Movable carrying table mechanism for wafer detection

Abstract

The utility model discloses a moving platform deck mechanism for wafer detection, which comprises a moving platform deck main body, a moving groove is arranged in the moving platform deck main body, a balance moving seat is arranged at the upper position in the moving groove, an assembly part is arranged at the middle position of one end of the bottom surface of the balance moving seat, and the balance moving seat is provided with a movable groove. Positioning openings are formed in the two sides in the assembly part, the inner side of the assembly part is connected with the push rod, and the push rod is arranged in the hydraulic push rod. According to the utility model, the position of the adjustable positioning seat is adjusted and moved by using the adjusting screw rod, the adjusting mode is simple, adjustment can be carried out according to the size of the wafer and the positioning position, more user requirements can be met, and the device is suitable for wafers of various sizes; the wafer detection position is corrected by adjusting the adjustable positioning seat, so that the wafer positioning is more accurate, and the wafer detection effect is improved.

Description

Technical Field

[0001] This utility model relates to the field of wafer-related technologies, specifically a moving stage mechanism for wafer inspection. Background Technology

[0002] A wafer is a silicon wafer used in the fabrication of silicon semiconductor integrated circuits. Because of its circular shape, it is called a wafer. The raw material for a wafer is silicon, and there is an inexhaustible supply of silicon dioxide on the Earth's crust. Various circuit element structures can be fabricated on silicon wafers to become IC products with specific electrical functions. The raw material for a wafer is silicon, and there is an inexhaustible supply of silicon dioxide on the Earth's crust. Wafer manufacturers then melt this polycrystalline silicon, plant seed crystals in the molten liquid, and then slowly pull them out to form cylindrical single-crystal silicon rods. Since the silicon rod is gradually formed from a seed crystal with a defined crystal orientation in molten silicon raw material, this process is called "crystal growth".

[0003] Existing technologies for wafer inspection moving stage mechanisms still have certain drawbacks. The traditional moving stage usually moves to a fixed position. Due to the different sizes of wafers, there will be slight deviations in the wafer's position, which will cause the wafer to not be aligned with the inspection position and affect the accuracy of the wafer's movement position. Utility Model Content

[0004] The purpose of this invention is to provide a moving stage mechanism for wafer inspection, in order to solve the problem mentioned in the background art that the moving position of a traditional moving stage is usually fixed. Due to the different sizes of wafers, there will be slight deviations in the moving position of the wafer, which will cause the wafer to not be aligned with the inspection position and affect the accuracy of the wafer moving position.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a moving stage mechanism for wafer inspection, comprising a moving stage body, a moving groove inside the moving stage body, a balancing moving seat at the upper position inside the moving groove, an assembly at the middle position of one end of the bottom surface of the balancing moving seat, positioning ports on both sides of the assembly, a push rod connected to the inner side of the assembly, the push rod being located inside a hydraulic push rod, anti-deviation positioning rods on both sides of the hydraulic push rod, fixed spur gears on both sides of the bottom surface of the balancing moving seat, a fixed circular gear below the fixed spur gears, an adjustable positioning seat inside the balancing moving seat, a wafer placement groove above the adjustable positioning seat, guide rods on both sides of the interior of the adjustable positioning seat, mounting plates on both sides of the moving stage body, and a slot at one end of the moving stage body aligned with the fixed spur gear.

[0006] In a further embodiment, the wafer placement slot is circular in shape, and the wafer placement slot is connected to the adjustable positioning seat by a plug-in connection.

[0007] In a further embodiment, the middle position of one end of the adjustable positioning seat is fixedly connected to the balance moving seat by an adjusting screw, and the two sides of both ends of the adjustable positioning seat are fixedly connected to the balance moving seat by a buffer spring.

[0008] In a further embodiment, the two ends of the guide rod are fixedly connected to the balance moving seat by insertion, and the adjustable positioning seat is slidably connected to the guide rod.

[0009] In a further embodiment, the balancing moving seat and the moving groove are connected by a fixed spur gear and a fixed circular gear, and the fixed circular gear and the moving groove are fixedly connected by a fixed shaft.

