Dismounting device for quartz tube of battery diffusion furnace

Abstract

The utility model discloses a dismounting device for a quartz tube of a battery diffusion furnace, which comprises a pushing piece, one end of the pushing piece is provided with an arc-shaped adapter, the other end of the pushing piece is provided with an operation end, and the arc-shaped adapter is matched at the tail part of the quartz tube. According to the utility model, the push rod is inserted into the tail part of the quartz tube and the quartz tube is detached from back to front, so that on one hand, the cracking condition and the injury risk which are further aggravated due to direct action on a cracked tube opening can be avoided; and the quartz tube can be pushed out from back to front, thereby being more labor-saving and convenient.

Description

Technical Field

[0001] This utility model belongs to the field of diffusion furnace tube replacement technology, specifically a disassembly device for a quartz tube in a battery diffusion furnace. Background Technology

[0002] Currently, in the solar energy industry, the crystalline silicon cell module industrial chain consists of silicon material, silicon ingot, silicon wafer, cell, and module. The process of producing cell from silicon wafer requires texturing, diffusion, wet etching, PECVD, printing and sintering, while the diffusion and PECVD processes require the use of tube diffusion furnaces and tube PECVD equipment.

[0003] A diffusion furnace is an indispensable key process equipment for solar cells, used to prepare the heart of solar cells—the PN junction. A silicon wafer is placed in a quartz reaction tube, and a phosphorus (P) source or a boron (B) source is introduced into the reaction tube. At high temperature, the phosphorus (P) source or boron (B) source decomposes, and the decomposition compound reacts with the silicon background to generate P atoms or B atoms. The P atoms or B atoms then diffuse into the silicon at high temperature, thereby forming the PN junction.

[0004] A search revealed CN217280815U, which describes a diffusion furnace tube disassembly and assembly device and a diffusion furnace. The device uses a support rod installed inside the tube opening and a traction mechanism to disassemble and assemble the furnace tube. CN115781585A discloses a tubular furnace quartz tube disassembly and assembly device and method, which uses internal expansion to remove the quartz tube from the furnace.

[0005] The quartz tube is approximately 4.5m long and 480mm in diameter, making its replacement inconvenient. Furthermore, the furnace tube is easily damaged due to prolonged exposure to 1030℃ and continuous operation for 168 minutes at a time, with most damage occurring at the tube opening due to cracking. Additionally, toxic substances may remain on the tube surface. However, the aforementioned technology is primarily used for replacing furnace tubes with intact openings; it is unsuitable for tubes with cracked openings, as applying force to the opening is difficult, and the cracked opening poses a risk of injury. Moreover, existing technology lacks a device for disassembling furnace tubes with cracked openings. Utility Model Content

[0006] The technical problem to be solved by this utility model is: how to solve the problem of disassembling furnace tubes with broken pipe openings.

[0007] To solve the above-mentioned technical problems, the inventors of this utility model, through practice and summarization, have derived the technical solution of this utility model, which adopts the following technical solution:

[0008] A disassembly device for a quartz tube in a battery diffusion furnace includes a pusher, one end of which is provided with an arc-shaped adapter and the other end with an operating end, the arc-shaped adapter fitting into the tail of the quartz tube.

[0009] In a preferred embodiment, the tail of the arc-shaped adapter is provided with a gradual transition area, two sealing diaphragms are installed in the gradual transition area, and an opening and closing port is provided at the gradual transition area for inflating and deflating the gradual transition area.

[0010] In a preferred embodiment, a retainer is installed on the outer side of the operating end. The retainer is used to install inside the furnace. The retainer includes a central sleeve, and multiple retaining bodies are distributed circumferentially on the outer side of the central sleeve. The retaining bodies move unidirectionally from back to front relative to the furnace body. The central sleeve is fitted onto the outer side of the operating end, and a drive assembly is installed on the central sleeve.

[0011] In a preferred embodiment, the retainer includes a connecting plate installed on the outside of the central sleeve, a telescopic sleeve installed on the connecting plate, and an elastic wedge installed at the end of the telescopic sleeve.

[0012] In a preferred embodiment, the telescopic sleeve includes a fixed rod, one end of which is fixed to a connecting plate, and the other end is provided with an internal threaded hole. A screw is installed in the internal threaded hole, and the portion of the screw outside the internal threaded hole is used to install an elastic wedge.

[0013] In a preferred embodiment, the elastic wedge includes a mounting seat rotatably mounted on the end of the telescopic sleeve. A spring and a wedge are installed inside the mounting seat. A limiting plate is fitted on the outer side of the wedge, and the limiting plate is fixed on the side of the mounting seat opposite to the telescopic sleeve.

[0014] In a preferred embodiment, the drive assembly includes a servo motor, which is mounted on the outside of the central sleeve. A notch is provided in the central sleeve, and a drive wheel is mounted on the end of the servo motor. The drive wheel is located inside the notch and acts on the outer wall of the operating end.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] 1. This utility model uses a push rod inserted into the tail of the quartz tube and disassembles the quartz tube from back to front. This avoids directly impacting the cracked tube opening, which could further aggravate the cracking and increase the risk of injury. Furthermore, pushing the quartz tube from back to front is more labor-saving and convenient.

