Electronic-grade hydrogen peroxide filtering device

Abstract

The utility model discloses an electronic grade hydrogen peroxide filtering device which comprises an integrated cabinet, a plurality of groups of filters are arranged in the integrated cabinet, a liquid inlet pipe and a liquid outlet pipe are arranged on the integrated cabinet, the liquid inlet pipe is communicated with the liquid inlet ends of the plurality of groups of filters, and the liquid outlet pipe is communicated with the liquid outlet ends of the plurality of groups of filters. The liquid outlet end of the front group of filters is communicated with the liquid inlet end of the rear group of filters through a conveying pipe, and a filtering air supply mechanism is arranged in the integrated cabinet. According to the utility model, the plurality of groups of filters are arranged in the integrated cabinet, the filtering precision of each filter is gradually improved, and the plurality of filters can be adjusted to operate in series or independently according to the filtering requirements so as to remove particulate matters in the electronic-grade hydrogen peroxide and reduce the trouble of repeated feedback filtering; therefore, the electronic-grade hydrogen peroxide particles can meet the related quality requirements.

Description

Technical Field

[0001] This utility model relates to the technical field of hydrogen peroxide filtration devices, and in particular to an electronic-grade hydrogen peroxide filtration device. Background Technology

[0002] With the development of domestic food, pharmaceutical, photovoltaic, LCD, and semiconductor industries, especially the impact of the COVID-19 pandemic, the demand for hydrogen peroxide as a cleaning and disinfecting agent in the food, pharmaceutical, and hygiene industries is increasing, and quality control is becoming increasingly stringent. Meanwhile, the semiconductor and electronics industry, as a high-tech industry supported by national development strategies, has seen annual investment exceeding 200 billion yuan in recent years, forming semiconductor industry clusters in East China, South China, Central China, and Southwest China. The consumption of electronic-grade chemicals is also increasing significantly year by year. Currently, the main suppliers in the market generally offer products at 100ppt and 10ppt grades, with most suppliers being overseas. As semiconductor process linewidths evolve, 14nm will gradually become mainstream, and even 7nm and 5nm technologies will be realized step by step in the future. Therefore, the demand for high-purity electronic chemicals in advanced semiconductor processes will only increase, not decrease.

[0003] The prior art, patent number CN202410580086.3, discloses an electronic-grade hydrogen peroxide filtration device and filtration process. By incorporating a pleated filter layer, it significantly increases the filtration area, greatly reducing the number of times particulate matter needs to be removed and ensuring filtration efficiency. However, for electronic-grade hydrogen peroxide particles to meet relevant quality requirements, multiple filtration operations are generally required, and a single filter element cannot meet the requirements for different filtration precisions. Summary of the Invention

[0004] The present invention aims to solve at least one of the technical problems mentioned above, and provides an electronic-grade hydrogen peroxide filtration device that can adjust multiple filters to operate in series or individually according to filtration needs, so as to remove particulate matter in electronic-grade hydrogen peroxide.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0006] An electronic-grade hydrogen peroxide filtration device includes an integrated cabinet. The integrated cabinet is equipped with multiple sets of filters. The integrated cabinet is provided with an inlet pipe and an outlet pipe. The inlet pipe is connected to the inlet end of each of the multiple sets of filters, and the outlet pipe is connected to the outlet end of each of the multiple sets of filters. The outlet end of the previous set of filters and the inlet end of the next set of filters are connected through a delivery pipe. The integrated cabinet is equipped with a filtration air supply mechanism.

[0007] As an improvement to the above technical solution, each of the multiple sets of filters is provided with a parallel liquid inlet on its top, and the liquid inlet pipe is connected to each of the multiple sets of parallel liquid inlets. Each of the multiple sets of filters is provided with a parallel liquid outlet on its bottom, and the liquid outlet pipe is connected to each of the multiple sets of parallel liquid outlets. All of the parallel liquid inlets and parallel liquid outlets are provided with a parallel control valve.

[0008] As an improvement to the above technical solution, each of the multiple sets of filters is provided with a series inlet at the upper end and a series outlet at the lower end. The series outlet of the previous set of filters and the series inlet of the next set of filters are connected through a delivery pipe, and all the delivery pipes are provided with a series control valve.

