Grinding and polishing equipment

By designing a grinding and polishing equipment with multiple suction cups and vacuum components, the problem of unstable shape and position of diaphragm valve sheets during the grinding process was solved, achieving efficient and stable diaphragm processing to meet the needs of large-scale production.

CN223981655UActive Publication Date: 2026-03-10SHANGHAI HAIWEI IND CONTROL CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-03-31
Publication Date
2026-03-10

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    Figure CN223981655U_ABST
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Abstract

The utility model relates to grinding and polishing equipment which comprises a frame body, a suction cup used for containing a membrane and a vacuumizing assembly used for being connected with the suction cup and enabling the suction cup to generate adsorption force. The vacuumizing assembly is fixedly installed on the frame body, an installation plate is horizontally and fixedly installed on the top of the frame body, and the suction cup is detachably installed on the installation plate. The multiple suction cups used for containing the diaphragms and the vacuumizing assembly used for treating the multiple diaphragms at a time and enabling the suction cups to generate adsorption force are arranged, the suction cups can adsorb the diaphragms, the diaphragms are kept stable in shape and position in the grinding process, and the problem that due to shaking, the surface quality of the ground diaphragms is inconsistent is solved; and meanwhile, the membrane processing efficiency of the equipment is improved.
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Description

Technical Field

[0001] This utility model belongs to the field of machining and relates to a grinding and polishing equipment. Background Technology

[0002] In the manufacturing process of ultrapure diaphragm valves, the grinding and polishing of the diaphragm is a critical and challenging step. Diaphragm valve sheets are typically only 0.10mm-0.15mm thick, characterized by their thinness and irregular shape, making them highly susceptible to deformation or damage during grinding and polishing. Due to the diaphragm's special geometry and extremely thin thickness, traditional grinding and polishing equipment struggles to handle them effectively, resulting in a widespread problem of low grinding pass rates in the industry.

[0003] Currently, while existing grinding and polishing equipment on the market can process diaphragm valve diaphragms, it is expensive and has many limitations in practical applications. For example, existing equipment struggles to ensure the diaphragm maintains a stable shape and position during grinding, resulting in inconsistent surface quality and a low yield rate. Furthermore, existing equipment typically processes only one diaphragm at a time, leading to inefficiency and failing to meet the demands of large-scale production.

[0004] In view of the above-mentioned prior art, in order to prevent the diaphragm from deforming or shifting during the grinding process, and at the same time improve grinding efficiency and yield, the applicant has designed a grinding and polishing device. Utility Model Content

[0005] In view of the shortcomings of the existing technology, the purpose of this utility model is to provide a grinding and polishing device.

[0006] This application provides a technical solution that adopts the following approach:

[0007] A grinding and polishing device includes a frame, a suction cup for placing a diaphragm, and a vacuum assembly for connecting the suction cup and generating suction force on the suction cup; the vacuum assembly is fixedly installed on the frame; a mounting plate is fixedly installed on one end of the frame away from the vacuum assembly, and there are several suction cups, all of which are fixedly installed on the mounting plate.

[0008] By adopting the above technical solution, several suction cups for placing the membrane sheets and a vacuum assembly for generating the suction force of the suction cups are set up. The suction cups can adsorb the membrane sheets, keeping them in a stable shape and position during the grinding process, avoiding the problem of inconsistent surface quality of the membrane sheets after grinding due to shaking; this solves the problem that existing equipment cannot ensure that the membrane sheets maintain a stable shape and position during grinding, while improving the efficiency of the equipment in processing membrane sheets and meeting the needs of large-scale production. Multiple suction cups can place multiple membrane sheets simultaneously, realizing the processing of multiple membrane sheets at once, thus improving processing efficiency.

[0009] Preferably, the mounting plate includes a base plate and a cover plate. The base plate is fixedly installed at one end of the frame, and the cover plate is fixedly installed on one side of the base plate. A first vacuum cavity is formed between the cover plate and the base plate.

[0010] By adopting the above technical solution, the mounting plate consists of a cover plate and a base plate, forming a first vacuum chamber between them. This first vacuum chamber, in conjunction with the vacuum pumping assembly, can create a stable vacuum adsorption force at the suction cup, allowing the diaphragm to be more firmly adsorbed onto the suction cup, further ensuring the stability of the diaphragm during the grinding process. The formation of a vacuum adsorption environment provides the structural basis, helping to improve the adsorption effect of the suction cup and ensuring the stability of the diaphragm; the stable adsorption force reduces the time required for readjustment due to diaphragm movement, improving the continuity and efficiency of the grinding process.

