Low-energy-consumption vacuum-pumping system of coating machine

Abstract

The utility model discloses a low-energy-consumption vacuum-pumping system of a coating machine, which comprises a coating vacuum chamber, a fine pumping assembly, a pre-pumping assembly and a maintaining pump assembly, the coating vacuum chamber is provided with a vacuum-pumping port and an inflation port, the inflation port is provided with an inflation valve, the fine pumping assembly comprises a first molecular pump, and the pre-pumping assembly comprises a second molecular pump. A high-pressure valve set used for controlling connection and disconnection is connected between the first air inlet end and the vacuumizing opening. A rough pumping valve set is connected between the second air inlet end and the vacuumizing opening, and a preceding-stage valve set is connected between the second air inlet end and the first exhaust end. The maintaining pump assembly comprises a second molecular pump and a maintaining pump body which are sequentially connected in the gas circulation direction, and the third gas inlet end is communicated between the first gas exhaust end and the gas inlet side of the preceding-stage valve set. And the electric energy consumption is greatly saved.

Description

Technical Field

[0001] This utility model relates to the technical field of vacuuming in coating processes, and in particular to a low-energy-consumption vacuuming system and operating method for a coating machine. Background Technology

[0002] Current vacuum coating machines all use a vacuum system to evacuate the coating vacuum chamber. To improve the accuracy of vacuuming, existing vacuum systems generally use molecular pumps to precisely control and maintain the vacuum level of the coating vacuum chamber. However, the molecular pumps require a long time to start and stop, and can only be started or stopped after the pipeline vacuum level reaches the set value. In order to keep the molecular pumps operating at high efficiency, multiple traditional mechanical pumps are generally configured to cooperate with the molecular pumps for exhaust. Moreover, mechanical pumps operate at relatively high power, resulting in high energy consumption. It is difficult to efficiently maintain the vacuum level of the coating vacuum chamber at a specific vacuum level, and it is difficult to quickly evacuate the coating vacuum chamber to the set value during the intermittent feeding and discharging switching process of the vacuum coating machine. Utility Model Content

[0003] The purpose of this utility model is to provide a low-energy coating machine vacuum system and operation method to solve one or more technical problems existing in the prior art, and at least provide a beneficial option or create conditions.

[0004] The technical solution adopted to solve the above-mentioned technical problems is as follows:

[0005] This utility model provides a low-energy-consumption vacuum system for a coating machine, comprising:

[0006] The coating vacuum chamber is provided with at least one vacuum port and an air inlet, and the air inlet is provided with an air inlet valve.

[0007] A fine pump assembly has a first air inlet and a first exhaust end. The fine pump assembly includes at least one first molecular pump. A high-pressure valve group for controlling the on-off state is connected between the first air inlet and the vacuum port.

[0008] The pre-vacuum pump assembly has a second air inlet and a second exhaust end. A coarse pump valve group for controlling the on / off state is connected between the second air inlet and the vacuum port. A pre-stage valve group for controlling the on / off state is connected between the second air inlet and the first exhaust end.

[0009] The sustaining pump assembly has a third inlet end and a fourth outlet end. The sustaining pump assembly includes a second molecular pump and a sustaining pump body connected sequentially along the gas flow direction. The third inlet end is connected between the first outlet end and the inlet side of the pre-valve assembly.

[0010] The beneficial effects of the low-energy coating machine vacuum system of this utility model are:

