Valve and vacuum system

Abstract

The utility model provides a valve and a vacuum system. The valve comprises a valve body, a valve plate, a valve plate assembly, a linear driving part and a transmission assembly. The valve body is provided with a valve port in the length direction and the width direction and comprises a first valve body part and a second valve body part. The first valve body part and the second valve body part are arranged in the width direction; the two ends of the second valve body part in the length direction respectively exceed the two ends of the first valve body part in the length direction, and the valve port is located in the first valve body part; the valve plate is movably arranged on the valve body; the linear driving piece is arranged on the edge, facing the first valve body part, of the second valve body part; the driving output end of the linear driving piece is connected with the valve plate through the transmission assembly and is configured to drive the valve plate to move through the transmission assembly so as to open or close the valve port. According to the valve, the valve body structure similar to a step shape is adopted, and the linear driving pieces are arranged at the steps at the two ends of the valve body, so that the additional space occupation of the linear driving pieces is reduced, and correspondingly, the space occupation of the whole valve is reduced.

Description

Technical Field

[0001] This application relates to the field of vacuum technology, and more specifically, to a valve and a vacuum system. Background Technology

[0002] The main function of a valve is to isolate and conduct airflow through an airflow channel, thereby controlling the flow and ensuring the airtightness and stability of the system.

[0003] Currently, commonly used valves typically consist of a valve body, a valve plate, and a drive component. The valve plate moves closer to or further away from the valve port on the valve body under the drive of the drive component, thereby opening and closing the valve.

[0004] However, the current type of valve, due to the selection of the location of its actuator on the valve body, results in the actuator occupying additional space.

[0005] In other words, current valves take up a lot of space. Utility Model Content

[0006] The purpose of this application is to provide a valve and vacuum system that, by placing the drive component at a relatively short position on the valve body, avoids the additional space occupied by the drive component, thereby reducing the space occupied by the valve.

[0007] In a first aspect, this application provides a valve, including a valve body, a valve plate, a valve plate assembly, a linear drive, and a transmission assembly; the valve body has a valve port and a length direction and a width direction, and includes a first valve body portion and a second valve body portion; the first valve body portion and the second valve body portion are arranged along the width direction; the two ends of the second valve body portion extend beyond the two ends of the first valve body portion in the length direction, and the valve port is located in the first valve body portion; the valve plate is movably disposed on the valve body; the linear drive is disposed on the edge of the second valve body portion facing the first valve body portion; the drive output end of the linear drive is connected to the valve plate through the transmission assembly, and is configured to drive the valve plate to move through the transmission assembly to open or close the valve port.

[0008] The valve described above, with its stepped valve body structure and linear actuators located at the steps at both ends of the valve body, reduces the additional space occupied by the linear actuators, thereby reducing the overall space occupied by the valve.

[0009] In conjunction with the first aspect, optionally, the valve body has a chamber inside; the transmission assembly is located in the chamber and includes a transmission member, a first rolling member, and a second rolling member; the first transmission end of the transmission member is connected to the drive output end of the linear drive member, and the second transmission end of the transmission member is connected to the valve plate; the first rolling member is connected to the transmission member on the inner edge of the first valve body portion facing away from the linear drive member, and the second rolling member is connected to the transmission member on the inner edge of the second valve body portion; wherein, the inner edge of the second valve body portion is located at the end of the second valve body portion in the length direction.

[0010] In the case of the valve provided in this application being side-mounted, by configuring a first rolling element and a second rolling element in the transmission assembly, and supporting the transmission element on the inner walls of the first valve body and the second valve body respectively, the frictional force of the transmission element during translational movement under the drive of the linear drive element is reduced, thereby improving the stability of the transmission element during translation. This correspondingly improves the stability of the valve plate during opening and closing.

[0011] In conjunction with the first aspect, optionally, the number of the first rolling elements is at least two; among the at least two first rolling elements, the line connecting at least two intersects the driving direction of the linear drive; and / or the number of the second rolling elements is at least two; among the at least two second rolling elements, the line connecting at least two intersects the driving direction of the linear drive.

