Confocal alignment system and alignment equipment

Abstract

The utility model relates to the technical field of integrated circuit preparation, in particular to a confocal alignment system and alignment equipment, and the confocal alignment system comprises at least one group of alignment detection devices. The alignment detection device comprises a light beam emitting device, a light modulation assembly and an image acquisition assembly; the light beam emitting device can emit infrared light beams; the light modulation assembly is arranged on a projection path between the light beam emitting device and the alignment mark, the light modulation assembly is provided with at least two optical modulation parts, and the reflection angles of the at least two optical modulation parts can be automatically adjusted based on the incident angle of the infrared light beam; after being reflected by the at least two optical modulators, the infrared beam can be emitted to the alignment mark of the substrate; the image acquisition assembly is used for acquiring image information generated by reflecting the infrared beams by the substrate; according to the utility model, the position of the alignment mark does not need to be considered, and at least two optical modulators are arranged to eliminate the influence of stray light and background light in the alignment process, thereby improving the imaging quality.

Description

TECHNICAL FIELD

[0001] The utility model relates to integrated circuit preparation technical field especially relates to a confocal alignment system and alignment equipment. BACKGROUND

[0002] Back alignment is mainly applied to the fields such as semiconductor manufacturing and micro electro mechanical system, and it is a kind of high-precision alignment technology, is used to carry out pattern alignment or structure positioning on the back of chip or micro device, to ensure that the structure or circuit between front and back can accurately cooperate, realizes the expected function.For example, in three-dimensional integrated circuit manufacturing, the circuit of upper and lower chips needs to be accurately connected through back alignment, and the accuracy of signal transmission is guaranteed.

[0003] The two common back alignment methods on the market at present, the first kind is visible light back alignment, the second kind is infrared light back alignment.But the back alignment of visible light has the shortcoming that the alignment mark must be used on the back surface.The infrared back alignment is realized by the different absorption and penetration ability of different materials for infrared light, so it does not need to consider the position of the alignment mark, but it is easily affected by stray light and back light, resulting in reduced contrast and thus reduced alignment accuracy. SUMMARY

[0004] In order to solve the above technical problems, the utility model does not need to consider the position of the alignment mark, and at least two optical modulation members are arranged to eliminate the influence of stray light and back light during alignment, thereby improving the imaging quality.

[0005] The utility model provides a kind of confocal alignment system, it is applied to substrate detection, the substrate is provided with at least one alignment mark, the confocal alignment system includes at least one set of alignment detection device;

[0006] The alignment detection device includes light beam emitting device, light modulation assembly and image acquisition assembly;The light beam emitting device can emit infrared light beam;

[0007] The light modulation assembly is arranged on the projection path between the light beam emitting device and the alignment mark, the light modulation assembly has at least two optical modulation members, and the reflection angle of the at least two optical modulation members can be automatically adjusted based on the incident angle of the infrared light beam;After the infrared light beam is reflected by the at least two optical modulation members, it can be shot to the alignment mark of the substrate;

[0008] The image acquisition assembly is arranged on the reflection path of the infrared light beam reflected by the substrate, for acquiring the image information generated by the substrate reflecting the infrared light beam.

[0009] In a possible embodiment, the alignment detection device further includes a first alignment component and a second alignment component.

[0010] The first alignment component is arranged on the projection path between the light beam emitting device and the light modulation component, and is used for projecting the infrared light beam emitted by the light beam emitting device to the light modulation component.

[0011] The second alignment component is arranged on the projection path between the light modulation component and the substrate, and is used for receiving the infrared light beam reflected by the light modulation component and projecting the infrared light beam to the substrate.

[0012] In a possible embodiment, the alignment detection device further comprises a first light splitting member.

[0013] The first light splitting member is arranged on the light path between the light modulation component and the substrate, and the infrared light beam is projected to the image acquisition component after being reflected by the substrate and passing through the first light splitting member; or, the first light splitting member is arranged on the light path between the light beam emitting device and the light modulation component, and the infrared light beam is projected to the image acquisition component after being reflected by the substrate, passing through the light modulation component and the first light splitting member in sequence.

[0014] In a possible embodiment, the second alignment component is arranged on the light path between the first light splitting member and the light modulation component, and the infrared light beam reflected by the light modulation component is projected to the substrate after passing through the second alignment component and the first light splitting member in sequence.

[0015] In a possible embodiment, the second alignment component is arranged on the light path between the substrate and the light modulation component, the infrared light beam emitted by the light beam emitting device is projected to the substrate after passing through the first light splitting member, the light modulation component and the second alignment component, and the infrared light beam reflected by the substrate is projected to the image acquisition component after passing through the second alignment component, the light modulation component and the first light splitting member in sequence.

[0016] In a possible embodiment, the second alignment component comprises a scanning lens and a first tube lens.

[0017] On the projection path of the infrared light beam, the scanning lens is used for receiving the infrared light beam reflected by the light modulation component and projecting the infrared light beam to the first tube lens.

[0018] In a possible embodiment, the first alignment component comprises a lens.

[0019] In a possible embodiment, the light modulation component further has a driving component, the driving component is in driving connection with the at least two optical modulation members, and the driving component can adjust the angle of the reflecting surface of the at least two optical modulation members.

