Graphene heating annealing furnace
By using a graphene heating plate and a gas equalization plate structure in the annealing furnace, the distribution of hot air flow is optimized, the problem of uneven heating of the substrate is solved, higher annealing uniformity is achieved, and the heating uniformity of perovskite solar cells is improved.
Patent Information
- Application Number
- CN202520372593.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-05
- Publication Date
- 2026-03-06
- Estimated Expiration
- 2035-03-05
AI Technical Summary
In existing perovskite solar cell annealing furnaces, the substrate is heated unevenly, resulting in poor annealing uniformity.
The system employs a graphene heating plate and a uniform air distribution plate structure. The distribution of hot air is optimized through the air inlet and exhaust components. The graphene heating plate with microcrystalline glass and graphene coating achieves uniform heating of the hot air. Combined with the support bracket to lift the substrate, it ensures that the hot air acts uniformly on the substrate.
This improved the uniformity of heat distribution within the annealing furnace, enhanced the annealing uniformity of the substrate, and ensured the heating uniformity of the perovskite solar cells.
Smart Images

Figure CN223976449U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of perovskite solar cell technology, specifically relating to perovskite solar cell annealing furnaces, and more particularly to graphene heating annealing furnaces. Background Technology
[0002] Perovskite solar cells are currently in the experimental stage. During the fabrication of perovskite solar cell substrates, high-temperature heating is required to heat-treat the substrates. Uniform heating of the perovskite light-absorbing layer during the heating process is an important factor in the uniformity of annealing.
[0003] In related technologies, an annealing furnace includes: a furnace body and a graphene heating element disposed within the furnace body. The graphene heating element is distributed around the perimeter of the furnace body cavity, and the graphene heating element is cylindrical with a graphite disc-shaped bottom plate at the bottom and a ceramic cylinder fitted on its surface.
[0004] However, this heating mode with heating from all sides not only makes the overall temperature inside the furnace rise more slowly, but also makes the temperature near the center of the furnace lower. This results in a large temperature difference in the airflow inside the furnace, which leads to uneven temperature distribution on the substrate and reduces the uniformity of substrate annealing.
[0005] Therefore, how to solve the problem of uneven heating of the substrate in the annealing furnace is a technical problem that urgently needs to be solved in this field.
[0006] It should be noted that the information disclosed in this background section is only for understanding the background technology of the present application concept, and therefore, the above description is not considered to constitute prior art information. Utility Model Content
[0007] This disclosure provides at least one graphene heating annealing furnace to solve the technical problem of uneven heating of the substrate within the annealing furnace.
[0008] In a first aspect, embodiments of this disclosure provide a graphene heating annealing furnace, comprising: a furnace body having an air inlet assembly disposed at its top and / or bottom; and a graphene heating plate disposed at the air inlet of the air inlet assembly; wherein the graphene heating plate comprises a microcrystalline glass sheet having a graphene coating on at least one surface of the microcrystalline glass sheet.
[0009] In one alternative embodiment, at least one side of the furnace body is provided with an exhaust assembly; wherein the exhaust assembly is adapted to exhaust a portion of the hot air inside the furnace body to the outside of the furnace body.
[0010] In one optional embodiment, a gas equalization plate is provided at the air inlet position of the air inlet assembly and / or the air outlet position of the exhaust assembly; wherein the hot air flows through the gas equalization plate at the air inlet to enter the graphene heating plate position for heating; and / or, the hot air enters the inner cavity of the furnace body and is discharged to the outside of the furnace body after passing through the gas equalization plate at the air outlet.
[0011] In one alternative embodiment, the exhaust assembly further includes a blower; the blower is fixed to the outer wall of the furnace body.
[0012] In one optional embodiment, the air intake assembly further includes an air intake guide hood; the top and / or bottom surfaces of the furnace body are each provided with at least one air intake guide hood.
[0013] In one alternative embodiment, the air inlet guide shroud is installed at the air inlet position of the furnace body.
