Auxiliary conveyor belt for base of sheet inserting machine
By installing bidirectional telescopic rods and adjustment mechanisms on the wafer inserter conveyor belt, the problem of adaptability to the transport of silicon wafers of different sizes was solved, thereby improving production efficiency and product yield.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-11
- Publication Date
- 2026-03-06
AI Technical Summary
The existing wafer inserter's conveyor belt is difficult to accommodate the mixed-line production needs of silicon wafers of different sizes, which leads to the need to stop and adjust during type change, reducing production efficiency.
A bidirectional telescopic rod is installed on the conveyor belt. Through the width adjustment mechanism and the silicon wafer alignment mechanism, the width of the conveyor belt can be adjusted and the silicon wafer can be precisely positioned. A servo motor and a laser rangefinder sensor are used for dynamic adjustment.
It enables flexible adjustment of the conveyor belt width to adapt to the transport of silicon wafers of different sizes, improving production efficiency and product yield, and reducing the risk of silicon wafer offset and collision during transport.
Smart Images
Figure CN223973195U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the technical field of conveyor belts for insert machines, and specifically relates to an auxiliary conveyor belt for the base of an insert machine. Background Technology
[0002] In the automated production process of semiconductor wafers and photovoltaic silicon wafers, wafer insertion machines are one of the key pieces of equipment for achieving precise wafer transfer. Traditional wafer insertion machines typically use a belt conveyor to transport silicon wafers to designated workstations. Their working principle involves the conveyor belt carrying the silicon wafers and a guiding mechanism to complete the positioning.
[0003] Existing wafer insertion machines typically optimize conveyor belt widths for silicon wafers of 200mm and below. When transporting large-sized silicon wafers (such as 300mm wafers or G12 wafers), the contact area between the silicon wafer and the conveyor belt is relatively reduced. During high-speed transport, the silicon wafer is prone to tilting left and right due to insufficient support. When the tilted silicon wafer enters the subsequent roller transport mechanism, it may collide with the edge structure due to alignment deviation, causing microcracks or edge chipping, which seriously affects product yield. If the conveyor belt is too wide, the left and right support spacing of the silicon wafer will be too large, making it prone to swaying during high-speed movement, which will increase the risk of displacement. In addition, when the silicon wafer enters the roller transport mechanism from the wide conveyor belt 1, if the silicon wafer size is small, it may collide with the edge due to alignment deviation.
[0004] In summary, the technical problem to be solved by this utility model is:
[0005] Current equipment mostly uses a single-width conveyor belt, which is difficult to accommodate the mixed-line production needs of silicon wafers of different sizes, resulting in the need to stop and adjust when changing models, thus reducing production efficiency. Utility Model Content
[0006] In order to overcome the problems existing in the background art, this utility model provides an auxiliary conveyor belt for the inserter base.
[0007] To achieve the above objectives, this utility model is implemented through the following technical solution: an auxiliary conveyor belt for a wafer inserter base, supported by a roller system of the wafer conveyor of the wafer inserter, wherein the roller system supports the conveyor belt to form a square frame-shaped loop. The innovation lies in: the conveyor belt has several bidirectional telescopic rods linearly and fixedly arranged along its surface; each bidirectional telescopic rod includes: a sleeve disposed on the surface of the conveyor belt, a first sliding rod slidably disposed within the sleeve, and a second sliding rod disposed within the same sleeve; the auxiliary conveyor belt for the wafer inserter base further includes: a width adjustment mechanism disposed in the lower half of the frame of the wafer conveyor to control the bidirectional extension and retraction of the first and second sliding rods within the sleeve, and a wafer alignment mechanism disposed in the upper half of the frame.
[0008] Preferably, the sleeve is square, the inner cross-section of the sleeve is convex, and the cross-sections of the first sliding rod and the second sliding rod are convex.
[0009] Preferably, both the width adjustment mechanism and the silicon wafer alignment mechanism include a bidirectional telescopic mechanism, which includes: a mounting box; a forward and reverse threaded screw that passes through the mounting box; a first bevel gear disposed on the forward and reverse threaded screw and located inside the mounting box; a servo motor disposed on the mounting box and whose output shaft passes through the mounting box; a second bevel gear disposed on the output shaft and meshing with the first bevel gear; a first support member disposed on one side of the mounting box; a first sliding groove disposed on the first support member and extending vertically; a second support member disposed on the other side of the mounting box; and a second sliding groove disposed on the second support member and extending vertically. A first slider is threadedly fitted to one end of the forward and reverse threaded screw, and the first slider can slide within the first sliding groove. A second slider is threadedly fitted to the other end of the forward and reverse threaded screw, and the second slider can slide within the second sliding groove.