[0011] When the vacuum system of the low-energy coating machine is started, the coarse evacuation valve group is first opened, and the pre-evacuation pump assembly evacuates the coating vacuum chamber, making the internal vacuum level of the coating vacuum chamber lower than the starting vacuum level of the first molecular pump. Simultaneously, considering the vacuum conditions and time required for the molecular pump to start, the maintenance pump body pre-evacuates the first and second molecular pumps to achieve the starting vacuum level of the first and second molecular pumps, accelerating their start-up time and starting them. Once the internal vacuum level of the coating vacuum chamber reaches the preset opening value of the high-pressure valve group, the coarse evacuation valve group is closed, and the forestage valve group and high-pressure valve group are opened. At this time, the pre-evacuation pump assembly and the second molecular pump are responsible for extracting the exhaust gas that assists the first molecular pump, while the maintenance pump body is responsible for accelerating the exhaust gas that assists the second molecular pump. The first molecular pump performs a fine high-vacuum evacuation of the coating vacuum chamber, making the internal vacuum level of the coating vacuum chamber reach... After reaching and stabilizing the set coating vacuum level, the fore-stage valve group and pre-pump assembly are closed, while the second molecular pump and maintenance pump body remain running. Under the high compression ratio of the second molecular pump, the exhaust volume of the first molecular pump under specific working conditions is met, so that the coating vacuum chamber is stably maintained at the required working vacuum level. This utility model completely replaces the traditional method of multiple mechanical pumps with the exhaust assistance of the maintenance pump body + the second molecular pump, which greatly saves energy consumption. When it is necessary to intermittently break the vacuum in the coating vacuum chamber, the high-pressure valve group is closed, while the first molecular pump, the second molecular pump, and the maintenance pump body remain running. When the coating vacuum chamber needs to be re-established, the coarse pump valve group is opened, the pre-pump assembly is started, and coarse pumping is performed. After reaching the set vacuum level, the fore-stage valve group and high-pressure valve group are opened, the coarse pump valve group is closed, and the coating vacuum chamber is quickly pumped to the required working vacuum level. Then, the fore-stage valve group and pre-pump assembly are closed.

[0012] As a further improvement to the above technical solution, the first molecular pump is provided in multiple forms, and the multiple first molecular pumps are connected in parallel to the first air inlet and the first exhaust end.

[0013] As a further improvement to the above technical solution, the sustaining pump assembly further includes a sustaining valve connected between the second molecular pump and the sustaining pump body.

[0014] As a further improvement to the above technical solution, the pre-pump assembly includes multiple mechanical pumps, which are connected in parallel between the second air inlet and the second exhaust.

[0015] As a further improvement to the above technical solution, each of the mechanical pumps is provided with a pre-extraction valve at its inlet.

[0016] As a further improvement to the above technical solution, the pre-extraction pump assembly also includes a Roots pump, which is connected between the second air inlet and the inlet of the plurality of pre-extraction valves.

[0017] As a further improvement to the above technical solution, the pre-pump assembly also includes a second vacuum sensor, which is used to detect the vacuum level between the Roots pump and the plurality of mechanical pumps.

[0018] As a further improvement to the above technical solution, the precision pump assembly also includes a first vacuum sensor, which is used to detect the vacuum level between the outlet of the first molecular pump and the inlet of the second molecular pump.

[0019] As a further improvement to the above technical solution, the coating vacuum chamber is equipped with a third vacuum sensor for detecting the vacuum level inside the coating vacuum chamber, and the vacuum port is equipped with a throttle valve.

[0020] Furthermore, this utility model also proposes an operating method applicable to the vacuum system of the low-energy coating machine, the operating method comprising:

[0021] Start the pre-vacuum pump assembly and open the coarse evacuation valve group to perform coarse evacuation of the coating vacuum chamber;

[0022] Start the maintenance pump body to pre-evacuate the first and second molecular pumps;

[0023] Once the vacuum level inside the first molecular pump and the second molecular pump reaches the first preset value, the first molecular pump and the second molecular pump are started.

[0024] When the vacuum level inside the coating vacuum chamber reaches the preset opening value of the high-pressure valve group, close the coarse pumping valve group and open the front valve group and the high-pressure valve group to perform fine pumping in the coating vacuum chamber.

[0025] Once the vacuum level inside the coating vacuum chamber reaches the second preset value, shut down the fore-stage valve group and the pre-pump assembly.

[0026] When it is necessary to break the vacuum in the coating vacuum chamber, close the high-pressure valve group, open the gas filling valve, and keep the first molecular pump, the second molecular pump, and the pump body running.

