Multi-task composite manipulator and robot

Abstract

The utility model relates to the technical field of semiconductor production, and particularly discloses a multi-task composite manipulator and a robot. The multi-task composite manipulator comprises a supporting main body, a driving piece and two clamping pieces, a connecting seat is arranged on the supporting main body; the two clamping pieces are movably arranged on the supporting body in the first direction. The driving piece is arranged on the supporting body and used for driving the two clamping pieces to get close to each other or get away from each other. A first clamping groove and a second clamping groove are sequentially formed in the inner side of the clamping piece in the second direction, and the second direction is the length direction of the clamping piece. According to the mechanical arm provided by the scheme, a flower basket and a door handle can be clamped through the first clamping groove and the second clamping groove correspondingly, so that a robot connected with the mechanical arm can sequentially conduct operation of opening a door, transferring the flower basket and closing the door under the condition that the model is not changed, and the operation efficiency is improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and in particular to a multi-tasking composite manipulator and robot. Background Technology

[0002] EBL equipment, or Electron Beam Lithography, is a core piece of equipment in semiconductor manufacturing that enables the transfer of nanoscale photolithographic patterns and is used for high-precision processing of chip circuits.

[0003] Wafer baskets are used to hold wafers in batches. The EBL (Extractable Batch Processing) production process involves multiple stations such as coating, exposure, and development. Using wafer baskets enables batch processing of wafers, improving throughput efficiency.

[0004] In the automation of EBL (Extractable Batch Loading) equipment, the current method involves using a robotic arm equipped with a specific robotic hand to pick up, place, and transfer flower baskets. Correspondingly, different robotic hands need to be switched when the robotic arm docks with the flower basket for different tasks. For example, when the robotic arm opens the door of the equipment's storage compartment and places the flower basket through the door, it first needs to use the door-opening robotic hand to open the door, and then switch to the flower basket-gripping robotic hand to transfer the basket. This results in long changeover times and low operational efficiency. Utility Model Content

[0005] In view of this, the purpose of this application is to provide a multi-task composite manipulator and robot to solve the problem of the single function of manipulators in existing EBL equipment automation scenarios.

[0006] To achieve the above-mentioned technical objectives, the first aspect of this application provides a multi-tasking composite manipulator, comprising: a support body, a drive component, and two gripping components;

[0007] The supporting body is provided with a connecting seat;

[0008] The two clamping members are movably disposed on the support body along a first direction;

[0009] The driving component is disposed on the support body and is used to drive the two clamping components to move closer to each other or further away from each other;

[0010] The inner side of the clamping member is provided with a first clamping groove and a second clamping groove in sequence along the second direction, the second direction being the length direction of the clamping member;

[0011] The first clamping groove and the second clamping groove are used to clamp the flower basket and the door handle, respectively.

[0012] Furthermore, the first clamping groove is located inside the second clamping groove along the second direction;

[0013] The first clamping groove is used to clamp the flower basket;

[0014] The second clamping groove is used to clamp the door handle.

[0015] Furthermore, the depth of the second clamping groove along the first direction is greater than the depth of the first clamping groove along the first direction.

[0016] Furthermore, the first clamping groove is a V-shaped groove structure, so that when the second direction is vertical, the bottom wall of the first clamping groove slopes downward.

[0017] Furthermore, a force sensor is provided on the supporting body;

[0018] The connector is mounted on the force sensor.

[0019] Furthermore, a displacement sensor is provided on the support body;

[0020] The displacement sensor is used to sense the coordinate position and movement distance of the two clamping members to determine whether the two clamping members are clamping the flower basket or the door handle.

[0021] Furthermore, it also includes positioning components;

[0022] The positioning element is disposed in at least one of the two clamping elements;

[0023] The positioning element is used to abut against the flower basket when the two clamping elements hold the flower basket, so as to prevent the flower basket from tilting or rotating.

