Valve and vacuum system
By changing the inclination of the connecting rod to alter the valve plate, the valve structure is simplified, manufacturing costs are reduced, control sensitivity and stability are improved, flow rate is increased, and sealing performance is enhanced.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-10
- Publication Date
- 2026-03-03
AI Technical Summary
In existing valves, the valve plate moves either linearly or rotaryly, resulting in complex structures and increased manufacturing costs.
The connecting rod rotatably connects the drive end of the linear drive to the valve plate at both ends. By changing the inclination of the connecting rod, the distance between the valve plate and the valve port changes, thereby opening and closing the valve port and simplifying the valve structure.
It reduces the manufacturing cost of valves, improves the driving control sensitivity and stability of valve plates, increases flow rate, and improves sealing performance.
Smart Images
Figure CN223964992U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of vacuum technology, and more specifically, to a valve and a vacuum system. Background Technology
[0002] The main function of a valve is to isolate and conduct airflow through an airflow channel, thereby controlling the flow and ensuring the airtightness and stability of the system.
[0003] Commonly used valves typically consist of a valve body, a valve plate, and an actuator. The valve body is usually a housing with an inlet and an outlet, while the valve plate is used to close or open the gas passage. The actuator, which can be manual, electric, or pneumatic, controls the movement of the valve plate. The valve plate typically moves linearly or rotaryly along its own plane.
[0004] However, since the valve plates of this type of valve currently in use move in a linear or rotary manner along the plane of the valve plate, the structure of the valve plate is more complex, thereby increasing the manufacturing cost of the valve. Utility Model Content
[0005] The purpose of this application is to provide a valve in which the driving end of a linear drive and a valve plate are rotatably connected at both ends of a connecting rod. Under the drive of the linear drive, the distance between the valve plate and the valve port changes based on the change of the inclination of the connecting rod, thereby realizing the opening and closing of the valve port, simplifying the valve structure and reducing the valve manufacturing cost.
[0006] In a first aspect, this application provides a valve, including a valve body, a valve plate, a linear actuator, and a connecting rod; the valve body has a valve port; the valve plate is movably disposed on the valve body; the linear actuator is disposed on the valve body and has a driving end facing the valve plate; wherein the driving direction of the linear actuator is parallel to the direction of the valve plate; a first end of the connecting rod is rotatably connected to the driving end, and a second end of the connecting rod is rotatably connected to the valve plate; wherein the rotation surface of the first end is parallel to the rotation surface of the second end, and the rotation surface of the first end intersects the plane of the valve plate; the actuator is configured to drive the valve plate to move via the connecting rod to open or close the valve port.
[0007] The aforementioned valve, by rotatably connecting the driving end of a linear drive component and the valve plate at both ends of a connecting rod, and under the drive of the linear drive component, changes in the inclination of the connecting rod cause a change in the distance between the valve plate and the valve port, thereby realizing the opening and closing of the valve port. Compared with the commonly used valves, which open and close the valve port by the linear or rotational movement of the valve plate along its own plane, the valve provided in this application has a simpler structure, thereby reducing the manufacturing cost of the valve.
[0008] In conjunction with the first aspect, optionally, the rotational surface of the first end of the connecting rod is perpendicular to the plane where the valve plate is located and parallel to the driving direction of the linear drive member.
[0009] In the aforementioned valve, when the rotational surface of the first end of the connecting rod is perpendicular to the plane of the valve plate, the linear driving force output by the linear actuator can be converted into a change in the distance between the valve plate and the driving end by changing the inclination of the connecting rod. In other words, the "transmission ratio" between the linear actuator and the valve plate is higher, thereby improving the sensitivity of valve plate control.
[0010] In conjunction with the first aspect, optionally, the number of connecting rods is at least n; where n ≥ 3; the first ends of at least three of the connecting rods are not collinear; and the second ends of at least three of the connecting rods are not collinear.
[0011] The valve described above, by limiting the number of connecting rods to no less than three, and by limiting that the first and second ends of at least three of these connecting rods are not collinear, makes the first and second ends of these connecting rods form the action surface for transmitting driving force. Compared with the driving of the valve plate by a single point or a linearly arranged force, this improves the stability of the valve plate during the driving process.