[0011] Preferably, the suction cup is installed on the side of the cover plate away from the bottom plate; a locking bolt is fixedly installed at one end of the suction cup, and the cover plate has threaded connection holes corresponding to the suction cups. The threaded connection holes are connected to the first vacuum chamber, and the suction cups are threadedly connected and fixed to the cover plate by the locking bolt.

[0012] By adopting the above technical solution, the suction cup is fixedly connected to the threaded connection hole on the cover plate by locking bolts, and the threaded connection hole is connected to the first vacuum chamber. This connection method ensures both a firm connection and ease of operation. When the suction cup is damaged or needs to be replaced with a different size, it can be easily and quickly disassembled and installed.

[0013] Preferably, the suction cup is cylindrical, and one end of the suction cup is provided with a membrane placement groove adapted to the membrane. A second vacuum cavity is formed between the suction cup and the locking bolt. A plurality of vacuum suction holes are opened in the membrane placement groove, and the vacuum suction holes are connected to the second vacuum cavity.

[0014] By adopting the above technical solution, the suction cup is cylindrical, with a membrane placement groove adapted to the membrane at one end. Multiple vacuum suction holes are formed within the membrane placement groove, creating a second vacuum chamber between the suction cup and the locking bolt. This structural design allows the suction cup to better adhere to the membrane, and the connection between the vacuum suction holes and the second vacuum chamber enables more uniform membrane adsorption, ensuring the stability of the membrane's shape and position during the grinding process. The stable adsorption effect reduces the generation of defective products, improves the membrane's pass rate, and indirectly increases production efficiency.

[0015] Preferably, the locking bolt has a vacuum through hole extending through it in the axial direction, one end of the vacuum through hole is connected to the first vacuum chamber, and the other end of the vacuum through hole is connected to the second vacuum chamber.

[0016] By adopting the above technical solution, a vacuum through hole is provided through the locking bolt along the axial direction, connecting the first vacuum chamber and the second vacuum chamber. When the vacuum pumping component is working, air passes through the first vacuum chamber, the vacuum through hole, and the second vacuum chamber in sequence, and finally reaches the vacuum suction hole, so that an adsorption force is formed at the suction cup, ensuring the stable adsorption of the membrane.

[0017] Preferably, the vacuum assembly includes a vacuum machine, an air pipe, and an air pipe connector. The vacuum machine is fixedly installed in the frame body. One end of the air pipe is fixedly connected to the output end of the vacuum machine, and the end of the air pipe away from the vacuum machine is fixedly connected to the air pipe connector. A connector connection hole is provided on the base plate. The connector connection hole communicates with the first vacuum chamber. The end of the air pipe away from the vacuum machine is fixedly connected to the connector connection hole through the air pipe connector.

[0018] By adopting the above technical solution, the vacuum assembly includes a vacuum machine, an air pipe, and an air pipe connector. One end of the air pipe is fixedly connected to the output end of the vacuum machine, and the other end is fixedly connected to the air pipe connector. The air pipe is also fixedly connected to the connector connection hole through the air pipe connector, and the connector connection hole communicates with the first vacuum chamber. When the vacuum machine is working, the air in the first vacuum chamber is extracted through the air pipe and the connector connection hole, thereby forming an adsorption force in the diaphragm placement groove of the suction cup. The stable vacuum system ensures the stability of the adsorption force, improves the reliability of diaphragm adsorption, and thus improves the grinding efficiency.

[0019] Preferably, the vacuum assembly further includes a manual sliding valve, which is fixedly installed on the air pipe.

[0020] By adopting the above technical solution and fixing a manual sliding valve on the trachea, the operator can manually control the airflow in the trachea, thereby adjusting the suction force of the suction cup. When it is necessary to replace the diaphragm or perform other operations, the manual sliding valve can be closed to pause the suction force; after the operation is completed, the manual sliding valve can be opened to restore suction. The flexible control function reduces unnecessary waiting time and improves the convenience and efficiency of operation.