[0027] When the coating vacuum chamber is devastated and needs to be re-established, close the inflation valve, start the pre-pump assembly, open the coarse pump valve assembly, and quickly pump the vacuum level of the coating vacuum chamber to the preset opening value of the high-pressure valve assembly. Then, close the coarse pump valve assembly, open the fore-stage valve assembly and the high-pressure valve assembly, and perform fine evacuation of the coating vacuum chamber. When the vacuum level inside the coating vacuum chamber reaches the second preset value, close the fore-stage valve assembly and the pre-pump assembly.

[0028] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. Attached Figure Description

[0029] The present invention will be further described below with reference to the accompanying drawings and embodiments;

[0030] Figure 1 This is a schematic diagram of the pipe connection of an embodiment of the low-energy coating machine vacuum system provided by this utility model;

[0031] Figure 2 This is a schematic diagram of an embodiment of the low-energy coating machine vacuum system provided by this utility model;

[0032] Figure 3 This is a side view of an embodiment of the low-energy coating machine vacuum system provided by this utility model;

[0033] Figure 4 This is a flowchart illustrating an embodiment of the operating method provided by this utility model;

[0034] Icon labels:

[0035] Coating vacuum chamber 100; vacuum port 110; throttle valve 111; gas filling port 120; gas filling valve 121; third vacuum sensor 130;

[0036] Fine pump assembly 200; first molecular pump 210; high-pressure valve assembly 220; first vacuum sensor 230;

[0037] Pre-pump assembly 300; coarse pump valve assembly 310; fore-stage valve assembly 320; mechanical pump 330; pre-pump valve 340; Roots pump 350; second vacuum sensor 360;

[0038] Maintaining pump assembly 400; second molecular pump 410; maintaining pump body 420; maintaining valve 430. Detailed Implementation

[0039] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0040] In the description of this utility model, it should be understood that the orientation descriptions, such as up, down, etc., are based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0041] In the description of this utility model, "multiple" refers to two or more. The use of "first" and "second" is for distinguishing technical features only and should not be construed as indicating or implying relative importance, or implicitly indicating the number of technical features or their sequential relationship.

[0042] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0043] The technical solution of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described below are some embodiments of this utility model, not all embodiments.

[0044] like Figure 1 , Figure 2 and Figure 3 As shown, the low-energy coating machine vacuum system of this utility model includes: a coating vacuum chamber 100, a fine pump assembly 200, a pre-pump assembly 300, and a holding pump assembly 400.

[0045] The coating vacuum chamber 100 is provided with at least one vacuum port 110 and an air inlet 120. The number of vacuum ports 110 is determined according to the actual situation, and two or three can be provided. The air inlet 120 is used to connect the outside to the inside of the coating vacuum chamber 100. The air inlet 120 is provided with an air inlet valve 121, and the vacuum of the coating vacuum chamber 100 is broken by opening the air inlet valve 121.

[0046] The fine pump assembly 200 has a first inlet end and a first outlet end, wherein the first inlet end is responsible for air intake and the first outlet end is responsible for air exhaust. The fine pump assembly 200 includes at least one first molecular pump 210. The inlet of the first molecular pump 210 is connected to the first inlet end, or the inlet of the first molecular pump 210 serves as the first inlet end, and the outlet of the first molecular pump 210 is connected to the first outlet end. The first inlet end is connected to the vacuum port 110. A high-pressure valve group 220 for controlling the on and off is connected between the first inlet end and the vacuum port 110. The high-pressure valve group 220 includes at least one high-pressure valve body, which is installed at the inlet of the first molecular pump 210.

[0047] The pre-pump assembly 300 has a second air inlet and a second exhaust end. The functions of the second air inlet and the second exhaust end are the same as those of the first air inlet and the first exhaust end. The second air inlet is connected to the vacuum port 110. A coarse pump valve assembly 310 for controlling the on / off state is connected between the second air inlet and the vacuum port 110. The second air inlet is connected to the first exhaust end. A pre-valve assembly 320 for controlling the on / off state is connected between the second air inlet and the first exhaust end.