[0020] In a possible embodiment, the light modulation assembly comprises a spatial light modulator or a galvanometer mirror, the spatial light modulator or the galvanometer mirror having the at least two optical modulation pieces.

[0021] In a possible embodiment, the light modulation assembly further comprises an optical reflection piece, the optical reflection piece being capable of projecting the infrared light beam emitted by the light beam emitting device onto the at least two optical modulation pieces.

[0022] In a possible embodiment, the optical reflection piece is a mirror or a beam splitter.

[0023] In a possible embodiment, the image acquisition assembly comprises a second tube lens and an image acquisition piece, the second tube lens being configured to receive the infrared light beam reflected by the first beam splitting piece and project the infrared light beam onto the image acquisition piece in a reflection path of the infrared light beam.

[0024] In a possible embodiment, the image acquisition piece is an infrared camera.

[0025] In a possible embodiment, the at least one set of alignment detection devices comprises a first alignment detection device and a second alignment detection device.

[0026] The confocal alignment system further comprises a moving mechanism, the moving mechanism being in transmission connection with the first alignment detection device and the second alignment detection device respectively.

[0027] The moving mechanism is capable of driving the first alignment detection device and the second alignment detection device to move relative to the substrate respectively, so that the first alignment detection device and the second alignment detection device are aligned with different alignment marks in the at least two alignment marks respectively.

[0028] The second aspect of the utility model further protects an alignment device, the alignment device comprising the confocal alignment system as described above.

[0029] The utility model embodiment has the following beneficial effects:

[0030] The utility model discloses adopt infrared light beam to carry out alignment, can realize the alignment mark of being involved can be on the top surface of base or the back of base, reach the effect of not needing to consider alignment mark position, but adopt infrared light beam to carry out alignment and be easily affected by stray light and back light, the utility model discloses at least two optical modulation pieces are set up on the basis of adopting infrared light beam to carry out alignment, and the propagation direction of infrared light beam is used for changing in light modulation subassembly, through the reflection angle of adjusting at least two optical modulation pieces, can guide infrared light beam to specific target point on, thereby realized point to point scanning, thereby remove the influence of stray light to imaging quality, and further improve imaging quality, through setting up at least two optical modulation pieces and carrying out confocal imaging, also can eliminate the interference of other layers in base, further improve imaging quality. BRIEF DESCRIPTION OF DRAWINGS

[0031] In order to more clearly illustrate the technical scheme of the utility model, the following will be to the embodiment or prior art description needed to use the drawing briefly introduced. Obviously, the following description in the drawing is only some embodiments of the utility model, for those skilled in the art, under the premise of not paying creative labor, can also obtain other drawings according to these drawings.

[0032] Figure 1 For the image acquisition assembly of the present embodiment is in the first position, the structure diagram of the alignment detection device;

[0033] Figure 2 For the image acquisition assembly of the present embodiment is in the second position, the structure diagram of the alignment detection device;

[0034] Figure 3 For the image acquisition assembly of the present embodiment is in the first position, the structure diagram of the confocal alignment system;

[0035] Figure 4 For the image acquisition assembly of the present embodiment is in the first position, the structure diagram of the confocal alignment system;

[0036] Figure 5 For the image acquisition assembly of the present embodiment is in the second position, and the light modulation assembly includes a spatial light modulator, the structure diagram of the confocal alignment system;

[0037] Figure 6 For the image acquisition assembly of the present embodiment is in the second position, and the light modulation assembly includes a galvanometer, the structure diagram of the confocal alignment system.

[0038] Wherein, the drawing mark corresponds to:

[0039] 1-beam emitting device; 2-first alignment component; 3-light modulating component; 4-second alignment component; 5-objective lens; 6-image collecting component; 7-substrate; 8-first light splitting component; 31-space light modulator; 32-optical reflection component; 33-vibrating mirror; 41-scanning lens; 42-first tube lens; 61-second tube lens; 62-image collecting component; 71-alignment mark. DETAILED DESCRIPTION

[0040] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application. The term "one embodiment" or "embodiment" herein means that a certain feature, structure or property can be included in at least one implementation of the present application. In the description of the present application, it should be understood that the orientation or position relationship indicated by the terms "upper", "lower" and the like is based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements indicated must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0041] In addition, the terms "first", "second" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first", "second" can be explicitly or implicitly included one or more of the features. Moreover, the terms "first", "second" and the like are used to distinguish similar objects, and do not necessarily be used to describe a specific order or sequence. It should be understood that the data thus used can be interchanged under appropriate circumstances, so that the embodiments of the present application described herein can be implemented in an order other than that illustrated or described herein. In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusion.