[0012] In conjunction with the first aspect, optionally, the driving end is provided with a valve core assembly; the valve core assembly includes a valve core and n rotating pins; the length directions of any two rotating pins are parallel to each other and parallel to the plane where the valve core is located; the n rotating pins are arranged along the driving direction of the linear drive member; the first ends of the n connecting rods are rotatably connected to the n rotating pins one by one.
[0013] The aforementioned valve, by incorporating a valve core assembly at the drive end, achieves rotatable connection of the first ends of each connecting rod based on rotating pins within the valve core assembly. These rotating pins are arranged on the valve core in the driving direction of the linear actuator, ensuring that regardless of the number of connecting rods, the first ends and second ends of all connecting rods are coplanar. Furthermore, this simplifies the structure of the transmission mechanism between the linear actuator and the valve plate based on the connecting rods. In other words, it further simplifies the overall valve structure, thereby further reducing the valve's manufacturing cost.
[0014] In conjunction with the first aspect, optionally, the rotary pin has a first connecting end and a second connecting end; the first connecting end faces the first edge of the valve core, and the second connecting end faces the second edge of the valve core; wherein the first edge and the second edge are disposed opposite to each other; along the driving direction of the linear drive member, the rotary pins with odd numbers are rotatably connected to the connecting rod through their first connecting end, and the rotary pins with even numbers are rotatably connected to the connecting rod through their second connecting end.
[0015] The aforementioned valve, by alternately connecting the first ends of each connecting rod to the first and second connecting ends of the rotating pin, ensures that the first ends of at least three connecting rods are not collinear, resulting in a more regular arrangement of the connecting rods and thus reducing the space required for their arrangement. Ultimately, this further simplifies the structure of the valve provided in this application and further reduces its manufacturing cost.
[0016] In conjunction with the first aspect, optionally, a limiting member is also provided on the valve body; the limiting member is located on the side of the valve port away from the linear drive member; the limiting member is configured to abut against the valve plate.
[0017] The valve described above, by providing a limiting member on the side of the valve port away from the linear drive member, allows the valve plate to flip along the edge abutting the limiting member as the linear drive member continues to drive the connecting rod to its maximum tilt angle. This further increases the maximum opening degree of the valve provided in this application and ultimately improves the valve's flow rate.
[0018] In conjunction with the first aspect, optionally, the valve plate includes a valve plate body and a roller; the roller is disposed on the edge of the valve plate body away from the linear drive member; the rotatable direction of the roller is consistent with the rotatable direction of the first end of the connecting rod; the roller abuts against the limiting member.
[0019] The aforementioned valve, by installing rollers on the edge of the valve plate body away from the linear drive member, that is, near the limiting member, allows the rollers to roll correspondingly on the limiting member when the valve plate body is rotated by the linear drive member. This makes the rotation process of the valve plate body smoother and more fluid, thereby improving the operational stability and reliability of the valve provided in this application.
[0020] In conjunction with the first aspect, optionally, the valve plate body has a length direction and a width direction; the valve plate also has a reinforcing portion; the reinforcing portion extends from the surface of the valve plate body away from the valve port outward from the valve plate body; the two ends of the reinforcing portion extend to the two ends of the valve plate body in the length direction and are located in the middle of the valve plate body in the width direction.
[0021] The valve described above improves the strength of the valve plate body in the length direction by providing a reinforcing part along the length of the valve plate body, thereby enabling the valve plate to better seal the valve port.
[0022] In conjunction with the first aspect, optionally, a sealing ring is provided on the surface of the valve plate facing the valve port; wherein the sealing ring is located at the edge of the valve plate.
[0023] The valve described above further improves its sealing performance when the valve port is closed by installing a sealing ring on the valve plate.
[0024] In a second aspect, this application provides a vacuum system including a vacuum pump, a vacuum chamber, and a valve as described in the first aspect.
[0025] The vacuum system described above has the same beneficial effects as the valve provided in the first aspect or any alternative embodiment of the first aspect, which will not be elaborated here.