[0010] In a further embodiment, the assembly is welded to the balance moving seat, and the cross-section of the assembly is designed as an L-shaped structure.

[0011] Compared with the prior art, the beneficial effects of this utility model are as follows: the position of the adjustable positioning seat is adjusted and moved by adjusting screws. This adjustment method is relatively simple and can be adjusted according to the size of the wafer and the positioning position, meeting more user needs and applicable to wafers of various sizes. When there is a slight deviation in the wafer detection position, the wafer detection position can be corrected by adjusting the adjustable positioning seat, making the wafer positioning more accurate and thus improving the wafer detection effect. In addition, the two sides of the bottom of the balance moving seat move through gear transmission. Since gear transmission has good stability and accurate and reliable motion transmission, the back-and-forth movement of the balance moving seat is more stable and reliable, extending its service life. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the structure of a moving stage mechanism for wafer inspection according to the present invention.

[0013] Figure 2 This is a schematic cross-sectional view of a moving stage mechanism for wafer inspection according to the present invention.

[0014] Figure 3 This is a rear view of the balancing moving seat of this utility model;

[0015] Figure 4 This is a side view of the balancing moving seat of this utility model.

[0016] In the diagram: 1. Main body of the movable stage; 2. Adjusting screw; 3. Buffer spring; 4. Balance moving seat; 5. Adjustable positioning seat; 6. Wafer placement slot; 7. Guide rod; 8. Fixed spur gear; 9. Anti-offset positioning rod; 10. Moving slot; 11. Hydraulic push rod; 12. Mounting plate; 13. Assembly component; 14. Push rod; 15. Slot; 16. Fixed shaft; 17. Fixed spur gear; 18. Positioning port. Detailed Implementation

[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0018] Please see Figure 1-4 This utility model provides an embodiment of a wafer inspection moving stage mechanism, comprising a moving stage body 1, a moving groove 10 inside the moving stage body 1, a balancing moving seat 4 at the upper position inside the moving groove 10, an assembly 13 at the middle position of one end of the bottom surface of the balancing moving seat 4, positioning ports 18 on both sides of the assembly 13, the inner side of the assembly 13 connected to a push rod 14, the push rod 14 being located inside a hydraulic push rod 11, anti-deviation positioning rods 9 on both sides of the hydraulic push rod 11, fixed spur gears 8 on both sides of the bottom surface of the balancing moving seat 4, fixed spur gears 17 below the fixed spur gears 8, an adjustable positioning seat 5 inside the balancing moving seat 4, a wafer placement groove 6 above the adjustable positioning seat 5, guide rods 7 on both sides of the adjustable positioning seat 5, mounting plates 12 on both sides of the moving stage body 1, and one end of the moving stage body 1 connected to... A slot 15 is provided at the alignment position of the fixed spur gear 8. The movable slot 10 is used to reserve space for the movement of the balance moving seat 4. The balance moving seat 4 is used to install the adjustable positioning seat 5. The adjustable positioning seat 5 is used to install and fix the wafer placement slot 6. The wafer placement slot 6 is used to position the wafer. The assembly 13 is used to assemble and fix the push rod 14 and the balance moving seat 4. The hydraulic push rod 11 is used to provide power to move and adjust the balance moving seat 4 back and forth. The push rod 14 is located inside the hydraulic push rod 11. The hydraulic push rod 11 has positioning on both sides for positioning the movement position of the balance moving seat 4. The fixed spur gear 8 is connected to the fixed spur gear 17 to increase the stability of the movement of the balance moving seat 4. The guide rod 7 is used to guide and position the adjustable positioning seat 5. The slot 15 is used to position the fixed spur gear 8 at the retraction position.

[0019] The wafer placement slot 6 is circular in shape, and the wafer placement slot 6 is connected to the adjustable positioning seat 5 by a plug-in connection. The circular structure of the wafer placement slot 6 better conforms to the shape of the wafer, and the plug-in connection facilitates the installation or removal of the wafer placement slot 6. The middle position of one end of the adjustable positioning seat 5 is fixedly connected to the balance moving seat 4 by an adjusting screw 2, and the two sides of both ends of the adjustable positioning seat 5 are fixedly connected to the balance moving seat 4 by a buffer spring 3. The adjusting screw 2 is used to adjust the position of the adjustable positioning seat 5.