[0048] The sustaining pump assembly 400 of this embodiment has a third inlet end and a fourth outlet end. The functions of the third inlet end and the fourth outlet end are the same as those of the first inlet end and the first outlet end described above. The sustaining pump assembly 400 of this embodiment includes a second molecular pump 410 and a sustaining pump body 420 connected sequentially along the gas flow direction. It can be understood that the inlet of the second molecular pump 410 is connected to the third inlet end, while the outlet of the sustaining pump body 420 is connected to the fourth outlet end. The third inlet end is connected between the first outlet end and the inlet side of the pre-valve assembly 320.

[0049] Because the molecular pump rotates too fast, both the start-up and stop times of the molecular pump require a certain amount of pre-set time. In addition, the molecular pump needs to start after the vacuum level is lower than a set value. Specifically, in this embodiment, the first molecular pump 210 and the second molecular pump 410 need to start after the vacuum level is lower than 1 Pa.

[0050] When the vacuum system of the low-energy coating machine is started, the coarse evacuation valve group 310 is first opened, and the pre-evacuation pump assembly 300 performs coarse evacuation of the coating vacuum chamber 100, so that the internal vacuum degree of the coating vacuum chamber 100 is lower than the starting vacuum degree of the first molecular pump 210. At the same time, considering the vacuum conditions and time required for the molecular pump to start, the first molecular pump 210 and the second molecular pump 410 are pre-evacuated by maintaining the pump body 420 to achieve the starting vacuum degree of the first molecular pump 210 and the second molecular pump 410, thereby accelerating the start-up time of the first molecular pump 210 and the second molecular pump 410, and starting the first molecular pump 210 and the second molecular pump 410. When the internal vacuum degree of the coating vacuum chamber 100 reaches the preset opening value of the high-pressure valve group 220, the coarse evacuation valve group 300 is closed. The pumping valve assembly 310 opens the pre-pump assembly 320 and the high-pressure valve assembly 220. At this time, the pre-pump assembly 300 and the second molecular pump 410 are responsible for pumping the exhaust gas from the first molecular pump 210, while the maintenance pump body 420 is responsible for pumping the exhaust gas from the second molecular pump 410. The first molecular pump 210 performs a high vacuum evacuation on the coating vacuum chamber 100, so that the internal vacuum degree of the coating vacuum chamber 100 reaches and is stably maintained at the set coating vacuum degree. Then, the pre-pump assembly 320 and the pre-pump assembly 300 are closed, and the second molecular pump 410 and the maintenance pump body 420 are kept running. Under the high compression ratio of the second molecular pump 410, the exhaust volume of the first molecular pump 210 under specific working conditions is met, so that the coating vacuum chamber 100 is stably maintained at the vacuum degree required for operation.

[0051] This invention completely replaces the traditional method of multiple mechanical pumps 330 with a venting-assisted method using a holding pump body 420 and a second molecular pump 410, greatly saving electrical energy consumption. When intermittent vacuum breaking is required in the coating vacuum chamber 100, the high-pressure valve group 220 is closed, while the first molecular pump 210, the second molecular pump 410, and the holding pump body 420 continue to operate. When the coating vacuum chamber 100 needs to be re-established, the coarse evacuation valve group 310 is opened, and the pre-evacuation pump assembly 300 is started to perform coarse evacuation to achieve high pressure. After the valve group 220 reaches its preset opening value, the coarse pumping valve group 310 is closed, and the pre-stage valve group 320 and the high-pressure valve group 220 are opened. At this time, the pre-pump assembly 300 extracts the exhaust gas from the first molecular pump 210 to increase the pumping force of the vacuum system. After the coating vacuum chamber 100 is quickly pumped to the vacuum level required for operation, the pre-stage valve group 320 and the pre-pump assembly 300 are closed. Then, through the operation of the first molecular pump 210, the second molecular pump 410 and the maintenance pump 420, the coating vacuum chamber 100 is precisely maintained at the set vacuum level.