[0042] Referring to the drawings Figures 1-6The embodiment provides a confocal alignment system applied to substrate 7 detection, the substrate 7 is provided with at least one alignment mark 71, the confocal alignment system comprises at least one set of alignment detection devices; the alignment detection device comprises a light beam emitting device 1, a light modulation assembly 3 and an image acquisition assembly 6; the light beam emitting device 1 can emit an infrared light beam; the light modulation assembly 3 is arranged on a projection path between the light beam emitting device 1 and the alignment mark 71, the light modulation assembly 3 comprises at least two optical modulation pieces, the reflection angles of the at least two optical modulation pieces can be automatically adjusted based on the incident angle of the infrared light beam; after the infrared light beam is reflected by the at least two optical modulation pieces, the infrared light beam can be shot to the alignment mark 71 of the substrate 7; the image acquisition assembly 6 is arranged on a reflection path of the infrared light beam reflected by the substrate 7, and is used for acquiring image information generated by the substrate 7 reflecting the infrared light beam; in this way, the alignment mark 71 involved can be on the top surface of the substrate 7 or the back surface of the substrate 7 by adopting the infrared light beam for alignment, so that the effect that the position of the alignment mark 71 does not need to be considered is achieved, but the infrared light beam is susceptible to stray light and background light when being used for alignment, at least two optical modulation pieces are arranged on the basis of using the infrared light beam for alignment in the utility model, the optical modulation pieces are used for changing the propagation direction of the infrared light beam in the light modulation assembly 3, the infrared light beam can be guided to a specific target point by adjusting the reflection angles of the at least two optical modulation pieces, so that point-to-point scanning is realized, the influence of stray light on imaging quality is removed, and then the imaging quality is improved; confocal imaging is also realized by arranging the at least two optical modulation pieces, interference caused by other layers in the substrate 7 can be eliminated, and the imaging quality is further improved.

[0043] Specifically, the infrared light beam emitted by the light beam emitting device 1 can be single-band light, or can also include two or more than two band lights.

[0044] It can be understood that the focal points of the at least two optical modulation pieces in the embodiment are located on the same alignment mark 71, and form focal planes on the plane where the alignment mark 71 is located; only the infrared light beam on the focal plane can return to the image acquisition assembly 6 in the original path to realize imaging; in the embodiment, the alignment mark can be on the back surface or the top surface of the substrate 7 because the infrared light beam is used for alignment; meanwhile, the focal points of the at least one optical modulation piece can be adjusted to the alignment mark 71 on the top surface of the substrate 7 by changing the focal point positions of the optical modulation pieces, and the focal points of the at least one optical modulation piece can also be adjusted to the alignment mark 71 on the bottom surface of the substrate 7, that is, the focal planes are formed on the top surface of the substrate 7 and the bottom surface of the substrate 7 respectively; wherein, the alignment mark 71 on the top surface of the substrate 7 and the alignment mark 71 on the bottom surface of the substrate 7 are oppositely arranged, and the arrangement can realize that one layer is imaged on the top surface of the substrate 7 and one layer is imaged on the bottom surface of the substrate 7, the two layers can be high-quality superimposed together, different depth image information is acquired, high-quality alignment superposition is completed, and the imaging quality is further improved.

[0045] Understandably, confocal imaging with at least two optical modulators can produce a clear image with higher axial resolution and can acquire continuous optical slices, increasing the lateral resolution of the image.

[0046] In this embodiment, the confocal alignment system is mainly used for back alignment in fields such as semiconductors and microelectromechanical systems. The confocal alignment system can also be used to observe cells. It can simultaneously observe samples with different cell structures labeled with two or three different fluorescent dyes. Information on different intracellular structures can be obtained through a single experimental observation, thereby improving observation efficiency.

[0047] In this embodiment, the number of alignment marks 71 is set to correspond to the number of alignment detection devices, or the number of alignment marks 71 is greater than the number of alignment detection devices.

[0048] In some embodiments, when a set of alignment detection devices and an alignment mark 71 are provided, the set of alignment detection devices aligns with an alignment mark 71, and the alignment accuracy of the confocal alignment system is a first accuracy.

[0049] In some embodiments, a set of alignment detection devices and two alignment marks 71 are provided, and the projections of the two alignment marks 71 on the substrate 7 are completely overlapping, that is, when the two alignment marks 71 are respectively provided on the back and top surfaces of the substrate 7, the set of alignment detection devices can align the two alignment marks 71 respectively, and the alignment accuracy of the confocal alignment system is the first accuracy.

[0050] In some other embodiments, when a set of alignment detection devices and multiple alignment marks 71 are provided, the set of alignment detection devices can align the multiple alignment marks 71 respectively. In this case, the projections of any two alignment marks 71 on the substrate 7 do not completely overlap. In this case, the alignment accuracy of the confocal alignment system is the second accuracy, which is greater than the first accuracy.

[0051] In one embodiment, when the confocal alignment system includes two or more sets of alignment detection devices, any two sets of alignment detection devices may have the same or different structures. For example, the confocal alignment system includes a first alignment detection device and a second alignment detection device. The first alignment detection device and the second alignment detection device may have the same structure or different structures. When the first alignment detection device and the second alignment detection device are provided, the first alignment detection device and the second alignment detection device can align different alignment marks 71.

[0052] Specifically, the first and second alignment detection devices are different in structure, i.e., the position where the image acquisition component 6 is arranged and the specific structure of the light modulation component 3.

[0053] In some embodiments, the first and second alignment detection devices are arranged, and two alignment marks 71 are arranged at the same time, the first alignment detection device is used to align the first alignment mark 71, the second alignment detection device is used to align the second alignment mark 71, and the first and second alignment detection devices can be aligned at the same time or at different times.