[0024] Furthermore, the positioning element is a plate-like structure;

[0025] The positioning element has positioning posts at both ends along the third direction;

[0026] The bottom end of the positioning post is provided with an elastic support section for abutting the flower basket.

[0027] Furthermore, the positioning member is slidably disposed on the clamping member along the second direction.

[0028] A second aspect of this application provides a robot comprising the multi-tasking composite manipulator described in any of the preceding claims.

[0029] As can be seen from the above technical solutions, this application provides a multi-task composite manipulator and robot; wherein, the multi-task composite manipulator includes: a support body, two clamping members and a driving member; a connecting seat is provided on the support body; the two clamping members are movably disposed on the support body along a first direction; the driving member is disposed on the support body and is used to drive the two clamping members to move closer to each other or further away from each other; a first clamping groove and a second clamping groove are sequentially provided on the inner side of the clamping member along a second direction, the second direction being the length direction of the clamping member.

[0030] The robotic arm provided by this solution can grip the flower basket and the door handle through the first and second gripping slots respectively, enabling the robot connected to this robotic arm to sequentially open the storage room door, transfer the flower basket, and close the storage room door without changing its design, thereby improving work efficiency. Attached Figure Description

[0031] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0032] Figure 1 A perspective view of a multi-tasking composite manipulator provided for an embodiment of this application;

[0033] Figure 2 A schematic diagram illustrating a multi-task composite robot arm that extracts a flower basket after being connected to a robotic arm, as provided in an embodiment of this application;

[0034] In the diagram: 10. Support body; 11. Connecting seat; 12. Force sensor; 13. Displacement sensor; 20. Clamping component; 21. First clamping groove; 22. Second clamping groove; 30. Driving component; 40. Positioning component; 41. Positioning post; 42. Elastic support section;

[0035] x-axis direction: first direction; y-axis direction: second direction; z-axis direction: third direction. Detailed Implementation

[0036] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. Based on the embodiments in this application specification, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection claimed in this application.

[0037] In the description of the embodiments of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0038] In the description of the embodiments of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a replaceable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this application according to the specific circumstances.

[0039] Please see Figure 1 The first aspect provided in this application embodiment is a multi-tasking composite manipulator, including: a support body 10, a drive member 30 and two clamping members 20.

[0040] A connecting seat 11 is provided on the support body 10. The connecting seat 11 can be an existing quick-connect coupling, allowing the support body 10 to be quickly assembled and disassembled with the robotic arm via the connecting seat 11. In this embodiment, two clamping members 20 are movably disposed on the support body 10 along a first direction x, such as... Figure 1 The x-axis direction is shown in the diagram.

[0041] A drive unit 30 is disposed on the support body 10 and is used to drive the two clamping members 20 to move closer to or further away from each other. The method by which the drive unit 30 drives the two clamping members 20 to open and close is existing technology. For example, the drive unit 30 can be a motor, the output end of which is connected to a bidirectional lead screw. The two clamping members 20 are disposed on different threaded sections of the bidirectional lead screw, so that when the bidirectional lead screw rotates, the two clamping members 20 can move closer to or further away from each other.

[0042] In this embodiment, the inner side of the clamping member 20 is provided with a first clamping groove 21 and a second clamping groove 22 along the second direction y, where the second direction y is the length direction of the clamping member 20; the first clamping groove 21 and the second clamping groove 22 are respectively used to clamp the flower basket and the door handle.

[0043] In this embodiment, the two clamping members 20 can clamp the flower basket through the two first clamping slots 21, and clamp the door handle through the two second clamping slots 22. The flower basket held by the robotic arm can be... Figure 2 As shown, the top of the flower basket is equipped with a handle. After the robotic arm is aligned, the two grippers 20 come close together to clamp the handle, and then the robotic arm moves to move the flower basket for transport. In this embodiment, the door refers to the door of the storage chamber in the EBL (Extract, Batch, and Metal) processing equipment, where the flower basket can be placed; subsequently, the equipment can perform wafer processing operations on the flower basket. The door is equipped with a door handle, which is opened and closed by the movement of the robotic arm after the robotic arm grips the handle. In practical applications, the door can be opened by rotation, sliding, etc.