[0012] The aforementioned valve, by limiting the number of the first and / or second rolling elements to at least two, and their arrangement direction not parallel to the driving direction of the linear drive element, ensures that the first and second rolling elements define at least one plane. This plane serves as a support surface for the transmission element, improving the stability of supporting the transmission element. This further enhances the stability of the valve plate during opening and closing.

[0013] In conjunction with the first aspect, optionally, the second valve body is provided with a window and a cover plate; the window connects the chamber to the outside of the valve body; the cover plate is detachably connected to the edge of the window on the second valve body.

[0014] The aforementioned valve features a chamber window on its second valve body that connects the outside to the inside of the valve body. This window serves as a maintenance window for repairing or maintaining the valve's internal components, improving the convenience of valve maintenance. Furthermore, a detachable cover plate is provided at the edge of the window. This cover plate can cover the window when maintenance of the internal valve components is not required, thus protecting the internal parts of the valve.

[0015] In conjunction with the first aspect, optionally, the valve plate assembly includes a first adjusting member, a connecting rod, a second adjusting member, and a valve plate body; the second adjusting member is attached to and connected to the valve plate body; a first end of the connecting rod is rotatably connected to the second adjusting member, and a second end of the connecting rod is rotatably connected to the first adjusting member; wherein the rotation surface of the first end is parallel to the rotation surface of the second end, and the rotation surface of the first end intersects the plane where the valve plate body is located; the first adjusting member is located outside the plane where the valve plate body is located and is connected to the drive output end of the linear drive member through the transmission assembly.

[0016] The aforementioned valve, by incorporating a connecting rod within the valve plate assembly, changes the inclination of this connecting rod relative to the plane of the valve plate body during the linear actuator's operation. This alters the vertical distance between the valve plate and the valve port, thereby adjusting the tightness of the valve plate's contact with the valve port edge. Building upon improved valve sealing, adjusting the tightness of the valve plate's contact with the port edge allows for customization based on specific needs in different application scenarios, enhancing the valve's operational flexibility.

[0017] In conjunction with the first aspect, optionally, the two ends of the second adjusting member in the length direction are respectively connected to the first end of the connecting rod.

[0018] The valve described above, by connecting two connecting rods to the same second adjusting member and arranging them along the length of the valve body, ensures that the points of force applied to the valve plate body by the connecting rods during the change of inclination are linearly arranged, rather than acting on only one point. This makes the force distribution on the valve port edge more uniform, ultimately improving the sealing performance of the valve when it is closed.

[0019] In conjunction with the first aspect, optionally, the number of the second adjusting members is at least two, and they are evenly arranged along the length direction and / or the width direction.

[0020] The aforementioned valve, through multiple second adjustments evenly arranged along the length and / or width of the valve body, further disperses the force exerted by the connecting rod on the valve plate body during tilting. This further makes the force exerted by the edge of the valve plate body on the valve port edge more uniformly distributed, ultimately improving the sealing performance of the valve when closed.

[0021] In conjunction with the first aspect, optionally, the valve plate assembly further includes an elastic element; one end of the elastic element is connected to the first adjusting element, and the other end of the elastic element is connected to the valve body; when the valve port is in the closed state, the elastic element is in the stretched state.

[0022] The aforementioned valve, by incorporating an elastic element in the valve plate assembly, and ensuring that this elastic element is in a stretched state when the valve port is closed, allows the valve plate body to move away from the valve port during opening, aided by the pulling force generated by the retraction tendency of the elastic element. This makes the valve port easier to open, and even eliminates the need for a linear drive component during the opening process, thereby saving energy.

[0023] In conjunction with the first aspect, optionally, a sealing ring is provided on the surface of the valve plate assembly facing the valve port; wherein the sealing ring is located at the edge of the valve plate assembly.

[0024] The valve described above further improves its sealing performance when the valve port is closed by setting a sealing ring on the valve plate assembly.

[0025] In a second aspect, this application provides a vacuum system including a vacuum pump, a vacuum chamber, and a valve as described in the first aspect.

