LED wafer cleaning clamp

Abstract

The LED wafer cleaning clamp comprises a plurality of discs which are arranged from top to bottom and formed by coil pipes in a coiled mode, the middles of the upper surfaces of the discs are concave downwards, the output ends and the input ends of the adjacent discs are in butt joint, all the discs are installed on a disc fixing frame, the disc fixing frame is installed in a cleaning kettle, and the disc fixing frame is connected with the disc fixing frame. The input end of the lowermost disc is connected with a carbon dioxide gas source through management, a plurality of fine holes are densely distributed in the upper surfaces of the discs, the disc fixing frame comprises a plurality of annular plates arranged from top to bottom, and vertical annular limiting plates are arranged on the edges of the outer rings of the annular plates; the upper and lower adjacent annular limiting plates are connected through a connecting plate, and the outer edge of the edge of the disc abuts against the annular plate. The wafer cleaning device is reasonable in design, can uniformly clean the whole wafer, reduces cleaning dead angles, facilitates specialized wafer cleaning work, and facilitates promotion of the whole production process.

Description

Technical Field

[0001] This utility model relates to an LED wafer cleaning fixture. Background Technology

[0002] With the advancement of microelectronics technology, chip integration is constantly increasing and component dimensions are continuously decreasing. Consequently, the requirements for the cleanliness of silicon wafers are becoming increasingly stringent. However, traditional semiconductor wafer cleaning methods are affected by the surface tension of water, making it difficult to clean some tiny pores, requiring multiple cleaning cycles. Therefore, supercritical carbon dioxide wafer cleaning technology has been developed. Currently, during supercritical carbon dioxide wafer cleaning, defects in the fixtures cause the wafer edges to be blocked, resulting in the central area of ​​the wafer facing the carbon dioxide outlet being cleaned more thoroughly, while the edges are not completely cleaned. Summary of the Invention

[0003] In view of this, the purpose of this utility model is to overcome the shortcomings of the prior art and provide an LED wafer cleaning fixture that can clean the entire wafer evenly, reduce cleaning dead corners, facilitate professional wafer cleaning work, and facilitate the advancement of the overall production process.

[0004] This utility model is implemented using the following scheme: An LED wafer cleaning fixture includes several discs made of coiled tubes arranged from top to bottom. The upper surface of each disc is concave in the middle. The output end and input end of adjacent discs are connected. Each disc is mounted on a disc fixing frame, which is installed inside the cleaning tank. The input end of the bottom disc is connected to a carbon dioxide gas source via a pipeline. The upper surface of each disc is densely covered with several fine holes. The bottom disc is connected to the carbon dioxide inlet of the cleaning tank.

[0005] Furthermore, the disc fixing frame includes several annular plates arranged from top to bottom, with vertical annular limiting plates provided on the outer edge of the annular plates, and adjacent annular limiting plates connected by connecting plates, with the outer edge of the disc abutting against the annular plates.

[0006] Furthermore, the input end of the coil is located in the middle, and the pipe of the coil is coiled outward from the input end to form a disc. The output end of the disc is located at the outer edge of the disc and extends upward. The input end of the disc extends downward and bends to the edge of the disc corresponding to the lower adjacent output end of the disc.

[0007] Furthermore, the input and output ends of adjacent disks are connected by a threaded structure, which includes an externally threaded tube that is screwed together with each other and a connecting tube with a nut structure rotatably connected to its end. The non-nut structure ends of the externally threaded tube and the connecting tube are respectively welded to the input and output ends of the disk.

[0008] Furthermore, one end of the connecting tube is provided with a snap-fit ​​shoulder, and the nut structure includes a nut tube body, which is sleeved on the outside of the connecting tube. One end of the nut tube body is provided with a limiting shoulder corresponding to the snap-fit ​​shoulder. The end of the nut tube body without a limiting shoulder extends out from the snap-fit ​​shoulder end of the connecting tube, and the snap-fit ​​shoulder abuts against the limiting shoulder. The nut tube body is provided with an internal thread that mates with the external threaded tube.

[0009] Furthermore, the cleaning vessel includes a vessel body and a vessel cover that fits with the vessel body. A carbon dioxide inlet pipe is provided on the bottom of the vessel body and is connected to an external carbon dioxide gas source. The carbon dioxide inlet pipe is connected to the input end of the lowest disc through a threaded structure.