[0054] In other embodiments, the first and second alignment detection devices are arranged, and multiple alignment marks 71 are arranged at the same time, the multiple alignment marks 71 are divided to determine the number and position of the alignment marks 71 that need to be aligned by the first alignment detection device and the number and position of the alignment marks 71 that need to be aligned by the second detection device, the first alignment detection device aligns the alignment marks 71 that need to be aligned in sequence, and the second detection device aligns the alignment marks 71 that need to be aligned in sequence.

[0055] In some possible embodiments, the alignment detection device further comprises a first alignment component 2 and a second alignment component 4; the first alignment component 2 is arranged on the projection path between the light beam emitting device 1 and the light modulation component 3, and is used to project the infrared light beam emitted by the light beam emitting device 1 to the light modulation component 3; the second alignment component 4 is arranged on the projection path between the light modulation component 3 and the substrate 7, and is used to receive the infrared light beam reflected by the light modulation component 3 and project the infrared light beam to the substrate 7; by arranging the first alignment component 2 on the projection path between the light beam emitting device 1 and the light modulation component 3, the first alignment component 2 can project the infrared light beam emitted by the light beam emitting device 1 to the light modulation component 3; by arranging the second alignment component 4 on the projection path between the light modulation component 3 and the substrate 7, the second alignment component 4 can project the infrared light beam reflected by the light modulation component 3 to the substrate 7, and thus the projection path can be arranged reasonably.

[0056] Specifically, the first alignment component 2 is used to preliminarily amplify the infrared light beam and project the amplified infrared light beam to the light modulation component 3, and it can be seen that the first alignment component 2 can be realized by one device to preliminarily amplify the infrared light beam, or can be realized by multiple devices in combination to preliminarily amplify the infrared light beam.

[0057] Referring to FIG. 1, the alignment detection device comprises a light beam emitting device 1, a light modulation component 3, an image acquisition component 6, a substrate 7, and an alignment detection device. Figure 1To simplify the structure of the first alignment component 2 and avoid setting too many devices to cause the dispersion or weakening of the light beam, the first alignment component 2 comprises a lens, which is used to preliminarily enlarge the infrared light beam and project the enlarged infrared light beam onto the light modulation component 3.

[0058] Specifically, the second alignment component 4 is used to adjust the light path reflected by the light modulation component 3 and ensure clear imaging. As can be seen, the second alignment component 4 can be realized by combining a plurality of devices to achieve the above-mentioned required functions.

[0059] Referring to the accompanying drawings Figure 1 To simplify the structure of the second alignment component 4 and avoid setting too many devices to cause the dispersion or weakening of the light beam, the second alignment component 4 comprises a scanning lens 41 and a first tube lens 42. On the projection path of the infrared light beam, the scanning lens 41 is used to receive the infrared light beam reflected by the light modulation component 3 and project the infrared light beam onto the first tube lens 42. The scanning lens 41 is used to dynamically adjust the light path to ensure the imaging clarity and accuracy. The first tube lens 42 is used to enlarge and transmit the image to the objective lens 5 again.

[0060] Specifically, the light beam emitting device 1, the lens, the light modulation component 3, the scanning lens 41, the first tube lens 42 and the objective lens 5 are sequentially arranged on the projection path of the infrared light beam. The infrared light beam emitted by the light beam emitting device 1 is sequentially projected onto the substrate 7 through the lens, the light modulation component 3, the scanning lens 41, the first tube lens 42 and the objective lens 5.

[0061] In some possible embodiments, the alignment detection device further comprises a first light splitting member 8. The first light splitting member 8 is arranged on the light path between the light modulation component 3 and the substrate 7. After the infrared light beam is reflected by the substrate 7, the infrared light beam is projected onto the image acquisition component 6 through the first light splitting member 8. Alternatively, the first light splitting member 8 is arranged on the light path between the light beam emitting device 1 and the optical modulation member. After the infrared light beam is reflected by the substrate 7, the infrared light beam is sequentially projected onto the image acquisition component 6 through the light modulation component 3 and the first light splitting member 8. By arranging the first light splitting member 8 on the projection path, the first light splitting member 8 can transmit the infrared light beam emitted by the light beam emitting device 1, and the infrared light beam reflected by the substrate 7 can also be reflected onto the image acquisition component 6 through the first light splitting member 8. In this way, the projection path and the reflection path can be reasonably arranged, the number of devices on the projection path and the reflection path can be reduced, and the structure of the alignment detection device can be simplified.

[0062] Specifically, in the case that the first light splitting member 8 is arranged on the light path between the light beam emitting device 1 and the optical modulation member, and the infrared light beam is sequentially projected onto the image acquisition component 6 through the light modulation component 3 and the first light splitting member 8 after being reflected by the substrate 7, the infrared light beam reflected by the substrate 7 is returned through the light modulation component 3 to realize the confocal imaging of the image acquisition component 6.

[0063] Alternatively, in the case that the first light splitting member 8 is arranged on the light path between the light modulation assembly 3 and the base 7, and the infrared light beam is projected to the image acquisition assembly 6 after being reflected by the base 7 and passing through the first light splitting member 8, the infrared light beam reflected by the base 7 does not return from the light modulation assembly 3, but directly reaches the image acquisition assembly 6 after passing through the first light splitting member 8. In this way, the image acquisition assembly 6 adopts a digital confocal manner, the pixels on the image acquisition assembly 6 correspond to the pixels of the light modulation assembly 3, and the image acquisition assembly 6 collects information of the corresponding opening region of the light modulation assembly 3 each time, so as to realize the confocal effect.

