Load sample heating assembly and solar cell production equipment

Abstract

The utility model discloses a loading sample heating assembly and solar cell production equipment, the loading sample heating assembly comprises a furnace tube, the inner wall of the furnace tube comprises a first support plane; the sample carrying boat is used for carrying a product, and the sample carrying boat is arranged on the first supporting plane in a supporting manner; and the heating piece is used for heating the furnace tube. The sample loading boat can be effectively prevented from sliding or displacing, so that on one hand, the risk that the sample loading boat and the furnace tube are damaged can be reduced, and silicon wafers loaded on the sample loading boat can be prevented from being broken; and on the other hand, the positions of the sample loading boats which do not slide or displace are not changed, so that the sample loading boats can be normally taken out from the furnace tube after each working procedure is finished, and the silicon wafers can be normally unloaded from the sample loading boats.

Description

Technical Field

[0001] This application relates to the field of solar cell production equipment technology, and in particular to a sample heating component and solar cell production equipment. Background Technology

[0002] In the field of solar cell manufacturing, furnace tubes and sample carriers are key manufacturing equipment, playing an important role in processes such as diffusion, thermal oxidation, annealing, and low-pressure chemical vapor deposition.

[0003] In related technologies, the furnace tube is cylindrical, and the sample carrier boat is supported on the inner wall of the furnace tube. However, the problem is that the support of the sample carrier boat on the inner wall of the furnace tube is unstable, which can easily lead to slippage or displacement of the sample carrier boat. On the one hand, this can easily cause damage to the sample carrier boat and the furnace tube, and also can easily cause the silicon wafer loaded on the sample carrier boat to crack. On the other hand, because the position of the sample carrier boat changes due to slippage or displacement, it can also easily affect the normal removal of the sample carrier boat from the furnace tube after each process. Utility Model Content

[0004] In view of the above-mentioned deficiencies in the related technologies, this application provides a sample heating component and solar cell production equipment to solve the problem that the sample boat is prone to slippage or displacement in the furnace tube in the related technologies.

[0005] To address the aforementioned technical problems, in a first aspect, this application provides a sample-carrying heating assembly, which includes:

[0006] A furnace tube, the inner wall of which includes a first supporting plane;

[0007] A sample carrier boat is used to carry the product, and the sample carrier boat is supported on the first support plane.

[0008] A heating element for heating the furnace tube.

[0009] In one possible implementation of the first aspect, the sample carrier boat is provided with a second support plane, and the second support plane is in surface-to-surface contact with the first support plane.

[0010] In one possible implementation of the first aspect, the sample carrier boat includes:

[0011] boat body;

[0012] Boat feet, there are multiple boat feet, all of which are provided on the boat body, and each boat foot is provided with a second support plane.

[0013] In a possible implementation of the first aspect, the furnace tube includes:

[0014] A straight plate segment is used to form the inner cavity of the furnace tube, and the first supporting plane is the plate surface of the straight plate segment located in the inner cavity.

[0015] In one possible implementation of the first aspect, the inner wall of the furnace tube includes:

[0016] An arched surface is located at the top of the inner cavity of the furnace tube, and the arched surface protrudes outward from the furnace tube.

[0017] In a possible implementation of the first aspect, the furnace tube includes:

[0018] An arched plate segment is used to form the inner cavity of the furnace tube, and the arched surface is the plate surface of the arched plate segment located in the inner cavity.

[0019] In one possible implementation of the first aspect, the bottom of the sample carrier boat is provided with a groove, the groove including a bottom wall, a first side wall and a second side wall disposed opposite to each other, the bottom wall, the first side wall and the second side wall are all connected to the side of the sample carrier boat, and a clearance opening is formed on the side.

[0020] The clearance opening is used to allow the transfer component to enter the groove to support the sample carrier boat and transfer the sample carrier boat to the inside or outside of the furnace tube.

[0021] In a possible implementation of the first aspect, both the first sidewall and the second sidewall are inclined walls, and the distance between the first sidewall and the second sidewall gradually increases in the direction away from the bottom wall.

[0022] In one possible implementation of the first aspect, the sample carrier boat is further provided with boat lugs for connecting to a lifting device.