[0021] Preferably, a first sealing ring is installed inside the first vacuum chamber, and the first sealing ring is located on the periphery of the first vacuum chamber.

[0022] By adopting the above technical solution, a first sealing ring is installed inside the first vacuum chamber, located on the periphery of the first vacuum chamber. The first sealing ring can prevent air from leaking from the edge of the first vacuum chamber, ensuring that the vacuum pumping assembly can form a stable vacuum environment inside the first vacuum chamber, thereby guaranteeing the adsorption effect of the suction cup. The stable adsorption force reduces repetitive operations caused by unstable adsorption, thus improving production efficiency.

[0023] Preferably, the locking bolt includes a hollow screw head and a screw rod, the screw head and screw rod are integrally formed, and the outer circumference of the screw rod is provided with threads; a sealing groove is provided on the side of the screw head that abuts against the cover plate, and a second sealing ring is installed in the sealing groove.

[0024] By adopting the above technical solution, the integrated design of the screw head and screw rod makes the locking bolt structure more stable, ensuring the stability of the connection between the suction cup and the cover plate. A sealing groove is provided on the side of the locking bolt that abuts against the cover plate, and a second sealing ring is installed within the sealing groove. The second sealing ring fills the gap between the screw head and the cover plate, preventing air leakage, ensuring the vacuum level in the second vacuum chamber, improving the suction force of the suction cup, and ensuring stable suction force through excellent sealing, reducing the generation of defective products and improving production efficiency.

[0025] Preferably, a diaphragm top rod for fixing the diaphragm is fixedly installed on the suction cup. There are multiple diaphragm top rods, and all of them are fixedly installed on the outer periphery of the suction cup.

[0026] By adopting the above technical solution, multiple diaphragm push rods are fixedly installed on the suction cup around the outer periphery. The diaphragm push rods can play an auxiliary role in fixing the diaphragm, restricting the movement of the diaphragm in the horizontal direction, and ensuring that the diaphragm maintains a stable position during the grinding process. The stable diaphragm position reduces grinding errors and defective products caused by diaphragm displacement, thereby improving production efficiency and product quality.

[0027] In summary, this application includes at least one of the following beneficial technical effects:

[0028] 1. Several suction cups for placing the membrane sheets and a vacuum assembly for generating the suction force are incorporated. The suction cups can adhere to the membrane sheets, maintaining their stable shape and position during the grinding process, thus avoiding inconsistent surface quality caused by shaking. This solves the problem of existing equipment failing to ensure stable shape and position of the membrane sheets during grinding, while also improving the equipment's membrane processing efficiency and meeting the needs of large-scale production. Multiple suction cups can hold multiple membrane sheets simultaneously, enabling the processing of multiple membrane sheets at once, further improving processing efficiency.

[0029] 2. The mounting plate consists of a cover plate and a base plate, forming a first vacuum chamber between them. This first vacuum chamber, in conjunction with the vacuum extraction assembly, creates a stable vacuum adsorption force at the suction cup, allowing the diaphragm to adhere more firmly to the suction cup and further ensuring the stability of the diaphragm during the grinding process. The formation of a vacuum adsorption environment provides the structural basis, helping to improve the adsorption effect of the suction cup and ensuring the stability of the diaphragm; the stable adsorption force reduces the time required for readjustment due to diaphragm movement, improving the continuity and efficiency of the grinding process.

[0030] 3. The vacuum assembly includes a vacuum unit, an air pipe, and an air pipe connector. One end of the air pipe is fixedly connected to the output end of the vacuum unit, and the other end is fixedly connected to the air pipe connector. The air pipe is also fixedly connected to the connector's connection hole, which communicates with the first vacuum chamber. When the vacuum unit is working, air is extracted from the first vacuum chamber through the air pipe and the connector connection hole, thereby creating an adsorption force in the diaphragm placement slot of the suction cup. The stable vacuum system ensures the stability of the adsorption force, improves the reliability of diaphragm adsorption, and thus improves grinding efficiency. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0032] Figure 2 yes Figure 1 Schematic diagram of the cross-sectional structure of AA;

[0033] Figure 3 yes Figure 2 Enlarged view of section B in the middle.