[0064] In some embodiments, the first light splitting member 8 can include but is not limited to one of a polarized light splitting film, a dielectric film light splitting film, and a dot array metal film.

[0065] Specifically, on the projection path, if the light modulation assembly 3 is used to receive the transmitted light beam formed by the first light splitting member 8, the reflecting surface of the light modulation assembly 3 is arranged opposite to the reflecting surface of the first light splitting member 8.

[0066] In the embodiment, the image acquisition assembly 6 includes a second tube lens 61 and an image acquisition member 62. On the reflection path of the infrared light beam, the second tube lens 61 is used to receive the infrared light beam reflected by the first light splitting member 8 and project the infrared light beam to the image acquisition member 62.

[0067] Specifically, the image acquisition member 62 is an infrared camera.

[0068] In some possible embodiments, the second alignment assembly 4 is arranged on the light path between the first light splitting member 8 and the light modulation assembly 3. The infrared light beam reflected by the light modulation assembly 3 is projected to the base 7 after passing through the second alignment assembly 4 and the first light splitting member 8 in sequence. Through the above arrangement, the second alignment assembly 4 can dynamically adjust the infrared light beam reflected by the light modulation assembly 3 and project the infrared light beam to the first light splitting member 8, so as to ensure the subsequent imaging clarity and accuracy.

[0069] In some possible embodiments, the second alignment assembly 4 is arranged on the light path between the base 7 and the light modulation assembly 3. The infrared light beam emitted by the light beam emitting device 1 is projected to the base 7 after passing through the first light splitting member 8, the light modulation assembly 3 and the second alignment assembly 4. The infrared light beam reflected by the base 7 is projected to the image acquisition assembly 6 after passing through the second alignment assembly 4, the light modulation assembly 3 and the first light splitting member 8 in sequence. Through the above arrangement, the second alignment assembly 4 can receive the infrared light beam emitted by the first light splitting member 8 and the light modulation assembly 3 in sequence, and project the infrared light beam to the base 7, so as to realize the reasonable arrangement of the projection path.

[0070] In some possible embodiments, the alignment detection device further comprises an objective lens 5 arranged on the projection path between the second alignment assembly 4 and the substrate 7, the objective lens 5 being configured to receive the infrared light beam projected by the second alignment assembly 4 and project the infrared light beam onto the substrate 7.

[0071] Referring to Fig. 1, the alignment detection device comprises a light beam emitting device 1, a first alignment assembly 2, a first light splitting component 8, a light modulation assembly 3, a second alignment assembly 4 and an image acquisition assembly 6. Figure 1 The objective lens 5 can also be regarded as being arranged on the reflection path between the substrate 7 and the second alignment assembly 4, the objective lens 5 being configured to receive the infrared light beam reflected by the substrate 7 and project the infrared light beam onto the image acquisition assembly 6 via the second alignment assembly 4, the light modulation assembly 3 and the first light splitting component 8 in sequence.

[0072] Referring to Fig. 1, the alignment detection device comprises a light beam emitting device 1, a first alignment assembly 2, a first light splitting component 8, a light modulation assembly 3, a second alignment assembly 4 and an image acquisition assembly 6. Figure 2 The objective lens 5 can also be regarded as being arranged on the reflection path between the substrate 7 and the first light splitting component 8, the objective lens 5 being configured to receive the infrared light beam reflected by the substrate 7 and project the infrared light beam onto the image acquisition assembly 6 via the first light splitting component 8.

[0073] Referring to Fig. 1, the alignment detection device comprises a light beam emitting device 1, a first alignment assembly 2, a first light splitting component 8, a light modulation assembly 3, a second alignment assembly 4 and an image acquisition assembly 6. Figure 1 The light beam emitting device 1, the first alignment assembly 2, the first light splitting component 8, the light modulation assembly 3, the second alignment assembly 4 and the objective lens 5 are arranged on the projection path of the infrared light beam in sequence, and the infrared light beam emitted by the light beam emitting device 1 is projected onto the substrate 7 via the first alignment assembly 2, the first light splitting component 8, the light modulation assembly 3, the second alignment assembly 4 and the objective lens 5 in sequence;

[0074] The objective lens 5, the second alignment assembly 4, the light modulation assembly 3, the first light splitting component 8 and the image acquisition assembly 6 are arranged on the reflection path of the infrared light beam reflected by the substrate 7 in sequence, and the infrared light beam reflected by the substrate 7 is projected onto the image acquisition assembly 6 via the objective lens 5, the second alignment assembly 4, the light modulation assembly 3 and the first light splitting component 8 in sequence.

