Electronic goods shelf for storing wafer conveying boxes

Abstract

The utility model discloses an electronic goods shelf for storing a wafer conveying box, which comprises a goods shelf for supporting, positioning guide grooves are formed in the inner end face of the goods shelf at equal intervals, and fixed sliding grooves are formed in the two sides of the inner end face of each positioning guide groove. By arranging the material guiding device, when the positioning box bodies at different positions are guided out, the servo motor can position the X-axis of the positioning push plate through the transmission lead screw, and meanwhile, the stepping motor and the threaded sliding seat can position the Y-axis of the positioning push plate, so that the mini air cylinder can be quickly and accurately positioned to the rear parts of all the positioning box bodies; and therefore, the mini air cylinder can conveniently drive the positioning push plate to guide out the positioning box body, subsequent workers can conveniently and rapidly take and place the wafer conveying box, and the practical performance of the equipment is improved.

Description

Technical Field

[0001] This utility model relates to the field of electronic shelf equipment technology, specifically an electronic shelf for storing wafer transfer boxes. Background Technology

[0002] With the rapid development of the semiconductor industry, the requirements for the storage and management of wafer transfer boxes are becoming increasingly stringent. Electronic racks for storing wafer transfer boxes are indispensable equipment in the semiconductor industry. They are specifically designed for storing and managing wafer transfer boxes and are widely used in semiconductor manufacturing, packaging and testing, and other fields.

[0003] For example, the utility model patent disclosed in publication number CN221738910U discloses an electronic storage rack, comprising: a storage rack with at least one row of storage compartments for storing wafer transfer boxes, the storage rack having an inlet / outlet; a handling device disposed within the storage rack, the handling device being used to move wafer transfer boxes located at the inlet / outlet to the storage compartments or move wafer transfer boxes in the storage compartments to the inlet / outlet; and a monitoring device disposed within the storage rack, the monitoring device being used to monitor the position of the wafer transfer boxes within the storage rack. By incorporating the handling device, the wafer transfer boxes can be transferred to any storage compartment without manual handling, achieving automated storage and retrieval of the wafer transfer boxes and avoiding potential unexpected situations during handling. Furthermore, by setting up the monitoring device to monitor the position of the wafer transfer box in the storage rack in real time, it is possible to reasonably arrange the storage of the wafer transfer box according to the storage status of the storage compartment and to control the automated handling of the wafer transfer box.

[0004] Although the aforementioned devices can store wafer transfer boxes, they are not convenient for quickly and accurately exporting wafers from different locations, thus reducing the efficiency of wafer storage and retrieval. Therefore, there is an urgent need for an electronic rack for storing wafer transfer boxes to solve the above-mentioned problems. Utility Model Content

[0005] The purpose of this invention is to provide an electronic shelf for storing wafer transfer boxes to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution: an electronic shelf for storing wafer transfer boxes, comprising a support shelf, wherein positioning guide grooves are equidistantly provided on the inner end face of the shelf, and fixing slide grooves are provided on both sides of the inner end face of the positioning guide grooves.

[0007] A conveying device, which is elastically slidably engaged with the inner end face of the shelf via the positioning guide groove;

[0008] A positioning bracket is fixedly installed on the rear end face of the shelf, and a servo motor is installed on the side end face of the positioning bracket, and a transmission screw is installed at the output end of the servo motor.

[0009] A material guiding device is threadedly slidably connected to the outer end face of the positioning bracket via the transmission screw.

[0010] Preferably, the material guiding device includes a threaded slide, a stepper motor is provided at the center of the rear end face of the threaded slide, and a positioning screw is provided at the output end of the stepper motor. A threaded guide seat is threadedly connected to the inner end face of the threaded slide through the positioning screw. A mini cylinder is provided on the upper end face of the threaded guide seat, and a positioning push plate is provided at the output end of the mini cylinder.

[0011] Preferably, the conveying device includes a positioning box, the upper end face of which has two sets of storage slots, and fixed sliders are symmetrically arranged on the side end face of the positioning box near the rear, and a return spring is arranged at the center of the inner end face of the fixed slider.