[0017] 2. This utility model adds a gradual transition area at the tail of the arc-shaped adapter. During use, the internal gas is charged and released through the opening and closing port. After installation, the internal gas is drawn out to form a negative pressure by an external negative pressure device. The two sealing diaphragms ensure that the pusher and the quartz tube are connected as a whole. With the help of the drive assembly, the operating end moves from back to front to push the quartz tube out of the furnace. After pushing out a certain distance each time, the retainer moves forward a certain distance by the reverse rotation of the drive assembly. Repeating the operation multiple times, the quartz tube can be removed.

[0018] 3. This utility model sets a central sleeve on the outside of the operating end, and the length can be adjusted by the retainer on the outside of the central sleeve. In addition, the elastic wedge at the end enables the unidirectional movement of the retainer. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of one embodiment of the present invention;

[0020] Figure 2 for Figure 1 The structural diagram of the disassembly device is shown below;

[0021] Figure 3 This is a schematic diagram of the overall structure of another embodiment of the present invention;

[0022] Figure 4 for Figure 3 A magnified view of a section at point A in the middle;

[0023] Figure 5 This is a schematic diagram of the overall structure of another embodiment of the present invention;

[0024] Figure 6 for Figure 5 The structural diagram of the disassembly device is shown below;

[0025] Figure 7 for Figure 5 Structural diagram of the retainer;

[0026] Figure 8 for Figure 5 Side view of the cage.

[0027] In the diagram: 100, Pushing component; 101, Arc-shaped adapter; 102, Operating end; 103, Gradient transition area; 104, Sealing diaphragm; 105, Opening / closing port; 106, Cage; 1061, Center sleeve; 1062, Cage; 1063, Telescopic sleeve; 1064, Elastic wedge; 1065, Fixing rod; 1066, Screw; 1067, Connecting plate; 1068, Mounting base; 1069, Limiting plate; 107, Spring; 1071, Wedge; 108, Servo motor; 109, Drive wheel. Detailed Implementation

[0028] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0029] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0030] Example 1

[0031] like Figure 1 and Figure 2 As shown, a disassembly device for a quartz tube in a battery diffusion furnace includes a pusher 100. One end of the pusher 100 is provided with an arc-shaped adapter 101, and the other end is provided with an operating end 102. The arc-shaped adapter 101 fits into the tail of the quartz tube. In use, the arc-shaped adapter 101 is inserted into the tail of the quartz tube, and the operating end 102 is used to push the quartz tube forward from the tail of the quartz tube with a crack at the tube opening. This allows the quartz tube to be easily and quickly pushed out for replacement, avoiding the risk of injury from working from the tube opening side.

[0032] Example 2

[0033] Based on the above embodiments, especially considering the tendency for the quartz tube and the pusher to separate when the quartz tube is about to be removed from the furnace opening, the following improvements are made: Figure 3 and Figure 4 As shown, the tail of the arc-shaped adapter 101 is provided with a gradual transition region 103. Two sealing diaphragms 104 are installed in the gradual transition region 103. An opening and closing port 105 is provided at the gradual transition region 103 for charging and decharging the gradual transition region 103. By connecting a negative pressure extraction device to the opening and closing port 105, negative pressure is extracted from the gradual transition region 103 to achieve a certain negative pressure state between the two sealing diaphragms 104, thereby ensuring that the pusher 100 and the tail of the quartz tube are a whole. When completely removed, the opening and closing port 105 is opened, and gas enters the gradual transition region 103. The negative pressure effect between the sealing diaphragms 104 is lost, causing the pusher 100 and the quartz tube to separate, thereby achieving the separation operation from the quartz tube.

[0034] Example 3

[0035] Based on the above embodiments, since the quartz tube is relatively long, simply using the pusher 100 would result in a long pusher length, making rapid implementation in the workshop impossible. Therefore, the following improvements are made: Figures 5 to 8 As shown, a retainer 106 is installed on the outer side of the operating end 102. The retainer 106 is used for installation inside the furnace. The retainer 106 includes a central sleeve 1061, and multiple retaining bodies 1062 are distributed circumferentially on the outer side of the central sleeve 1061. The retaining bodies 1062 move unidirectionally from back to front relative to the furnace body. The central sleeve 1061 is fitted onto the outer side of the operating end 102, and a drive assembly is installed on the central sleeve 1061. The drive assembly acts on the operating end 102, causing the operating end 102 to push the quartz tube forward. After each push forward a certain distance, the drive assembly rotates in the opposite direction, moving the retainer 106 forward a certain distance, and then rotates forward again to push the operating end 102 forward to push the quartz tube, thereby achieving continuous pushing operation and solving this type of problem.