[0010] Preferably, the first sliding rod is provided with a first roller on the side away from the sleeve, and the second sliding rod is provided with a second roller on the side away from the sleeve. The width adjustment mechanism further includes: a first guide groove connected to the first slider, and a second guide groove connected to the second slider; both the first guide groove and the second guide groove include: a wide conical groove facing the direction of the first roller or the second roller, and a straight groove at the tail end of the conical groove.
[0011] Preferably, the silicon wafer alignment mechanism further includes: a first connecting rod connected to the first slider, a first T-shaped rod horizontally disposed at the other end of the first connecting rod, a second connecting rod connected to the second slider, and a second T-shaped rod horizontally disposed at the other end of the second connecting rod. The first T-shaped rod and the second T-shaped rod are arranged opposite to each other, and silicone pads are provided on the crossbars of the first T-shaped rod and the second T-shaped rod near the conveyor belt.
[0012] The beneficial effects of this utility model compared with the prior art are as follows:
[0013] This invention forms a support surface by setting bidirectional telescopic rods on the conveyor belt. The bidirectional telescopic mechanism drives the first guide groove and the second guide groove to move synchronously in both directions through positive and negative threaded screws, guiding the first sliding rod and the second sliding rod to extend and retract to both sides of the conveyor belt, thereby adjusting the width of the support surface and thus the width of the conveyor belt to accommodate silicon wafers of different widths. Attached Figure Description
[0014] Figure 1 A schematic diagram of the auxiliary conveyor belt for the chip inserter base;
[0015] Figure 2 This is a schematic diagram of the structure of a two-way telescopic rod;
[0016] Figure 3 This is a schematic diagram of the bidirectional telescopic mechanism;
[0017] Figure 4 This is a schematic diagram of the width adjustment mechanism;
[0018] Figure 5 This is a schematic diagram of the silicon wafer alignment mechanism.
[0019] In the diagram: 1. Conveyor belt; 2. Bidirectional telescopic rod; 3. Sleeve; 4. First sliding rod; 5. Second sliding rod; 6. Width adjustment mechanism; 7. Silicon wafer alignment mechanism; 8. Mounting box; 9. Positive and negative thread screw; 10. First bevel gear; 11. Servo motor; 12. Output shaft; 13. Second bevel gear; 14. First support member; 15. First slide groove; 16. Second support member; 17. Second slide groove; 18. First slider; 19. Second slider; 20. First roller; 21. Second roller; 22. First guide groove; 23. Second guide groove; 24. Conical groove; 25. Straight groove; 26. First connecting rod; 27. First T-shaped rod; 28. Second connecting rod; 29. Second T-shaped rod; 30. Silicone pad. Detailed Implementation
[0020] To make the objectives, technical solutions, and beneficial effects of this utility model clearer, the preferred embodiments of this utility model will be described in detail below to facilitate understanding by those skilled in the art.
[0021] Please see Figures 1 to 5 The idler system is omitted in the figure. This embodiment provides an auxiliary conveyor belt for a wafer inserter base, supported by the idler system of the wafer conveyor of the wafer inserter. The idler system supports the conveyor belt 1 to form a square frame-shaped loop. It also includes: several bidirectional telescopic rods 2 linearly and fixedly arranged along the surface of the conveyor belt 1; the bidirectional telescopic rod 2 includes: a sleeve 3 disposed on the surface of the conveyor belt 1, a first sliding rod 4 slidably disposed within the sleeve 3, and a second sliding rod 5 disposed within the same sleeve 3; the auxiliary conveyor belt for the wafer inserter base also includes: a width adjustment mechanism 6 disposed in the lower half of the frame of the wafer conveyor to control the bidirectional extension and retraction of the first sliding rod 4 and the second sliding rod 5 within the sleeve 3, and a wafer alignment mechanism 7 disposed in the upper half of the frame. The idler system of the wafer conveyor is prior art, including: a roller unit, a bearing system, a drive mechanism with a servo motor 11 as the core, and a wafer position feedback device based on a laser rangefinder sensor to detect the position of the wafer; it also includes a tensioning mechanism.
[0022] The sleeve 3 is square, and its internal cross-section is convex. The cross-sections of the first sliding rod 4 and the second sliding rod 5 are also convex. The sleeve 3, the first sliding rod 4, and the second sliding rod 5 form a support surface that covers the conveyor belt 1. The width of the support surface is adjustable to accommodate the size of the silicon wafer.