[0026] In summary, the valve and vacuum system provided in this application, by rotatably connecting the driving end of a linear drive and the valve plate at both ends of a connecting rod, and under the drive of the linear drive, changing the distance between the valve plate and the valve port based on the change in the inclination of the connecting rod, simplifies the valve structure and reduces the manufacturing cost while achieving the basic function of opening and closing the valve port. By limiting the number of connecting rods to no less than three, and by ensuring that the first and second ends of at least three of these connecting rods are not collinear, the first and second ends of these connecting rods respectively constitute the working surface for transmitting driving force, improving the stability during the driving process of the valve plate. By alternately connecting the first end of each connecting rod to the first and second connecting ends of the rotating pin, the arrangement of the connecting rods is more regular, thereby reducing the space required for arranging the connecting rods and further simplifying the structure of the valve provided in this application. By setting a limiting member on the side of the valve port away from the linear drive, when the linear drive drives the connecting rod to its maximum inclination, the valve plate can flip along the edge abutting the limiting member, improving the valve's flow rate. By providing reinforcement along the length of the valve plate body, the strength of the valve plate body in its length direction is improved, thereby enabling the valve plate to better seal the valve port. Attached Figure Description
[0027] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0028] Figure 1 A first perspective view and a partial enlarged view of the valve provided in the embodiments of this application;
[0029] Figure 2 A second perspective view and a partial enlarged view of the valve provided in the embodiments of this application;
[0030] Figure 3 A third perspective view of the valve provided in the embodiments of this application;
[0031] Figure 4 This is a fourth perspective view of the valve provided in an embodiment of this application.
[0032] Icons: 100, Valve; 110, Valve body; 111, Limiting element; 120, Valve plate; 121, Valve plate body; 122, Roller; 123, Reinforcing part; 124, Sealing ring; 130, Linear drive element; 140, Connecting rod; 150, Valve core assembly; 151, Valve core; 152, Rotary pin. Detailed Implementation
[0033] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.
[0034] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.
[0035] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.
[0036] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the utility model product is in use. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0037] Furthermore, terms such as "horizontal" and "vertical" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.
[0038] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.
[0039] Please refer to Figure 1 , Figure 1 This is a first perspective view and a partial enlarged view of the valve 100 provided in this application embodiment. The valve 100 provided in this application embodiment may include a valve body 110, a valve plate 120, a linear drive member 130, and a connecting rod 140. The valve body 110 may have a valve port. The valve plate 120 may be movably disposed on the valve body 110. The linear drive member 130 may be disposed on the valve body 110 and may have a drive end, which may face the valve plate 120. The drive direction of the linear drive member 130 may be parallel to the direction of the valve plate 120. The first end of the connecting rod 140 may be rotatably connected to the drive end, and the second end of the connecting rod 140 may be rotatably connected to the valve plate 120. The rotation surface of the first end may be parallel to the rotation surface of the second end, and the rotation surface of the first end may intersect with the plane of the valve plate 120. The drive member may be configured to drive the valve plate 120 to move via the connecting rod 140 to open or close the valve port.
[0040] The movable direction of the valve plate 120 on the valve body 110 can include a direction perpendicular to the plane of the valve body 110, that is, the valve plate 120 can translate in this direction. To achieve the movable nature of the valve plate 120 in this direction, relevant structures known to those skilled in the art can be adopted. For example, a sliding portion can be provided at the edge of the valve plate 120, and a slide rail adapted to the sliding portion can be provided at a corresponding position on the valve body 110. Furthermore, the slide rail can also serve as a limiting mechanism to constrain the movable nature of the valve plate 120 in other directions.
[0041] The linear drive component 130 can be a cylinder, hydraulic cylinder, linear motor, etc., and there can be two of them, located at opposite ends of the valve body 110 along its length. During the driving process of the linear drive component 130, based on the rotatable connection between the first and second ends of the connecting rod 140 and the drive end and valve plate 120 respectively, the linear driving force output by the linear drive component 130 is converted into a change in the inclination of the connecting rod 140. When the inclination of the connecting rod 140 changes, the vertical distance between the drive end and the valve plate 120 also changes accordingly, thereby changing the vertical distance between the valve plate 120 and the valve port, thus enabling the valve plate 120 to move closer to or further away from the valve port.