[0009] As an improvement to the above technical solution, each of the multiple sets of filters includes a tank, the inside of which is provided with a filter element, an outer liquid cavity is formed between the tank and the filter element, and an inner liquid cavity is provided inside the filter element. The parallel liquid inlet and the series liquid inlet are both connected to the outer liquid cavity, and the parallel liquid outlet and the series liquid outlet are both connected to the inner liquid cavity.

[0010] As an improvement to the above technical solution, the air filtration mechanism includes a filter screen and a fan. An air inlet is provided on the top of the integrated cabinet. The filter screen is detachably installed inside the top of the integrated cabinet and in a position opposite to the air inlet. An air outlet is provided on the bottom of the integrated cabinet. The fan is installed inside the bottom of the integrated cabinet and in a position opposite to the air outlet.

[0011] As an improvement to the above technical solution, mounting slots are provided on both sides of the top of the integrated cabinet, and the two ends of the filter screen can be movably inserted into the corresponding mounting slots.

[0012] As an improvement to the above technical solution, a control box installed on the integrated cabinet is also included. The control box is equipped with a central processing unit, which is electrically connected to all the parallel control valves and series control valves. The control box is equipped with a control panel electrically connected to the central processing unit, which can control the opening or closing of all the parallel control valves and series control valves through the central processing unit.

[0013] Compared with the prior art, the beneficial effects of this application are:

[0014] This utility model discloses an electronic-grade hydrogen peroxide filtration device. By installing multiple sets of filters in an integrated cabinet, the filtration accuracy of each filter gradually increases. Multiple filters can be adjusted to operate in series or individually according to filtration needs to remove particulate matter from electronic-grade hydrogen peroxide, reducing the trouble of repeated back-feeding filtration and ensuring that the particulate matter in electronic-grade hydrogen peroxide meets relevant quality requirements. In addition, a filtration air supply mechanism is also set inside the integrated cabinet to ensure that the air particles supplied into the integrated cabinet are pre-treated, preventing external particles from entering the integrated cabinet and improving the filtration environment of hydrogen peroxide. Attached Figure Description

[0015] The specific embodiments of this utility model will be further described in detail below with reference to the accompanying drawings, wherein:

[0016] Figure 1 This is a schematic diagram of the structure of an embodiment of the present utility model;

[0017] Figure 2 This is a schematic diagram of the filter structure in an embodiment of the present invention;

[0018] Figure 3 This is a cross-sectional view of the filter in an embodiment of the present invention;

[0019] Figure 4 This is a partial structural diagram of the air supply and filtration mechanism in an embodiment of this utility model. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0021] It should be noted that when a component is described as "fixed to" another component, it can be directly on the other component or may have a central component. When a component is described as "connected to" another component, it can be directly connected to the other component or may have a central component. When a component is described as "set on" another component, it can be directly set on the other component or may have a central component. When a component is described as "set in the middle," it is not simply set in the exact center, as long as it is not set within the area defined by both ends being in the middle. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.

[0022] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0023] like Figures 1 to 4 As shown, this utility model provides an electronic-grade hydrogen peroxide filtration device, including an integrated cabinet 10. The integrated cabinet 10 is equipped with multiple sets of filters 20. The integrated cabinet 10 is equipped with an inlet pipe 11 and an outlet pipe 12. The inlet pipe 11 is connected to the inlet end of the multiple sets of filters 20, and the outlet pipe 12 is connected to the outlet end of the multiple sets of filters 20. The outlet end of the previous set of filters 20 and the inlet end of the next set of filters 20 are connected through a delivery pipe 13. The integrated cabinet 10 is equipped with a filtration air supply mechanism 30. The number of filters 20 can be increased or decreased according to actual needs to meet different filtration requirements. This patent takes three sets as an example, and they are connected in series through the delivery pipe 13. Different filters 20 can be set with different filtration precisions, such as filter cartridges with filtration precisions of 1um, 0.45um, and 0.1um, with the precision gradually increasing. The hydrogen peroxide filtered by the previous stage filter 20 continues to enter the next stage filter 20 through the delivery pipe 13 for filtration, gradually removing particulate matter in the hydrogen peroxide. After three filtrations, the particulate matter in the electronic grade hydrogen peroxide meets the relevant quality requirements.

