Optical testing device

Abstract

The utility model discloses an optical testing device. The optical testing device comprises an optical testing equipment cover and optical testing equipment, the optical test equipment cover comprises a first cover body and a second cover body, wherein the first cover body and the second cover body cover each other to form an equipment accommodating cavity, and the equipment accommodating cavity is used for accommodating optical test equipment; and the first cover body and the second cover body are used for protecting the optical test equipment so as to reduce electromagnetic interference on the optical test equipment. By adopting the scheme, the accuracy of optical testing of the optical testing equipment can be improved.

Description

Technical Field

[0001] This utility model relates to the field of optical testing technology, and specifically to an optical testing device. Background Technology

[0002] Optical testing equipment is a tool or device that uses optical principles for measurement. It is mainly used to measure parameters such as length, shape, angle, color, and brightness, and has a wide range of applications in many fields.

[0003] Infrared spectrometers are a common type of optical testing equipment. They mainly utilize the absorption characteristics of substances to infrared radiation of different wavelengths to analyze molecular structure and chemical composition.

[0004] In practical applications, the accuracy of optical testing is poor when using optical testing equipment such as infrared spectrometers. Utility Model Content

[0005] The problem this invention aims to solve is: how to improve the accuracy of optical testing equipment in optical testing.

[0006] To address the aforementioned problems, this utility model provides an optical testing device, comprising: an optical testing equipment cover and an optical testing device; the optical testing equipment cover comprises: a first cover and a second cover.

[0007] The first cover and the second cover cover cover each other to form a device receiving cavity, which is used to accommodate optical testing equipment;

[0008] The first cover and the second cover are used to protect the optical testing equipment to reduce electromagnetic interference to the optical testing equipment.

[0009] In one possible embodiment, both the first cover and the second cover are made of metal.

[0010] In one possible embodiment, both the first cover and the second cover are made of stainless steel.

[0011] In one possible embodiment, the optical testing device includes: a retractable sample stage; at least one of the first cover and the second cover, a sample inlet / outlet is provided at a position corresponding to the sample stage; the sample inlet / outlet is used for the sample stage to extend out of or retract into the device receiving cavity.

[0012] In one possible embodiment, the optical testing equipment further includes: a testing component and a sample holder; the sample stage is disposed on the sample holder.

[0013] In one possible embodiment, the first enclosure is used to house the test assembly and a portion of the sample holder; the second enclosure is used to house the remaining portion of the sample holder.

[0014] In one possible embodiment, both the first cover and the second cover are cuboids.

[0015] In one possible embodiment, the first cover is provided with a hand-held part.

[0016] In one possible embodiment, the second cover is provided with a wire inlet / outlet corresponding to the position of the charging port of the test component, for the charging cable of the test component to extend out of the device receiving cavity or retract into the device receiving cavity.

[0017] In one possible embodiment, the number of the first cover is two or more, and it is adapted to sample holders with different structures.

[0018] In one possible embodiment, a first blocking member is provided on the inner edge of the second free end of the second cover, and the first free end of the first cover contacts the second cover outside the first blocking member.

[0019] In one possible embodiment, the first blocking member protrudes from the contact surface of the second free end and is disposed circumferentially along the second free end.

[0020] In one possible embodiment, the first free end of the first cover includes a first contact segment and a second contact segment; the first contact segment is connected to the side wall of the second cover and is used to contact the contact surface of the first free end; the second contact segment is connected to the first contact segment and is used to contact the outer side of the first blocking member.

[0021] In one possible embodiment, a gasket is provided on the contact surface of the second free end.

[0022] Compared with the prior art, the technical solution of this utility model embodiment has the following advantages:

[0023] The optical testing equipment cover using the present invention includes a first cover and a second cover, which cover each other to form a device housing cavity. When the optical testing equipment is used for testing, the first cover and the second cover can protect the optical testing equipment inside the device housing cavity, thereby reducing electromagnetic interference to the optical testing equipment and improving the accuracy of the signals received by the optical testing equipment, ultimately improving the accuracy of optical testing. Attached Figure Description

[0024] Figure 1This is a schematic diagram of the overall structure of an optical testing equipment cover according to one embodiment of the present invention;

[0025] Figure 2 yes Figure 1 A side view of the housing of the optical testing equipment;

[0026] Figure 3 This is a schematic diagram of the structure of a first cover in one embodiment of the present invention;

[0027] Figure 4 This is a schematic diagram of the structure of a second cover in one embodiment of the present invention. Detailed Implementation

[0028] Taking infrared spectrometers as an example, when using infrared spectrometers for optical testing, there are various large pieces of equipment and wireless devices in the semiconductor factory workshop. These large pieces of equipment and wireless devices will generate microwaves, and these microwaves may generate electromagnetic noise.