[0042] For example, starting from the inclined state of the connecting rod 140, the linear drive 130 starts and begins to output driving force. The angle between the connecting rod 140 and the valve plate 120 gradually approaches 90°. When the connecting rod 140 is perpendicular to the valve plate 120, the vertical distance between the drive end and the valve plate 120 reaches its maximum, and correspondingly, the distance between the valve plate 120 and the valve port reaches its minimum.
[0043] In the above implementation process, the driving end of the linear drive 130 and the valve plate 120 are rotatably connected to the two ends of the connecting rod 140, respectively. Under the drive of the linear drive 130, the distance between the valve plate 120 and the valve port changes based on the change of the inclination of the connecting rod 140, thereby realizing the opening and closing of the valve port. Compared with the commonly used valve 100, which realizes the opening and closing of the valve port by the linear or rotational movement of the valve plate 120 along its own plane, the valve 100 provided in this application embodiment has a simpler structure, thereby reducing the manufacturing cost of the valve 100.
[0044] Please continue to refer to Figure 1 In some alternative embodiments, the rotational surface of the first end of the connecting rod 140 may be perpendicular to the plane where the valve plate 120 is located, and may be parallel to the driving direction of the linear drive member 130.
[0045] Since the rotation surface of the first end is parallel to the rotation surface of the second end, when the rotation surface of the first end of the connecting rod 140 is perpendicular to the plane where the valve plate 120 is located, the rotation surface of the second end is also perpendicular to the plane where the valve plate 120 is located.
[0046] In the above implementation process, when the rotation surface of the first end of the connecting rod 140 is perpendicular to the plane where the valve plate 120 is located, the linear driving force output by the linear drive member 130 can be converted into a change in the distance between the valve plate 120 and the drive end by changing the inclination of the connecting rod 140. In other words, the "transmission ratio" between the linear drive member 130 and the valve plate 120 is higher, thereby improving the sensitivity of controlling the valve plate 120.
[0047] Please refer to Figure 2 , Figure 2 This is a second perspective view and a partial enlarged view of the valve 100 provided in the embodiments of this application. In some optional embodiments, the number of connecting rods 140 is at least n, where n ≥ 3. The first ends of at least three connecting rods 140 may not be collinear. The second ends of at least three connecting rods 140 may not be collinear.
[0048] For example, if there are three connecting rods 140, then the first ends of these three connecting rods 140 are not collinear. That is, the first ends of these three connecting rods 140 are arranged in a triangle. Correspondingly, the second ends of these three connecting rods 140 can also be arranged in a triangle. Based on this, the first ends and second ends of these three connecting rods 140 can each define a plane. This plane can then serve as the action surface acting on the drive end and the valve plate 120.
[0049] In the above implementation process, by limiting the number of connecting rods 140 to no less than three, and by limiting that the first end and the second end of at least three of these connecting rods 140 are not collinear, the first end and the second end of these connecting rods 140 respectively constitute the working surface for the transmission of driving force. Compared with the driving force of a single point or a linearly arranged force on the valve plate 120, the stability of the valve plate 120 during the driving process is improved.
[0050] Referring to the figure, in some optional embodiments, the drive end may be provided with a valve core 151 assembly 150. The valve core 151 assembly 150 may include a valve core 151 and n rotating pins 152. The length directions of any two rotating pins 152 may be parallel to each other and may be parallel to the plane where the valve core 151 is located. The n rotating pins 152 may be arranged along the driving direction of the linear drive member 130. The first ends of the n connecting rods 140 may be rotatably connected to the n rotating pins 152 one by one.
[0051] The valve core 151 can be plate-shaped, and its plane can be parallel to the plane of the valve plate 120. The length direction of the rotating pin 152 can be perpendicular to the direction of the driving force output by the linear drive member 130.