[0024] See Figure 2In one specific embodiment of this application, each of the multiple sets of filters 20 has a parallel inlet port 21 at its top, and the inlet pipe 11 is connected to each of the multiple sets of parallel inlet ports 21. Each of the multiple sets of filters 20 has a parallel outlet port 22 at its bottom, and the outlet pipe 12 is connected to each of the multiple sets of parallel outlet ports 22. All the parallel inlet ports 21 and parallel outlet ports 22 are equipped with a parallel control valve 23. Furthermore, each of the multiple sets of filters 20 has a series inlet port 24 at its upper end and a series outlet port 25 at its lower end. The series outlet port 25 of the previous set of filters 20 and the series inlet port 24 of the next set of filters 20 are connected through a delivery pipe 13, and all the delivery pipes 13 are equipped with a series control valve 14. The filters 20 can be operated in series or individually by adjusting the opening or closing states of the parallel control valves 23 and the series control valves 14. For example, by opening the parallel control valves 23 of the parallel inlet 21 of the first-stage filter 20 and the parallel outlet 22 of the last-stage filter 20, and simultaneously opening the series control valves 14 of each delivery pipe 13, multiple filters 20 can be operated in series. After hydrogen peroxide is input from the parallel inlet 21 of the first-stage filter 20, it is gradually filtered by multiple filters 20 and output from the parallel outlet 22 of the last-stage filter 20. Of course, the number of filters 20 in series can also be adjusted according to requirements. For example, by opening only the parallel control valves 23 of the parallel inlet 21 and the parallel outlet 22 of one of the filters 20, that filter 20 can be operated individually.

[0025] Specifically, to facilitate the adjustment of the opening or closing of the parallel control valves 23 and the series control valves 14, a control box 40 installed on the integrated cabinet 10 is also included. The control box 40 contains a central processing unit (CPU), which is electrically connected to all the parallel control valves 23 and the series control valves 14. The control box 40 also has a control panel 41 electrically connected to the CPU. The control panel 41 can control the opening or closing of all the parallel control valves 23 and the series control valves 14 through the CPU, enabling flexible switching of the filtration mode. The CPU and control panel 41 are existing technologies and will not be described in detail in this application. Alternatively, wireless remote control can be used instead of the control panel 41 to further improve operational convenience.

[0026] See Figure 3In one specific embodiment of this application, each of the multiple sets of filters 20 includes a tank 26, with a filter element 27 disposed inside the tank 26. An outer liquid chamber 28 is formed between the tank 26 and the filter element 27, and an inner liquid chamber 29 is disposed inside the filter element 27. The parallel inlet 21 and the series inlet 24 are both connected to the outer liquid chamber 28, and the parallel outlet 22 and the series outlet 25 are both connected to the inner liquid chamber 29. The hydrogen peroxide to be filtered first enters the outer liquid chamber 28 through the parallel inlet 21 or the series inlet 24. The hydrogen peroxide in the outer liquid chamber 28 then passes through the filter element 27 and enters the inner liquid chamber 29. Particulate impurities are intercepted outside the filter element, and the filtered hydrogen peroxide is discharged through the parallel outlet 22 and the series outlet 25. Specifically, the filter element 27 can be removed, cleaned, and replaced, which is existing technology. For details, please refer to the high-precision hydrogen peroxide-specific coalescing dewatering filter element disclosed in patent number CN202221280733.1.

[0027] See Figure 1 and Figure 4 In one specific embodiment of this application, the air filtration and supply mechanism 30 includes a filter screen 31 and a fan 32. An air inlet 15 is provided on the top of the integrated cabinet 10. The filter screen 31 is detachably installed inside the top of the integrated cabinet 10, opposite to the air inlet 15. An air outlet is provided on the bottom of the integrated cabinet 10, and the fan 32 is installed inside the bottom of the integrated cabinet 10, opposite to the air outlet. Specifically, mounting grooves 16 are provided on both sides of the top of the integrated cabinet 10, and both ends of the filter screen 31 can be movably inserted into the corresponding mounting grooves 16. The filter screen 31 is a conventional air filter, and multiple filters can be installed as needed to achieve the purpose of cleaning the input air.