[0034] Reference numerals: 1. Frame; 2. Suction cup; 3. Vacuum assembly; 31. Vacuum machine; 32. Air pipe; 33. Air pipe connector; 34. Manual sliding valve; 4. Mounting plate; 41. Base plate; 42. Cover plate; 5. First vacuum chamber; 6. First sealing ring; 7. Locking bolt; 71. Screw head; 72. Screw rod; 8. Threaded connection hole; 9. Sealing groove; 10. Second sealing ring; 11. Diaphragm placement groove; 12. Second vacuum chamber; 13. Vacuum suction hole; 14. Diaphragm top rod; 15. Connector connection hole; 16. Vacuum through hole. Detailed Implementation

[0035] This application discloses a grinding and polishing device.

[0036] A grinding and polishing device, as described above Figure 1 and Figure 2 It includes a frame 1, a suction cup 2 for placing the diaphragm, and a vacuum assembly 3 for connecting the suction cup 2 and generating suction force on the suction cup 2; the vacuum assembly 3 is fixedly installed on the frame 1, and a mounting plate 4 is horizontally fixedly installed on the top of the frame 1, and the suction cup 2 is detachably installed on the mounting plate 4.

[0037] When using, first fix the suction cup 2 on the mounting plate 4, then place the diaphragm on the designated position on the suction cup 2. Next, activate the vacuum assembly 3 to give the suction cup 2 suction force, ensuring the diaphragm is firmly adhered to the suction cup 2 and tightly bonded to it without displacement. After completion, the diaphragm can be ground and polished.

[0038] After use, turn off the vacuum assembly 3 to remove the suction cup 2 from its adhesive force. At this point, the polished or sanded diaphragm can be removed; alternatively, the suction cup 2 can be removed from the mounting plate 4 for cleaning and maintenance.

[0039] Reference Figure 2 and Figure 3 Specifically, the mounting plate 4 includes a base plate 41 and a cover plate 42. The base plate 41 is welded and fixed to the top of the frame 1. A vacuum groove is opened on the top of the base plate 41. The cover plate 42 is located above the base plate 41. The base plate 41 is located on one side of the vacuum groove and is bolted to the cover plate 42 and is sealed and fitted with the cover plate 42, thereby forming a first vacuum chamber 5.

[0040] Furthermore, a first sealing ring 6 is installed inside the first vacuum chamber 5, and the first sealing ring 6 is located on the periphery of the first vacuum chamber 5; the cover plate 42 is aligned with the base plate 41 and fixed by bolts, and the first sealing ring 6 is compressed. By setting the first sealing ring 6, gas leakage from the joint between the base plate 41 and the cover plate 42 can be effectively prevented, further achieving the sealing performance of the first vacuum chamber 5.

[0041] Specifically, there are several suction cups 2, which are installed on the side of the cover plate 42 away from the bottom plate 41. A locking bolt 7 is fixedly installed at one end of the suction cup 2, and the locking bolt 7 has a vacuum through hole 16 through it in the axial direction. The cover plate 42 has threaded connection holes 8 that correspond one-to-one with the suction cup 2, and the threaded connection holes 8 are connected to the first vacuum chamber 5. The suction cup 2 is fixed to the cover plate 42 by the locking bolt 7 to ensure the connection between the suction cup 2 and the first vacuum chamber 5.

[0042] Furthermore, the locking bolt 7 includes a hollow screw head 71 and a screw rod 72, which are fixedly connected. The outer peripheral wall of the screw rod 72 is threaded, and the screw rod 72 is threadedly engaged with the threaded connection hole 8 on the cover plate 42. When the screw rod 72 is screwed into the threaded connection hole 8, the end face of the screw head 71 abuts against the top of the cover plate 42. A sealing groove 9 is provided on the side of the screw head 71 that abuts against the cover plate 42, and a second sealing ring 10 is installed in the sealing groove 9. When the screw rod 72 is screwed into the threaded connection hole 8, the second sealing ring 10 is compressed. The hollow screw head 71 and screw rod 72 ensure the communication between the suction cup 2 and the first vacuum suction hole 13, while the second sealing ring 10 improves the sealing performance between the locking bolt 7 and the cover plate 42.

