first mass change and the second mass change obtained by the calculation unit: when the first mass change is greater than a first preset threshold and the difference between the second mass change and the first mass change is less than or equal to a third preset threshold, the judgment result is that the tip is contaminated and the tip needs to be cleaned; when the first mass change is greater than the first preset threshold and the difference between the second mass change and the first mass change is greater than the third preset threshold, the judgment result is that the tip and the shank are contaminated and the AFM probe as a whole needs to be cleaned; when the first mass change is less than or equal to the first preset threshold and greater than or equal to a second preset threshold, and the difference between the second mass change and the first mass change is greater than the third preset threshold, the judgment result is that the shank is contaminated and the shank needs to be cleaned; when the first mass change is less than the second preset threshold and the difference between the second mass change and the first mass change is less than or equal to the third preset threshold, the judgment result is that the tip is worn and the AFM probe needs to be replaced; the first preset threshold is greater than or equal to 0, and the second preset threshold is less than or equal to 0.
[0017] Optionally, the AFM probe detection structure further comprises an alarm unit electrically connected with the judgment unit to receive an abnormal result not within the judgment range of the judgment unit; when the first mass change and the second mass change received by the judgment unit are not within the judgment conditions of the judgment conclusion, the alarm unit is configured to issue an alarm signal to prompt whether the test result of the AFM probe on the test piece is normal.
[0018] Optionally, the AFM probe detection structure further comprises one or more third micro-mass sensors, which are located between the first end and the second end of the shank.
[0019] In a second aspect, the utility model provides a kind of AFM probe, using the AFM probe detection structure of any one described above to detect the pollution and abrasion condition of the AFM probe.
[0020] In a third aspect, the utility model provides a kind of atomic force microscope, the AFM probe of the atomic force microscope includes above, using the AFM probe detection structure of any one described above to detect the pollution and abrasion condition of the AFM probe of the atomic force microscope.
[0021] As described above, the AFM probe and its detection structure and atomic force microscope of the utility model have the following beneficial effects:
[0022] The utility model discloses a micro-mass sensor is arranged in AFM probe, can realize the detection of abrasion, dirt condition of AFM probe at low cost, method is simple, and can be accurately positioned to the exception of AFM probe, it is favorable to improve the precision of AFM measurement and processing, improve product yield. BRIEF DESCRIPTION OF DRAWINGS
[0023] Figure 1 It is shown as the schematic diagram of AFM probe detection structure in the utility model.
[0024] Figure 2 It is shown as the schematic diagram of the needle tip of AFM probe being polluted in an example of the utility model.
[0025] Figure 3 It is shown as the schematic diagram of the needle tip and shank of AFM probe being polluted in an example of the utility model.
[0026] Figure 4 It is shown as the schematic diagram of the shank of AFM probe being polluted in an example of the utility model.
[0027] Figure 5 It is shown as the schematic diagram of the needle tip of AFM probe being abraded in an example of the utility model.
[0028] ELEMENT NUMBER EXPLANATION
[0029] 10, AFM probe;11, needle tip;12, shank;13, pollutant;21, first micro-mass sensor;22, second micro-mass sensor;30, moving structure;31, mechanical arm. DETAILED DESCRIPTION
[0030] The following will illustrate the embodiments of the present application through specific examples. Those skilled in the art can easily understand other advantages and effects of the present application from the disclosure of the present application. The present application can also be implemented or applied through other different embodiments, and each detail in the present application can be modified or changed based on different viewpoints and applications without departing from the spirit of the present application.
[0031] As described in the detailed embodiments of the present application, the schematic diagrams showing the structure of the device can be partially enlarged without the general proportion for the convenience of description, and the schematic diagrams are only examples which should not limit the scope of protection of the present application. In addition, the three-dimensional spatial dimensions including length, width and depth should be included in the actual manufacture.