[0075] Referring to Fig. 1, the alignment detection device comprises a light beam emitting device 1, a first alignment assembly 2, a first light splitting component 8, a light modulation assembly 3, a second alignment assembly 4 and an image acquisition assembly 6. Figure 2 The light beam emitting device 1, the first alignment assembly 2, the light modulation assembly 3, the second alignment assembly 4, the first light splitting component 8 and the objective lens 5 are arranged on the projection path of the infrared light beam in sequence, and the infrared light beam emitted by the light beam emitting device 1 is projected onto the substrate 7 via the first alignment assembly 2, the light modulation assembly 3, the second alignment assembly 4, the first light splitting component 8 and the objective lens 5 in sequence; the objective lens 5, the first light splitting component 8 and the image acquisition assembly 6 are arranged on the reflection path of the infrared light beam reflected by the substrate 7 in sequence, and the infrared light beam reflected by the substrate 7 is projected onto the image acquisition assembly 6 via the objective lens 5 and the first light splitting component 8 in sequence.

[0076] In some possible embodiments, the light modulation assembly 3 further has a driving assembly in driving connection with the at least two optical modulation pieces, and the driving assembly is capable of adjusting the angles of the reflecting surfaces of the at least two optical modulation pieces. By providing the driving assembly, the positions and the angles of the reflecting surfaces of the at least two optical modulation pieces can be automatically adjusted, the adjustment efficiency is improved, and the adjustment accuracy is ensured.

[0077] In the embodiment, the specific structure of the driving assembly is not limited as long as the driving assembly is capable of driving the optical modulation pieces to move or rotate.

[0078] In some possible embodiments, the light modulation assembly 3 includes a spatial light modulator 31 or a galvanometer 33, and the spatial light modulator 31 or the galvanometer 33 has the at least two optical modulation pieces. In this way, the positions and the angles of the reflecting surfaces of the at least two optical modulation pieces in the light modulation assembly 3 can be automatically adjusted, the adjustment efficiency is improved, and the adjustment accuracy is ensured.

[0079] In the embodiment, the spatial light modulator 31 is a liquid crystal on silicon spatial light modulator or a digital micromirror device.

[0080] Specifically, the optical modulation piece is a reflecting mirror.

[0081] In some possible embodiments, the light modulation assembly 3 further includes an optical reflecting piece 32, and the optical reflecting piece 32 is capable of projecting the infrared light beam emitted by the light beam emitting device 1 onto the at least two optical modulation pieces. In this way, the positions of the spatial light modulator 31 and / or the galvanometer 33 are not limited, and the optical reflecting piece 32 can be placed at a suitable position according to the overall layout of the alignment detection device, so that the structure of the alignment detection device is reasonably planned.

[0082] It can be understood that the optical reflecting piece 32 in the light modulation assembly 3 is used to adjust the direction of the infrared light beam emitted by the light beam emitting device 1, so as to adapt to the positions of the at least two optical modulation pieces, and thus ensure that the infrared light beam emitted by the light beam emitting device 1 can be projected onto the optical modulation pieces through the optical reflecting piece 32.

[0083] Specifically, the optical reflecting piece 32 is a reflecting mirror or a light splitting piece.

[0084] In the case where the light modulation assembly 3 includes the spatial light modulator 31, the optical reflecting piece 32 can be a reflecting mirror or a light splitting piece; in the case where the light modulation assembly 3 includes the galvanometer 33, the optical reflecting piece 32 can be a reflecting mirror or a light splitting piece.

[0085] Referring to FIG. 1, Figure 3The optical reflection member 32 is a reflecting mirror, and the reflecting mirror cooperates with the spatial light modulator 31 to realize projection of the infrared light beam emitted by the light beam emitting device 1 to the reflecting mirror, and the reflecting mirror reflects the infrared light beam to the at least two optical modulation members in the spatial light modulator 31, and the at least two optical modulation members reflect the received infrared light beam to the substrate 7.

[0086] Referring to the accompanying drawings Figure 4 The optical reflection member 32 is a reflecting mirror, and the reflecting mirror cooperates with the spatial light modulator 31 to realize projection of the infrared light beam emitted by the light beam emitting device 1 to the reflecting mirror, and the reflecting mirror reflects the infrared light beam to the at least two optical modulation members in the spatial light modulator 31, and the at least two optical modulation members reflect the received infrared light beam to the substrate 7.

[0087] In some possible embodiments, the at least one alignment detection device comprises a first alignment detection device and a second alignment detection device; the confocal alignment system further comprises a moving mechanism, which is in transmission connection with the first alignment detection device and the second alignment detection device respectively; the moving mechanism can drive the first alignment detection device and the second alignment detection device to move relative to the substrate 7 respectively, so that the first alignment detection device and the second alignment detection device are aligned with different alignment marks 71 in the at least two alignment marks 71 respectively; by simultaneously arranging the first alignment detection device and the second alignment detection device, the first alignment detection device can be aligned with the first alignment mark 71, and the second alignment detection device can be aligned with the second alignment mark 71, so that the alignment efficiency of the alignment detection device can be improved; and the first alignment detection device and the second alignment detection device can simultaneously perform alignment, so that the alignment efficiency of the alignment detection device can be further improved.

[0088] For example, the moving mechanism drives the first alignment detection device to move relative to the substrate 7, so that the first alignment detection device is aligned with the first alignment mark 71; and the moving mechanism drives the second alignment detection device to move relative to the substrate 7, so that the second alignment detection device is aligned with the second alignment mark 71.

[0089] Specifically, the specific structure of the moving mechanism is not limited, as long as it can drive the alignment detection device to move relative to the substrate 7.

[0090] The second aspect of the utility model further protects an alignment device, and the alignment device comprises the confocal alignment system.