[0026] The vacuum system described above has the same beneficial effects as the valve provided in the first aspect or any alternative embodiment of the first aspect, which will not be elaborated here.

[0027] In summary, the valve and vacuum system provided in this application, through a stepped valve body structure and the placement of the linear drive at the steps at both ends of the valve body, reduces the additional space occupied by the linear drive, thereby reducing the overall space occupied by the valve. By limiting the number of the first and / or second rolling elements to at least two, and ensuring their arrangement is not parallel to the driving direction of the linear drive, the first and second rolling elements can define at least one plane, improving the stability of the support for the transmission components. Furthermore, by providing a chamber window on the second valve body connecting the outside to the inside of the valve body, serving as a maintenance window for repairing or maintaining the internal components of the valve, the convenience of valve maintenance is improved. By configuring a connecting rod in the valve plate assembly, the inclination of the connecting rod relative to the plane where the valve plate body is located changes during the driving process of the linear drive component, thereby changing the vertical distance between the valve plate and the valve port, thus adjusting the tightness of the valve plate against the edge of the valve port. Attached Figure Description

[0028] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0029] Figure 1 This is a first perspective view of the valve plate provided in an embodiment of this application;

[0030] Figure 2 This is a second perspective view and a partial enlarged view of the valve plate provided in the embodiments of this application;

[0031] Figure 3 This is a third perspective view of the valve plate provided in an embodiment of this application;

[0032] Figure 4 The fourth perspective view and a partial enlarged view of the valve plate provided in the embodiments of this application are shown.

[0033] Icons: 100, Valve; 110, Valve body; 111, First valve body section; 112, Second valve body section; 113, Cover plate; 120, Valve plate; 121, First adjusting member; 122, Connecting rod; 123, Second adjusting member; 124, Valve plate body; 125, Elastic member; 126, Sealing ring; 130, Valve plate assembly; 140, Linear drive member; 150, Transmission assembly; 151, Transmission member; 152, First rolling member; 153, Second rolling member. Detailed Implementation

[0034] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0035] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0036] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0037] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the utility model product is in use. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0038] Furthermore, terms such as "horizontal" and "vertical" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0039] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0040] Please refer to Figure 1 and Figure 2 , Figure 1 This is a first perspective view of the valve plate 120 provided in the embodiments of this application; Figure 2 This is a second perspective view and a partial enlarged view of the valve plate 120 provided in the embodiments of this application. The valve 100 provided in the embodiments of this application may include a valve body 110, a valve plate 120, a valve plate 120 assembly, a linear drive member 140, and a transmission assembly 150. The valve body 110 may have a valve port in the length direction and a width direction, and may include a first valve body 110 portion and a second valve body 110 portion. The first valve body 110 portion and the second valve body 110 portion may be arranged along the width direction. The two ends of the second valve body 110 portion in the length direction may respectively extend beyond the two ends of the first valve body 110 portion in the length direction, and the valve port may be located in the first valve body 110 portion. The valve plate 120 may be movably disposed on the valve body 110. The linear drive member 140 may be disposed on the edge of the second valve body 110 portion facing the first valve body 110 portion. The drive output end of the linear drive 140 can be connected to the valve plate 120 through the transmission assembly 150, and can be configured to drive the valve plate 120 to move through the transmission assembly 150 to open or close the valve port.

[0041] In other words, the valve body 110 can be "stepped", and the linear drive 140 can be disposed on the step. Specifically, the linear drive 140 can be a cylinder, a hydraulic cylinder, a linear motor, etc., and there can be two of them, located at the steps at both ends of the valve body 110 respectively.

[0042] The movable direction of the valve plate 120 on the valve body 110 may include the direction along the plane where the valve plate 120 is located, and its movable manner may include translation along that direction.

[0043] The transmission assembly 150 can specifically be a transmission frame, which can house the valve plate 120 and connect to the drive output end of the linear drive member 140. The transmission assembly 150 can directly transmit the linear driving force output by the linear driving force to the valve plate 120, and the valve plate 120 responds to the linear driving force by translating along its own plane.