[0029] The inventors discovered that electromagnetic noise in the environment where the infrared spectrometer is located can interfere with the electronic components of the infrared spectrometer, thereby affecting the accuracy of the signals received by the infrared spectrometer, causing unstable peak values ​​in the spectrum, and ultimately affecting the accuracy of optical testing.

[0030] To address this problem, this utility model provides an optical testing equipment cover. The first and second covers of the optical testing equipment cover can form a device housing cavity. When the optical testing equipment is placed in the device housing cavity, the first and second covers can isolate external electromagnetic interference, thereby improving the accuracy of optical testing.

[0031] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0032] This utility model provides an optical testing device, which may include: an optical testing equipment cover and an optical testing device. The optical testing equipment cover may include a first cover and a second cover.

[0033] The first cover and the second cover cover together to form a device receiving cavity, which is used to accommodate optical testing equipment;

[0034] The first and second covers are used to protect the optical testing equipment and reduce electromagnetic interference to the optical testing equipment.

[0035] By setting up a first cover and a second cover, external electromagnetic interference can be shielded when performing optical tests using optical testing equipment, thereby improving the accuracy of optical tests.

[0036] Figure 1 This is a schematic diagram of the overall structure of the optical testing equipment cover in one embodiment of the present invention. Figure 2 for Figure 1 A side view of the housing of the optical testing equipment. (Refer to...) Figure 1 and Figure 2 The optical testing equipment cover may include a first cover 11 and a second cover 12. The first cover 11 and the second cover 12 are fitted together to form a device housing cavity. The shape and size of the device housing cavity can be set according to the size and shape of the optical testing equipment to be housed. The optical testing equipment can be housed inside the housing cavity, thereby using the first cover 11 and the second cover 12 to isolate external electromagnetic interference.

[0037] In specific implementations, the first cover 11 and the second cover 12 can be made of any material capable of shielding electromagnetic interference.

[0038] In some embodiments, the first cover 11 and the second cover 12 may be made of metallic materials, such as iron or copper. The materials of the first cover 11 and the second cover 12 may be the same or different.

[0039] Metallic materials possess excellent electromagnetic shielding properties. Specifically, metals can reflect and absorb electromagnetic waves. When external electromagnetic waves (radio waves, microwaves, etc.) encounter a metal enclosure, they are reflected back or induced currents are generated within the metal. These induced currents produce an electromagnetic field opposite to the external electromagnetic field, canceling out external electromagnetic interference and preventing these interfering signals from entering the internal structure and affecting the normal operation of the infrared optical testing equipment. Thus, it can effectively shield against electromagnetic interference.

[0040] In one embodiment of this utility model, both the first cover 11 and the second cover 12 can be made of stainless steel. Stainless steel has good electrical conductivity and can reflect microwaves, thereby isolating and shielding microwaves, effectively reducing microwave interference to internal equipment or areas. Furthermore, stainless steel is highly corrosion-resistant and does not easily rust or corrode. Moreover, stainless steel has higher strength, resulting in a stable optical testing equipment cover structure that can withstand certain external impacts and vibrations, and is not easily deformed or damaged.

[0041] In specific implementation, the equipment receiving cavity formed by the first cover 11 and the second cover 12 can be a completely closed equipment receiving cavity, thereby improving the anti-interference effect. When testing is required using optical testing equipment, the first cover 11 and the second cover 12 are separated, the optical testing equipment is placed into the equipment receiving cavity through the opening between the first cover 11 and the second cover 12, the sample to be tested is placed on the sample stage, and then the first cover 11 and the second cover 12 are closed, and the optical testing equipment is controlled to perform the test.

[0042] In specific implementations, the optical testing equipment can be any tool or device that measures based on any optical principle, including but not limited to an infrared spectrometer. The optical testing equipment typically includes a testing component and a sample holder. The testing component may include a housing and testing devices located within the housing. The sample holder is typically placed on the housing of the testing component and includes a sample stage through which the sample to be tested can be received, thereby enabling optical testing of the sample.

[0043] The sample to be tested includes, but is not limited to, semiconductor wafers. The optical tests performed on the semiconductor wafers include, but are not limited to, passivation layer analysis and testing of boron (B) and phosphorus (P) content in phosphosilicate glass film (PSG) or boron phosphosilicate glass film (BPSG).