[0091] It should be noted that the confocal alignment system and the alignment device can align at least one alignment mark 71, and the alignment mark 71 can be on the top surface of the substrate 7 or the back surface of the substrate 7, and the effect of not considering the position of the alignment mark 71 can be achieved, but the infrared light beam is easy to be affected by stray light and background light, and at least two optical modulation members are arranged on the basis of the alignment of the infrared light beam, the optical modulation members are used for changing the propagation direction of the infrared light beam in the light modulation assembly 3, and the infrared light beam can be guided to a specific target point by adjusting the reflection angle of the at least two optical modulation members, so that point-to-point scanning is realized, the influence of stray light on the imaging quality is removed, and the imaging quality is improved.

[0092] The working process of the single-group alignment detection device in the utility model will be introduced below in combination with the above-mentioned scheme.

[0093] One specific embodiment, see attached Figure 1 The image acquisition assembly 6 acquires first image information of the alignment mark, and the infrared light beam emitted by the light beam emitting device 1 is projected onto the substrate 7 to form a first image after passing through the lens of the first alignment assembly 2, the first light splitting member 8, the light modulation assembly 3, the scanning lens 41, the first tube lens 42 and the objective lens 5 in turn, the substrate 7 receives the infrared light beam reflected by the first image, and projects the infrared light beam onto the image acquisition assembly 6 after passing through the objective lens 5 and the first light splitting member 8 in turn, the image acquisition assembly 6 acquires second image information based on the first image, and the moving mechanism controls the alignment detection device to move relative to the substrate 7 according to the first image information and the second image information, so as to align the first image formed by the infrared light beam emitted by the light beam emitting device 1 with the alignment mark 71.

[0094] Another specific embodiment, see attached Figure 2 The image acquisition assembly 6 acquires first image information of the alignment mark, and the infrared light beam emitted by the light beam emitting device 1 is projected onto the substrate 7 to form a first image after passing through the lens of the first alignment assembly 2, the light modulation assembly 3, the scanning lens 41, the first tube lens 42, the first light splitting member 8 and the objective lens 5 in turn, the substrate 7 receives the infrared light beam reflected by the first image, and projects the infrared light beam onto the image acquisition assembly 6 after passing through the objective lens 5 and the first light splitting member 8 in turn, the image acquisition assembly 6 acquires second image information based on the first image, and the moving mechanism controls the alignment detection device to move relative to the substrate 7 according to the first image information and the second image information, so as to align the first image formed by the infrared light beam emitted by the light beam emitting device 1 with the alignment mark 71.

[0095] The working process of the detection process of the two sets of alignment detection devices in the utility model is introduced below in combination with the above scheme:

[0096] Referring to the accompanying drawings Figure 3 The confocal alignment system comprises the first alignment detection device and the second alignment detection device, the image acquisition assembly 6 acquires third image information and fourth image information of the two alignment marks 71 on the substrate 7 respectively; the infrared light beam emitted by the light beam emitting device 1 is projected onto the substrate 7 to form a second image in sequence through the lens of the first alignment assembly 2, the first light splitting piece 8, the optical reflection piece 32, the spatial light modulator 31, the scanning lens 41, the first tube lens 42 and the objective lens 5, the substrate 7 receives the infrared light beam reflected by the second image and projects the infrared light beam in sequence through the objective lens 5, the first tube lens 42, the scanning lens 41, the spatial light modulator 31, the optical reflection piece 32, the first light splitting piece 8 and the second tube lens 61 to the image acquisition piece 62, the image acquisition piece 62 acquires fifth image information based on the second image, the moving mechanism controls the first alignment detection device to move relative to the substrate 7 according to the third image information and the fifth image information, so as to align the second image formed by the infrared light beam emitted by the light beam emitting device 1 with the first alignment mark 71; similarly, the image acquisition piece 62 in the second alignment detection device acquires sixth image information of a third image formed on the substrate 7, the moving mechanism controls the second alignment detection device to move relative to the substrate 7 according to the fourth image information and the sixth image information, so as to align the third image formed by the infrared light beam emitted by the light beam emitting device 1 with the second alignment mark 71; such a setting can realize simultaneous alignment of the two alignment marks 71 on the substrate 7, thereby improving the alignment efficiency.

[0097] In other embodiments, the confocal alignment system can comprise more than two sets of alignment detection devices.

[0098] It can be understood that the implementation in the drawings is only a preferred example of the present application, and in actual products, the alignment device can also comprise more or fewer components, and any component combination within the protection scope of the present application can also be adopted, the above description is exemplary and is not exhaustive, and is not limited to the disclosed embodiments. Many modifications and changes are obvious to those skilled in the art without departing from the scope and spirit of the described embodiments. The selection of the terms used herein is intended to best explain the principles, practical applications or technical improvements in the market of the embodiments, or to enable other ordinary skilled persons in the art to understand the embodiments disclosed herein.

[0099] The above embodiments and features in the embodiments can be combined with each other in this paper without conflict.

[0100] The above disclosed is only a preferred embodiment of the utility model, of course, cannot with this to limit the utility model right scope, therefore, the equivalent change made according to the utility model claim, still belong to the utility model the scope covered.