[0010] Furthermore, the bottommost annular limiting plate has support feet spaced at intervals around its circumference, and the support feet abut against the bottom of the vessel body.

[0011] Furthermore, vertical support columns are symmetrically arranged on the left and right sides of the vessel body, and a horizontal beam is placed between the upper ends of the two support columns. A cylinder for driving the vessel lid to move up and down is vertically installed on the horizontal beam. The vessel lid is directly opposite the vessel opening of the vessel body and is connected to the telescopic end of the cylinder.

[0012] Compared with the prior art, the present invention has the following advantages: it is reasonably designed, can clean the entire wafer evenly, reduces cleaning dead corners, facilitates professional wafer cleaning work, and facilitates the advancement of the overall production process. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the structure of an embodiment of the present utility model;

[0014] Figure 2 for Figure 1 Enlarged view of point A in the middle

[0015] Figure 3 This is a top view of the disc and disc fixing frame according to an embodiment of the present utility model.

[0016] In the diagram: 1-coil; 2-disc; 3-disc holder; 4-cleaning vessel; 5-fine hole; 6-ring plate; 7-ring limiting plate; 8-connecting plate; 9-threaded structure; 10-external threaded pipe; 11-nut structure; 12-connecting pipe; 13-clamping shoulder; 14-nut body; 15-limiting shoulder; 16-vessel body; 17-vessel lid; 18-carbon dioxide inlet pipe; 19-support foot; 20-vertical support column; 21-beam; 22-cylinder; 23-wafer. Detailed Implementation

[0017] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0018] It should be noted that the following detailed descriptions are exemplary and intended to provide further explanation of this application. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains.

[0019] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0020] like Figure 1-3 As shown, an LED wafer cleaning fixture includes several discs 2 formed by coiled tubing 1 arranged from top to bottom. The diameter of the discs is larger than the diameter of the wafer. The upper surface of each disc is concave in the middle to facilitate wafer placement. The output and input ends of adjacent discs are connected. Each disc is mounted on a disc holder 3, which is installed inside a cleaning tank 4. The input end of the bottom disc is connected to a carbon dioxide gas source via a pipeline. The upper surface of each disc is densely covered with numerous fine holes 5, with the hole diameter as small as possible and the number of holes as large as possible, so that all parts of the wafer can be evenly cleaned by carbon dioxide. In use, the coiled tubing is first coiled into discs, and after the discs are connected, they are placed on the disc holder. Then, the wafer is placed into the disc, and a wafer cleaning agent is added to the output end of the top disc. The entrainer dosage is 10-20ml. After the material is added, the input end of the bottom disc is connected to the carbon dioxide inlet of the cleaning vessel. Then, the cleaning vessel is closed and the temperature is raised to inject carbon dioxide. The cleaning temperature is 60-90℃ and the carbon dioxide pressure is 15-25Mpa. The carbon dioxide is introduced from the carbon dioxide inlet of the cleaning vessel into the sequentially connected disc coils. Then, the carbon dioxide is output through the fine holes and the output end of the top disc until the carbon dioxide is in a supercritical state for cleaning. As the cleaning liquid level rises, each wafer will be evenly rinsed by carbon dioxide. After the liquid level covers the cleaning fixture, the system is soaked for 10-30 minutes. The pressure is released, the carbon dioxide is discharged, the vessel is opened, and the wafer is taken out to complete one wafer cleaning cycle. The input and output ends of the disc in this device are the input and output ends of the coiled disc.

[0021] In this embodiment, to facilitate the placement of the disc, the disc fixing frame includes several annular plates 6 arranged from top to bottom. The outer edge of the annular plates is provided with vertical annular limiting plates 7. The upper and lower adjacent annular limiting plates are connected by connecting plates 8. The outer edge of the disc abuts against the annular plates, that is, the annular plates and the annular limiting plates form an L-shaped cross-section annular groove. The disc is placed on the annular groove. The gap in the middle of the annular groove facilitates the downward convex part of the disc to make way. The annular limiting plates restrict the position of the disc and prevent the disc from falling off.