[0023] Secondly, this application also provides a solar cell manufacturing apparatus, which includes:

[0024] The first aspect describes any of the sample-carrying heating components.

[0025] Compared with related technologies, this application has at least the following beneficial effects:

[0026] In this application, because the inner wall of the furnace tube includes a first supporting plane, and because the sample carrier boat is supported on the first supporting plane, compared with the arc-shaped inner wall of the cylindrical furnace tube in the related art, the first supporting plane can provide more stable support for the sample carrier boat, enabling a stable contact between the first supporting plane and the sample carrier boat, effectively preventing the sample carrier boat from slipping or shifting. Furthermore, on the one hand, this reduces the risk of damage to the sample carrier boat and the furnace tube, and also prevents the silicon wafers loaded on the sample carrier boat from breaking; on the other hand, because the position of the sample carrier boat, which does not slip or shift, remains unchanged, it ensures that the sample carrier boat can be normally removed from the furnace tube after each process, and thus also ensures the normal unloading of the silicon wafers from the sample carrier boat. Attached Figure Description

[0027] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0028] Figure 1 A schematic diagram of the sample-carrying heating assembly provided in an embodiment of this application;

[0029] Figure 2 A schematic diagram of a furnace tube provided in an embodiment of this application;

[0030] Figure 3 A schematic diagram of the sample carrier boat provided in the embodiments of this application;

[0031] Figure 4 for Figure 3 Enlarged view of section A;

[0032] Figure 5 This is a schematic diagram of a solar cell production equipment provided in an embodiment of this application.

[0033] Explanation of reference numerals in the attached figures:

[0034] 1-Furnace tube; 11-First supporting plane; 12-Straight plate section; 13-Inner cavity; 14-Arched surface; 15-Arched plate section;

[0035] 2-Sample boat; 21-Second support plane; 22-Boat body; 23-Boat foot; 24-Groove; 241-Bottom wall; 242-First side wall; 243-Second side wall; 25-Clearing opening; 26-Boat ear;

[0036] 100-Sample heating assembly. Detailed Implementation

[0037] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0038] In this application, the terms "upper," "lower," "left," "right," "front," "rear," "top," "bottom," "inner," "outer," "vertical," "horizontal," "lateral," and "longitudinal" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this application and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0039] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0040] Furthermore, the terms "installation," "setup," "equipped with," "connection," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0041] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, elements, or components (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, elements, or components. Unless otherwise stated, "a plurality of" means two or more.

[0042] As described in the background section of this application, in the field of solar cell manufacturing, furnace tubes and sample carriers are key manufacturing equipment, playing an important role in processes such as diffusion, thermal oxidation, annealing, and low-pressure chemical vapor deposition.

[0043] In related technologies, the furnace tube is cylindrical, and the sample carrier boat is supported on the inner wall of the furnace tube. However, the problem is that the support of the sample carrier boat on the inner wall of the furnace tube is unstable, which can easily lead to slippage or displacement of the sample carrier boat. On the one hand, this can easily cause damage to the sample carrier boat and the furnace tube, and also can easily cause the silicon wafer loaded on the sample carrier boat to crack. On the other hand, because the position of the sample carrier boat changes due to slippage or displacement, it can also easily affect the normal removal of the sample carrier boat from the furnace tube after each process.

[0044] Example 1

[0045] In view of the above-mentioned problems, this application provides a sample carrying heating assembly to solve the problem that the sample carrying boat is prone to slippage or displacement in the furnace tube in the related art.

[0046] The technical solution of this application will be further described below with reference to specific embodiments and accompanying drawings:

[0047] like Figure 1 and Figure 2 As shown, the sample heating assembly 100 includes a furnace tube 1, a sample carrier boat 2, and a heating element (not shown in the figure). The inner wall of the furnace tube 1 includes a first supporting plane 11. The sample carrier boat 2 is used to carry the product and is supported on the first supporting plane 11. The heating element is used to heat the furnace tube 1.