[0052] As described in the preceding embodiments, the number of rotating pins 152 can be the same as the number of connecting rods 140. Since these rotating pins 152 are arranged along the driving direction of the linear drive member 130, the distances between these rotating pins 152 and the valve plate 120 are equal. When the first ends of these connecting rods 140 are connected to the rotating pins 152, they can be coplanar, and the plane they lie on can be parallel to the plane of the valve plate 120. Based on the fact that the n connecting rods 140 have the same structure and dimensions, the second ends of these connecting rods 140 can also be coplanar, and the plane they lie on is parallel to the plane of the valve plate 120.
[0053] In the above implementation process, by setting a valve core 151 assembly 150 at the drive end, the first ends of each connecting rod 140 are rotatably connected based on the rotating pin 152 in the valve core 151 assembly 150. Furthermore, the rotating pin 152 is arranged on the valve core 151 according to the driving direction of the linear drive member 130, ensuring that regardless of the number of connecting rods 140, the first ends and second ends of each connecting rod 140 are coplanar. Based on this, the structure of the transmission mechanism between the linear drive member 130 and the valve plate 120 based on the connecting rods 140 is simplified. This further simplifies the structure of the entire valve 100, thereby further reducing the manufacturing cost of the valve 100.
[0054] Please continue to refer to Figure 2 In some optional embodiments, the rotary pin 152 may have a first connecting end and a second connecting end. The first connecting end may face a first edge of the valve core 151, and the second connecting end may face a second edge of the valve core 151. The first edge may be positioned opposite to the second edge. Along the driving direction of the linear drive member 130, the odd-numbered rotary pins 152 may be rotatably connected to the connecting rod 140 via their first connecting end, and the even-numbered rotary pins 152 may be rotatably connected to the connecting rod 140 via their second connecting end.
[0055] In other words, the first connecting ends of all n rotating pins 152 are located at the same end of the rotating pin 152, and the second connecting ends are located at the other end of the rotating pin 152. Based on the length direction of the rotating pins 152 and the arrangement direction of the rotating pins 152 described above, the first connecting ends of these rotating pins 152 can be collinear, and the second connecting ends can also be collinear.
[0056] Furthermore, the first ends of the n connecting rods 140 can be alternately connected to the first and second connecting ends of the rotating pin 152. For example, taking n=3, the first end of the connecting rod 140 in the middle is connected to the first connecting end of the corresponding rotating pin 152; the first ends of the connecting rods 140 on both sides are respectively connected to the second connecting ends of the corresponding rotating pin 152.
[0057] In the above implementation process, by alternately connecting the first ends of each connecting rod 140 to the first and second connecting ends of the rotating pin 152, at least three connecting rods 140 are made non-collinear at their first ends, resulting in a more regular arrangement of the connecting rods 140 and reducing the space required for arranging them. Ultimately, this further simplifies the structure of the valve 100 provided in this embodiment and further reduces the manufacturing cost of the valve 100.
[0058] Please refer to Figure 3 , Figure 3 This is a third perspective view of the valve 100 provided in the embodiments of this application. In some optional embodiments, a limiting member 111 may also be provided on the valve body 110. The limiting member 111 may be located on the side of the valve port away from the linear drive member 130. The limiting member 111 may be configured to abut against the valve plate 120.
[0059] In addition to the movable direction of the valve plate 120, which includes a direction perpendicular to the plane of the valve body 110, the movable direction of the valve plate 120 can also include a flipping direction along its edge abutting against the limiting member 111. In conjunction with the previous embodiment, with the connecting rod 140 in a position perpendicular to the valve plate 120 as the initial state, the linear drive member 130 continues to drive the valve core 151 to move closer to the limiting member 111. During this process, as the connecting rod 140 gradually tilts relative to the valve plate 120, the distance between the valve plate 120 and the valve port gradually increases. When the distance between the valve plate 120 and the valve port reaches its maximum, the valve plate 120 can then flip away from the valve port along the edge abutting against the limiting member 111. This further increases the opening degree of the valve 100.