[0023] Both the width adjustment mechanism 6 and the silicon wafer alignment mechanism 7 include a bidirectional telescopic mechanism, which includes: a mounting box 8; a threaded screw 9 penetrating the mounting box 8; a first bevel gear 10 disposed on the threaded screw 9 and located inside the mounting box 8; a servo motor 11 disposed on the mounting box 8 with its output shaft 12 passing through the mounting box 8; a second bevel gear 13 disposed on the output shaft 12 and meshing with the first bevel gear 10; a first support member 14 disposed on one side of the mounting box 8; a first sliding groove 15 disposed on the first support member 14 and extending vertically; a second support member 16 disposed on the other side of the mounting box 8; and a second sliding groove 17 disposed on the second support member 16 and extending vertically. A first slider 18 is threadedly fitted to one end of the threaded screw 9, and the first slider 18 can slide within the first sliding groove 15. A second slider 19 is threadedly fitted to the other end of the threaded screw 9, and the second slider 19 can slide within the second sliding groove 17. The mounting box 8 is fixedly installed on the frame of the silicon wafer conveyor. The servo motor 11 drives the positive and negative thread screw 9 to rotate through the first bevel gear 10 and the second bevel gear 13. The positive and negative thread screw 9 drives the first slider 18 and the second slider 19 to move in both directions.
[0024] The first sliding rod 4 has a first roller 20 on the side away from the sleeve 3, and the second sliding rod 5 has a second roller 21 on the side away from the sleeve 3. The width adjustment mechanism 6 further includes: a first guide groove 22 connected to the first slider 18, and a second guide groove 23 connected to the second slider 19; both the first guide groove 22 and the second guide groove 23 include: a wide conical groove 24 facing the direction of the first roller 20 or the second roller 21, and a straight groove 25 at the tail end of the conical groove 24. When the first slider 18 and the second slider 19 move in both directions, they will drive the first guide groove 22 and the second guide groove 23 to move in both directions. The conical groove 24 guides the first roller 20 and the second roller 21 into the straight groove 25. The first roller 20 and the second roller 21 drive the first sliding rod 4 and the second sliding rod 5 to extend and retract within the sleeve 3. The distance between the two straight grooves 25 is the adjusted width of the conveyor belt 1. The width adjustment mechanism 6 also includes a servo motor 11 driver, a laser displacement sensor, and a PLC controller. The laser displacement sensor is located behind the width adjustment mechanism 6 and is used to detect the width of the bidirectional telescopic rod 2. The PLC sets the adjusted width, compares the width of the bidirectional telescopic rod 2 detected by the laser displacement sensor with the set value, and the PLC controls the servo motor 11 through the servo motor 11 driver to adjust the width of the bidirectional telescopic rod 2 to the set value.
[0025] The silicon wafer alignment mechanism 7 further includes: a first connecting rod 26 connected to the first slider 18; a first T-shaped rod 27 horizontally disposed at the other end of the first connecting rod 26; a second connecting rod 28 connected to the second slider 19; and a second T-shaped rod 29 horizontally disposed at the other end of the second connecting rod 28. The first T-shaped rod 27 and the second T-shaped rod 29 are arranged opposite to each other, and silicone pads 30 are provided on the crossbars of the first T-shaped rod 27 and the second T-shaped rod 29 near the conveyor belt 1. The servo motor 11 of the silicon wafer alignment mechanism 7 is also controlled by the PLC in the width adjustment mechanism 6. The bidirectional telescopic mechanism in the silicon wafer alignment mechanism 7 brings the first T-shaped rod 27 and the second T-shaped rod 29 together to align the silicon wafer, and then separates them to allow the silicon wafer to continue moving forward. The PLC sets the width of the silicon wafer and controls the servo motor 11 driver to make the first T-shaped rod 27 and the second T-shaped rod 29 move in opposite directions after reaching the specified width. The displacement distance between the first slider 18 and the second slider 19 is determined by the number of rotations of the servo motor 11. Setting the width between the first T-shaped rod 27 and the second T-shaped rod 29 controls the number of rotations of the servo motor 11. The conversion relationship between distance and number of rotations is determined by the actual situation. The start and stop of the servo motor 11 in the silicon wafer alignment mechanism 7 are controlled by the signal from the silicon wafer position feedback device.
