Plasma cleaning equipment

Abstract

The utility model discloses plasma cleaning equipment which comprises a master control box used for controlling the whole body, a limiting arc plate is installed at the top end of the front face of the master control box, a servo motor is fixedly installed at the top end of the back face of the master control box, and a rotary supporting column is rotationally installed in the middle of the top end; the driven rotating disc is fixedly installed at the top end of the rotating supporting column, a plurality of installation connecting arms are installed on the upper surface of the driven rotating disc at equal intervals, installation sliding grooves are formed in the top ends of the installation connecting arms, matched inserting rods are fixedly installed in the installation sliding grooves, and the outer walls of the matched inserting rods are sleeved with supporting springs and sliding connecting arms; one end of the sliding connecting arm is fixedly connected with a matched sliding column. A plurality of mounting connecting arms are driven by the driven turntable to rotate synchronously, so that feeding, cleaning, discharging and continuous circulation of vacant stations are realized, the overall capacity is improved, six plasma cleaning spray guns are arranged on a cleaning station and are arranged according to a regular hexagon, the surface of a workpiece can be fully covered, and impurities are ensured to be efficiently removed and far away from the stations.

Description

Technical Field

[0001] This utility model relates to the field of plasma cleaning technology, and in particular to a plasma cleaning device. Background Technology

[0002] In existing technologies, plasma cleaning is an important technique in the field of biophysics, defined as the process of cleaning, activating, or modifying material surfaces using plasma generated by ionized gas. The electron temperature of low-temperature plasma is much higher than its ion temperature, while the ion temperature can be comparable to room temperature. Low-temperature plasma is a non-thermal equilibrium plasma, containing a large number and variety of active particles. These particles are more diverse and reactive than those produced by typical chemical reactions, making them more likely to react with the surfaces of materials they come into contact with. Therefore, they are used to improve material surfaces, thereby enhancing their adhesion.

[0003] A search revealed Chinese patent application number 202321870792.9, which discloses a plasma cleaning device, comprising: a chassis, wherein a cleaning table is provided inside the chassis, the cleaning table dividing the internal space of the chassis into upper and lower parts; a three-axis moving device and a two-axis moving clamp are provided above the cleaning table, the three-axis moving device being driven and connected to a spray gun; an air nozzle is mounted on the two-axis moving clamp, the air nozzle being connected to a negative pressure device; a dust and ozone filtration device is provided below the cleaning table, the dust and ozone filtration device being connected to an air filtration device, and the dust and ozone filtration device being simultaneously connected to the air nozzle.

[0004] The above-mentioned patent has the following shortcomings: In actual use, the device is equipped with only one spray gun. The workpiece is in a closed state during the cleaning process. Only one or a small number of workpieces can be cleaned at a time, which is not convenient for continuous cleaning of workpieces. This makes the overall cleaning speed of the device slow and is not conducive to the use of the device. Utility Model Content

[0005] The purpose of this invention is to address the shortcomings of existing technologies by proposing a plasma cleaning device.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A plasma cleaning device, comprising:

[0008] The main control box is used to control the whole system. A limit arc plate is installed at the top of the front, a servo motor is fixedly installed at the top of the back, and a rotating support column is rotatably installed in the middle of the top.

[0009] The driven turntable is fixedly installed on the top of the rotating support column, and multiple mounting connecting arms are equidistantly installed on its upper surface. The top of each mounting connecting arm has a mounting groove, and a mating rod is fixedly installed inside the mounting groove. A support spring and a sliding connecting arm are sleeved on the outer wall of the mating rod. One end of the sliding connecting arm is fixedly connected to a mating sliding column, and a bearing connecting plate is fixedly installed on the top of the mating sliding column. A workpiece bearing plate is fixedly installed on the top of the bearing connecting plate, and multiple plasma cleaning spray guns are provided on the top of one of the workpiece bearing plates.

[0010] As a further improvement of this utility model: the lower surface of the driven turntable is fixedly connected with a plurality of slots and pins at equal intervals, and the top of the driven turntable is fixedly connected with a mounting connecting pin.

[0011] As a further improvement of this utility model: a drive turntable is fixedly installed at the top of the output shaft of the servo motor, and multiple turntable slots that cooperate with the slot posts are equidistantly opened on the side of the drive turntable.

[0012] As a further improvement of this utility model: a plurality of positioning pins connected to the mounting connecting arm are welded at equal intervals to the top of the driven turntable, and a limiting bracket for limiting the mounting connecting arm is fixedly installed on the outer wall of the mounting connecting pin.