[0044] Taking an infrared spectrometer as an example, its testing components may include: an infrared light source, a beam splitter, a moving mirror and a fixed mirror, and a detector. The infrared light generated by the infrared light source, after illuminating the sample to be tested, passes through the infrared beam splitter; part of it is transmitted to the moving mirror, and the other part is reflected to the fixed mirror. The beams from the moving and fixed mirrors interfere due to the optical path difference, and the signal intensity is measured by the detector. By moving the moving mirror back and forth, an interference pattern of the light source is obtained. Then, using the Fourier transform principle, the interference pattern can be converted into a spectrum that varies with wavelength (wavenumber).

[0045] In practice, the sample stage of optical testing equipment is typically a retractable stage. The stage can be extended using software to receive the sample to be tested. Furthermore, the stage can be retracted using software, allowing the received sample to be placed in the testing position to complete the optical test.

[0046] In one embodiment, to facilitate optical testing operations, a sample inlet / outlet can be provided on the optical testing equipment cover at a position corresponding to the sample stage. In the retracted state, the sample inlet / outlet may only expose the outer side of the sample stage, while in the extended state, the sample inlet / outlet may expose part or even all of it.

[0047] Specifically, the location of the sample inlet / outlet can be set according to the position of the sample stage corresponding to the cover of the optical testing equipment. For example, refer to... Figure 1The sample inlet / outlet 13 can be disposed on the first cover 11 and recessed inward relative to the free end of the first cover 11 (hereinafter referred to as the first free end). After closing, the sample inlet / outlet 13 will expose a portion of the free end of the second cover 12 (hereinafter referred to as the second free end). The portion of the second free end exposed by the sample inlet / outlet 13 also serves as the edge of the sample inlet / outlet 13.

[0048] In other embodiments, the sample inlet / outlet 13 may also be located on the second cover 12. Alternatively, a portion of the sample inlet / outlet 13 may be located on the first cover 11, and the remaining portion may be located on the second cover 12, with the portion on the first cover 11 and the portion on the second cover 12 combined to form a complete sample inlet / outlet 13.

[0049] In practice, the size and shape of the sample inlet / outlet 13 can be set according to the space required for the sample stage to extend and retract. Without affecting the extension and retraction of the sample stage, the sample inlet / outlet 13 should be minimized as much as possible to reduce external electromagnetic interference.

[0050] In specific implementation, the shapes of the first cover 11 and the second cover 12 can be set according to the structure that accommodates the optical testing equipment.

[0051] Figure 3 This is a schematic diagram of the structure of the first cover 11 in one embodiment of the present invention. Figure 4 This is a schematic diagram of the structure of the second cover 12 in one embodiment of the present invention. (Refer to...) Figure 3 and Figure 4 Both the first cover 11 and the second cover 12 can be cuboids. This shape of cover can be adapted to sample racks of various structures and heights, thus offering better versatility.

[0052] The length L1 of the cuboid can range from 800mm to 900mm (e.g., 848mm), and the width W1 can range from 750mm to 850mm (e.g., 798mm). The height H1 of the first cover 11 can range from 250mm to 300mm (e.g., 285mm), and the height H1 of the second cover 12 can range from 280mm to 350mm (e.g., 316mm).

[0053] In other embodiments, the first cover 11 and the second cover 12 may both be cubes or cylinders.

[0054] In specific implementations, to facilitate the closing of the first cover 11 and the second cover 12, a handhold can be provided on at least one of the first cover 11 and the second cover 12. The number of handholds can be set according to actual needs. For example, refer to... Figure 1Handholds 14 can be provided on the symmetrical sides of the first cover 11, with two handholds 14 on each side, so that the first cover 11 can be easily covered onto the second cover 12.

[0055] In some embodiments, the second housing 12 is provided with a wire inlet / outlet (not shown) corresponding to the charging port of the test component. The charging cable of the test component can be extended out of or retracted into the device housing cavity through the wire inlet / outlet, thereby facilitating the charging of the optical testing equipment.

[0056] In a specific implementation, the first cover 11 and the second cover 12 can be connected by a fixed connector. The fixed connector can be set on the two opposite sides of the free ends of the first cover 11 and the second cover 12. One end of the fixed connector is connected to the first free end of the first cover 11 and the other end is connected to the second free end of the second cover 12. Thus, the first cover 11 and the second cover 12 can be opened from the opposite side of the fixed connector to take out or put in the optical testing equipment.

[0057] Specifically, the fixing connector can be implemented using various connectors. For example, a hinge can be used to connect the opposite sides of the first cover 11 and the second cover 12. Preferably, the fixing connector can be located on the side opposite to the sample inlet / outlet. In this way, when the first cover 11 and the second cover 12 are closed, the side where the sample inlet / outlet is located can be closed last, thereby avoiding damage to the sample stage caused by the closing of the first cover 11 and the second cover 12.