[0052] In this embodiment, multiple first molecular pumps 210 are provided. The multiple first molecular pumps 210 are connected in parallel to the first air inlet and the first air outlet. The multiple first molecular pumps 210 can increase the pumping volume, thereby improving the control accuracy of the coating vacuum degree of the coating vacuum chamber 100.

[0053] The sustaining pump assembly 400 also includes a sustaining valve 430 connected between the second molecular pump 410 and the sustaining pump body 420. The sustaining valve 430 is used to control the on / off connection between the second molecular pump 410 and the sustaining pump body 420. When it is necessary to evacuate or degas the second molecular pump 410, the sustaining valve 430 is opened.

[0054] Furthermore, the pre-pump assembly 300 of this embodiment includes a plurality of mechanical pumps 330, which are connected in parallel between the second air inlet and the second air outlet, thereby improving the pumping capacity of the pre-pump assembly 300.

[0055] Each of the mechanical pumps 330 has a pre-extraction valve 340 at its inlet. When the mechanical pump 330 is started, the corresponding pre-extraction valve 340 is opened.

[0056] To further improve the vacuuming capacity and speed of the pre-vacuum pump assembly 300, the pre-vacuum pump assembly 300 also includes a Roots pump 350. The Roots pump 350 is connected between the second air inlet and the inlet of multiple pre-vacuum valves 340. The Roots pump 350 can only be started after the vacuum level is lower than a set value. In this embodiment, the Roots pump 350 is set to start after the vacuum level is lower than 500 Pa, while the mechanical pump 330 can be started directly in atmospheric conditions. Thus, during the start-up of the pre-vacuum pump assembly 300, the mechanical pump 330 is started first to evacuate the coating vacuum chamber 100. When the vacuum level between the mechanical pump 330 and the Roots pump 350 reaches the start-up vacuum level of the Roots pump 350, the Roots pump 350 starts, increasing the pumping speed.

[0057] Furthermore, the pre-pump assembly 300 in this embodiment also includes a second vacuum sensor 360, which is used to detect the vacuum level between the Roots pump 350 and the plurality of mechanical pumps 330, and to detect and identify the start-up vacuum level of the Roots pump 350 through the second vacuum sensor.

[0058] In addition, the fine pump assembly 200 of this embodiment also includes a first vacuum sensor 230, which is used to detect the vacuum level between the outlet of the first molecular pump 210 and the inlet of the second molecular pump 410. In this embodiment, the first vacuum sensor 230 is used to detect and identify the outlet of the first molecular pump 210 and the start-up vacuum level of the second molecular pump 410.

[0059] In this embodiment, the coating vacuum chamber 100 is equipped with a third vacuum sensor 130 for detecting the vacuum level inside the coating vacuum chamber 100, so as to realize the detection of the vacuum level of the coating vacuum chamber 100. The vacuum port 110 is equipped with a throttle valve 111, which is mainly used to control the airflow size of the pump.

[0060] In addition, such as Figure 4 As shown, this utility model also proposes an operating method applicable to the vacuum system of the low-energy coating machine. The operating method includes the following steps:

[0061] Step S100: Start the pre-vacuum pump assembly 300 and open the coarse evacuation valve assembly 310 to perform coarse evacuation of the coating vacuum chamber 100.

[0062] Step S200: Start the maintenance pump body 420 to pre-evacuate the first molecular pump 210 and the second molecular pump 410;

[0063] Step S300: When the vacuum level inside the first molecular pump 210 and the second molecular pump 410 reaches the first preset value, the first molecular pump 210 and the second molecular pump 410 are started.

[0064] Step S400: When the vacuum level inside the coating vacuum chamber 100 reaches the preset opening value of the high-pressure valve group 220, close the coarse pumping valve group 310, open the front valve group 320 and the high-pressure valve group 220, and perform fine pumping on the coating vacuum chamber 100.

[0065] Step S500: When the vacuum level inside the coating vacuum chamber 100 reaches the second preset value, close the fore-stage valve group 320 and the pre-pump assembly 300.