[0044] For example, taking the initial state of valve 100 as closed, when it is necessary to switch valve 100 to open state, the linear drive 140 is activated and transmits linear driving force to valve plate 120 through transmission assembly 150. Under the action of the linear driving force, valve plate 120 moves away from the valve port, thereby opening the valve port.

[0045] As an optional implementation, the valve 100 provided in this application embodiment can be a side-mounted valve 100. That is, as shown... Figure 1 As shown, the movable direction of valve 100 is... Figure 1 The horizontal direction in the middle.

[0046] In the above implementation process, by using a valve body 110 structure similar to a step and placing the linear drive 140 at the steps at both ends of the valve body 110, the additional space occupied by the linear drive 140 is reduced, which in turn reduces the space occupied by the overall valve 100.

[0047] Referring to the figures, in some optional embodiments, the valve body 110 may have a chamber inside. The transmission assembly 150 may be located within the chamber and may include a transmission member 151, a first rolling member 152, and a second rolling member 153. The first transmission end of the transmission member 151 may be connected to the drive output end of the linear drive member 140, and the second transmission end of the transmission member 151 may be connected to the valve plate 120. The first rolling member 152 may be connected to the transmission member 151 on the inner edge of the first valve body 110 portion facing away from the linear drive member 140, and the second rolling member 153 may be connected to the transmission member 151 on the inner edge of the second valve body 110 portion. The inner edge of the second valve body 110 portion may be located at its end in the length direction.

[0048] In conjunction with the preceding embodiments, the transmission component 151 can specifically be a transmission frame, on which a first rolling element 152 and a second rolling element 153 are disposed. The first rolling element 152 and the second rolling element 153 can each be a roller. When the transmission component 151 is a transmission frame, the first transmission end of the transmission component 151 can be the outside of the transmission frame, and the second transmission end of the transmission component 151 can be the inside of the transmission frame. The valve plate 120 is mounted inside the transmission frame. Since the valve body 110 is stepped, the internal chamber of the valve body 110 can also be stepped. In this case, to accommodate the shape of the chamber, the transmission frame can also be stepped.

[0049] Accordingly, the first rolling element 152 and the second rolling element 153 can be respectively connected to two different steps of the transmission frame. This enables the transmission frame to be supported within the inner wall of the first valve body 110 and the second valve body 110.

[0050] In the above implementation process, when the valve 100 provided in this application embodiment is side-mounted, by configuring the first rolling element 152 and the second rolling element 153 in the transmission assembly 150, and supporting the transmission element 151 on the inner walls of the first valve body 110 and the second valve body 110 respectively, the frictional force of the transmission element 151 during translational movement driven by the linear drive element 140 is reduced, and the stability of the transmission element 151 during translation is improved. Correspondingly, the stability of the valve plate 120 during opening and closing is improved.

[0051] Please continue to refer to Figure 2 In some alternative embodiments, the number of first rolling elements 152 may be at least two; of the at least two first rolling elements 152, the line connecting at least two of them may intersect the driving direction of the linear drive element 140. And / or the number of second rolling elements 153 may be at least two; of the at least two second rolling elements 153, the line connecting at least two of them may intersect the driving direction of the linear drive element 140.

[0052] For example, there is one first rolling element 152 and two second rolling elements 153, which are arranged in a direction perpendicular to the plane of the valve plate 120. In this case, since the total number of the first rolling element 152 and the second rolling element 153 is three, and the positions of these three rolling elements can define a plane, this plane is typically the support surface used to support the transmission element 151.

[0053] In the above implementation process, by limiting the number of the first rolling element 152 and / or the second rolling element 153 to at least two, and ensuring that their arrangement direction is not parallel to the driving direction of the linear drive element 140, the first rolling element 152 and the second rolling element 153 can define at least one plane. This plane serves as the support surface for the transmission element 151, improving the stability of supporting the transmission element 151. This further enhances the stability of the valve plate 120 during the opening and closing process.