[0014] In one alternative embodiment, a heating wire is provided on the air inlet.
[0015] In one alternative embodiment, a support is provided between the two graphene heating plates; wherein the support is adapted to support the substrate.
[0016] Secondly, this disclosure also provides a graphene heating annealing furnace, comprising: a furnace body, wherein an air inlet assembly is provided at the top and / or bottom, and an exhaust assembly is provided on at least one side of the furnace body; a graphene heating plate is provided at the air inlet position of the air inlet assembly; a bracket adapted to support a substrate is provided between two graphene heating plates; and an air distribution plate is provided at the air inlet position of the air inlet assembly and / or the air outlet position of the exhaust assembly.
[0017] In one optional embodiment, the graphene heating plate includes a microcrystalline glass sheet with a graphene coating on at least one side surface of the microcrystalline glass sheet; wherein, hot air enters the graphene heating plate position through the air inlet and is heated; and / or, the hot air enters the furnace cavity and is discharged to the outside of the furnace after passing through the air outlet air distribution plate.
[0018] The beneficial effect of this utility model is that it provides a graphene heating annealing furnace, which makes the furnace body heated evenly by setting a graphene heating plate with a microcrystalline glass sheet on one side and a graphene coating on the other side.
[0019] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other advantages of this invention are realized and obtained through the structures particularly pointed out in the description and the accompanying drawings.
[0020] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, preferred embodiments are described in detail below with reference to the accompanying drawings. Attached Figure Description
[0021] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.
[0022] Figure 1 A perspective view of a graphene heating annealing furnace provided in an embodiment of this disclosure;
[0023] Figure 2 A cross-sectional view of a graphene heating annealing furnace provided in an embodiment of this disclosure;
[0024] Figure 3 This is a schematic diagram of the structure of the graphene heating plate provided in an embodiment of this disclosure.
[0025] In the picture:
[0026] 1. Furnace body;
[0027] 2. Air intake assembly; 21. Air intake shroud; 22. Air inlet; 23. Heating wire tube;
[0028] 3. Exhaust assembly; 31. Blower; 32. Air outlet;
[0029] 4. Air distribution plate;
[0030] 5. Graphene heating plate; 51. Microcrystalline glass sheet; 52. Graphene coating;
[0031] 6. Bracket. Detailed Implementation
[0032] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.
[0033] In this document, when it is mentioned that a first component is located on a second component, this can mean that the first component can be directly formed on the second component, or that a third component can be inserted between the first and second components. Furthermore, in the accompanying drawings, the thickness of the components may be exaggerated or reduced for the purpose of effectively describing the technical content.
[0034] In this document, exemplary embodiments of the present disclosure will be described in more detail with reference to the accompanying drawings. As used herein, expressions such as “at least one of…” modify the entire list of elements when following a list of elements, rather than individual elements in the list. For example, the expression “at least one of a, b, and c” should be understood to include only a, only b, only c, both a and b, both a and c, both b and c, or all of a, b, and c.
[0035] The terminology used herein is for the purpose of describing specific exemplary configurations only and is not intended to be limiting. As used herein, the singular articles “a,” “an,” and “the” may also be intended to include plural forms unless otherwise clearly stated herein. The terms “comprising,” “including,” and “having” are inclusive and thus specify the presence of features, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein should not be construed as requiring them to be performed in the specific order discussed or shown, unless specifically identified as such. Additional or alternative steps may be employed.
[0036] As used herein, the phrases “in one embodiment,” “according to one embodiment,” “in some embodiments,” etc., generally refer to the fact that a particular feature, structure, or characteristic following the phrase can be included in at least one embodiment of this disclosure. Therefore, a particular feature, structure, or characteristic can be included in more than one embodiment of this disclosure, such that these phrases do not necessarily refer to the same embodiment. As used herein, the terms “example,” “exemplary,” etc., are used to “serve as an example, instance, or illustration.” Any implementation, aspect, or design described herein as “example” or “exemplary” is not necessarily to be construed as preferred or superior to other implementations, aspects, or designs. Rather, the use of the terms “example,” “exemplary,” etc., is intended to present concepts in a specific manner.