[0028] This utility model discloses an electronic-grade hydrogen peroxide filtration device. By installing multiple sets of filters 20 inside an integrated cabinet 10, the filtration accuracy of each filter 20 gradually increases. Multiple filters 20 can be adjusted to operate in series or individually according to filtration needs to remove particulate matter in electronic-grade hydrogen peroxide, reducing the trouble of repeated back-feeding filtration and ensuring that the particulate matter in electronic-grade hydrogen peroxide meets relevant quality requirements. In addition, a filtration air supply mechanism 30 is also set inside the integrated cabinet 10 to ensure that the air particles sent into the integrated cabinet 10 are pre-treated, preventing external particles from entering the integrated cabinet 10 and improving the filtration environment of hydrogen peroxide.

[0029] The above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Any modifications or equivalent substitutions that do not depart from the spirit and scope of this utility model should be covered within the scope of the technical solution of this utility model.

Claims

1. An electronic grade hydrogen peroxide filtering device, characterized by, The integrated cabinet is internally provided with a plurality of filter groups, and is provided with an inlet pipe and an outlet pipe, the inlet pipe is communicated with the inlet ends of the plurality of filter groups, the outlet pipe is communicated with the outlet ends of the plurality of filter groups, the outlet end of a previous filter group is communicated with the inlet end of a subsequent filter group through a conveying pipe, and the integrated cabinet is internally provided with a filter air supply mechanism.

2. The electronic grade hydrogen peroxide filtering device according to claim 1, wherein, Parallel inlet ports are arranged on the top of the plurality of filter groups, the inlet pipe is communicated with the plurality of parallel inlet ports, parallel outlet ports are arranged on the bottom of the plurality of filter groups, the outlet pipe is communicated with the plurality of parallel outlet ports, and parallel control valves are arranged on all the parallel inlet ports and parallel outlet ports.

3. The electronic grade hydrogen peroxide filtering device according to claim 2, wherein, Serial inlet ports are arranged on the upper end of the plurality of filter groups, serial outlet ports are arranged on the lower end of the plurality of filter groups, the serial outlet port of a previous filter group is communicated with the serial inlet port of a subsequent filter group through a conveying pipe, and serial control valves are arranged on all the conveying pipes.

4. The electronic grade hydrogen peroxide filtering device according to claim 3, wherein, The plurality of filter groups each comprise a tank body, the tank body is internally provided with a filter core, an outer liquid cavity is formed between the tank body and the filter core, an inner liquid cavity is formed in the filter core, the parallel inlet ports and the serial inlet ports are communicated with the outer liquid cavity, and the parallel outlet ports and the serial outlet ports are communicated with the inner liquid cavity.

5. The electronic grade hydrogen peroxide filtering device according to claim 1, wherein, The filter air supply mechanism comprises a filter screen and a fan, an air inlet is formed on the top of the integrated cabinet, the filter screen is detachably mounted on the top of the integrated cabinet at a position opposite to the air inlet, an air outlet is formed on the bottom of the integrated cabinet, and the fan is mounted on the bottom of the integrated cabinet at a position opposite to the air outlet.

6. The electronic grade hydrogen peroxide filtering device according to claim 5, wherein, Mounting grooves are arranged on both sides of the top of the integrated cabinet, and both ends of the filter screen are movably inserted into the corresponding mounting grooves.

7. The electronic grade hydrogen peroxide filtering device according to claim 3, wherein, A control box is mounted on the integrated cabinet, the control box is internally provided with a central processing unit, the central processing unit is electrically connected with all the parallel control valves and serial control valves, a control panel electrically connected with the central processing unit is arranged on the control box, and the control panel can control the opening or closing of all the parallel control valves and serial control valves through the central processing unit.

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