[0048] In this application, since the inner wall of the furnace tube 1 includes a first supporting plane 11, and since the sample carrier boat 2 is supported on the first supporting plane 11, compared with the arc-shaped inner wall of the cylindrical furnace tube in the related art, the first supporting plane 11 can provide more stable support for the sample carrier boat 2, so that a stable contact can be formed between the first supporting plane 11 and the sample carrier boat 2, which can effectively prevent the sample carrier boat 2 from slipping or shifting. Furthermore, on the one hand, it can not only reduce the risk of damage to the sample carrier boat 2 and the furnace tube 1, but also prevent the silicon wafers loaded on the sample carrier boat 2 from breaking; on the other hand, since the position of the sample carrier boat 2 does not change due to slipping or shifting, it can be ensured that the sample carrier boat 2 can be normally removed from the furnace tube 1 after each process, and thus the normal unloading of the silicon wafers from the sample carrier boat 2 can also be ensured.

[0049] Regarding the heating element, in this embodiment of the application, the heating element can be a resistance heating wire or an induction coil, etc. The type of heating element is set flexibly. Specifically, it can be set according to actual needs. This embodiment of the application does not make specific limitations on this.

[0050] In other embodiments, the product carried by the sample carrier boat 2 can also be a ceramic material blank or a metal material. The choice of product type is flexible. Specifically, it can be determined according to the usage scenario of the sample heating component. This application embodiment does not make specific limitations in this regard.

[0051] Furthermore, such as Figure 3 As shown, a second support plane 21 is provided on the sample carrier boat 2, and the second support plane 21 is in surface contact with the first support plane 11.

[0052] This configuration has several advantages. Firstly, surface-to-surface contact provides a more stable support structure compared to point or line contact. Therefore, the surface-to-surface contact between the second support plane 21 and the first support plane 11 enables a more stable contact between the first support plane 11 and the sample carrier boat 2, thereby further preventing the sample carrier boat 2 from slipping or shifting.

[0053] On the other hand, the surface-to-surface contact between the second support plane 21 and the first support plane 11 can increase the contact area between the furnace tube 1 and the sample carrier boat 2. This can ensure uniform stress distribution when subjected to high temperature and mechanical stress, avoid stress concentration, and effectively reduce the risk of cracks or damage.

[0054] In other embodiments, the contact between the sample carrier 2 and the first support plane 11 can be a line contact or a point contact. The contact method between the sample carrier 2 and the first support plane 11 is flexible and can be set according to actual needs. This application embodiment does not impose specific limitations on this.

[0055] Furthermore, such as Figure 3 As shown, the sample carrier boat 2 includes a boat body 22 and boat feet 23. Multiple boat feet 23 are provided and are all provided on the boat body 22. Each boat foot 23 is provided with a second support plane 21.

[0056] With this configuration, on the one hand, the multiple boat feet 23 can form a more stable support structure for the sample carrier boat 2 inside the furnace tube 1. In this way, when the sample carrier boat 2 is subjected to external disturbances (such as vibrations generated during operation, impacts from airflow inside the furnace tube, etc.), the multiple boat feet 23 can disperse these disturbances, reduce the risk of the sample carrier boat 2 tipping over or shaking, and enable the sample carrier boat 2 to be more stably supported inside the furnace tube 1.

[0057] On the other hand, since the first support plane 11 of the furnace tube 1 may have slight unevenness or local wear after long-term use, a second support plane 21 is set on multiple boat feet 23 so that each boat foot 23 can independently adjust its contact with the first support plane 11, ensuring that the sample boat 2 can have stable support under different conditions.

[0058] In other embodiments, the second support plane 21 can also be disposed on the boat body 22. This arrangement eliminates the need for boat feet 23, thereby simplifying the structure of the sample carrier boat 2 and facilitating its manufacturing.

[0059] Furthermore, such as Figure 3 As shown, the bottom of the sample carrier boat 2 is provided with a groove 24, such as Figure 4 As shown, the groove 24 includes a bottom wall 241, a first side wall 242 and a second side wall 243 disposed opposite to each other. The bottom wall 241, the first side wall 242 and the second side wall 243 are all connected to the side of the sample carrier boat 2, and a clearance opening 25 is formed on the side. Figure 3 (As shown).

[0060] The clearance opening 25 is used to avoid the transfer component (not shown in the figure) so that the transfer component can enter the groove 24 to support the sample carrier boat 2 and transfer the sample carrier boat 2 to the inside or outside of the furnace tube 1.