[0044] In practical applications, the robotic arm requires high precision in gripping flower baskets. The basket handle must be precisely aligned with the first clamping slot 21 to minimize collisions during transport, such as when placing the basket into the work chamber. Conversely, the robotic arm requires lower precision in opening and closing doors. After gripping the door handle, a certain offset between the robotic arm and the handle is permissible during movement to accommodate doors with different opening and closing mechanisms. If both basket gripping and door handle gripping are integrated into a single common clamping slot, the slot's shape must be configured to fit the basket handle to ensure effective basket gripping. During door opening and closing, the handle and the common clamping slot will deviate from their trajectory, causing wear. Furthermore, the robotic arm must maintain high precision when opening and closing doors, resulting in a heavy workload. Therefore, existing technologies often use different robotic arms for basket gripping and door handle gripping respectively.

[0045] In this embodiment, the first clamping groove 21 can be configured to fit the handle of a flower basket; the second clamping groove 22 can be configured to allow the clamped part to have room for movement, that is, the groove depth of the second clamping groove 22 along the first direction x is greater than the groove depth of the first clamping groove 21 along the first direction x. The shape of the second clamping groove 22 can be, for example, a U-shaped groove, and after being clamped by the two clamping parts 20, the two second clamping grooves 22 combine to form a strip-shaped groove structure, thereby allowing the door handle to have a certain amount of room for movement within the second clamping groove 22, thereby allowing a certain trajectory deviation between the door handle and the robotic arm when the robotic arm opens and closes the door, specifically enabling the robotic arm and robotic arm to control the opening and closing of the door.

[0046] After the robotic arm is connected to the multi-task composite robotic arm provided in this embodiment, it can accurately grip the flower basket through the two first gripping slots 21, and at the same time, it can grip the door handle through the two second gripping slots 22. The opening and closing of the door has low precision requirements, which can reduce the action burden of opening and closing the door, reduce the change time during the placement of the flower basket, and improve the overall work efficiency.

[0047] In one embodiment, the first clamping groove 21 is a V-shaped groove structure, so that when the second direction y is vertical, the bottom wall of the first clamping groove 21 is inclined downward.

[0048] Specifically, after the robotic arm grips the handle of the flower basket, the process of placing the basket into the working chamber involves moving the basket above the working chamber and then lowering it vertically until it is placed on the receiving component inside the working chamber. In this embodiment, the first clamping groove 21 has a V-shaped groove structure. Therefore, after the two clamping components 20 grip the flower basket and place it into the working chamber, as the two clamping components 20 move away from each other, the flower basket can slide downwards along the bottom wall of the first clamping groove 21. Thus, as the two clamping components 20 open, the flower basket can be gently placed on the receiving component. During the operation, since the working chamber and the receiving component are in fixed positions, the robotic arm can move the flower basket to a preset position above the receiving component, and then slowly release the grip, allowing the flower basket to slowly slide down onto the receiving component. The preset position can be 5-10mm away from the receiving component. Due to the error in the robotic arm's transfer action, the above operation can reduce the risk of excessive impact force caused by the flower basket being placed directly on the receiving component.

[0049] In one embodiment, the first clamping groove 21 is located inside the second clamping groove 22 along the second direction y, that is, the first clamping groove 21 is located on the side of the second clamping groove 22 closer to the support body 10.

[0050] In this embodiment, the second clamping groove 22 for clamping the door handle is located on the outside, which facilitates quick clamping of the door handle.

[0051] In one embodiment, a force sensor 12 is provided on the support body 10; a connecting seat 11 is provided on the force sensor 12.