[0060] In the above implementation process, by setting a limiting member 111 on the side of the valve port away from the linear drive member 130, when the linear drive member 130 drives the connecting rod 140 to tilt to the maximum tilt angle, the valve plate 120 can be flipped along the edge that abuts against the limiting member 111 by the continued driving of the linear drive member 130, thereby further increasing the maximum opening degree of the valve 100 provided in this application embodiment, and ultimately improving the flow rate of the valve 100.
[0061] Please continue to refer to Figure 3In some alternative embodiments, the valve plate 120 may include a valve plate body 121 and a roller 122. The roller 122 may be disposed on the edge of the valve plate body 121 away from the linear drive member 130. The rotational direction of the roller 122 may be consistent with the rotational direction of the first end of the connecting rod. The roller 122 may abut against the limiting member 111.
[0062] In conjunction with the description of the preceding embodiments, when the linear drive member 130 drives the connecting rod 140 to tilt to the maximum tilt angle, the valve plate body 121 will flip over. Therefore, by setting the roller 122 to abut against the limiting member 111, the roller 122 will roll on the limiting member 111 during the flipping process of the valve plate 120.
[0063] In the above implementation process, by providing rollers 122 on the edge of the valve plate body 121 away from the linear drive member 130, that is, on the edge near the limiting member 111, when the valve plate body 121 is driven to flip by the linear drive member 130, the rollers 122 roll accordingly on the limiting member 111. This makes the flipping process of the valve plate body 121 smoother and more fluid. This improves the operational stability and reliability of the valve 100 provided in this embodiment.
[0064] Please continue to refer to Figure 3 In some alternative embodiments, the valve plate body 121 may have a length direction and a width direction. The valve plate 120 may also have a reinforcing portion 123. The reinforcing portion 123 may extend from the surface of the valve plate body 121 away from the valve port outward from the valve plate body 121. The two ends of the reinforcing portion 123 may extend to the two ends of the valve plate body 121 in the length direction, and may be located at the middle of the valve plate body 121 in the width direction.
[0065] For example, the reinforcing part 123 may be a reinforcing rib provided on the valve plate body 121, and the length direction of the reinforcing rib is consistent with the length direction of the valve plate body 121.
[0066] In the above implementation process, by providing a reinforcing part 123 along the length direction of the valve plate body 121, the strength of the valve plate body 121 in its length direction is improved, thereby enabling the valve plate 120 to better seal the valve port.
[0067] Please refer to Figure 4 , Figure 4 This is a fourth perspective view of the valve 100 provided in the embodiments of this application. In some optional embodiments, a sealing ring 124 may be provided on the surface of the valve plate 120 facing the valve port. The sealing ring 124 is located at the edge of the valve plate 120.
[0068] The sealing ring 124 can be made of fluororubber, fluoropolymer, nitrile rubber, etc. In conjunction with the previous embodiments, the sealing ring 124 can specifically be disposed on the valve plate body 121.
[0069] In conjunction with the preceding embodiments, the valve plate 120 is already attached to the edge of the valve port by the linear drive 130, thus closing the valve port. Based on this, by continuing to control the linear drive 130, the inclination of the connecting rod 140 can be changed, thereby altering the pressure applied by the valve plate 120 against the valve port, ultimately achieving adjustable compression of the sealing ring 124.
[0070] In the above implementation process, by setting a sealing ring 124 on the valve plate 120, the sealing performance of the valve 100 is further improved when the valve port is closed.
[0071] Based on the same concept, embodiments of this application provide a vacuum system that may include a vacuum pump, a vacuum chamber, and the valve 100 described above.
[0072] The vacuum chamber may include a chamber shell, on which a valve 100 is provided.
[0073] The above implementation process is the same as that of valve 100 described above, and will not be repeated here.