[0061] With this configuration, firstly, the groove 24 and the clearance opening 25 provide a dedicated access space for the transfer component. This allows the transfer component to smoothly enter the groove 24 through the clearance opening 25 when transferring the sample carrier boat 2, and then support the sample carrier boat 2, making the connection between the transfer component and the sample carrier boat 2 more precise and convenient.

[0062] Secondly, when the transfer component enters the groove 24 to support the sample carrier boat 2, the position of the sample carrier boat 2 can be well fixed during the transfer process due to the limiting effect of the bottom wall 241, the first side wall 242 and the second side wall 243 of the groove 24. The sample carrier boat 2 is not easy to shake, tilt or fall during the transfer process, thereby reducing the risk of product damage during the transfer process.

[0063] Finally, the transfer component supports the sample carrier boat 2 within the groove 24. Its contact position and manner are relatively fixed, reducing damage to the sides or bottom of the sample carrier boat 2 due to improper contact. Simultaneously, the transfer component can operate in a relatively stable environment, reducing the impact on its own structure caused by the shaking of the sample carrier boat 2, thus extending the service life of both the transfer component and the sample carrier boat 2.

[0064] Regarding the transfer component, in this embodiment of the application, the transfer component can be a silicon carbide paddle or a robotic arm, etc. The structure of the transfer component is relatively flexible, and can be set according to actual needs. This embodiment of the application does not make specific limitations on this.

[0065] Furthermore, such as Figure 4 As shown, both the first sidewall 242 and the second sidewall 243 are inclined walls, and the distance between the first sidewall 242 and the second sidewall 243 is in the direction away from the bottom wall 241 (e.g., Figure 4 It gradually increases in the Y direction.

[0066] With this configuration, firstly, the first sidewall 242 and the second sidewall 243 can guide the transfer component smoothly into the groove 24, reducing the occurrence of situations where the transfer component cannot enter the groove 24 due to inaccurate positioning, and improving the fault tolerance and efficiency of the transfer process.

[0067] Secondly, since different transfer components may have some differences in size and shape, the design of the inclined wall allows the groove 24 to better adapt to various types of transfer components, increasing the flexibility of the sample carrier 2 in cooperating with various transfer components, so that the sample carrier 2 can successfully complete the transfer operation under different transfer components or process requirements.

[0068] Finally, the inclined wall can guide the transfer component to slowly enter the groove 24, making the contact between the transfer component and the side wall of the groove 24 smoother. This can reduce the collision and friction between the transfer component and the side wall of the groove 24, thereby protecting the structural integrity of the sample carrier boat 2 and extending its service life.

[0069] In other embodiments, both the first sidewall 242 and the second sidewall 243 are perpendicular to the bottom wall 241, meaning the distance between the first sidewall 242 and the second sidewall 243 does not change in the direction away from the bottom wall 241. This arrangement simplifies the structure of the groove 24 to some extent and facilitates its processing.

[0070] Furthermore, such as Figure 3 As shown, the sample carrier boat 2 is also equipped with boat ears 26, which are used to connect with the lifting device.

[0071] With this configuration, the boat lug 26 can serve as a gripping point during automated or manual operation, facilitating the safe handling of the sample boat 2 into and out of the furnace tube 1 or other equipment using lifting tools (such as hooks or robotic arms), thus reducing the risk of contamination or damage caused by direct contact with the boat hull.

[0072] For furnace tube 1, further, as Figure 2 As shown, the furnace tube 1 includes a straight plate section 12, which is used to form the inner cavity 13 of the furnace tube 1. The first supporting plane 11 is the plate surface of the straight plate section 12 located in the inner cavity 13.

[0073] With this configuration, on the one hand, the straight plate segment 12 is used to form the first support plane 11, which not only facilitates the formation of the first support plane 11, but also makes it easier to control the dimensional accuracy and surface flatness of the straight plate segment during processing, thereby reducing manufacturing difficulty and cost and improving production efficiency.