[0043] Furthermore, the suction cup 2 is cylindrical, with a membrane placement groove 11 formed at one end of the suction cup 2 to fit the membrane. A second vacuum chamber 12 is provided at the end of the suction cup 2 away from the membrane placement groove 11. The end of the suction cup 2 located in the second vacuum chamber 12 is welded and fixed to the screw head 71. When the suction cup 2 is fixedly installed on the cover plate 42 by the locking bolt 7, the second vacuum chamber 12 is connected to the first vacuum chamber 5 through the vacuum through hole 16. The suction cup 2 has a plurality of vacuum suction holes 13 at the membrane placement groove 11, and the vacuum suction holes 13 are connected to the second vacuum chamber 12 inside the suction cup 2.

[0044] Furthermore, a diaphragm push rod 14 is fixedly installed on the suction cup 2. There are multiple diaphragm push rods 14, and the diaphragm push rods 14 are fixedly installed on the outer periphery of the suction cup 2. The diaphragm push rods 14 are used to support the flange portion on the periphery of the diaphragm, further improving the stability of the diaphragm during placement.

[0045] Specifically, the vacuum assembly 3 includes a vacuum machine 31, an air pipe 32, and an air pipe connector 33. The vacuum machine 31 is fixedly installed inside the frame 1. One end of the air pipe 32 is fixedly connected to the output end of the vacuum machine 31, and the other end is fixedly connected to the air pipe connector 33. A connector connection hole 15 is provided on the base plate 41, and the connector connection hole 15 is connected to the first vacuum chamber 5. The air pipe 32 is fixedly connected to the connector connection hole 15 through the air pipe connector 33. When in use, the vacuum machine 31 is started, and the air is extracted from the first vacuum chamber 5 through the air pipe 32 and the air pipe connector 33, so that a negative pressure is formed in the first vacuum chamber 5. Since the suction cup 2 is connected to the first vacuum chamber 5 through the hollow locking bolt 7, the negative pressure passes through the first vacuum chamber 5, the vacuum through hole 16, the second vacuum chamber 12, and the vacuum suction hole 13 in sequence, so that the diaphragm is firmly adsorbed at the diaphragm placement groove 11, ensuring that the diaphragm will not be displaced during the grinding and polishing process.

[0046] Furthermore, the vacuum assembly 3 also includes a manual sliding valve 34, which is fixedly installed on the air pipe 32. When in use, the manual sliding valve 34 can manually control the opening and closing of the air pipe 32, thereby precisely controlling the start and stop of the vacuum system. When it is necessary to start or stop the vacuum adsorption, it can be done quickly through the manual sliding valve 34, without the need to frequently start and stop the vacuum machine 31.

[0047] The implementation principle of the application embodiment is as follows:

[0048] When in use, firstly, several suction cups 2 with locking bolts 7 are fixed to the cover plate 42 of the mounting plate 4 by threaded connection. The threaded connection hole 8 on the cover plate 42 is connected to the first vacuum chamber 5, and the screw head 71 of the locking bolt 7 is provided with a sealing groove 9 and a second sealing ring 10 at the contact point with the cover plate 42 to ensure the sealing of the first vacuum chamber 5. Then, the diaphragm is placed in the diaphragm placement groove 11 on the suction cup 2 that is compatible with the diaphragm. Multiple diaphragm push rods 14 fixedly installed on the outer periphery of the suction cup 2 can help the diaphragm to be quickly positioned and accurately placed in the diaphragm placement groove 11. Then, the vacuum machine 31 is turned on. The vacuum machine 31 extracts the air from the connector connection hole 15 on the bottom plate 41 of the mounting plate 4 and the first vacuum chamber 5 through the air pipe 32 and the air pipe connector 33, so that a negative pressure is formed in the first vacuum chamber 5. Since the suction cup 2 is connected to the first vacuum chamber 5 through the hollow locking bolt 7, negative pressure passes sequentially through the first vacuum chamber 5, the vacuum suction hole 13, the second vacuum chamber 12, and the vacuum suction hole 13, thereby firmly adhering the diaphragm to the diaphragm placement slot 11, ensuring that the diaphragm will not shift during the grinding and polishing process. At the same time, the manual sliding valve 34 can manually control the opening and closing of the air pipe 32, precisely controlling the start and stop of the vacuum system, eliminating the need for frequent starting and stopping of the vacuum machine 31; after the diaphragm is stably adsorbed on the suction cup 2, the diaphragm can be ground and polished, and during this process, the diaphragm will not shift due to the adsorption force.