[0054] Please refer to Figure 3 , Figure 3 This is a third perspective view of the valve plate 120 provided in the embodiments of this application. In some optional embodiments, a window and a cover plate 113 may be provided on the second valve body 110. The window may communicate with the outside of the chamber and the valve body 110. The cover plate 113 may be detachably connected to the edge of the window on the second valve body 110.

[0055] The window provided on the second valve body 110 can serve as a maintenance window for the valve 100, allowing for the repair and maintenance of internal components such as the transmission assembly 150. The cover plate 113 is detachably connected to the edge of the window, specifically through screws, snap-fit, or hook-on connections.

[0056] As an alternative implementation, the back side of the cover plate 113, that is, the side of the cover plate 113 facing away from the window, can be provided with reinforcing ribs to improve the strength of the cover plate 113.

[0057] In the above implementation process, a chamber window communicating with the outside and the interior of the valve body 110 is provided on the second valve body 110. This window can serve as a maintenance window for repairing or maintaining the internal components of the valve 100, thus improving the convenience of maintaining the valve 100. Furthermore, a detachable cover plate 113 is provided at the edge of the window. When maintenance of the internal components of the valve 100 is not required, the cover plate 113 covers the window, thus protecting the internal parts of the valve 100.

[0058] Please refer to Figure 4 , Figure 4This is a fourth perspective view and a partial enlarged view of the valve plate 120 provided in the embodiments of this application. In some optional embodiments, the valve plate 120 assembly may include a first adjusting member 121, a connecting rod 122, a second adjusting member 123, and a valve plate body 124. The second adjusting member 123 may be attached to and connected to the valve plate body 124. The first end of the connecting rod 122 may be rotatably connected to the second adjusting member 123, and the second end of the connecting rod 122 may be rotatably connected to the first adjusting member 121. The rotational surfaces of the first and second ends may be parallel, and the rotational surface of the first end may intersect the plane containing the valve plate body 124. The first adjusting member 121 may be located outside the plane containing the valve plate body 124 and may be connected to the drive output end of the linear drive member 140 via the transmission assembly 150.

[0059] In this embodiment, the movable direction of the valve plate 120 may also include a direction perpendicular to the plane on which the valve plate 120 is located. The rotational surface of the first end may be perpendicular to the plane on which the valve plate body 124 is located, and also perpendicular to the driving direction of the linear drive member 140.

[0060] For example, taking the initial state of valve 100 as the open state, the connecting rod 122 can be in an inclined state relative to the valve plate body 124. During the process of the linear drive 140 driving the second adjusting member 123 through the transmission assembly 150, the valve plate body 124 moves closer to the valve port. When the valve plate body 124 is directly facing the valve port, it no longer translates along its own plane under the drive of the linear drive 140. However, as the linear drive 140 continues to drive, the inclination of the connecting rod 122 relative to the plane of the valve plate body 124 gradually decreases until it is perpendicular to the plane of the valve plate body 124. As the inclination of the connecting rod 122 gradually decreases, the vertical distance between the second adjusting member 123, together with the valve plate body 124, and the first adjusting member 121 gradually increases. Correspondingly, the vertical distance between the valve plate body 124 and the valve port gradually decreases until the valve plate body 124 is tightly against the edge of the valve port.

[0061] In the above implementation process, by configuring a connecting rod 122 in the valve plate 120 assembly, during the driving process of the linear drive component 140, the inclination of the connecting rod 122 relative to the plane where the valve plate body 124 is located changes, thereby altering the vertical distance between the valve plate 120 and the valve port. This adjusts the tightness of the valve plate 120 against the edge of the valve port. Based on improving the sealing performance of the valve 100, by adjusting the tightness of the valve plate 120 against the window edge, the valve 100 can be adjusted according to specific needs in different application scenarios, thus improving the flexibility of the valve 100 in use.

[0062] Please continue to refer to Figure 4 In some alternative embodiments, the two ends of the second adjusting member 123 in the length direction can be connected to the first end of the connecting rod 122, respectively.