[0032] For the convenience of description, spatial relationship words such as "under", "below", "lower", "underneath", "above", "upper" and the like can be used to describe the relationship between one element or feature and other elements or features shown in the drawings. It should be understood that these spatial relationship words are intended to include other directions of the device in use or operation in addition to the directions depicted in the drawings.
[0033] In the context of the present application, the structure described as "on" the second feature can include the embodiment in which the first and second features are formed in direct contact, and can also include the embodiment in which another feature is formed between the first and second features, so that the first and second features can not be in direct contact.
[0034] It should be noted that the diagrams provided in the present embodiment only illustrate the basic concept of the present application in a schematic manner, and only show the components related to the present application in the diagrams, not the number, shape and size of the components when actually implemented. The actual implementation of each component can be randomly changed in shape, number and proportion, and the layout pattern of the components can also be more complex.
[0035] In the prior art, since the AFM probe 10 is often worn or contaminated during use, which affects the accuracy of AFM measurement and processing, it is necessary to monitor the wear and contamination of the AFM probe 10. Conventional AFM probe 10 can be detected by using a general microscope or a scanning electron microscope (SEM) to detect the wear and contamination of the AFM probe 10, but this method is complex and costly. The AFM probe 10 can also be used for test work on the test sheet, and the measurement or processing results of the test sheet obtained by the AFM machine are used to monitor the AFM probe 10 daily, but this method cannot accurately locate whether the daily monitor data is abnormal due to the probe abnormality; and the AFM probe 10 is replaced due to the daily monitor data abnormality caused by non-AFM probe 10, thereby causing unnecessary waste and increasing the use cost of the AFM.
[0036] The utility model provides a kind of AFM probe detection structure, as shown in Figure 1 The AFM probe detection structure includes: a first micro mass sensor 21 and a second micro mass sensor 22.
[0037] The first micro mass sensor 21 and the second micro mass sensor 22 are used to detect the AFM probe 10, the AFM probe 10 includes a needle tip 11 and a needle handle 12, the needle handle 12 includes a first end and a second end, the first end of the needle handle 12 is fixedly connected with the needle tip 11, and the second end of the needle handle 12 is fixedly connected with a moving structure 30, and the moving structure 30 can control the movement of the AFM probe 10 composed of the needle tip 11 and the needle handle 12.
[0038] The first micro mass sensor 21 is located at the position where the needle tip 11 is connected with the first end of the needle handle 12, and the second micro mass sensor 22 is located at the position of the second end of the needle handle 12, the first micro mass sensor 21 is used to detect the mass change of the needle tip 11, and the second micro mass sensor 22 is used to detect the mass change of the AFM probe 10.
[0039] The utility model discloses a first micro mass sensor 21 and second micro mass sensor 22 are arranged in AFM probe 10, can realize the detection to the wear and tear, dirty condition of AFM probe 10 with MEMS technology low cost, and the improvement method is simple, and the detection process can also be realized through the transmission and calculation of electric signal, saves the complex operation and high -cost equipment of using microscope detection, and can accurately locate whether it is the exception of AFM probe 10, is favorable for improving the precision of AFM measurement and processing, improves product yield, and through the first micro mass sensor 21 and second micro mass sensor 22 of setting respectively in the needle point 11 and needle handle 12 of AFM probe 10 two positions, can further improve the position confirmation of AFM probe 10 exception, further improved the accuracy of detection positioning.
[0040] In one embodiment, as shown in Figure 1 The mobile structure 30 is a mechanical arm 31.
[0041] In one embodiment, the first micro mass sensor 21 and the second micro mass sensor 22 are both FBAR (Film Bulk Acoustic Resonator) sensors.
[0042] The utility model discloses a FBAR sensor as the mass change sensor of AFM probe 10, can adopt the mature semiconductor technology to make, and can realize the preparation of small size, meet the size demand of AFM probe 10, and the preparation method is simple.