[0049] After use, turn off the vacuum assembly 3. Specifically, the air pipe 32 can be cut off by closing the hand slide valve 34, so that the suction cup 2 no longer has suction force. At this time, the diaphragm that has been ground or polished can be easily removed from the suction cup 2. Alternatively, the suction cup 2 can be removed from the mounting plate 4 for cleaning and maintenance. The base plate 41 and the cover plate 42 of the mounting plate 4 are connected by bolts, which is convenient for disassembly. The first sealing ring 6 installed in the first vacuum chamber 5 is also easy to maintain and replace during disassembly, ensuring the sealing performance for the next use.

[0050] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A lapping polishing apparatus characterized by comprising: The utility model provides a film vacuum adsorption device, including frame (1), the sucking disc (2) for placing film and the vacuum component (3) for connecting sucking disc (2) and make sucking disc (2) produce adsorption force, the vacuum component (3) fixed mounting is in frame (1), the frame (1) far from the one end of vacuum component (3) fixed mounting has the mounting plate (4), the sucking disc (2) is several, the sucking disc (2) all fixed mounting is in mounting plate (4).

2. The polishing apparatus according to claim 1, wherein The mounting plate (4) includes bottom plate (41) and cover plate (42), the bottom plate (41) is fixedly installed at one end of the frame (1), and the cover plate (42) is fixedly installed on one side of the bottom plate (41). A first vacuum cavity (5) is formed between the cover plate (42) and the bottom plate (41).

3. The polishing apparatus according to claim 2, wherein The sucking disc (2) is installed on the side of the cover plate (42) away from the bottom plate (41). One end of the sucking disc (2) is fixedly installed with a locking bolt (7). Threaded connection holes (8) corresponding to the sucking discs (2) are formed in the cover plate (42). The threaded connection holes (8) are in communication with the first vacuum cavity (5). The sucking disc (2) is fixedly connected with the cover plate (42) through the locking bolt (7).

4. The polishing apparatus according to claim 3, wherein The sucking disc (2) is cylindrical. A film placing groove (11) adapted to the film is arranged at one end of the sucking disc (2). A second vacuum cavity (12) is formed between the sucking disc (2) and the locking bolt (7). A plurality of vacuum suction holes (13) are formed in the film placing groove (11). The vacuum suction holes (13) are in communication with the second vacuum cavity (12).

5. The polishing apparatus according to claim 4, wherein The locking bolt (7) penetrates through a vacuum through hole (16) in the axial direction. One end of the vacuum through hole (16) is in communication with the first vacuum cavity (5). The other end of the vacuum through hole (16) is in communication with the second vacuum cavity (12).

6. The polishing apparatus of claim 2, wherein The vacuum component (3) includes a vacuum machine (31), an air pipe (32), and an air pipe joint (33). The vacuum machine (31) is fixedly installed in the frame (1). One end of the air pipe (32) is fixedly connected with the output end of the vacuum machine (31). The other end of the air pipe (32) is fixedly connected with the air pipe joint (33). A joint connection hole (15) is formed in the bottom plate (41). The joint connection hole (15) is in communication with the first vacuum cavity (5). The other end of the air pipe (32) is fixedly connected with the joint connection hole (15) through the air pipe joint (33).

7. The polishing apparatus of claim 2, wherein The vacuum component (3) further includes a hand slide valve (34) fixedly installed on the air pipe (32).

8. The polishing apparatus of claim 2, wherein A first sealing ring (6) is installed in the first vacuum cavity (5). The first sealing ring (6) is located on the side of the cavity of the first vacuum cavity (5).

9. The polishing apparatus according to any one of claims 3 to 5, wherein The locking bolt (7) includes a hollow screw head (71) and a screw rod (72). The screw head (71) and the screw rod (72) are integrally formed. A thread is arranged on the outer circumferential side of the screw rod (72). A sealing groove (9) is formed in the abutting surface of the screw head (71) and the cover plate (42). A second sealing ring (10) is installed in the sealing groove (9).

10. The polishing apparatus of claim 4, wherein The suction disc (2) is fixedly provided with diaphragm top rods (14) for fixing diaphragms, the diaphragm top rods (14) are multiple, and the diaphragm top rods (14) are fixedly arranged on the outer circumferential side of the suction disc (2).