[0020] Both ends of the guide rod 7 are connected to the balance moving seat 4 by insertion, and the adjustable positioning seat 5 is connected to the guide rod 7 by sliding. The insertion connection facilitates the installation or removal of the guide rod 7. The balance moving seat 4 and the moving groove 10 are connected by a fixed spur gear 8 and a fixed spherical gear 17. The fixed spherical gear 17 and the moving groove 10 are fixedly connected by a fixed shaft 16. The fixed shaft 16 is used to install and fix the fixed spherical gear 17. The assembly 13 is connected to the balance moving seat 4 by welding. The cross-section of the assembly 13 is designed as an L-shaped structure. The welding connection is used to increase the firmness of the installation of the assembly 13 and the balance moving seat 4.

[0021] Working principle: In use, the movable stage body 1 is installed in the required position on the wafer inspection equipment using bolts. The wafer is placed in the wafer placement slot 6, aligning the center point of the wafer with the center point of the wafer placement slot 6. The hydraulic push rod 11 pushes the balance moving seat 4 to one end. At the same time, the gear transmission between the fixed spur gear 8 and the fixed round gear 17 ensures the stability of the movement of the balance moving seat 4, moving the wafer placement slot 6 into the inspection equipment for wafer inspection. When the wafer inspection position deviates, the adjustable positioning seat 5 is adjusted forward or backward by adjusting the screw 2 to place the wafer placement slot 6 in the correct inspection position.

[0022] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A mobile stage mechanism for wafer inspection, comprising a mobile stage body (1), characterized in that: The inside of the mobile carrier body (1) is provided with a moving groove (10), the upper position of the inside of the moving groove (10) is provided with a balanced moving seat (4), the middle position of one end of the bottom surface of the balanced moving seat (4) is provided with an assembly part (13), both sides of the assembly part (13) are provided with positioning ports (18), the inside of the assembly part (13) is connected with a push rod (14), the push rod (14) is arranged in the inside of a hydraulic push rod (11), both sides of the hydraulic push rod (11) are provided with anti-deviation positioning rods (9), both sides of the bottom surface of the balanced moving seat (4) are provided with fixed spur gears (8), the lower side of the fixed spur gears (8) is provided with fixed circular gears (17), the inside of the balanced moving seat (4) is provided with an adjustable positioning seat (5), the upper side of the adjustable positioning seat (5) is provided with a wafer placing groove (6), both sides of the inside of the adjustable positioning seat (5) are provided with guide rods (7), both sides of the mobile carrier body (1) are provided with mounting pieces (12), one end of the mobile carrier body (1) is provided with a groove (15) at the position aligned with the fixed spur gears (8).

2. The mobile stage mechanism for wafer inspection of claim 1, wherein: The shape of the wafer placing groove (6) is a circular structure, and the wafer placing groove (6) is connected with the adjustable positioning seat (5) through plug-in connection.

3. The mobile stage mechanism for wafer inspection of claim 1, wherein: One end of the adjustable positioning seat (5) is fixedly connected with the balanced moving seat (4) through an adjusting screw (2), and both ends of the adjustable positioning seat (5) are fixedly connected with the balanced moving seat (4) through buffer springs (3).

4. The mobile stage mechanism for wafer inspection of claim 1, wherein: Both ends of the guide rod (7) are connected with the balanced moving seat (4) through plug-in connection, and the adjustable positioning seat (5) is connected with the guide rod (7) through sliding connection.

5. The mobile stage mechanism for wafer inspection of claim 1, wherein: The balanced moving seat (4) is drivingly connected with the moving groove (10) through the fixed spur gears (8) and the fixed circular gears (17), and the fixed circular gears (17) are fixedly connected with the moving groove (10) through fixed shafts (16).

6. The mobile stage mechanism for wafer inspection of claim 1, wherein: The assembly part (13) is connected with the balanced moving seat (4) through welding, and the cross section of the assembly part (13) is an L-shaped structure.

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