[0074] On the other hand, the structure of the straight plate section 12 facilitates heat transfer within the furnace tube 1. Heat can be transferred relatively evenly from the heating element to the first support plane 11 on the straight plate section 12, and then to the sample carrier boat 2 and the product it carries. This uniform heat conduction helps achieve more precise temperature control, which is crucial for some temperature-critical processing techniques, ensuring that products are processed in a suitable temperature environment and improving processing quality.

[0075] In other embodiments, the furnace tube 1 includes a first plate segment, the cross-sectional shape of which can be triangular, pentagonal, or semi-circular, etc., and the plate surface of the first plate segment located in the inner cavity 13 is the first supporting plane 11. Therefore, the structural arrangement of the plate segment on the furnace tube 1 used to form the first supporting plane 11 is quite flexible, and can be configured according to actual needs.

[0076] Furthermore, such as Figure 2 As shown, the inner wall of the furnace tube 1 includes an arched surface 14, which is located at the top of the inner cavity 13 of the furnace tube 1 and protrudes outward from the furnace tube 1.

[0077] This design has several advantages. First, the arched structure has excellent compressive strength. Second, the furnace tube 1 may be subjected to internal pressure (such as gas pressure generated during heating) and external pressure (such as the pressure from surrounding equipment or its own weight) during operation. Therefore, the arched surface 14 can effectively disperse these pressures and transfer them to the side walls and bottom of the furnace tube 1 through the arched structure, thereby improving the overall compressive strength of the furnace tube 1. The arched surface 14 makes the structure of the furnace tube more robust and durable, reducing the risk of damage to the furnace tube 1 due to excessive pressure and, to a certain extent, reducing the risk of the furnace tube 1 collapsing due to prolonged high-temperature environment.

[0078] Secondly, when the furnace tube 1 is subjected to uneven thermal stress or external impact, the structure of the arched surface 14 can play a certain role in buffering and resisting deformation. It can absorb some energy through its own elastic deformation and maintain the stability of the overall structure, avoiding damage such as dents or cracks.

[0079] Furthermore, during the heating process, the heat generated by the heating element propagates into the furnace tube 1 via thermal radiation. The arched surface 14 enables a more uniform distribution of thermal radiation within the furnace tube 1. Thermal radiation is reflected from various points on the arched surface 14 towards the sample carrier 2 and the product below. Compared to the top of a flat surface, the arched surface 14 reduces localized heat concentration or loss due to reflection angle issues, contributing to more uniform heating of the silicon wafer and thus improving processing quality. Simultaneously, the arched surface 14 better reflects heat to the effective area inside the furnace tube 1, improving heat utilization and reducing energy consumption required for heating.

[0080] Finally, the arched surface 14 is located at the top of the inner cavity 13 of the furnace tube 1 and protrudes outward, which effectively increases the space of the inner cavity 13 of the furnace tube 1. At the same time, some gaseous byproducts may be generated during certain heat treatment processes. The arched top space can provide sufficient space for these gaseous substances to accumulate and diffuse, avoiding their interference with the processing.

[0081] In other embodiments, the inner wall of the furnace tube 1 at the top of the inner cavity 13 can also be flat. This arrangement simplifies the structure of the furnace tube 1 and facilitates its processing and manufacturing.

[0082] Furthermore, such as Figure 2 As shown, the furnace tube 1 includes an arched plate segment 15, which is used to form the inner cavity 13 of the furnace tube 1, and the arched surface 14 is the plate surface of the arched plate segment 15 located in the inner cavity 13.

[0083] With this configuration, firstly, since the surface of the arched plate segment 15 located in the inner cavity 13 is arched, and also since the surface of the arched plate segment 15 located outside the furnace tube 1 is arched, the pressure on the furnace tube 1 can be more effectively distributed through the arched plate segment 15, further enhancing the pressure resistance of the furnace tube 1, thereby making the structure of the furnace tube more robust and durable, further reducing the risk of damage to the furnace tube 1 due to excessive pressure, and further reducing the risk of the furnace tube 1 collapsing due to prolonged high temperature environment.

[0084] Secondly, since the thickness of the arched plate segment 15 is relatively uniform, during the heating process, the heat radiation can be further evenly distributed inside the furnace tube 1 through the arched plate segment 15.