Claims

1. A confocal alignment system for use in the inspection of a substrate (7) provided with at least one alignment mark (71), characterized in that, The confocal alignment system comprises at least one set of alignment detection devices; The alignment detection device comprises a light beam emitting device (1), a light modulation assembly (3) and an image acquisition assembly (6); the light beam emitting device (1) can emit an infrared light beam; The light modulation assembly (3) is arranged on a projection path between the light beam emitting device (1) and the alignment mark (71), the light modulation assembly (3) has at least two optical modulation pieces, the reflection angles of the at least two optical modulation pieces can be automatically adjusted based on the incident angle of the infrared light beam; the infrared light beam can be reflected by the at least two optical modulation pieces and then can be shot to the alignment mark (71) of the substrate (7); The image acquisition assembly (6) is arranged on a reflection path of the infrared light beam reflected by the substrate (7), and is used for acquiring image information generated by the substrate (7) reflecting the infrared light beam.

2. The confocal alignment system of claim 1, wherein, The alignment detection device further comprises a first alignment assembly (2) and a second alignment assembly (4); The first alignment assembly (2) is arranged on the projection path between the light beam emitting device (1) and the light modulation assembly (3), and is used for projecting the infrared light beam emitted by the light beam emitting device (1) to the light modulation assembly (3); The second alignment assembly (4) is arranged on the projection path between the light modulation assembly (3) and the substrate (7), and is used for receiving the infrared light beam reflected by the light modulation assembly (3) and projecting the infrared light beam to the substrate (7).

3. The confocal alignment system of claim 2, wherein, The alignment detection device further comprises a first light splitting piece (8); The first light splitting piece (8) is arranged on an optical path between the light modulation assembly (3) and the substrate (7), the infrared light beam is reflected by the substrate (7), then passes through the first light splitting piece (8) and is projected to the image acquisition assembly (6); Or, the first light splitting piece (8) is arranged on an optical path between the light beam emitting device (1) and the optical modulation piece, the infrared light beam is reflected by the substrate (7), then passes through the light modulation assembly (3) and the first light splitting piece (8) in sequence and is projected to the image acquisition assembly (6).

4. The confocal alignment system of claim 3, wherein, The second alignment assembly (4) is arranged on an optical path between the first light splitting piece (8) and the light modulation assembly (3), the infrared light beam reflected by the light modulation assembly (3) passes through the second alignment assembly (4) and the first light splitting piece (8) in sequence and is projected to the substrate (7).

5. The confocal alignment system of claim 3, wherein, The second alignment assembly (4) is arranged on an optical path between the substrate (7) and the light modulation assembly (3), the infrared light beam emitted by the light beam emitting device (1) passes through the first light splitting piece (8), the light modulation assembly (3) and the second alignment assembly (4) and is projected to the substrate (7); and the infrared light beam reflected by the substrate (7) passes through the second alignment assembly (4), the light modulation assembly (3) and the first light splitting piece (8) in sequence and is projected to the image acquisition assembly (6).

6. The confocal alignment system of claim 2, wherein, The second alignment assembly (4) comprises a scanning lens (41) and a first tube lens (42); The scanning lens (41) is configured to receive the infrared light beam reflected by the light modulation assembly (3) and project the infrared light beam to the first tube lens (42) in a projection path of the infrared light beam.

7. The confocal alignment system of claim 2, wherein The first alignment assembly (2) comprises a lens.

8. The confocal alignment system of claim 1, wherein, The light modulation assembly (3) further comprises a driving assembly, which is in driving connection with the at least two optical modulation pieces, and the driving assembly is capable of adjusting the angle of the reflecting surface of the at least two optical modulation pieces.

9. The confocal alignment system of any of claims 1-8, wherein, The light modulation assembly (3) comprises a spatial light modulator (31) or a galvanometer (33), and the spatial light modulator (31) or the galvanometer (33) has the at least two optical modulation pieces.

10. The confocal alignment system of claim 9, wherein, The light modulation assembly (3) further comprises an optical reflecting piece (32), which is capable of projecting the infrared light beam emitted by the light beam emitting device (1) to the at least two optical modulation pieces.

11. The confocal alignment system of claim 10, wherein, The optical reflecting piece (32) is a mirror or a beam splitter.

12. The confocal alignment system of any of claims 1-8, wherein, The image acquisition assembly (6) comprises a second tube lens (61) and an image acquisition piece (62), and the second tube lens (61) is configured to receive the infrared light beam reflected by the first beam splitting piece (8) and project the infrared light beam to the image acquisition piece (62) in a reflection path of the infrared light beam.

13. The confocal alignment system of claim 12, wherein, The image acquisition piece (62) is an infrared camera.

14. The confocal alignment system of any of claims 1-8, wherein, The at least one set of alignment detection devices comprises a first alignment detection device and a second alignment detection device; The confocal alignment system further comprises a moving mechanism, which is in transmission connection with the first alignment detection device and the second alignment detection device respectively; The moving mechanism is capable of driving the first alignment detection device and the second alignment detection device to move relative to the base (7) respectively, so that the first alignment detection device and the second alignment detection device are aligned with different alignment marks in the at least two alignment marks (71) respectively.

15. An alignment apparatus characterized by The alignment device comprises the confocal alignment system according to any one of claims 1-14.

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