[0058] In some embodiments, in order to reduce the materials used in the first cover 11 and the second cover 12 and reduce costs, the first cover 11 and the second cover 12 can be set separately. When needed, the first cover 11 can be covered on the second cover 12 from top to bottom. Compared with a fixed connection, the materials used can be reduced, thereby reducing the cost of the optical testing equipment cover.

[0059] In specific implementation, when the first cover 11 and the second cover 12 are separately installed, in order to make the first cover 11 and the second cover 12 more stable after being closed, refer to Figure 4 A first blocking member 121 can be provided on the inner edge of the second free end of the second cover 12, and the first free end of the first cover 11 contacts the second cover 12 on the outside of the first blocking member 121. At this time, the first blocking member 121 can prevent the second cover 12 from translating in the parallel direction of the contact surface, thereby improving the stability of the contact.

[0060] In one embodiment, the first blocking member 121 has a metal sheet circumferentially disposed along the second free end. This metal sheet may be an extension of the inner edge of the second cover 12, or it may be an additional metal sheet fixed to the inner edge of the second cover 12. The metal sheet may surround the inner side of the second free end, but expose the sample inlet / outlet 13. That is, the first blocking member 121 does not extend into the sample inlet / outlet 13.

[0061] Accordingly, the first free end of the first cover 11 includes a first contact segment and a second contact segment; the first contact segment is connected to the side wall of the second cover 12 and is used to contact the contact surface of the first free end; the second contact segment is connected to the first contact segment and is used to contact the outer side of the first blocking member.

[0062] After closing, the sidewall of the second cover 12 can be in the same plane as the sidewall of the first cover 11. The first contact segment of the second cover 12 contacts the contact surface of the first free end, while the second contact segment extends from the end connected to the first contact segment toward the sidewall of the second cover 12 and can contact the outside of the first blocking member. In this way, the first blocking member blocks the second contact segment, thereby preventing the second cover 12 from moving along the plane of the contact surface.

[0063] In other embodiments, multiple protrusions may be provided at the first free end of the first cover 11, and multiple recesses may be provided at the second free end of the second cover 12. When closed, the protrusions may be placed in the corresponding recesses, thereby using the confinement of the recesses on the protrusions to prevent the second cover 12 from moving along the plane of the contact surface.

[0064] In specific implementations, after the optical testing equipment is installed, the top of the housing of the testing component may be flush with the top of the sample holder, or the top of the housing of the testing component may be higher or lower than the top of the sample holder.

[0065] When the top of the test component housing may be flush with the top of the sample holder, or the top of the test component housing may be higher than the top of the sample holder, the heights of the first cover 11 and the second cover 12 may be set according to the position of the sample inlet / outlet 13, so that the sample inlet / outlet 13 is exposed at the boundary between the first cover 11 and the second cover 12.

[0066] When the top of the test component's housing is lower than the top of the test component's housing, the heights of the first cover 11 and the second cover 12 can be set according to the height of the test component's housing and the height of the sample holder. The first cover 11 is used to accommodate the test component and a portion of the sample holder's height, while the second cover 12 is used to accommodate the remaining portion of the sample holder's height. In this case, the first free end of the first cover 11 can be substantially flush with the top of the test component's housing, while the top of the second cover is slightly higher than the top of the sample holder, thus fully accommodating the sample holder.

[0067] In practice, even with the same optical testing equipment, different test objects and samples may require different sample holders, which in turn may vary. In other words, the same optical testing equipment may need to be replaced with a different sample holder to perform the corresponding tests on different objects, while the testing components remain unchanged. This allows for different tests to be performed by using different testing devices within the testing components.

[0068] To this end, a first cover 11 is provided to accommodate the test components and part of the sample holder, and a second cover 12 is provided to accommodate the remaining part of the sample holder. The second cover 11 can also be kept stationary when the sample holder is replaced, thereby improving the convenience of testing.

[0069] In one embodiment, a gasket, such as a rubber gasket, may be provided on the second free end of the second cover 12. Using this gasket, the friction between the free ends of the first cover 11 and the second cover 12 can be reduced when the first cover 11 and the second cover 12 are covered, and the movement of the first cover 11 in the parallel direction of the contact surface can be prevented.

[0070] In specific implementation, the optical testing equipment cover may consist of only a first cover 11 and a second cover 12. In this case, after replacing the sample holder, a new optical testing equipment cover can be replaced for electromagnetic protection.