[0037] Research has revealed that in related technologies, annealing furnaces include: a furnace body and a graphene heating element disposed within the furnace body. The graphene heating element is distributed around the perimeter of the furnace body cavity, and is cylindrical with a graphite disc-shaped base plate at the bottom and a ceramic cylinder fitted on its surface.
[0038] However, this heating mode with heating from all sides not only makes the overall temperature inside the furnace rise more slowly, but also makes the temperature near the center of the furnace lower. This results in a large temperature difference in the airflow inside the furnace, which leads to uneven temperature distribution on the substrate and reduces the uniformity of substrate annealing.
[0039] Therefore, how to solve the problem of uneven heating of the substrate in the annealing furnace is a technical problem that urgently needs to be solved in this field.
[0040] The shortcomings of the above solutions are the result of the utility model inventor's practice and careful research. Therefore, the discovery process of the above problems and the solutions proposed in this disclosure should be considered as contributions made by the utility model inventor to this disclosure.
[0041] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.
[0042] The following detailed description, with reference to the accompanying drawings, describes some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.
[0043] like Figures 1 to 3 As shown, some embodiments provide a graphene heating annealing furnace, including: a furnace body 1, the interior of which is provided with a cavity, and a substrate inlet (not shown in the figure) is provided on one side of the furnace body, the inlet being directly opposite the support 6. During use, the substrate inlet is in a closed state; air inlet components 2 are provided at the top and / or bottom of the furnace body 1; to achieve the effect of air intake from the top, bottom, or both simultaneously. Multiple air inlet components 2 can be provided at the top and / or bottom, the main purpose being that if any one of the air inlet components 2 fails, the normal operation of the annealing furnace can be maintained during the repair process. In addition, the air inlet components 2 at the top and / or bottom are located in the center of the furnace body 1, and the arrangement of the air inlet components 2 can be adapted to the equipment environment, such as... Figure 1 The top of the graphene heating plate 5 is arranged in parallel or perpendicular directions. The graphene heating plate 5 is used to reheat the preheated hot airflow evenly. In order to achieve better heating effect, it is set at the air inlet 22 of the air inlet assembly 2.
[0044] Please see Figure 2 A support 6 is provided between the two graphene heating plates 5; the support 6 is suitable for supporting the substrate. Specifically, hot air enters from the air inlet 22 and will first come into contact with the two graphene heating plates 5 to achieve a reheating effect. The heated heat flow flows to the support 6 and acts on the substrate, which solves the problem of uneven heating caused by one side during the substrate annealing process.
[0045] Please see Figure 3 The composition and structure of the graphene heating plate 5 are described in detail below. The graphene heating plate 5 includes a microcrystalline glass sheet 51, and a graphene coating 52 is provided on at least one surface of the microcrystalline glass sheet 51.
[0046] Please see Figure 1 and combined Figure 2 The furnace body 1 is provided with an exhaust assembly 3 on at least one side. The exhaust assembly 3 is mainly used to transport the gas after the heat is absorbed inside the furnace body 1 to the outside of the furnace body 1, so that the inlet and outlet air pressure inside the furnace body 1 can reach a balance. The exhaust assembly 3 is suitable for exhausting some of the hot gas inside the furnace body 1 to the outside of the furnace body 1. The composition and structure of the exhaust assembly 3 are described in detail below. The exhaust assembly 3 also includes a blower 31. The blower 31 is fixed on the outer wall of the furnace body 1 and is used to draw the airflow inside the furnace body 1 to the outside of the furnace body.
[0047] Please see Figure 2 A uniform air distribution plate 4 is provided at the air inlet 22 of the air inlet assembly 2 and / or the air outlet 32 of the exhaust assembly 3. The main function of the uniform air distribution plate 4 is to allow the airflow to pass evenly into or out of the furnace body 1. The hot airflow enters the graphene heating plate 5 through the uniform air distribution plate 4 at the air inlet 22 for heating. And / or, the hot air enters the inner cavity of the furnace body 1 and is discharged to the outside of the furnace body 1 after passing through the uniform air distribution plate 4 at the air outlet 32.