[0043] In one embodiment, as shown in Figure 1 The first micro mass sensor 21 is embedded in the position where the needle point 11 is connected to the first end of the needle handle 12, and the second micro mass sensor 22 is embedded in the position of the second end of the needle handle 12.
[0044] The utility model discloses the position relation of first micro mass sensor 21 and second micro mass sensor 22, make first micro mass sensor 21 be used for detecting the mass change of needle point 11, and second micro mass sensor 22 is used for detecting the mass change of whole AFM probe 10, through the mass change difference detected by two micro mass sensors, can realize the judgment of the mass change of needle handle 12 part, thereby realized the partition detection function of AFM probe 10.
[0045] In one embodiment, the AFM probe detection structure further comprises a detection unit and a calculation unit, the first micro mass sensor 21 is electrically connected with a first input signal line and a first output signal line, and the second micro mass sensor 22 is electrically connected with a second input signal line and a second output signal line; the detection unit is electrically connected with the first input signal line and the second input signal line, and is configured to provide an input voltage signal to the first input signal line and the second input signal line respectively; the calculation unit is electrically connected with the first output signal line and the second output signal line, and is configured to receive a first output resonance frequency of the first output signal line and a second output resonance frequency of the second output signal line, and calculate a first mass change amount ΔA corresponding to the first micro mass sensor 21 and a second mass change amount ΔB corresponding to the second micro mass sensor 22 at a same measurement time point compared with an initial state; the first mass change amount ΔA is a value of a mass sensed by the first micro mass sensor 21 at a measurement time point of the AFM probe 10 minus a mass sensed at an initial state, and the second mass change amount ΔB is a value of a mass sensed by the second micro mass sensor 22 at the measurement time point of the AFM probe 10 minus the mass sensed at the initial state.
[0046] In one embodiment, the method for calculating the mass change amount at the measurement time point compared with the initial state is as follows: a difference Δf of the output resonance frequencies at the measurement time point and at the initial state is calculated, and the mass change amount Δm is calculated according to the mass load theory wherein ρ0 is the density of the piezoelectric film of the FBAR sensor, μ0 is the Young's modulus of the piezoelectric film of the FBAR sensor, and A is the effective area of the FBAR sensor; the first mass change amount ΔA and the second mass change amount ΔB are both the mass change amount, and the first output resonance frequency and the second output resonance frequency are both the output resonance frequency.
[0047] The utility model discloses the relationship between the output resonance frequency change and corresponding mass change amount detected by micro mass sensor through mass load theory, thereby the mass change amount can be calculated.
[0048] In one embodiment, since the mass and the output resonance frequency of the initial state of the AFM probe 10 can be originally calibrated, when the AFM probe detection structure is actually used to detect a structure, only the first output resonance frequency and the second output resonance frequency obtained at the measurement time point to be measured need to be calculated, and the first mass change amount ΔA and the second mass change amount ΔB can be directly obtained by calling the first output resonance frequency and the second output resonance frequency of the initial state which have been originally calibrated. Specifically, for the AFM probe 10 of the same specification mass, the originally calibrated mass and the output resonance frequency of the initial state of the AFM probe 10 can be uniformly used, and it is not necessary to record and store the mass and the output resonance frequency of the initial state of the AFM probe 10 every time the AFM probe 10 is used initially; however, recording and storing the mass and the output resonance frequency of the initial state of the AFM probe 10 every time the AFM probe 10 is used initially can improve the accuracy of the detection results finally obtained by the AFM probe detection structure, and persons skilled in the art can select according to the accuracy and operation efficiency requirements in actual application.
[0049] In one embodiment, the AFM probe detection structure further comprises a judgment unit electrically connected with the calculation unit to receive and process the first mass change amount ΔA and the second mass change amount ΔB obtained by the calculation unit; the judgment unit is used to make a judgment conclusion according to the size of the first mass change amount ΔA and the second mass change amount ΔB obtained by the calculation unit.