[0013] As a further improvement of this utility model: a plurality of support columns are fixedly installed on the top of the main control box, and an installation connecting frame is fixedly connected to the top of the plurality of support columns.

[0014] As a further improvement of this utility model: a lifting slot frame is fixedly installed in the middle of the front side of the mounting connection frame, and a telescopic cylinder is fixedly installed at the top of the lifting slot frame.

[0015] As a further improvement of this utility model: a lifting connecting arm is slidably installed inside the lifting slot frame, and a fixed connecting plate is fixedly connected to the front of the lifting connecting arm.

[0016] As a further embodiment of this utility model: a cleaning connection plate is fixedly connected to the bottom of the front side of the fixed connection plate, and multiple plasma cleaning spray guns are fixedly installed on the cleaning connection plate.

[0017] Compared with the prior art, the present invention provides a plasma cleaning device with the following advantages:

[0018] 1. This plasma cleaning equipment drives multiple mounting and connecting arms to rotate synchronously via a driven turntable, enabling continuous flow of loading, cleaning, unloading, and idle workstations, thereby improving overall production capacity. The cleaning workstation is equipped with six plasma cleaning spray guns arranged in a regular hexagonal layout, which can fully cover the surface of the workpiece, ensuring that impurities are efficiently removed and kept away from the workstation.

[0019] 2. This plasma cleaning equipment uses a laser height gauge to monitor the workpiece height in real time and automatically adjusts the spray gun height using a telescopic cylinder to avoid collisions and optimize the cleaning distance, thus improving cleaning effectiveness and safety. The support spring and sliding connecting arm design provide a buffer function to reduce impact during workpiece transfer. The laser height gauge dynamically adjusts the spray gun height to prevent accidental collisions.

[0020] The parts of this device not covered herein are the same as or can be implemented using existing technologies. This utility model has a simple structure and is easy to operate. Attached Figure Description

[0021] Figure 1 This is a three-dimensional structural diagram of the overall assembly of this utility model;

[0022] Figure 2 This is a partial cross-sectional view of the overall assembly of this utility model.

[0023] Figure 3 This utility model Figure 2 A magnified schematic diagram of the partial structure at point A in the middle;

[0024] Figure 4 This utility model Figure 2 A magnified schematic diagram of the local structure at point B;

[0025] Figure 5 This is a schematic diagram of the workstation structure of this utility model.

[0026] In the diagram: 1. Main control box; 2. Limiting arc plate; 3. Servo motor; 4. Drive turntable; 5. Turntable slot; 6. Driven turntable; 7. Slotted post; 8. Support column; 9. Mounting connecting frame; 10. Lifting slot frame; 11. Telescopic cylinder; 12. Lifting connecting arm; 13. Fixed connecting plate; 14. Auxiliary roller assembly; 15. Cleaning connecting plate; 16. Plasma cleaning spray gun; 17. Matching support arm; 18. Laser height gauge; 19. Mounting connecting column; 20. Limiting bracket; 21. Positioning insert; 22. Mounting connecting arm; 23. Mounting slide; 24. Matching insert rod; 25. Support spring; 26. Sliding connecting arm; 27. Matching slide column; 28. Bearing connecting plate; 29. ​​Workpiece bearing plate; 30. Rotating support column. Detailed Implementation

[0027] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0028] A plasma cleaning device, such as Figures 1 to 5As shown, it includes: a main control box 1 and a driven turntable 6 that controls the transfer of the workpiece to be cleaned, such as... Figure 5 As shown, the workstations include a loading station, a cleaning station, an unloading station, and an empty station. The workpieces to be cleaned are moved sequentially according to the order of the loading station, the cleaning station, and the unloading station.

[0029] The main control box 1 is used to control the entire system. A limiting arc plate 2 is installed at the top front of the box. The structure of the limiting arc plate 2 is as follows: Figure 1 As shown, it is fixedly installed on the top of the main control box 1 by bolts; a servo motor 3 is fixedly installed on the top of the back of the main control box 1, and a drive turntable 4 is fixedly installed on the top of the output shaft of the servo motor 3; the servo motor 3 outputs torque through a reducer to drive the drive turntable 4 to rotate.

[0030] A rotating support column 30 is rotatably mounted on the top center of the main control box 1. The driven turntable 6 is fixedly mounted on the top of the rotating support column 30, and the drive turntable 4 controls the rotation of the driven turntable 6.

[0031] Control method one: such as Figure 1 As shown, the outer wall of the drive turntable 4 is provided with multiple turntable slots 5 at equal intervals, and the lower surface of the driven turntable 6 is provided with multiple slot pins 7 at equal intervals. The slot pins 7 are adapted to the turntable slots 5. The number of slot pins 7 is set to twice the number of turntable slots 5, that is, the drive turntable 4 rotates twice and the driven turntable 6 rotates once. At this time, the output speed of the servo motor 3 is low to ensure the cleaning time of the workpiece to be cleaned.

