Reciprocating type wet coating equipment
By employing a dual-head design in a reciprocating wet coating equipment and a hot air knife pre-drying/crystallization process, the stability and uniformity issues of water- and oxygen-sensitive films during wet coating have been resolved. This enables efficient and uniform film preparation, suitable for the production of functional films for novel rechargeable lithium batteries, flat panel displays, and solar cells.
Patent Information
- Application Number
- CN202422672755.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-04
- Publication Date
- 2026-03-06
- Estimated Expiration
- 2034-11-04
AI Technical Summary
Existing wet slot coating processes are difficult to prepare thin films without contact with water and oxygen, especially for functional layers that are sensitive to water and oxygen, such as perovskite films, resulting in poor film stability and limited photoelectric conversion efficiency.
A reciprocating wet coating equipment is used, which integrates the first and second coating dies and the hot air knife to coat the functional film layer and the passivation film layer respectively. The hot air knife is used for pre-drying/crystallization to control the solvent gradient and reduce film defects.
It achieves protection of water and oxygen sensitive membranes, reduces membrane defects, ensures membrane performance uniformity and photoelectric conversion efficiency, and meets the needs of low-cost, high-quality large-scale production.
Smart Images

Figure CN223970297U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of thin film preparation technology, specifically relating to a reciprocating wet coating device. Background Technology
[0002] In recent years, the development of new rechargeable lithium batteries, flat panel displays, and solar cells has been rapid. These products often require thinner and more uniform functional films. Traditionally, chemical vapor deposition (CVD) and physical vapor deposition (PVD) methods are used to prepare such films. These methods deposit gaseous or solid materials onto a specific substrate under vacuum conditions through chemical reactions or physical means (such as evaporation). Because a vacuum-sealed process environment is required, it is difficult to achieve low-cost, high-efficiency large-scale production. Therefore, wet coating processes have become an indispensable and important technological means for the research and development of many important functional materials.
[0003] Wet coating technologies include dip coating, spin coating, roller coating, curtain coating, and slot extrusion coating. Among these, slot extrusion coating is a typical example of precision coating technology. It can meet the special requirements of certain coatings and its application range is constantly expanding. For example, the coating of new rechargeable lithium battery electrodes requires strip coating or intermittent block coating. The coating thickness of anti-reflective and anti-glare films used in liquid crystal displays is only tens to 100 nm, and the thickness of various functional layers in thin-film solar cells also ranges from tens to 1000 nm. At the same time, slot extrusion coating has advantages such as high coating uniformity, a wide range of applicable coating viscosity, fast coating speed, and high material utilization. It meets the requirements of low cost, high quality, and large-scale production, making it a better choice to meet the needs of market competition.
[0004] In wet slot coating, a solution (composed of solvent and solute) is typically first coated onto a substrate to form a wet film. The solvent is then evaporated through a drying process, and finally, an annealing and crystallization process forms the desired dry film. For some functional films sensitive to water and oxygen, it is crucial to minimize contact with water and oxygen during fabrication. If prepared using the above process, the film will be in prolonged contact with water and oxygen, potentially causing material degradation and ultimately resulting in defects. For example, the core light-absorbing layer in perovskite solar cells—the perovskite film—has poor stability, particularly in its resistance to water and oxygen; surface defect sites and grain interfaces are prone to decomposition upon contact with water and oxygen. While adjusting parameters such as composition, crystal form, and lattice stress can improve stability to some extent, the problem of water and oxygen resistance remains difficult to completely solve. Furthermore, for some functional films prepared using wet slot coating—such as perovskite films—the limitations of the process itself, such as the consistency issues of large-area coatings, can lead to nonradiative recombination of charge carriers due to surface defects, thus limiting photoelectric conversion efficiency. Summary of the Invention
[0005] The purpose of this utility model is to provide a reciprocating wet coating equipment, including a first solution supply system, a second solution supply system, and a hot air supply system, wherein: the first solution supply system includes a first supply tank, which is connected to a first coating die head via a first pipe, and a first supply pump is installed on the first pipe between the first supply tank and the first coating die head; the second solution supply system includes a second supply tank, which is connected to a second coating die head via a second pipe, and a second supply pump is installed on the second pipe between the second supply tank and the second coating die head; the hot air supply system includes an air supply tank, which is connected to a hot air knife via a third pipe, and a blower is installed on the third pipe between the air supply tank and the hot air knife, and a third control valve is installed on the third pipe between the blower and the air supply tank; the hot air knife is arranged between the first coating die head and the second coating die head to form an integrated die head.
[0006] Furthermore, in the reciprocating wet coating equipment, a first control valve is provided on the first pipeline between the first liquid supply tank and the first liquid supply pump.
[0007] Furthermore, in the reciprocating wet coating equipment, a second control valve is provided on the first pipeline between the second liquid supply tank and the second liquid supply pump.
[0008] Furthermore, in the reciprocating wet coating equipment, the air supply tank is equipped with a heating device.
[0009] Furthermore, in the reciprocating wet coating equipment, the first coating die, the hot air knife, and the second coating die are all mounted on the drive mechanism, and the moving coating operation is realized through the drive mechanism.