[0050] When the first mass change amount ΔA is greater than the first preset threshold (the mass increase of the tip 11 detected by the first micro-mass sensor 21 is obvious) and the difference between the second mass change amount ΔB and the first mass change amount ΔA is less than or equal to the third preset threshold (the mass increase amount of the AFM probe 10 as a whole detected by the second micro-mass sensor 22 is approximately equal to the mass increase amount of the tip 11, and the mass change of the handle 12 is not obvious), the judgment result is that the tip 11 is contaminated and the tip 11 needs to be cleaned, as shown in FIG. 2B, wherein the tip 11 is contaminated by the contaminant 13. Figure 2
[0051] When the first mass change amount ΔA is greater than the first preset threshold (the mass increase of the tip 11 detected by the first micro-mass sensor 21 is obvious) and the difference between the second mass change amount ΔB and the first mass change amount ΔA is greater than the third preset threshold (the mass increase amount of the AFM probe 10 as a whole detected by the second micro-mass sensor 22 is obviously greater than the mass increase amount of the tip 11, and the mass change of the handle 12 is obvious), the judgment result is that the tip 11 and the handle 12 are both contaminated and the AFM probe 10 as a whole needs to be cleaned, as shown in FIG. 2C, wherein the tip 11 and the handle 12 are both contaminated by the contaminant 13. Figure 3
[0052] When the first mass change amount ΔA is less than or equal to a first preset threshold and greater than or equal to a second preset threshold (the mass change of the needle tip 11 detected by the first micro-mass sensor 21 is not obvious), and the difference between the second mass change amount ΔB and the first mass change amount ΔA is greater than a third preset threshold (the mass increase of the AFM probe 10 as a whole detected by the second micro-mass sensor 22 is obvious, and the mass change of the needle handle 12 is obvious), the result of the judgment is that the needle handle 12 is contaminated and needs to be cleaned, as shown in FIG. 2B, where the needle handle 12 is contaminated by contaminants 13. Figure 4 When the first mass change amount ΔA is less than or equal to a first preset threshold and greater than or equal to a second preset threshold (the mass change of the needle tip 11 detected by the first micro-mass sensor 21 is not obvious), and the difference between the second mass change amount ΔB and the first mass change amount ΔA is greater than a third preset threshold (the mass increase of the AFM probe 10 as a whole detected by the second micro-mass sensor 22 is obvious, and the mass change of the needle handle 12 is obvious), the result of the judgment is that the needle handle 12 is contaminated and needs to be cleaned, as shown in FIG. 2B, where the needle handle 12 is contaminated by contaminants 13.
[0053] When the first mass change amount ΔA is less than or equal to a first preset threshold and greater than or equal to a second preset threshold (the mass change of the needle tip 11 detected by the first micro-mass sensor 21 is not obvious), and the difference between the second mass change amount ΔB and the first mass change amount ΔA is greater than a third preset threshold (the mass increase of the AFM probe 10 as a whole detected by the second micro-mass sensor 22 is obvious, and the mass change of the needle handle 12 is obvious), the result of the judgment is that the needle handle 12 is contaminated and needs to be cleaned, as shown in FIG. 2B, where the needle handle 12 is contaminated by contaminants 13. Figure 5 When the first mass change amount ΔA is less than or equal to a first preset threshold and greater than or equal to a second preset threshold (the mass change of the needle tip 11 detected by the first micro-mass sensor 21 is not obvious), and the difference between the second mass change amount ΔB and the first mass change amount ΔA is greater than a third preset threshold (the mass increase of the AFM probe 10 as a whole detected by the second micro-mass sensor 22 is obvious, and the mass change of the needle handle 12 is obvious), the result of the judgment is that the needle handle 12 is contaminated and needs to be cleaned, as shown in FIG. 2B, where the needle handle 12 is contaminated by contaminants 13.