[0012] Preferably, the positioning box is adapted to the fixed slide groove by the fixed slider and thus slidably engaged with the inner end face of the positioning guide groove, and the outer end face of the reset spring is fixedly connected to the inner wall of the positioning guide groove. The reset spring can quickly and stably return after the positioning box is exported by means of its elastic force, thereby improving the automation level of the equipment export and return.

[0013] Preferably, the threaded guide seat is adapted to the transmission screw via the threaded slide and thus threadedly slidably connected to the upper end face of the positioning card seat. When exporting positioning boxes from different locations, the servo motor can adjust the X-axis coordinate of the mini cylinder via the threaded connection between the transmission screw and the threaded slide. At the same time, the stepper motor can adjust the Y-axis coordinate of the mini cylinder via the threaded connection between the positioning screw and the threaded guide seat, thus facilitating the subsequent export of positioning boxes from different locations.

[0014] Preferably, the length and width of the positioning push plate are smaller than the length and width of the positioning guide groove. The fact that the length and width of the positioning push plate are both smaller than the length and width of the positioning guide groove can effectively improve the stability of the subsequent positioning push plate in guiding the positioning box.

[0015] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0016] 1. This utility model, by setting up a material guiding device, allows the servo motor to position the X-axis of the positioning push plate via a transmission screw when exporting positioning boxes from different locations. Simultaneously, the stepper motor and threaded slide block position the Y-axis of the positioning push plate. This enables the mini cylinder to quickly and accurately position itself to the rear of each positioning box, facilitating the mini cylinder to drive the positioning push plate to export the positioning box. This makes it easier for subsequent staff to quickly pick up and place wafer transfer boxes, improving the practicality of the equipment. Attached Figure Description

[0017] Figure 1 This is an exploded view of the main body of this utility model;

[0018] Figure 2 This is a schematic diagram of the main structure of the present utility model;

[0019] Figure 3 This is a schematic diagram of the material guiding device of this utility model;

[0020] Figure 4 This is a schematic diagram of the conveying device of this utility model.

[0021] In the diagram: 1-positioning guide groove, 2-fixed slide, 3-positioning bracket, 4-shelf, 5-material guiding device, 6-conveying device, 7-servo motor, 8-transmission screw, 51-threaded slide, 52-positioning screw, 53-threaded guide, 54-mini cylinder, 55-stepper motor, 56-positioning push plate, 61-storage slot, 62-fixed slider, 63-reset spring, 64-positioning box. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] Please see Figure 1-4 The present invention provides an embodiment of an electronic shelf for storing wafer transfer boxes, comprising a shelf 4 for support, wherein positioning guide grooves 1 are equidistantly provided on the inner end face of the shelf 4, and fixing grooves 2 are provided on both sides of the inner end face of the positioning guide grooves 1.

[0024] The conveying device 6 is elastically and slidingly engaged with the inner end face of the shelf 4 via the positioning guide groove 1.

[0025] Positioning bracket 3 is fixedly installed on the rear end face of the shelf 4, and a servo motor 7 is installed on the side end face of the positioning bracket 3, and a transmission screw 8 is installed at the output end of the servo motor 7.

[0026] The material guiding device 5 is threadedly slidably connected to the outer end face of the positioning bracket 3 via the transmission screw 8.

[0027] The material guiding device 5 includes a threaded slide 51. A stepper motor 55 is provided at the center of the rear end face of the threaded slide 51, and a positioning screw 52 is provided at the output end of the stepper motor 55. A threaded guide seat 53 is threadedly connected to the inner end face of the threaded slide 51 through the positioning screw 52. A mini cylinder 54 is provided on the upper end face of the threaded guide seat 53, and a positioning push plate 56 is provided at the output end of the mini cylinder 54.

[0028] The conveying device 6 includes a positioning box 64, with two sets of storage slots 61 on the upper end face of the positioning box 64, and fixed sliders 62 are symmetrically arranged on the side end face of the positioning box 64 near the rear. A return spring 63 is arranged at the center of the inner end face of the fixed slider 62.

[0029] The positioning box 64 is adapted to the fixed slide groove 2 by the fixed slider 62 and is slidably locked onto the inner end face of the positioning guide groove 1. The outer end face of the return spring 63 is fixedly connected to the inner wall of the positioning guide groove 1. The return spring 63 can quickly and stably return after the positioning box 64 is extended by elastic force, which improves the automation level of the equipment's extension and return.