[0048] Please see Figure 1 and combined Figure 2 In the upper and lower hot air intake structure of the furnace body 1, room temperature air enters through the air inlet 22, is heated by the heating wire tube 23, and then dispersed into the cavity through the air distribution plate 4. This achieves a dynamic balance between the hot air exhausted during the heating process of the substrate on the support 6 and the hot air replenished by the air inlet 22, maintaining the flow of hot air in the cavity and ensuring good uniformity of substrate annealing. The composition structure of the air intake assembly 2 is described in detail below. The air intake assembly 2 also includes an air intake guide hood 21. The air intake guide hood 21 protrudes from the outer surface of the furnace body 1, forming an air intake channel with the air inlet 22 of the furnace body 1. At least one air intake guide hood 21 is provided on the top and / or bottom surfaces of the furnace body 1. The air intake guide hood 21 is installed at the air inlet 22 of the furnace body 1. The heating wire tube 23 is provided on the air inlet 22, and the heating wire tube 23 is used to preheat the incoming gas.
[0049] like Figures 1 to 3As shown, some embodiments provide a graphene heating annealing furnace, including: a furnace body 1, the interior of which is provided with a cavity, and a substrate inlet on one side of the furnace body, the inlet being directly opposite the support 6. During use, the substrate inlet is in a closed state; air inlet components 2 are provided at the top and / or bottom of the furnace body 1; to achieve the effect of air intake from the top, bottom, or both simultaneously, the main purpose being that if one set of air inlet components 2 fails, the annealing furnace can be used normally without being affected during maintenance; in the structure of hot air intake at the top and bottom of the furnace body 1, room temperature air enters the air inlet 22 and is heated by the heating wire tube 23, and then dispersed into the cavity through the air distribution plate 4, so that the hot air exhausted during the heating process of the substrate on the support 6 and the hot air replenished by the air inlet 22 reach a dynamic balance, maintaining the flow of hot air in the cavity, and making the substrate annealing uniform.
[0050] Please see Figure 1 and combined Figure 2 The furnace body 1 has an exhaust assembly 3 on at least one side; a graphene heating plate 5 is located at the air inlet 22 of the air inlet assembly 2; a support 6 suitable for supporting the substrate is located between the two graphene heating plates 5. The hot air enters from the air inlet 22 and will first come into contact with the two graphene heating plates 5 to achieve a reheating effect. The heated heat flow flows to the support 6 and acts on the substrate, which solves the problem of uneven heating caused by one side during the substrate annealing process. The graphene heating plate 5 is to allow the preheated hot air flow to be heated evenly again, in order to achieve a better heating effect.
[0051] Please see Figure 2 An air distribution plate 4 is provided at the air inlet 22 of the air inlet assembly 2 and / or the air outlet 32 of the exhaust assembly 3; the main function of the air distribution plate 4 is to allow the airflow to pass evenly into or out of the furnace body 1.
[0052] Please see Figure 3 The graphene heating plate 5 includes a microcrystalline glass sheet 51, and a graphene coating 52 is provided on at least one side of the microcrystalline glass sheet 51; wherein, the hot air enters the graphene heating plate 5 through the air distribution plate 4 of the air inlet 22 and is heated; and / or, the hot air enters the inner cavity of the furnace body 1 and is discharged to the outside of the furnace body 1 after passing through the air distribution plate 4 of the air outlet 32.