[0054] In particular, the first preset threshold, the second preset threshold, and the third preset threshold can be obtained according to actual experiments to meet the requirements of the detection of the wear and contamination of the AFM probe 10.
[0055] In one embodiment, the AFM probe detection structure further comprises an alarm unit electrically connected to the judgment unit to receive an abnormal result that is not within the judgment range of the judgment unit; when the first mass change amount ΔA and the second mass change amount ΔB received by the judgment unit are not within the judgment conditions of the judgment conclusion, the alarm unit is used to issue an alarm signal to prompt whether the test result of the AFM probe 10 on the test piece is normal.
[0056] The utility model discloses a alarm unit is set up, and the first mass variation delta A and the second mass variation delta B that judging unit obtains can not correspond the quantity relation of its existing judging conclusion when the alarm, thereby can handle the abnormal condition of the probability of emergence of the judging range outside the judging unit such as " the first mass variation delta A is 0, but AFM probe 10 is worn and is contaminated with dirt and both quality influence of AFM probe 10 is same " etc. that AFM probe detection structure can not judge in the scheme, avoid the problem of falling into the calculation dead cycle of making the judging conclusion that can not be made, and the alarm unit can remind the operator when AFM probe detection structure does not judge the abnormal condition of AFM probe 10, can carry out daily monitor to AFM machine platform in time, judges whether AFM probe 10 is normal or the abnormal condition that AFM probe detection structure can not judge appears through the measurement or processing result of AFM probe 10 to test piece.
[0057] Specifically, since in some application cases, it is to judge the abnormal condition of AFM probe 10 by using AFM probe detection structure after the problem of daily monitor of AFM machine platform appears, if the alarm unit still alarms at this time, the abnormal condition that AFM probe detection structure can not detect can be judged without carrying out daily monitor, and the specific operation can be reasonably set according to the actual application requirement, and all are within the protection scope of the utility model.
[0058] In one embodiment, the AFM probe detection structure further comprises one or more third micro-mass sensors located between the first end and the second end of the needle handle 12.
[0059] The utility model discloses a third micro-mass sensor, which can be used for more accurate partition detection of AFM probe 10. This scheme is generally used for longer AFM probe 10 or other special application scenarios, and the number and position of the third micro-mass sensor can be set according to requirements.
[0060] The utility model discloses an AFM probe 10, which is detected for contamination and wear by any one of the AFM probe detection structures described above.
[0061] The utility model discloses an atomic force microscope, which comprises the AFM probe 10 described above, and the AFM probe 10 of the atomic force microscope is detected for contamination and wear by any one of the AFM probe detection structures described above.
[0062] Specifically, the utility model mainly solves the detection problem of the wear and contamination of the AFM probe 10 used in the atomic force microscope, but can also be used in other devices or application structures that need to detect the wear and contamination of the AFM probe 10, and all are within the protection scope of the utility model.
[0063] To sum up, the AFM probe, the detection structure and the atomic force microscope can realize the detection of the wear and contamination of the AFM probe at low cost by arranging the micro mass sensor in the AFM probe, the method is simple, the abnormality of the AFM probe can be accurately positioned, the precision of AFM measurement and processing is improved, and the product yield is improved.
[0064] Therefore, the utility model effectively overcomes various defects in the prior art and has high industrial utilization value.
[0065] The above embodiments only exemplarily illustrate the principle and effect of the utility model, and are not used for limiting the utility model. Any person skilled in the art can modify or change the above embodiments without departing from the spirit and category of the utility model. Therefore, all equivalent modifications or changes completed by those skilled in the art under the spirit and technical thought disclosed by the utility model still should be covered by the claims of the utility model.