[0066] Step S600: When it is necessary to break the vacuum in the coating vacuum chamber 100, close the high-pressure valve group 220, open the gas filling valve 121, and keep the first molecular pump 210, the second molecular pump 410 and the maintenance pump body 420 running.

[0067] Step S700: When the coating vacuum chamber 100 is devastated and needs to be re-established, close the inflation valve 121, start the pre-pump assembly 300, open the coarse pump valve group 310, and quickly pump the vacuum level of the coating vacuum chamber 100 to the preset opening value of the high pressure valve group 220. Then, close the coarse pump valve group 310, open the pre-stage valve group 320 and the high pressure valve group 220 to perform fine evacuation of the coating vacuum chamber 100. When the vacuum level inside the coating vacuum chamber 100 reaches the second preset value, close the pre-stage valve group 320 and the pre-pump assembly 300.

[0068] In the process of starting the pre-pump assembly 300, the mechanical pump 330 is started first to evacuate the coating vacuum chamber 100. When the vacuum degree between the mechanical pump 330 and the Roots pump 350 reaches the starting vacuum degree of the Roots pump 350, the Roots pump 350 is started to increase the pumping speed.

[0069] The first preset value is lower than the starting vacuum of the molecular pump, and the second preset value is the vacuum required for the coating process.

[0070] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0071] The embodiments of the present utility model have been described in detail above with reference to the accompanying drawings. However, the present utility model is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present utility model.

Claims

1. A low energy consumption coating machine vacuum system, characterized in that, The coating machine comprises: a coating vacuum chamber provided with at least one vacuum port and a gas filling port, the gas filling port being provided with a gas filling valve; a fine pumping assembly having a first gas inlet end and a first gas outlet end, the fine pumping assembly comprising at least one first molecular pump, a high-pressure valve group being connected between the first gas inlet end and the vacuum port for controlling the on-off; a rough pumping assembly having a second gas inlet end and a second gas outlet end, the second gas inlet end being connected with the vacuum port through a rough valve group for controlling the on-off, the second gas inlet end being connected with the first gas outlet end through a forevalve group for controlling the on-off; a maintenance pumping assembly having a third gas inlet end and a fourth gas outlet end, the maintenance pumping assembly comprising a second molecular pump and a maintenance pump body connected in sequence along the gas flow direction, the third gas inlet end being communicated between the first gas outlet end and the gas inlet side of the forevalve group.

2. The low-energy consumption coating machine vacuum system according to claim 1, wherein: a plurality of first molecular pumps are provided, and the plurality of first molecular pumps are connected in parallel between the first gas inlet end and the first gas outlet end.

3. The low-energy consumption coating machine vacuum system according to claim 1, wherein: the maintenance pumping assembly further comprises a maintenance valve connected between the second molecular pump and the maintenance pump body.

4. The low-energy consumption coating machine vacuum system according to claim 1, wherein: the rough pumping assembly comprises a plurality of mechanical pumps, and the plurality of mechanical pumps are connected in parallel between the second gas inlet end and the second gas outlet end.

5. The low-energy consumption coating machine vacuum system according to claim 4, wherein: the inlets of the plurality of mechanical pumps are respectively provided with rough valves.

6. The low-energy consumption coating machine vacuum system according to claim 5, wherein: the rough pumping assembly further comprises a Roots pump connected between the second gas inlet end and the inlets of the plurality of rough valves.

7. The low-energy consumption coating machine vacuum system according to claim 6, wherein: the rough pumping assembly further comprises a second vacuum sensor for detecting the vacuum degree between the Roots pump and the plurality of mechanical pumps.

8. The low-energy consumption coating machine vacuum system according to claim 1, wherein: the fine pumping assembly further comprises a first vacuum sensor for detecting the vacuum degree between the outlet of the first molecular pump and the inlet of the second molecular pump.

9. The low-energy consumption coating machine vacuum system according to claim 1, wherein: the coating vacuum chamber is provided with a third vacuum sensor for detecting the vacuum degree inside the coating vacuum chamber, and the vacuum port is provided with a throttle valve.

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