[0063] In other words, the same second adjusting member 123 can be connected to two connecting rods 122 respectively. As an optional implementation, the second adjusting member 123 can specifically be a rectangular frame, the plane of which the rectangle is located is parallel to the plane of the valve plate body 124.

[0064] In the above implementation process, by connecting two connecting rods 122 to the same second adjusting member 123 and arranging them along the length of the valve body 110, the points of application of the force applied to the valve plate body 124 by the connecting rods 122 during the change of inclination are linearly arranged, rather than only acting on one point. This makes the force distribution of the edge of the valve plate body 124 on the valve port edge more uniform, and ultimately improves the sealing performance of the valve 100 in the closed state.

[0065] Please continue to refer to Figure 4 In some alternative embodiments, the number of second adjusting members 123 may be at least two, and they may be evenly arranged along the length direction and / or the width direction.

[0066] For example, there are two second adjusting members 123, arranged along the width direction of the valve body 110; or, there are six second adjusting members 123, arranged along the length direction of the valve body 110; or, there are twelve second adjusting members 123, arranged along the width direction and the length direction of the valve body 110 respectively, wherein there are two arranged in the width direction and six arranged in the length direction.

[0067] In the examples above, the first two cases are when the second adjusting members 123 are arranged linearly, and the last case is when the second adjusting members 123 are arranged rectangularly.

[0068] In the above implementation process, by uniformly arranging multiple second adjustments along the length and / or width direction of the valve body 110, the force exerted by the connecting rod 122 on the valve plate body 124 during tilting is further dispersed. This further makes the force exerted by the edge of the valve plate body 124 on the valve port edge more uniformly distributed, ultimately further improving the sealing performance of the valve 100 in the closed state.

[0069] Please continue to refer to Figure 4In some alternative embodiments, the valve plate 120 assembly may further include an elastic element 125. One end of the elastic element 125 may be connected to the first adjusting member 121, and the other end of the elastic element 125 may be connected to the valve body 110. When the valve port is closed, the elastic element 125 may be in a stretched state.

[0070] The elastic element 125 can be a spring. Since the elastic element 125 is in a stretched state when the valve port is closed, the elastic element 125 has a tendency to retract when the valve port is closed.

[0071] In the above implementation, by configuring an elastic element 125 in the valve plate 120 assembly, and ensuring that the elastic element 125 is in a stretched state when the valve port is closed, the valve plate body 124 can move away from the valve port during the opening process by means of the tension generated by the retraction tendency of the elastic element 125. This makes it easier to open the valve port, and even eliminates the need for the linear drive element 140 during the opening process, thereby saving energy.

[0072] Please continue to refer to Figure 3 In some alternative embodiments, a sealing ring 126 may be provided on the surface of the valve plate 120 assembly facing the valve port. The sealing ring 126 may be located at the edge of the valve plate 120 assembly.

[0073] The sealing ring 126 can be made of fluororubber, fluoropolymer, nitrile rubber, etc. In conjunction with the previous embodiments, the sealing ring 126 can specifically be disposed on the valve plate body 124.

[0074] In conjunction with the previous embodiments, when the force applied by the valve plate 120 to the edge of the valve port is adjusted by changing the inclination of the connecting rod 122, the pressure on the sealing ring 126 also changes accordingly, thereby making the compression of the sealing ring 126 adjustable.

[0075] In the above implementation process, by setting a sealing ring 126 on the valve plate 120 assembly, the sealing performance of the valve 100 is further improved when the valve port is closed.

[0076] Based on the same concept, embodiments of this application provide a vacuum system that may include a vacuum pump, a vacuum chamber, and the valve 100 described above.

[0077] The vacuum chamber may include a chamber shell, on which a valve 100 is provided.

[0078] The above implementation process is the same as that of valve 100 described above, and will not be repeated here.