Claims
1. An AFM probe detection structure, characterized by, The AFM probe detection structure comprises a first micro-mass sensor and a second micro-mass sensor. The first micro-mass sensor and the second micro-mass sensor are used for detecting an AFM probe, the AFM probe comprises a needle tip and a needle handle, the needle handle comprises a first end and a second end, the first end of the needle handle is fixedly connected with the needle tip, and the second end of the needle handle is fixedly connected with a moving structure, and the moving structure can control the movement of the AFM probe formed by the needle tip and the needle handle. The first micro-mass sensor is located at a position where the needle tip is connected with the first end of the needle handle, and the second micro-mass sensor is located at a position of the second end of the needle handle, the first micro-mass sensor is used for detecting the mass change of the needle tip, and the second micro-mass sensor is used for detecting the mass change of the AFM probe.
2. The AFM probe detection structure of claim 1, wherein: The first micro-mass sensor and the second micro-mass sensor are both FBAR sensors.
3. The AFM probe detection structure of claim 2, wherein: The first micro-mass sensor is embedded in the position where the needle tip is connected with the first end of the needle handle, and the second micro-mass sensor is embedded in the position of the second end of the needle handle.
4. The AFM probe detection structure of claim 2, wherein: The AFM probe detection structure further comprises a detection unit and a calculation unit, the detection unit is electrically connected with the first micro-mass sensor and the second micro-mass sensor respectively, and is used for providing detection voltages to the first micro-mass sensor and the second micro-mass sensor; the calculation unit is electrically connected with the first micro-mass sensor and the second micro-mass sensor respectively, and is used for receiving and calculating a first mass change amount corresponding to the first micro-mass sensor and a second mass change amount corresponding to the second micro-mass sensor at the same measurement time point compared with an initial state; the first mass change amount is a value obtained by subtracting a mass sensed in the initial state from a mass sensed by the first micro-mass sensor at the measurement time point of the AFM probe, and the second mass change amount is a value obtained by subtracting a mass sensed in the initial state from a mass sensed by the second micro-mass sensor at the measurement time point of the AFM probe.
5. The AFM probe detection structure of claim 4, wherein: The first micro-mass sensor is electrically connected with a first input signal line and a first output signal line, the second micro-mass sensor is electrically connected with a second input signal line and a second output signal line; the detection unit is electrically connected with the first micro-mass sensor through the first input signal line, and is electrically connected with the second micro-mass sensor through the second input signal line, and is used for transmitting input voltage signals to the first input signal line and the second input signal line respectively to provide detection voltages; the calculation unit is electrically connected with the first micro-mass sensor through the first output signal line, and is electrically connected with the second micro-mass sensor through the second output signal line, and is used for receiving a first output resonance frequency of the first output signal line and a second output resonance frequency of the second output signal line, and calculating the corresponding first mass change amount and second mass change amount through the first output resonance frequency and the second output resonance frequency.
6. The AFM probe detection structure of claim 4, wherein: The AFM probe detection structure further comprises a judging unit electrically connected with the calculating unit to receive and process the first mass change and the second mass change obtained by the calculating unit; the judging unit is used to make a judgment conclusion according to the size of the first mass change and the second mass change obtained by the calculating unit.
7. The AFM probe detection structure of claim 6, wherein: The AFM probe detection structure further comprises an alarm unit electrically connected with the judging unit to receive an abnormal result not within the judgment range of the judging unit; when the first mass change and the second mass change received by the judging unit are not within the judgment condition of the judgment conclusion, the alarm unit is used to send an alarm signal to prompt whether the test result of the AFM probe on the test piece is normal.
8. The AFM probe detection structure of claim 1, wherein: The AFM probe detection structure further comprises one or more third micro-mass sensors located between the first end and the second end of the needle handle.
9. An AFM probe, characterized by The AFM probe detection structure according to any one of claims 1-8 is used to detect the contamination and wear condition of the AFM probe.
10. An atomic force microscope, characterized by, The atomic force microscope comprises the AFM probe in claim 9, and the AFM probe detection structure according to any one of claims 1-8 is used to detect the contamination and wear condition of the AFM probe of the atomic force microscope.