[0052] After the two grippers 20 grip the robot, the robot's control center can obtain the force on the manipulator during the opening and closing of the door and the transfer process through force sensors.

[0053] In one embodiment, a displacement sensor 13 is provided on the support body 10; the displacement sensor 13 is used to sense the coordinate position and movement distance of the two clamping members 20 to determine whether the two clamping members 20 are clamping the flower basket or the door handle.

[0054] In practical applications, the basket handle and the door handle have different dimensions, therefore the clamping components 20 have different clamping strokes. The control center can obtain the clamping status of the two clamping components 20 through the displacement sensor 13 to help determine whether the clamping is in place.

[0055] In one embodiment, a positioning element 40 is also included; the positioning element 40 is disposed on at least one of the two clamping elements 20; the positioning element 40 is used to abut against the flower basket when the two clamping elements 20 clamp the flower basket to prevent the flower basket from tilting or rotating.

[0056] Specifically, when the flower basket handle is clamped, there is a risk of it wobbling and tilting during transport. In this embodiment, the positioning element 40 can abut against the flower basket, improving the stability of the flower basket during transport and reducing the risk of the flower basket tilting or rotating.

[0057] In one embodiment, the positioning member 40 is a plate-like structure; positioning posts 41 are provided at both ends of the positioning member 40 along the third direction z; the bottom end of the positioning post 41 is provided with an elastic support section 42 for abutting the flower basket. The elastic support section 42, which has elasticity, can provide cushioning while supporting the flower basket.

[0058] In one implementation, the positioning member 40 is slidably disposed on the clamping member 20 along the second direction y. Correspondingly, the clamping member 20 may be provided with a guide structure (not shown in the figure) for the positioning member 40 to slide, and a linear drive member (not shown in the figure) is configured to drive the positioning member 40 to move up and down, thereby enabling the position of the positioning member 40 to be adjusted according to the working scenario and improving the flexibility in the actual operation process.

[0059] A second aspect of this application provides a robot comprising the multi-tasking composite manipulator described above.

[0060] Specifically, the robot provided in this embodiment may include the aforementioned robotic arm, multi-task composite manipulator, and control center. After the robotic arm is connected to the multi-task composite manipulator, it can continuously perform the operations of opening the door, delivering / retrieving the flower basket, and closing the door.

[0061] The above are merely preferred embodiments of this application and are not intended to limit the present invention. Although the present application has been described in detail with reference to examples, those skilled in the art can still modify the technical solutions described in the foregoing examples or make equivalent substitutions for some of the technical features. However, any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A multi-tasking compound robot characterized by, The utility model relates to a multi-task composite manipulator, including: Supporting body (10), drive piece (30) and two clamping pieces (20); The supporting body (10) is provided with connecting seat (11); Two clamping pieces (20) are movably arranged on the supporting body (10) along the first direction (x); The drive piece (30) is arranged on the supporting body (10) and is used to drive two clamping pieces (20) to approach each other or move away from each other; The inner side of the clamping piece (20) is sequentially provided with first clamping groove (21) and second clamping groove (22) along the second direction (y), and the second direction (y) is the length direction of the clamping piece (20); The first clamping groove (21) and the second clamping groove (22) are used for clamping flower basket and door handle respectively.

2. The multi-task composite robot of claim 1, wherein, The first clamping groove (21) is located in the inner side of the second clamping groove (22) along the second direction (y); The first clamping groove (21) is used for clamping the flower basket; The second clamping groove (22) is used for clamping the door handle.

3. The multi-task composite robot of claim 2, wherein, The groove depth of the second clamping groove (22) along the first direction (x) is greater than the groove depth of the first clamping groove (21) along the first direction (x).

4. The multi-task composite robot of claim 2, wherein, The first clamping groove (21) is V-shaped groove structure, so that when the second direction (y) is vertical direction, the bottom groove wall of the first clamping groove (21) is inclined downward.