[0022] In this embodiment, in order to achieve the connection between adjacent discs and the communication between each coil, the specific structure of the disc is as follows: the input end of the coil is located in the middle, the pipe of the coil is coiled outward from the pipe section of the input end to form a disc, the output end of the disc is located at the outer edge of the disc, the output end of the disc extends upward, the input end of the disc extends downward and bends to the edge of the disc corresponding to the output end of the lower adjacent disc. Of course, the output end and input end of the disc can also be located on both sides of the disc, and the middle part is formed by coiling the pipe into a disc surface. As long as the pipe wall of the coil on the upper surface of the disc is provided with fine holes to realize the spraying of carbon dioxide, it is acceptable. The disc fixing frame and the coil can be made of 304 stainless steel.

[0023] In this embodiment, to achieve quick connection between adjacent disks, the input and output ends of adjacent disks are connected by a threaded structure 9. The threaded structure includes an externally threaded tube 10 that is screwed together with each other, and a connecting tube 12 with a nut structure 11 rotatably connected to its end. The non-nut structure ends of the externally threaded tube and the connecting tube are respectively welded to the input and output ends of the disk. The externally threaded tube can be welded to the input end of the disk, and the non-nut structure end of the connecting tube can be welded to the output end of the disk. Of course, the reverse is also possible. Other quick-release connection methods are also possible, as long as the connection between the disks can be achieved.

[0024] In this embodiment, to achieve the connection between the externally threaded tube and the connecting tube with a nut structure rotatably connected to its end, one end of the connecting tube is provided with a snap-fit ​​shoulder 13. The nut structure includes a nut tube body 14, which is sleeved on the outside of the connecting tube. One end of the nut tube body is provided with a limiting shoulder 15 corresponding to the snap-fit ​​shoulder. The end of the nut tube body without the limiting shoulder extends from the snap-fit ​​shoulder end of the connecting tube, and the snap-fit ​​shoulder abuts against the limiting shoulder. The nut tube body is provided with an internal thread that mates with the externally threaded tube. The end of the connecting tube without the snap-fit ​​shoulder is welded to the input or output end of the disc. In use, the externally threaded tube is screwed into the nut tube body, and the end of the externally threaded tube and the limiting shoulder together snap the snap-fit ​​shoulder, realizing the docking between adjacent discs. At the same time, only the nut tube body needs to be rotated to achieve the threaded connection, without rotating the disc, making docking convenient.

[0025] In this embodiment, for the sake of reasonable design and convenient connection between the bottom disc and the carbon dioxide gas source, the cleaning vessel includes a vessel body 16 and a vessel cover 17 that cooperates with the vessel body. A carbon dioxide inlet pipe 18 connected to an external carbon dioxide gas source is provided on the bottom of the vessel body. The carbon dioxide inlet pipe is connected to the input end of the bottom disc through a threaded structure. The threaded structure is the same as the threaded structure for connecting adjacent discs, so it will not be described in detail. As long as it can achieve quick and convenient docking, it is acceptable.

[0026] In this embodiment, support feet 19 are distributed at intervals around the bottom of the annular limiting plate. The support feet abut against the bottom of the vessel body and are used to support the gap between the lowest disc and the bottom of the vessel body, so as to facilitate the connection between the input end of the lowest disc and the carbon dioxide inlet pipe.

[0027] In this embodiment, in order to open and close the cleaning vessel, vertical support columns 20 are symmetrically arranged on the left and right sides of the vessel body. A crossbeam 21 is placed horizontally between the upper ends of the two support columns. A cylinder 22 for driving the vessel lid to move up and down is vertically installed on the crossbeam. The vessel lid is directly opposite the vessel opening of the vessel body and is connected to the telescopic end of the cylinder. The cylinder drives the vessel lid to move up and down, which facilitates the connection between the vessel lid and the vessel body.

[0028] Unless otherwise stated, if any of the technical solutions disclosed in this utility model discloses a numerical range, then the disclosed numerical range is a preferred numerical range. Any person skilled in the art should understand that the preferred numerical range is merely one among many feasible numerical values ​​that has a more obvious or representative technical effect. Because there are many numerical values, it is impossible to list them all. Therefore, this utility model discloses only some numerical values ​​to illustrate the technical solutions of this utility model. Furthermore, the numerical values ​​listed above should not constitute a limitation on the scope of protection of this utility model.

[0029] If the terms "first" or "second" are used in this document to specify components, those skilled in the art should know that the use of "first" or "second" is merely for the purpose of distinguishing components in description, and unless otherwise stated, the above terms have no special meaning.