[0079] In summary, the valve 100 and vacuum system provided in the various embodiments of this application, through a stepped valve body 110 structure and the placement of the linear drive member 140 at the steps at both ends of the valve body 110, reduce the additional space occupied by the linear drive member 140, thereby reducing the overall space occupied by the valve 100. By limiting the number of the first rolling member 152 and / or the second rolling member 153 to at least two, and ensuring that their arrangement direction is not parallel to the driving direction of the linear drive member 140, the first rolling member 152 and the second rolling member 153 can define at least one plane, improving the stability of supporting the transmission member 151. By providing a chamber window on the second valve body 110 that connects the outside to the inside of the valve body 110, a maintenance window is provided for repairing or maintaining the internal components of the valve 100, thus improving the convenience of maintenance of the valve 100. By configuring a connecting rod 122 in the valve plate 120 assembly, during the driving process of the linear drive member 140, the inclination of the connecting rod 122 relative to the plane of the valve plate body 124 changes, thereby altering the vertical distance between the valve plate 120 and the valve port, and thus adjusting the tightness of the valve plate 120 against the edge of the valve port.

[0080] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A valve, characterized in that, Includes valve body, valve plate, valve plate assembly, linear drive component, and transmission assembly; The valve body has a valve port, a length direction, and a width direction, and includes a first valve body portion and a second valve body portion; the first valve body portion and the second valve body portion are arranged along the width direction; the two ends of the second valve body portion extend beyond the two ends of the first valve body portion in the length direction, and the valve port is located in the first valve body portion; The valve plate is movably disposed on the valve body; The linear drive component is disposed on the edge of the second valve body portion facing the first valve body portion; The drive output end of the linear drive is connected to the valve plate through the transmission assembly, and is configured to drive the valve plate to move through the transmission assembly to open or close the valve port.

2. The valve according to claim 1, characterized in that, The valve body has an internal chamber; The transmission assembly is located within the cavity and includes a transmission element, a first rolling element, and a second rolling element; The first transmission end of the transmission component is connected to the drive output end of the linear drive component, and the second transmission end of the transmission component is connected to the valve plate. The first rolling element is connected to the transmission member on the inner edge of the first valve body portion facing away from the linear drive member, and the second rolling element is connected to the transmission member on the inner edge of the second valve body portion; wherein, the inner edge of the second valve body portion is located at the end of the second valve body portion in the length direction.

3. The valve according to claim 2, characterized in that, The number of the first rolling elements is at least two; of the at least two first rolling elements, the line connecting at least two intersects the driving direction of the linear drive element; and / or The number of the second rolling elements is at least two; of the at least two second rolling elements, the line connecting at least two intersects the driving direction of the linear drive element.

4. The valve according to claim 2, characterized in that, The second valve body is provided with a window and a cover plate; The window connects the chamber to the outside of the valve body; The cover plate is detachably connected to the edge of the window on the second valve body.

5. The valve according to claim 1, characterized in that, The valve plate assembly includes a first adjusting member, a connecting rod, a second adjusting member, and a valve plate body; The second adjusting member is attached to the valve plate body and connected to the valve plate body; The first end of the connecting rod is rotatably connected to the second adjusting member, and the second end of the connecting rod is rotatably connected to the first adjusting member; wherein, the rotation surface of the first end is parallel to the rotation surface of the second end, and the rotation surface of the first end intersects with the plane on which the valve plate body is located; The first adjusting member is located outside the plane of the valve plate body and is connected to the drive output end of the linear drive member through the transmission assembly.

6. The valve according to claim 5, characterized in that, The second adjusting member is connected to the first end of the connecting rod at both ends in the length direction.

7. The valve according to claim 5, characterized in that, The number of the second adjusting members is at least two, and they are evenly arranged along the length direction and / or the width direction.

8. The valve according to claim 5, characterized in that, The valve plate assembly also includes an elastic element; One end of the elastic element is connected to the first adjusting element, and the other end of the elastic element is connected to the valve body; When the valve is closed, the elastic element is in a stretched state.

9. The valve according to any one of claims 1 to 7, characterized in that, A sealing ring is provided on the surface of the valve plate assembly facing the valve port; The sealing ring is located at the edge of the valve plate assembly.

10. A vacuum system, characterized in that, Includes a vacuum pump, a vacuum chamber, and a valve as described in any one of claims 1 to 9.

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