[0074] In summary, the valve 100 and vacuum system provided in this application embodiment, by rotatably connecting the driving end of the linear drive member 130 and the valve plate 120 at both ends of the connecting rod 140, and under the drive of the linear drive member 130, the distance between the valve plate 120 and the valve port changes based on the change of the inclination of the connecting rod 140, thereby simplifying the structure of the valve 100 and reducing its manufacturing cost while achieving the opening and closing of the valve port. By limiting the number of connecting rods 140 to no less than three, and by limiting that the first and second ends of at least three of these connecting rods 140 are not collinear, the first and second ends of these connecting rods 140 respectively constitute the working surface for the transmission of driving force, improving the stability during the driving process of the valve plate 120. By alternately connecting the first end of each connecting rod 140 to the first and second connecting ends of the rotating pin 152, the arrangement of the connecting rods 140 is more regular, thereby reducing the space required for arranging the connecting rods 140 and further simplifying the structure of the valve 100 provided in this application embodiment. By providing a limiting member 111 on the side of the valve port away from the linear drive member 130, the valve plate 120 can flip along the edge abutting the limiting member 111 when the linear drive member 130 is driven to tilt the connecting rod 140 to its maximum tilt angle, thereby increasing the flow rate of the valve 100. By providing a reinforcing part 123 along the length direction of the valve plate body 121, the strength of the valve plate body 121 in its length direction is improved, thereby enabling the valve plate 120 to better seal the valve port.
[0075] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.
Claims
1. A valve, characterized in that, Includes valve body, valve plate, linear drive component, and connecting rod; The valve body has a valve port; The valve plate is movably disposed on the valve body; The linear drive is disposed on the valve body and has a drive end facing the valve plate; wherein the drive direction of the linear drive is parallel to the direction of the valve plate. The first end of the connecting rod is rotatably connected to the driving end, and the second end of the connecting rod is rotatably connected to the valve plate; wherein, the rotation surface of the first end is parallel to the rotation surface of the second end, and the rotation surface of the first end intersects the plane where the valve plate is located; The drive component is configured to move the valve plate via the connecting rod to open or close the valve port.
2. The valve according to claim 1, characterized in that, in, The rotational surface of the first end of the connecting rod is perpendicular to the plane where the valve plate is located and parallel to the driving direction of the linear drive component.
3. The valve according to claim 1, characterized in that, The number of connecting rods is at least n; where n ≥ 3; At least the first ends of the three connecting rods are not collinear; The second ends of at least three of the connecting rods are not collinear.
4. The valve according to claim 3, characterized in that, The drive end is equipped with a valve core assembly; The valve core assembly includes a valve core and n rotating pins; The length directions of any two rotating pins are parallel to each other and parallel to the plane in which the valve core is located; The n rotating pins are arranged along the driving direction of the linear drive member; The first ends of each of the n connecting rods are rotatably connected to one of the n rotating pins.
5. The valve according to claim 4, characterized in that, The rotary pin has a first connecting end and a second connecting end; The first connecting end faces the first edge of the valve core, and the second connecting end faces the second edge of the valve core; wherein the first edge and the second edge are disposed opposite to each other; Along the driving direction of the linear drive component, the odd-numbered rotary pins are rotatably connected to the connecting rod through their first connecting end, and the even-numbered rotary pins are rotatably connected to the connecting rod through their second connecting end.
6. The valve according to claim 1, characterized in that, The valve body is also provided with a limiting component; The limiting member is located on the side of the valve port away from the linear drive member; The limiting member is configured to abut against the valve plate.
7. The valve according to claim 6, characterized in that, The valve plate includes a valve plate body and rollers; The roller is disposed on the valve plate body at the edge away from the linear drive member; The rotatable direction of the roller is the same as the rotatable direction of the first end of the connecting rod; The roller abuts against the limiting member.
8. The valve according to claim 7, characterized in that, in, The valve plate body has a length direction and a width direction; the valve plate also has a reinforcing part; The reinforcing portion extends from the surface of the valve plate body facing away from the valve port outward from the valve plate body; The two ends of the reinforcing part extend to the two ends of the valve plate body in the length direction and are located in the middle of the valve plate body in the width direction.
9. The valve according to any one of claims 1 to 8, characterized in that, A sealing ring is provided on the surface of the valve plate facing the valve port; The sealing ring is located at the edge of the valve plate.
10. A vacuum system, characterized in that, Includes a vacuum pump, a vacuum chamber, and a valve as described in any one of claims 1 to 9.