[0085] Finally, since the thickness of the arched plate segment 15 is relatively uniform and there is no superfluous structural design, the arched plate segment 15 can, to a certain extent, help to achieve the lightweight design of the furnace tube 1 and reduce the space occupied by the furnace tube 1.

[0086] In other embodiments, the furnace tube 1 includes a second plate segment. The plate surface of the second plate segment located in the inner cavity 13 of the furnace tube 1 is an arched surface 14, while the plate surface of the second plate segment located outside the furnace tube 1 can be a flat surface. This configuration simplifies the structure of the furnace tube 1 to a certain extent and facilitates its processing.

[0087] Example 2

[0088] This application also provides solar cell manufacturing equipment, such as... Figure 5 As shown, the solar cell production equipment includes a sample heating component 100. The sample heating component 100 has the same structure as any of the sample heating components 100 in the above embodiments and can bring the same or similar beneficial effects. For details, please refer to the description in the above embodiments. This embodiment will not be repeated here.

[0089] In this application, since the inner wall of the furnace tube 1 includes a first supporting plane 11, and since the sample carrier boat 2 is supported on the first supporting plane 11, compared with the arc-shaped inner wall of the cylindrical furnace tube in the related art, the first supporting plane 11 can provide more stable support for the sample carrier boat 2, so that a stable contact can be formed between the first supporting plane 11 and the sample carrier boat 2, which can effectively prevent the sample carrier boat 2 from slipping or shifting. Furthermore, on the one hand, it can not only reduce the risk of damage to the sample carrier boat 2 and the furnace tube 1, but also prevent the silicon wafers loaded on the sample carrier boat 2 from breaking; on the other hand, since the position of the sample carrier boat 2 does not change due to slipping or shifting, it can be ensured that the sample carrier boat 2 can be normally removed from the furnace tube 1 after each process, and thus the normal unloading of the silicon wafers from the sample carrier boat 2 can also be ensured.

[0090] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A sample-loaded heating assembly, comprising: The application relates to a sample loading and heating assembly. The furnace tube comprises a first supporting plane on the inner wall of the furnace tube; The sample loading boat is used for carrying products and is supported by the first supporting plane; The heating element is used for heating the furnace tube.

2. The sample-loaded heating assembly of claim 1, wherein, The sample loading boat comprises a second supporting plane, which is in surface-to-surface contact with the first supporting plane.

3. The sample-loaded heating assembly of claim 2, wherein, The sample loading boat comprises: A boat body; A plurality of boat feet are arranged on the boat body, and each boat foot is provided with the second supporting plane.

4. The sample-loaded heating assembly of any one of claims 1-3, wherein, The furnace tube comprises: A straight plate section is used for surrounding the inner cavity of the furnace tube, and the first supporting plane is a plate surface of the straight plate section in the inner cavity.

5. The sample-loaded heating assembly of any one of claims 1-3, wherein, The inner wall of the furnace tube comprises: An arched surface is arranged on the top of the inner cavity of the furnace tube and protrudes outward from the furnace tube.

6. The sample-loaded heating assembly of claim 5, wherein, The furnace tube comprises: An arched plate section is used for surrounding the inner cavity of the furnace tube, and the arched surface is a plate surface of the arched plate section in the inner cavity.

7. The sample-loaded heating assembly of any one of claims 1-3, wherein, The bottom of the sample loading boat is provided with a groove, which comprises a bottom wall, first and second side walls arranged oppositely, and the bottom wall, the first side wall and the second side wall are connected with the side of the sample loading boat and form an avoiding opening on the side. The avoiding opening is used for avoiding a transfer element so that the transfer element enters the groove to support the sample loading boat and transfers the sample loading boat into or out of the furnace tube.

8. The sample-loaded heating assembly of claim 7, wherein, The first and second side walls are inclined walls, and the distance between the first and second side walls gradually increases in the direction away from the bottom wall.

9. The sample-loaded heating assembly of any one of claims 1-3, wherein, The sample loading boat is further provided with a boat ear for being connected with a lifting appliance.

10. A solar cell manufacturing equipment, characterized in that, The application relates to a sample loading and heating assembly. The application relates to a sample loading and heating assembly.

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