[0053] In summary, the substrate enters the furnace body 1 through the substrate inlet. After the substrate inlet (not shown in the figure) is closed, air is introduced from both the top and bottom. The gas is heated by the heating wire tube 23 and enters the furnace body 1. It is then dispersed throughout the cavity by the gas distribution plate 4 and the graphene heating plate 5. The gas is exhausted by the left and right blowers 31 and heated by the symmetrical graphene heating plates 5, thus achieving the annealing of the perovskite glass substrate. The graphene heating plate 5 with a microcrystalline glass sheet 51 on one side and a graphene coating 52 on the other side ensures uniform heating inside the furnace body 1. At the same time, by setting the air intake component 2 with the gas distribution plate 4, the heat flow is evenly distributed around the support 6 between the two graphene heating plates 5, further improving the uniformity of heat flow distribution inside the furnace body 1, thereby enhancing the annealing uniformity during the use of the annealing furnace.
[0054] In the description of the embodiments of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0055] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence unless expressly indicated herein. Therefore, without departing from the teachings of the exemplary embodiments, the first element, component, region, layer, or segment discussed above may be referred to as the second element, component, region, layer, or segment.
[0056] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.
Claims
1. A graphene heating annealing furnace, characterized by, The graphene heating annealing furnace comprises: a furnace body (1) provided with an air inlet assembly (2) at the top and / or bottom thereof a graphene heating plate (5) arranged at the air inlet (22) of the air inlet assembly (2); wherein the graphene heating plate (5) comprises a microcrystalline glass sheet (51) provided with a graphene coating (52) on at least one surface of the microcrystalline glass sheet (51).
2. The graphene heating annealing furnace according to claim 1, wherein at least one side of the furnace body (1) is provided with an air outlet assembly (3); wherein the air outlet assembly (3) is adapted to discharge part of the hot air in the furnace body (1) to the outside of the furnace body (1).
3. The graphene heating annealing furnace according to claim 2, wherein the air inlet (22) of the air inlet assembly (2) and / or the air outlet (32) of the air outlet assembly (3) are provided with an air uniformization plate (4); wherein the hot air flows through the air uniformization plate (4) of the air inlet (22) to the graphene heating plate (5) for heating; and / or, the hot air enters the inner cavity of the furnace body (1) and is discharged to the outside of the furnace body (1) after passing through the air uniformization plate (4) of the air outlet (32).
4. The graphene heating annealing furnace according to claim 2, wherein the air outlet assembly (3) further comprises a blower (31); the blower (31) is fixed on the outer sidewall of the furnace body (1).
5. The graphene heating annealing furnace according to claim 1, wherein the air inlet assembly (2) further comprises an air inlet fairing (21); the top surface and / or the bottom surface of the furnace body (1) are each provided with not less than one air inlet fairing (21).
6. The graphene heating annealing furnace according to claim 5, wherein the air inlet fairing (21) is arranged at the air inlet (22) of the furnace body (1).
7. The graphene heating annealing furnace according to claim 6, wherein a heating wire tube (23) is arranged on the air inlet (22).
8. The graphene heating annealing furnace according to claim 1, wherein a support (6) is arranged between two graphene heating plates (5); wherein the support (6) is adapted to hold a substrate.
9. A graphene heating annealing furnace characterized by, The graphene heating annealing furnace comprises: a furnace body (1) provided with an air inlet assembly (2) at the top and / or bottom thereof, and at least one side of the furnace body (1) is provided with an air outlet assembly (3); a graphene heating plate (5) arranged at the air inlet (22) of the air inlet assembly (2); a support (6) adapted to hold a substrate is arranged between two graphene heating plates (5); the air inlet (22) of the air inlet assembly (2) and / or the air outlet (32) of the air outlet assembly (3) are provided with an air uniformization plate (4).
10. The graphene heating annealing furnace according to claim 9, wherein the graphene heating plate (5) comprises a microcrystalline glass sheet (51) provided with a graphene coating (52) on at least one surface of the microcrystalline glass sheet (51); wherein, the hot air flows through the air uniformization plate (4) of the air inlet (22) to the graphene heating plate (5) for heating; and / or, the hot air enters the inner cavity of the furnace body (1) and is discharged to the outside of the furnace body (1) after passing through the air uniformization plate (4) of the air outlet (32).