5. The multi-task composite robot of claim 1, wherein, The supporting body (10) is provided with force sensor (12); The connecting seat (11) is arranged on the force sensor (12).

6. The multi-task composite robot of claim 1, wherein, The supporting body (10) is provided with displacement sensor (13); The displacement sensor (13) is used for sensing the coordinate position and moving distance of two clamping pieces (20) to judge whether two clamping pieces (20) clamp the flower basket or the door handle.

7. The multi-task composite robot manipulator according to any one of claims 1 to 6, wherein Further including positioning piece (40); The positioning piece (40) is arranged in at least one of two clamping pieces (20); The positioning piece (40) is used for abutting against the flower basket when two clamping pieces (20) clamp the flower basket to avoid that the flower basket is inclined or rotated.

8. The multi-task composite robot of claim 7, wherein, The positioning piece (40) is plate structure; The positioning piece (40) is provided with positioning column (41) at both ends along the third direction (z); The bottom end of the positioning column (41) is provided with elastic support section (42) for abutting against the flower basket.

9. The multi-task composite robot of claim 8, wherein, The positioning piece (40) is slidably arranged in the clamping piece (20) along the second direction (y).

10. A robot, characterized in that The utility model relates to a multi-task composite manipulator, including: Supporting body (10), drive piece (30) and two clamping pieces (20); The supporting body (10) is provided with connecting seat (11); Two clamping pieces (20) are movably arranged on the supporting body (10) along the first direction (x); The drive piece (30) is arranged on the supporting body (10) and is used to drive two clamping pieces (20) to approach each other or move away from each other; The inner side of the clamping piece (20) is sequentially provided with first clamping groove (21) and second clamping groove (22) along the second direction (y), and the second direction (y) is the length direction of the clamping piece (20); The first clamping groove (21) and the second clamping groove (22) are used for clamping flower basket and door handle respectively. The first clamping groove (21) is located in the inner side of the second clamping groove (22) along the second direction (y); The first clamping groove (21) is used for clamping the flower basket; The second clamping groove (22) is used for clamping the door handle. The groove depth of the second clamping groove (22) along the first direction (x) is greater than the groove depth of the first clamping groove (21) along the first direction (x). The first clamping groove (21) is V-shaped groove structure, so that when the second direction (y) is vertical direction, the bottom groove wall of the first clamping groove (21) is inclined downward. The supporting body (10) is provided with force sensor (12); The connecting seat (11) is arranged on the force sensor (12). The supporting body (10) is provided with displacement sensor (13); The displacement sensor (13) is used for sensing the coordinate position and moving distance of two clamping pieces (20) to judge whether two clamping pieces (20) clamp the flower basket or the door handle. Further including positioning piece (40); The positioning piece (40) is arranged in at least one of two clamping pieces (20); The positioning piece (40) is used for abutting against the flower basket when two clamping pieces (20) clamp the flower basket to avoid that the flower basket is inclined or rotated. The positioning piece (40) is plate structure; The positioning piece (40) is provided with positioning column (41) at both ends along the third direction (z); The bottom end of the positioning column (41) is provided with elastic support section (42) for abutting against the flower basket. The positioning piece (40) is slidably arranged in the clamping piece (20) along the second direction (y). The utility model relates to a multi-task composite manipulator, including: Supporting body (10), drive piece (30) and two clamping pieces (20); The supporting body (10) is provided with connecting seat (11); Two clamping pieces (20) are movably arranged on the supporting body (10) along the first direction (x); The drive piece (30) is arranged on the supporting body (10) and is used to drive two clamping pieces (20) to approach each other or move away from each other; The inner side of the clamping piece (20) is sequentially provided with first clamping groove (21) and second clamping groove (22) along the second direction (y), and the second direction (y) is the length direction of the clamping piece (20); The first clamping groove (21) and the second clamping groove (22) are used for clamping flower basket and door handle respectively.

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