[0036] The retainer 1062 includes a connecting plate 1067 installed on the outside of the central sleeve 1061. A telescopic sleeve 1063 is installed on the connecting plate 1067, and an elastic wedge 1064 is installed at the end of the telescopic sleeve 1063. The elastic wedge 1064 acts on the corresponding component inside the furnace (inner wall of the furnace or heating wire support). When the drive assembly pushes the quartz tube forward, the elastic wedge 1064 prevents it from retracting, thus providing rearward resistance to the operating end 102 and enabling the operating end 102 to move forward. When the retainer 106 moves forward, the elastic wedge 1064 will move forward a certain distance and cooperate with the corresponding component at that position to limit the position of the retainer 106, ensuring the next pushing operation.

[0037] The telescopic sleeve 1063 includes a fixing rod 1065, one end of which is fixed to a connecting plate 1067, and the other end has an internal threaded hole. A screw 1066 is installed in the internal threaded hole, and the portion of the screw 1066 outside the internal threaded hole is used to install an elastic wedge 1064. The length of the telescopic sleeve 1063 is adjusted by rotating the screw 1066, and the length adjustment is used to handle the disassembly of quartz tubes of different diameters.

[0038] The elastic wedge 1064 includes a mounting base 1068 rotatably mounted on the end of the telescopic sleeve 1063. A spring 107 and a wedge 1071 are installed inside the mounting base 1068. A limiting plate 1069 is fitted onto the outer side of the wedge 1071, and the limiting plate 1069 is fixed to the side of the mounting base 1068 opposite to the telescopic sleeve 1063. The wedge 1071, in conjunction with the spring 107, limits the position of the retainer 106 after forward movement.

[0039] The drive assembly includes a servo motor 108, which is mounted on the outside of a central sleeve 1061. A notch is provided in the central sleeve 1061. A drive wheel 109 is mounted on the end of the servo motor 108, located within the notch and acting on the outer wall of the operating end 102. The servo motor 108 drives the drive wheel 109 to achieve forward movement of the operating end 102 or the retainer 106. The drive wheel 109 and the operating end 102 can be connected by friction or by a gear and rack transmission.

[0040] The above description is merely a preferred embodiment of this utility model, but the protection scope of this utility model is not limited thereto. The substitutions may be replacements of some structures, devices, or method steps, or they may be complete technical solutions. Equivalent substitutions or modifications made based on the technical solution and inventive concept of this utility model should all be covered within the protection scope of this utility model.

Claims

1. A disassembly device for a quartz tube in a battery diffusion furnace, characterized in that, The application relates to a pushing piece (100) which is provided with an arc-shaped adapter (101) at one end and an operation end (102) at the other end, and the arc-shaped adapter (101) is matched with the tail of a quartz tube; The tail of the arc-shaped adapter (101) is provided with a gradient transition area (103), two sealing diaphragms (104) are arranged in the gradient transition area (103), and an opening and closing opening (105) is arranged at the gradient transition area (103) and used for inflating and deflating the gradient transition area (103).

2. The apparatus according to claim 1, wherein A retainer (106) is arranged on the outer side of the operation end (102) and used for being mounted in a furnace, the retainer (106) comprises a center sleeve (1061), a plurality of retainer bodies (1062) are circumferentially distributed on the outer side of the center sleeve (1061), the retainer bodies (1062) are unidirectionally moved from back to front relative to a furnace body, the center sleeve (1061) is sleeved on the outer side of the operation end (102), and a driving assembly is arranged on the center sleeve (1061).

3. The apparatus according to claim 2, wherein The retainer body (1062) comprises a connecting plate (1067) arranged on the outer side of the center sleeve (1061), a telescopic sleeve (1063) is arranged on the connecting plate (1067), and an elastic wedge (1064) is arranged at the end of the telescopic sleeve (1063).

4. The apparatus according to claim 3, wherein The telescopic sleeve (1063) comprises a fixed rod (1065), one end of the fixed rod (1065) is fixed on the connecting plate (1067), the other end of the fixed rod (1065) is provided with an internal thread hole, a screw rod (1066) is arranged in the internal thread hole, and the part of the screw rod (1066) outside the internal thread hole is used for arranging the elastic wedge (1064).

5. The apparatus according to claim 3, wherein The elastic wedge (1064) comprises a mounting seat (1068) rotatably arranged at the end of the telescopic sleeve (1063), a spring (107) and a wedge body (1071) are arranged in the mounting seat (1068), a limiting plate (1069) is sleeved on the outer side of the wedge body (1071), and the limiting plate (1069) is fixed on the side of the mounting seat (1068) which is opposite to the telescopic sleeve (1063).

6. The apparatus according to claim 2, wherein The driving assembly comprises a servo motor (108), the servo motor (108) is arranged on the outer side of the center sleeve (1061), a gap is arranged in the center sleeve (1061), a driving wheel (109) is arranged at the end of the servo motor (108), and the driving wheel (109) is located in the gap and acts on the outer wall of the operation end (102).

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