[0071] In some embodiments, the same optical testing equipment cover may have only one second cover 12, but multiple first covers 11. After changing the sample holder, a matching first cover 11 can be selected to cover the second cover.

[0072] Taking an infrared spectrometer as the optical testing device and a semiconductor wafer as the sample to be tested as an example, in practical applications, the first cover 11 and the second cover 12 can be separated first, the infrared spectrometer can be placed inside the second cover 12, and the first cover 11 can be placed on top of the second cover 12. At this time, the sample inlet / outlet on the first cover 11 is aligned with the sample stage of the infrared spectrometer.

[0073] Next, the sample stage is extended out of the equipment cavity using software control, and the wafer to be tested is placed on the sample stage. Then, the sample stage is retracted back into the equipment cavity to begin optical testing. Specifically, the infrared light generated by the infrared source illuminates the wafer to be tested. After passing through the infrared beam splitter, part of the light is transmitted to the moving mirror, and the other part is reflected to the fixed mirror. The beams from the moving and fixed mirrors interfere due to the optical path difference, and the signal intensity is measured by the detector. By moving the moving mirror back and forth, the interference pattern of the light source is obtained. Then, using the Fourier transform principle, the interference pattern is converted into a spectrum that varies with wavelength, so that the test results can be obtained based on the spectrum.

[0074] Because electromagnetic interference is shielded, the stability of the signal received by the infrared spectrometer is improved. During spectral analysis, a stable signal makes the peak values ​​absorbed by the infrared more stable and clear, thereby improving the accuracy of the test.

[0075] As can be seen from the above, the optical testing device in this embodiment of the invention can shield against external electromagnetic interference through the optical testing equipment cover, effectively improving the stability of optical testing. Furthermore, the optical testing equipment cover adopts a split design, facilitating installation, disassembly, and maintenance. The sample inlet / outlet at the front of the optical testing equipment cover allows for easy entry and exit of the sample stage, thereby improving the convenience of optical testing without altering the original structure of the optical testing equipment.

[0076] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the present invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. An optical testing device, characterized in that, The optical testing device includes: an optical testing equipment cover, and optical testing equipment; the optical testing equipment cover includes: a first cover body and a second cover body; The first cover and the second cover cover cover each other to form a device receiving cavity, which is used to accommodate optical testing equipment; The first cover and the second cover are used to protect the optical testing equipment to reduce electromagnetic interference to the optical testing equipment.

2. The optical testing apparatus as described in claim 1, characterized in that, Both the first cover and the second cover are made of metal.

3. The optical testing apparatus as described in claim 2, characterized in that, Both the first cover and the second cover are made of stainless steel.

4. The optical testing apparatus as described in claim 1, characterized in that, The optical testing equipment includes: a retractable sample stage; at least one of the first cover and the second cover, a sample inlet / outlet is provided at a position corresponding to the sample stage; the sample inlet / outlet is used for the sample stage to extend out of or retract into the equipment receiving cavity.

5. The optical testing apparatus as described in claim 4, characterized in that, The optical testing equipment also includes: a testing component and a sample holder; the sample stage is mounted on the sample holder.

6. The optical testing apparatus as described in claim 5, characterized in that, The first enclosure is used to house the test assembly and a portion of the sample holder; the second enclosure is used to house the remaining portion of the sample holder.

7. The optical testing apparatus as described in claim 6, characterized in that, Both the first and second covers are cuboids.

8. The optical testing apparatus as described in claim 6, characterized in that, The first cover is provided with a hand-held part.

9. The optical testing apparatus as described in claim 6, characterized in that, The second cover has a wire inlet / outlet corresponding to the charging port of the test component, so that the charging cable of the test component can extend out of the device housing cavity or retract into the device housing cavity.

10. The optical testing apparatus as described in claim 5, characterized in that, The number of the first cover is two or more, and it is adapted to sample holders with different structures.

11. The optical testing apparatus as described in claim 1, characterized in that, The second free end of the second cover is provided with a first blocking member on its inner edge, and the first free end of the first cover contacts the second cover on the outside of the first blocking member.

12. The optical testing apparatus as described in claim 11, characterized in that, The first blocking member protrudes from the contact surface of the second free end and is arranged circumferentially along the second free end.

13. The optical testing apparatus as described in claim 12, characterized in that, The first free end of the first cover includes a first contact segment and a second contact segment; the first contact segment is connected to the side wall of the second cover and is used to contact the contact surface of the first free end; the second contact segment is connected to the first contact segment and is used to contact the outer side of the first blocking member.

14. The optical testing apparatus as described in claim 12, characterized in that, A gasket is provided on the contact surface of the second free end.

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