[0010] Furthermore, in the reciprocating wet coating equipment, the drive mechanism includes a guide rail, a servo motor, and a moving gantry. The servo motor is mounted on the moving gantry, and its output end is connected to the guide rail via a gear. The integrated die head is mounted on the moving gantry. The servo motor drives the gear to move on the guide rail, thereby moving the moving gantry along the guide rail, thus realizing the coating movement of the first coating die head, the hot air knife, and the second coating die head.
[0011] Research has shown that passivating functional films—such as perovskite films—by introducing a dense passivation layer on their surface can not only isolate water and oxygen, but also reduce nonradiative recombination of charge carriers by repairing surface defects of the perovskite film during the passivation process, thereby ensuring the photoelectric conversion efficiency of the battery.
[0012] The wet coating equipment provided by this utility model can repeatedly coat two different, uniform thin films on a substrate. The equipment integrates two coating dies, a first coating die and a second coating die, which can coat functional film layers and passivation film layers respectively; it also integrates a hot air knife to pre-dry / crystallize the separately coated wet films.
[0013] The wet coating equipment provided by this utility model includes a first solution supply system and a second solution supply system that supply / control the solution into the first coating die and the second coating die, respectively, during operation; a hot air supply system that supplies / controls hot air into the hot air knife; the first coating die and the second coating die coat the solution onto the substrate surface below them to form a thin film layer and ensure uniform distribution of the solution across the coating width; the hot air knife guides pressurized hot air vertically or obliquely towards the substrate surface to evaporate the solvent in the wet film on the substrate surface, achieving pre-drying / crystallization of the wet film; a servo motor controls the first coating die, the second coating die, and the hot air knife to pass through the substrate, while simultaneously controlling and maintaining the position of the substrate relative to the coating die and the hot air knife.
[0014] The wet coating equipment provided by this utility model adopts a combination design of a first coating die head, a second coating die head, and a hot air knife to avoid different solvent gradients when coating wet films and ensure the uniformity of the film layer after pre-drying / crystallization. The design of the first coating die head and the second coating die head coats the functional film layer and the passivation film layer in sequence, reducing the risk of film layer defect formation and ensuring film layer performance.
[0015] The wet coating equipment provided by this utility model integrates a hot air knife to immediately pre-dry / crystallize the coated wet film, preventing different solvent gradients across the entire coating area caused by varying solvent evaporation rates between the first and last coated wet films. This ensures the uniformity of the coated film and avoids the risk of inconsistent film formation during further annealing and crystallization. The design of the first and second coating dies, which coat the functional film layer first and then the passivation film layer, minimizes the contact time between the functional film layer, which is sensitive to water and oxygen or may have surface defects, or allows for some repair of surface defects. This reduces film defects that may be caused by degradation of the film material and ensures the performance of the functional film layer. The combination of wet coating and pre-drying / crystallization, a dual-process, dual-die combination, and a "four-in-one" equipment design reduces equipment costs. At the same time, slot coating offers high coating uniformity, fast coating speed, and high material utilization, meeting the requirements of low-cost, high-quality, and large-scale production. Attached Figure Description
[0016] Figure 1 A schematic diagram of the wet coating equipment provided by this utility model;
[0017] Figure 2 A schematic diagram of the first solution supply system in the wet coating equipment provided by this utility model;
[0018] Figure 3 A schematic diagram of the hot air supply system in the wet coating equipment provided by this utility model;
[0019] Figure 4 A schematic diagram of the drive mechanism for the wet coating equipment provided by this utility model;
[0020] above Figures 1-4 In the diagram, 1 is the integrated mold head, 11 is the first liquid supply tank, 12 is the first coating mold head, 13 is the first liquid supply pump, 14 is the first control valve, 21 is the second liquid supply tank, 22 is the second coating mold head, 23 is the second liquid supply pump, 24 is the second control valve, 31 is the air supply tank, 32 is the hot air knife, 33 is the blower, 34 is the third control valve, 41 is the guide rail, 42 is the servo motor, 43 is the moving gantry, and 5 is the substrate. Detailed Implementation
[0021] The preferred embodiments of this utility model will now be described in detail with reference to the examples. It should be understood that the following embodiments are provided for illustrative purposes only and are not intended to limit the scope of this utility model. Those skilled in the art can make various modifications and substitutions to this utility model without departing from its spirit and essence. Example 1
[0022] like Figure 1 As shown, this utility model provides a wet coating device, including a first solution supply system, a second solution supply system, and a hot air supply system. Specifically: the first solution supply system includes a first supply tank 11, which is connected to a first coating die 12 via a first pipe; a first supply pump 13 is installed on the first pipe between the first supply tank 11 and the first coating die 12. The second solution supply system includes a second supply tank 21, which is connected to a second coating die 22 via a second pipe; a second supply pump 23 is installed on the second pipe between the second supply tank 21 and the second coating die 22. The hot air supply system includes an air supply tank 31, which contains a heating device. The air supply tank 31 is connected to the hot air knife 32 through a third pipe. A blower 33 is installed on the third pipe between the air supply tank 31 and the hot air knife 32. A third control valve 34 is installed on the third pipe between the blower 33 and the air supply tank 31. The hot air knife 32 is arranged between the first coating die head 12 and the second coating die head 22 to form an integrated die head 1. A first control valve 14 is installed on the first pipe between the first liquid supply tank 11 and the first liquid supply pump 13. A second control valve 24 is installed on the first pipe between the second liquid supply tank 21 and the second liquid supply pump 23.