[0032] Control method two: The drive turntable 4 and the slot pin 7 in the above control method one can be replaced with a gear pair that reduces the transmission speed; furthermore, the drive gear corresponding to the drive turntable 4 can be set as a half-tooth gear, so that the driven turntable 6 moves intermittently, so that the driven turntable 6 stops moving every ninety degrees, and the time of stopping is the cleaning time of the workpiece to be cleaned, thereby improving the cleaning effect.

[0033] A mounting connecting post 19 is welded to the middle of the upper surface of the driven turntable 6. A limit bracket 20 is fixedly installed on the outer wall of the mounting connecting post 19 by a nut. Four limit slots are equidistantly opened at the bottom end of the limit bracket 20. A positioning insert post 21 is welded to the upper surface of the driven turntable 6 corresponding to the four limit slots. A mounting connecting arm 22 is sleeved on the outer wall of the positioning insert post 21. One end of the mounting connecting arm 22 is engaged inside the limit slot.

[0034] The mounting connecting arm 22 has a mounting groove 23 at the end away from the mounting connecting post 19. The mounting groove 23 passes through the top of the mounting connecting arm 22, and a mating rod 24 is fixedly installed on the inner wall of the end of the mounting groove 23 near the mounting connecting post 19. A support spring 25 and a sliding connecting arm 26 are sleeved on the outer wall of the mating rod 24. The support spring 25 is close to the mounting connecting post 19.

[0035] The sliding connecting arm 26 is fixedly connected to a mating sliding column 27 at the end away from the mounting connecting column 19. A bearing connecting plate 28 is fixedly installed at the top of the mating sliding column 27. A workpiece bearing plate 29 is fixedly installed at the top of the bearing connecting plate 28. The workpiece bearing plate 29 is used to hold the workpiece to be cleaned.

[0036] Reference Figure 4 The bottom wall of the mounting groove 23, away from the mounting connecting column 19, has an adaptation groove. The bottom of the sliding connecting arm 26 has a mating groove. A limit pin is provided inside the adaptation groove. The top of the limit pin is inserted into the mating rod 24, and the bottom is set inside the mating groove to limit the sliding connecting arm 26.

[0037] The top of the workpiece carrier plate 29 corresponding to the cleaning station is equipped with multiple plasma cleaning spray guns 16. The plasma cleaning spray guns 16 are set in two groups, with three in each group at equal intervals, supplying six. The six plasma cleaning spray guns 16 correspond to the six corners of the regular hexagon, which can thoroughly clean the surface of the workpiece to be cleaned, so that the impurities at the cleaning area can be kept away from the cleaning station.

[0038] Two support columns 8 are fixedly installed on the top of the front of the main control box 1. The top of the two support columns 8 is fixedly connected to the mounting bracket 9. The middle of the front of the mounting bracket 9 is fixedly installed with a lifting slot frame 10. The top of the lifting slot frame 10 is fixedly installed with a telescopic cylinder 11.

[0039] A lifting connecting arm 12 is slidably installed inside the lifting trough frame 10. A fixed connecting plate 13 is fixedly connected to the front of the lifting connecting arm 12. A cleaning connecting plate 15 is fixedly connected to the bottom of the front of the fixed connecting plate 13. Multiple plasma cleaning spray guns 16 are fixedly installed on the cleaning connecting plate 15.

[0040] like Figure 3 As shown, the telescopic end of the telescopic cylinder 11 is fixed to the top of the lifting connecting arm 12. Auxiliary roller groups 14 are fixedly installed on both sides of the back of the fixed connecting plate 13. The rollers of the auxiliary roller group 14 are in contact with the front of the lifting slot frame 10, which facilitates the lifting of the lifting connecting arm 12.

[0041] A supporting arm 17 is fixedly connected to one side of the back of the mounting bracket 9. A laser height measuring instrument 18 is fixedly installed at the end of the supporting arm 17. The laser height measuring instrument 18 is set above the workpiece bearing plate 29 corresponding to the loading station, so as to adjust the height of the plasma cleaning spray gun 16 according to the actual height of the workpiece to be cleaned.