[0030] The threaded guide seat 53 is adapted to the transmission screw 8 through the threaded slide seat 51 and is threadedly slidably connected to the upper end face of the positioning card seat 3. When the positioning box 64 in different locations is exported, the servo motor 7 can be threadedly connected to the threaded slide seat 51 through the transmission screw 8, thereby controlling the X-axis coordinate of the mini cylinder 54. At the same time, the stepper motor 55 can be threadedly connected to the threaded guide seat 53 through the positioning screw 52, ​​thereby controlling the Y-axis coordinate of the mini cylinder 54, thus facilitating the subsequent export of the positioning box 64 in different locations.

[0031] The length and width of the positioning push plate 56 are smaller than the length and width of the positioning guide groove 1. The fact that the length and width of the positioning push plate 56 are both smaller than the length and width of the positioning guide groove 1 can effectively improve the stability of the subsequent positioning push plate 56 in guiding the positioning box 64.

[0032] Working principle: Before use, the operator can position the required number of wafer transfer boxes into the storage slot 61 for storage, facilitating quick retrieval later. If it is necessary to remove the wafer transfer box, the operator can start the servo motor 7 and the stepper motor 55. The servo motor 7 drives the transmission screw 8 to rotate, and the transmission screw 8 can quickly and accurately position the lateral position of the mini cylinder 54 through the threaded connection with the threaded slide 51. Then, the stepper motor 55 can drive the threaded guide seat 53 through the positioning screw 52 to adjust the longitudinal position of the mini cylinder 54, so that the mini cylinder 54 and the positioning push plate 56 are aligned with the positioning guide slot 1. Then, the mini cylinder 54 can drive the positioning push plate 56 to push out the positioning box 64. After the positioning box 64 is pushed out, the operator can take out the wafer transfer box from the storage slot 61. Then, the mini cylinder 54 drives the positioning push plate 56 to reset. At this time, the positioning box 64 will automatically reset under the elastic action of the reset spring 63.

[0033] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An electronic shelf for storing wafer transfer boxes, comprising a support shelf, wherein positioning guide grooves are equidistantly provided on the inner end face of the shelf, and fixing grooves are provided on both sides of the inner end face of the positioning guide grooves, characterized in that: A conveying device, which is elastically slidably engaged with the inner end face of the shelf via the positioning guide groove; A positioning bracket is fixedly installed on the rear end face of the shelf, and a servo motor is installed on the side end face of the positioning bracket, and a transmission screw is installed at the output end of the servo motor. A material guiding device is threadedly slidably connected to the outer end face of the positioning bracket via the transmission screw.

2. The electronic shelf for storing wafer transfer boxes according to claim 1, characterized in that: The material guiding device includes a threaded slide, a stepper motor is provided at the center of the rear end face of the threaded slide, and a positioning screw is provided at the output end of the stepper motor. The inner end face of the threaded slide is threadedly connected to a threaded guide seat through the positioning screw. A mini cylinder is provided on the upper end face of the threaded guide seat, and a positioning push plate is provided at the output end of the mini cylinder.

3. The electronic shelf for storing wafer transfer boxes according to claim 2, characterized in that: The conveying device includes a positioning box, with two sets of storage slots on the upper surface of the positioning box, and fixed sliders symmetrically arranged on the side end face of the positioning box near the rear, with a return spring located at the center of the inner end face of the fixed slider.

4. The electronic shelf for storing wafer transfer boxes according to claim 3, characterized in that: The positioning box body is adapted to the fixed slide groove by the fixed slider and thus slidably locked onto the inner end face of the positioning guide groove, and the outer end face of the reset spring is fixedly connected to the inner wall of the positioning guide groove.

5. An electronic shelf for storing wafer transfer boxes according to claim 3, characterized in that: The threaded guide seat is adapted to the transmission screw through the threaded slide and is thus threadedly slidably connected to the upper end face of the positioning bracket.

6. An electronic shelf for storing wafer transfer boxes according to claim 3, characterized in that: The length and width of the positioning push plate are smaller than the length and width of the positioning guide groove.

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