[0030] If this utility model discloses or relates to mutually fixedly connected parts or structural components, then unless otherwise stated, a fixed connection can be understood as: a detachable fixed connection (e.g., using bolts or screws), or a non-detachable fixed connection (e.g., riveting, welding). Of course, mutually fixed connections can also be replaced by an integral structure (e.g., manufactured by integral molding using a casting process) (except where it is obviously impossible to use an integral molding process).

[0031] Furthermore, the orientations or positional relationships indicated by terms such as "longitudinal," "lateral," "up," "down," "front," "back," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer" used in any of the technical solutions disclosed in this utility model are based on the orientations or positional relationships shown in the accompanying drawings and are only for the convenience of describing this patent. They are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this patent. In addition, unless otherwise stated, the terms used to indicate shape in any of the technical solutions disclosed in this utility model include shapes that are similar to, close to, or approximate with it.

[0032] Any component provided by this utility model can be assembled from multiple individual components, or it can be a single component manufactured by a one-piece molding process.

[0033] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and not to limit it; although the utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications can still be made to the specific implementation of this utility model or equivalent substitutions can be made to some technical features without departing from the spirit of the technical solution of this utility model, and all such modifications and substitutions should be covered within the scope of the technical solution claimed by this utility model.

Claims

1. An LED wafer cleaning fixture, comprising: It includes several discs arranged from top to bottom, the upper surface of the disc is concave in the middle, the output end of the adjacent disc is connected with the input end, each disc is installed on a disc fixing frame, the disc fixing frame is installed in the cleaning kettle, the input end of the lowermost disc is connected with the carbon dioxide source through the pipeline, the upper surface of the disc is densely covered with a plurality of fine holes, and the bottom disc is connected with the carbon dioxide inlet of the cleaning kettle.

2. The LED wafer cleaning fixture of claim 1, wherein; The disc fixing frame includes several annular plates arranged from top to bottom, the outer edge of the annular plate is provided with a vertical annular limiting plate, the adjacent annular limiting plates are connected through the connecting plate, and the edge of the disc is abutted on the annular plate.

3. The LED wafer cleaning fixture of claim 2, wherein: The input end of the disc is located in the middle, the pipeline of the disc is wound outward to form a disc, the output end of the disc is located at the outer edge of the disc, the output end of the disc extends upward, and the input end of the disc extends downward and is bent to the edge of the disc corresponding to the output end of the adjacent disc below.

4. The LED wafer cleaning fixture of claim 2 or 3, wherein; The input end and the output end of the adjacent disc are connected through a screw thread structure, the screw thread structure includes an outer threaded pipe and a connecting pipe with a nut structure rotatingly connected at the end, and the non-nut structure end of the outer threaded pipe and the connecting pipe is welded on the input end and the output end of the disc respectively.

5. The LED wafer cleaning fixture of claim 4, wherein; One end of the connecting pipe is provided with a clamping shoulder, the nut structure includes a nut pipe body, the nut pipe body is sleeved on the connecting pipe, one end of the nut pipe body is provided with a limiting shoulder corresponding to the clamping shoulder, the end of the nut pipe body without the limiting shoulder is stretched out from one end of the clamping shoulder of the connecting pipe, the clamping shoulder is abutted on the limiting shoulder, and the nut pipe body is provided with an inner thread matched with the outer threaded pipe.

6. The LED wafer cleaning fixture of claim 2, wherein; The cleaning kettle includes a kettle body and a kettle cover matched with the kettle body, the bottom of the kettle body is provided with a carbon dioxide inlet pipe connected with the external carbon dioxide source, and the carbon dioxide inlet pipe and the input end of the lowermost disc are connected through a screw thread structure.

7. The LED wafer cleaning fixture of claim 6, wherein; The lower circumferential interval of the lowermost annular limiting plate is distributed with supporting feet, and the supporting feet are abutted on the bottom of the kettle body.

8. The LED wafer cleaning fixture of claim 6, wherein; Vertical supporting columns are symmetrically arranged on the left and right sides of the kettle body, a cross beam is horizontally arranged between the upper ends of the two supporting columns, a cylinder for driving the kettle cover to rise and fall is vertically installed on the cross beam, and the kettle cover is opposite to the kettle opening of the kettle body and is connected with the telescopic end of the cylinder.

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