[0042] Working principle:

[0043] Please refer to Figures 1 to 5 Assemble the device as shown in the figure:

[0044] In use, the workpiece to be cleaned is first fixed on the workpiece carrier plate 29. Then, the workpiece carrier plate 29 is fixed on the carrier connecting plate 28 at the loading station. The main control box 1 controls the servo motor 3 to start. The servo motor 3 drives the driven turntable 6 to rotate 90 degrees via the drive turntable 4, moving the carrier connecting plate 28 to the cleaning station. The driven turntable 6 drives multiple mounting connecting arms 22 to rotate synchronously. Figure 4 As shown, under the limiting action of the limiting arc plate 2 on the sliding column 27, the sliding connecting arm 26 squeezes the support spring 25 until the workpiece bearing plate 29 moves to below the plasma cleaning spray gun 16. The main control box 1 controls the plasma cleaning spray gun 16 to start and clean the workpiece to be cleaned. After cleaning is completed, the driven turntable 6 rotates 90 degrees again. Under the action of the support spring 25, the sliding connecting arm 26 extends again, causing the workpiece bearing plate 29 to move to the unloading position and be removed. Then the driven turntable 6 rotates 90 degrees again, and the bearing connecting plate 28 moves to the empty position. The external flushing structure above the empty position flushes the bearing connecting plate 28 to avoid impurities remaining.

[0045] During the above process, the workpiece to be cleaned is placed on the supporting connecting plate 28. The laser height measuring instrument 18 measures the height of the workpiece to be cleaned and feeds back the measurement data to the main control box 1. The main control box 1 starts the telescopic cylinder 11 according to the height of the workpiece to be cleaned. The telescopic cylinder 11 drives the lifting connecting arm 12 to move up and down, thereby adjusting the height of the plasma cleaning spray gun 16 to avoid the plasma cleaning spray gun 16 being hit by the workpiece to be cleaned.

[0046] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A plasma cleaning apparatus, characterized by, Include: The total control box (1) is used for controlling the whole, and the top of the front is provided with a limit arc plate (2), and the top of the back is fixedly provided with a servo motor (3), and the middle of the top is rotatably provided with a rotating support column (30); The driven turntable (6) is fixedly installed at the top of the rotating support column (30), and a plurality of installation connecting arms (22) are installed on the upper surface at equal intervals, the top of the installation connecting arm (22) is provided with an installation sliding groove (23), the inside of the installation sliding groove (23) is fixedly provided with a matching plug rod (24), the outer wall of the matching plug rod (24) is sleeved with a supporting spring (25) and a sliding connecting arm (26), one end of the sliding connecting arm (26) is fixedly connected with a matching sliding column (27), the top of the matching sliding column (27) is fixedly provided with a bearing connecting disc (28), the top of the bearing connecting disc (28) is fixedly provided with a workpiece bearing disc (29), and the top of one of the workpiece bearing disc (29) is provided with a plurality of plasma cleaning spray guns (16).

2. A plasma cleaning apparatus as claimed in claim 1, wherein: The lower surface of the driven turntable (6) is fixedly connected with a plurality of clamping groove clamping columns (7), and the top of the driven turntable (6) is fixedly connected with an installation connecting column (19).

3. The apparatus of claim 1 wherein: the plasma cleaning device is a microwave plasma cleaning device. The output shaft of the servo motor (3) is fixedly provided with a driving turntable (4) at the top, and a plurality of turntable clamping grooves (5) matched with the clamping groove clamping column (7) are formed at equal intervals on the side of the driving turntable (4).

4. A plasma cleaning apparatus as claimed in claim 2, wherein: A plurality of positioning plug columns (21) connected with the installation connecting arm (22) are welded at equal intervals on the top of the driven turntable (6), and a limiting clamping frame (20) for limiting the installation connecting arm (22) is fixedly installed on the outer wall of the installation connecting column (19).

5. The apparatus of claim 1 wherein: the plasma cleaning device is a plasma etching device. A plurality of supporting columns (8) are fixedly installed on the top of the total control box (1), and a plurality of installation connecting frames (9) are fixedly connected to the top of the supporting column (8).

6. A plasma cleaning apparatus as claimed in claim 5, wherein: The middle of the front of the installation connecting frame (9) is fixedly provided with a lifting groove frame (10), and the top of the lifting groove frame (10) is fixedly provided with a telescopic air cylinder (11).

7. A plasma cleaning apparatus as claimed in claim 6, wherein: The lifting connecting arm (12) is slidably installed in the lifting groove frame (10), and the front of the lifting connecting arm (12) is fixedly connected with a fixed connecting plate (13).

8. A plasma cleaning apparatus as claimed in claim 7, wherein: The bottom of the front of the fixed connecting plate (13) is fixedly connected with a cleaning connecting plate (15), and a plurality of plasma cleaning spray guns (16) are fixedly installed on the cleaning connecting plate (15).

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