[0023] like Figure 2 The diagram shown illustrates the first solution supply system described above. The first supply pump 13 delivers the liquid from the first supply tank 11 to the first coating die 12 to achieve coating. The diagram for the second solution supply system is similar.
[0024] like Figure 3 The diagram shows the above hot air supply system. The gas supply tank 31 is equipped with a heating device. After the gas is heated, it is delivered to the hot air knife 32 by the blower 33. The hot air knife 32 forms a uniformly distributed hot air that is blown onto the wet film on the surface of the substrate, thereby achieving the pre-drying / crystallization of the wet film.
[0025] like Figure 4 As shown, the first coating die 12, the hot air knife 32, and the second coating die 22 are all mounted on a drive mechanism, which enables the moving coating operation. The drive mechanism includes a guide rail 41, a servo motor 42, and a moving gantry 43. The servo motor 42 is mounted on the moving gantry 43, and its output end is connected to the guide rail 41 via a gear. The integrated die 1 is mounted on the moving gantry 43. The servo motor 42 drives the gear to move on the guide rail 41, thereby moving the moving gantry 43 along the guide rail 41, thus realizing the coating movement operation of the first coating die 12, the hot air knife 32, and the second coating die 22.
[0026] In the operation of the wet coating equipment provided in the above embodiments, the first solution supply system and the second solution supply system respectively supply and control the solution to the first coating die 12 and the second coating die 22; the hot air supply system supplies and controls the hot air to the hot air knife 32; the first coating die 12 and the second coating die 22 coat the solution onto the surface of the substrate 5 below them to form a thin film layer and ensure the uniform distribution of the solution in the width of the coating film; the hot air knife 32 guides pressurized hot air to blow vertically or obliquely onto the surface of the substrate to evaporate the solvent in the wet film on the surface of the substrate 5, thereby achieving the pre-drying / crystallization of the wet film; the servo motor 42 controls the first coating die 12, the second coating die 22 and the hot air knife 32 to pass through the substrate 5, while controlling and maintaining the position of the substrate 5 relative to the first coating die 12, the second coating die 22 and the hot air knife 32.
[0027] The above description is only a preferred embodiment of the present utility model and is not a limitation on the design of the present utility model. All equivalent changes made based on the key design of the present utility model shall fall within the protection scope of the present utility model.
Claims
1. A reciprocating wet coating apparatus characterized by comprising: The application relates to a coating device, which comprises a first solution supply system, a second solution supply system and a hot air supply system, wherein: the first solution supply system comprises a first liquid supply tank (11), the first liquid supply tank (11) is connected with a first coating die (12) through a first pipeline, a first liquid supply pump (13) is arranged on the first pipeline between the first liquid supply tank (11) and the first coating die (12); the second solution supply system comprises a second liquid supply tank (21), the second liquid supply tank (21) is connected with a second coating die (22) through a second pipeline, a second liquid supply pump (23) is arranged on the second pipeline between the second liquid supply tank (21) and the second coating die (22); the hot air supply system comprises a gas supply tank (31), the gas supply tank (31) is connected with a hot air knife (32) through a third pipeline, a blower (33) is arranged on the third pipeline between the gas supply tank (31) and the hot air knife (32), a third control valve (34) is arranged on the third pipeline between the blower (33) and the gas supply tank (31); the hot air knife (32) is arranged between the first coating die (12) and the second coating die (22) to form an integrated die (1).
2. The reciprocating wet coating apparatus according to claim 1, characterized by, A first control valve (14) is arranged on the first pipeline between the first liquid supply tank (11) and the first liquid supply pump (13).
3. The reciprocating wet coating apparatus according to claim 1, wherein A second control valve (24) is arranged on the first pipeline between the second liquid supply tank (21) and the second liquid supply pump (23).
4. The reciprocating wet coating apparatus according to claim 1, wherein The gas supply tank (31) is internally provided with a heating device.
5. The reciprocating wet coating apparatus according to claim 1, wherein The first coating die (12), the hot air knife (32) and the second coating die (22) are all arranged on a driving mechanism, and the driving mechanism is used for realizing the moving coating work.
6. The reciprocating wet coating apparatus according to claim 5, wherein The driving mechanism comprises a guide rail (41), a servo motor (42) and a moving gantry (43), the servo motor (42) is arranged on the moving gantry (43), the output end of the servo motor (42) is connected with the guide rail (41) in gear engagement through a gear, the integrated die (1) is arranged on the moving gantry (43), the servo motor (42) drives the gear to move on the guide rail (41), and then the moving gantry (43) is driven to move along the guide rail (41), and then the moving coating work of the first coating die (12), the hot air knife (32) and the second coating die (22) is realized.