[0026] When using the auxiliary conveyor belt of the inserter base of this utility model:
[0027] The width of the support surface of the conveyor belt 1 is adjusted according to the width of the silicon wafer. First, the servo motor 11 of the width adjustment mechanism 6 is controlled by PLC to adjust the first guide groove 22 and the second guide groove 23 to a suitable width. After the silicon wafer conveyor has been running for a period of time, the first guide groove 22 and the second guide groove 23 will adjust the bidirectional telescopic rod 2 to the set width. The silicon wafer gripping mechanism of the wafer inserter will place the silicon wafer on the support surface. When the silicon wafer reaches between the first T-shaped rod 27 and the second T-shaped rod 29, the silicon wafer position feedback device will start the servo motor 11 of the silicon wafer alignment mechanism 7 to align the silicon wafer.
[0028] Finally, it should be noted that the above preferred embodiments are only used to illustrate the technical solution of this utility model and not to limit it. Although the utility model has been described in detail through the above preferred embodiments, those skilled in the art should understand that various changes can be made to it in form and detail without departing from the scope defined by the claims of this utility model.
Claims
1. A wafer chaser base auxiliary conveyor, supported by a roller system of a wafer conveyor of said chaser, said roller system support causing said conveyor (1) to form a square frame shaped loop, characterized in that The invention relates to a silicon wafer conveying device, comprising: The conveying belt (1) is provided with a plurality of linearly arranged bidirectional telescopic rods (2) on the surface of the conveying belt (1); the bidirectional telescopic rod (2) comprises a sleeve (3) arranged on the surface of the conveying belt (1), a first sliding rod (4) slidingly arranged in the sleeve (3), and a second sliding rod (5) arranged in the sleeve (3); the silicon wafer conveying device further comprises a width adjusting mechanism (6) arranged in the lower half of the frame of the silicon wafer conveying device and used for controlling the bidirectional telescopic movement of the first sliding rod (4) and the second sliding rod (5) in the sleeve (3), and a silicon wafer adjusting mechanism (7) arranged in the upper half of the frame.
2. An insert sheet machine base auxiliary conveyor belt according to claim 1, characterized in that: The sleeve (3) is square, the internal cross section of the sleeve (3) is convex, and the cross sections of the first sliding rod (4) and the second sliding rod (5) are convex.
3. An insert sheet machine base auxiliary conveyor belt according to claim 2, characterized in that: The width adjusting mechanism (6) and the silicon wafer adjusting mechanism (7) both comprise a bidirectional telescopic mechanism, which comprises a mounting box (8), a reversible screw rod (9) penetrating through the mounting box (8), a first bevel gear (10) arranged on the reversible screw rod (9) and located in the mounting box (8), a servo motor (11) arranged on the mounting box (8) and having an output shaft (12) penetrating into the mounting box (8), a second bevel gear (13) arranged on the output shaft (12) and meshing with the first bevel gear (10), a first support (14) arranged on one side of the mounting box (8), a first sliding groove (15) penetrating through the first support (14) from top to bottom, a second support (16) arranged on the other side of the mounting box (8), and a second sliding groove (17) penetrating through the second support (16) from top to bottom; one end of the reversible screw rod (9) is threadedly connected with a first sliding block (18) which can slide in the first sliding groove (15), and the other end of the reversible screw rod (9) is threadedly connected with a second sliding block (19) which can slide in the second sliding groove (17).
4. An insert sheet machine base auxiliary conveyor belt according to claim 3, characterized in that: The first sliding rod (4) is provided with a first roller (20) on the side away from the sleeve (3), the second sliding rod (5) is provided with a second roller (21) on the side away from the sleeve (3), the width adjusting mechanism (6) further comprises a first guide groove (22) connected with the first sliding block (18) and a second guide groove (23) connected with the second sliding block (19); the first guide groove (22) and the second guide groove (23) both comprise a tapered groove (24) facing the first roller (20) or the second roller (21), and a straight groove (25) arranged at the tail end of the tapered groove (24).
5. The insert sheet machine base auxiliary conveyor belt of claim 3, wherein: The silicon wafer adjusting mechanism (7) further comprises a first connecting rod (26) connected with the first sliding block (18), a first T-shaped rod (27) horizontally arranged at the other end of the first connecting rod (26), a second connecting rod (28) connected with the second sliding block (19), and a second T-shaped rod (29) horizontally arranged at the other end of the second connecting rod (28). The first T-shaped rod (27) and the second T-shaped rod (29) are oppositely arranged, and the first T-shaped rod (27) and the second T-shaped rod (29) are provided with silica gel soft pads (30) close to the cross bars of the conveying belt (1).