Adsorption device

By designing an adjustable sealing structure and driving mechanism, the problem of weakened adsorption force caused by the warping of thin sheet-like objects was solved, achieving stable adsorption of the adsorption device and avoiding interference, thus improving the accuracy of transportation and testing.

CN223983149UActive Publication Date: 2026-03-10YINGUAN SEMICON TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-02-24
Publication Date
2026-03-10

AI Technical Summary

Technical Problem

Thin sheet-like objects are prone to warping during production, transportation, and storage, causing the edges of the adsorption device to fail to adhere to the adsorbed object, resulting in weakened adsorption force, unstable adsorption effect, and affecting the accuracy of transportation and testing.

Method used

An adsorption device is designed, comprising a suction cup, a sealing structure, and a driving mechanism. The sealing structure can be flush with or below the surface of the suction cup in a first position to avoid interference, and engage with the suction cup in a second position to enhance the adsorption force. The driving mechanism fixes the sealing structure through a limiting ring and a clamping ring, thereby achieving flexible adjustment of the sealing structure.

Benefits of technology

It improves the adsorption effect of the adsorption device, avoids interference with the lifting structure and the fork, ensures the stability of transportation and testing, and enhances the adsorption force and sealing performance.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model provides an adsorption device, and relates to the technical field of precision equipment. The adsorption device comprises a suction cup, a sealing structure arranged on the suction cup and a driving mechanism for driving the sealing structure to ascend or descend relative to the suction cup. The driving mechanism can drive the sealing structure to be at least at a first position or a second position; when the sealing structure is located at the first position, the upper end of the sealing structure is flush with or lower than the upper surface of the suction cup. When the sealing structure is located at the second position, the sealing structure is directly or indirectly connected with the suction cup, and the upper end of the sealing structure protrudes out of the upper surface of the suction cup.
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Description

Technical Field

[0001] The embodiments in this specification relate to the technical field of precision equipment, specifically to an adsorption device. Background Technology

[0002] Adsorption devices are used to apply negative pressure to adsorb objects, temporarily fixing them to the device for easy transfer, transportation, and testing. Due to the inherent physical properties of sheet-like objects, they may warp during production, transportation, and storage. This warping can prevent the edges of the adsorption device from adhering to the object, resulting in weakened adsorption force and unstable adsorption performance. In some applications, the adsorption device may include a lifting structure to raise the object from its surface; however, a sealing structure may interfere with the movement of this lifting structure. Utility Model Content

[0003] This specification provides one or more embodiments of an adsorption device, including: a suction cup, a sealing structure disposed on the suction cup, and a driving mechanism for driving the sealing structure to rise or fall relative to the suction cup; the driving mechanism is capable of driving the sealing structure to at least a first position or a second position; when the sealing structure is in the first position, the upper end of the sealing structure is flush with or lower than the upper surface of the suction cup; when the sealing structure is in the second position, the sealing structure is directly or indirectly engaged with the suction cup and the upper end of the sealing structure protrudes beyond the upper surface of the suction cup.

[0004] In some embodiments, the suction cup has an adsorption area, and the sealing structure is disposed around the adsorption area; the sealing structure includes: a fixing part fixedly connected to the driving mechanism and a joining part capable of engaging with the outer edge of the adsorption area of ​​the suction cup to form a seal; the joining part has a joining slope, the joining slope being inclined relative to the upper surface of the suction cup; the joining slope is capable of enclosing the adsorption area to form an adsorption space.

[0005] In some embodiments, the adsorption device further includes: a limiting ring connected to the suction cup, the upper surface of the limiting ring being flush with or lower than the upper surface of the suction cup; the limiting ring having a limiting inclined surface, and the engaging inclined surface being able to engage with the limiting inclined surface; the engaging inclined surface being able to form the adsorption space by the limiting ring and the adsorption area.

[0006] In some embodiments, the drive mechanism includes: a drive mechanism housing and a drive piston capable of linear movement relative to the drive mechanism housing, wherein the working end of the drive piston is connected to the fixed portion of the sealing structure.

[0007] In some embodiments, the working end of the drive piston is connected to the fixing part of the sealing structure via a fixing device, the fixing device comprising: a first clamping ring and a second clamping ring disposed on the working end of the drive piston, the fixing part being clamped between the first clamping ring and the second clamping ring.

[0008] In some embodiments, the working end of the driving piston is provided with a retaining ring and a clamping ring limiting boss; the first clamping ring and the second clamping ring are located between the retaining ring and the clamping ring limiting boss.

[0009] In some embodiments, the second clamping ring is located above the first clamping ring; the second clamping ring has a supporting slope that supports the joint portion of the sealing structure; the second clamping ring has a clamping notch that, together with the first clamping ring, forms a clamping groove for clamping the fixing portion of the sealing structure; the surface of the clamping notch of the second clamping ring extends toward the fixing portion of the sealing structure to form a clamping protrusion.

[0010] In some embodiments, the piston head of the driving piston divides the interior of the driving mechanism housing into a first cavity at the bottom and a second cavity at the top; the suction cup has a first medium channel communicating with the first cavity, the first medium channel being used to connect with a first medium source.

[0011] In some embodiments, the drive mechanism further includes an elastic element, one end of which abuts against the piston head of the drive piston, and the other end of which abuts against the inner wall of the drive mechanism housing.

[0012] In some embodiments, a second medium channel is formed between the suction cup and the drive mechanism housing, communicating with the second cavity, and the second medium channel is connected to a second medium source or the atmosphere.

[0013] In some embodiments, the drive mechanism housing includes: a cylindrical structure with an open lower end and a bottom plug fixedly connected to the bottom of the cylindrical structure; the bottom plug includes: a bottom plate connected to the bottom of the cylindrical structure and a conical structure fixedly connected to the bottom plate; the cylindrical structure has a first hole communicating with the first medium channel, the conical structure is disposed inside the cylindrical structure, and the first hole is disposed facing the conical structure.

[0014] In some embodiments, at least one side of the base plate protrudes from the cylindrical structure; the base plate is fixedly connected to the suction cup.

[0015] In some embodiments, the adsorption device includes a plurality of driving mechanisms, and the suction cup has a number of first medium channels corresponding to the number of driving mechanisms, and the plurality of first medium channels are connected to the same first medium source.

[0016] In some embodiments, the suction cup has an adsorption area; a sealing groove is formed on the suction cup, the sealing groove is disposed around the adsorption area, and the sealing groove is configured to accommodate the sealing structure; the shape of the sealing structure matches the shape of the adsorption area.

[0017] The beneficial effects that the embodiments of this specification may bring include, but are not limited to: (1) the sealing structure can be in the first position according to the working needs to avoid interference or influence with other related structures, or it can be in the second position according to the working needs to fit well with the adsorbed object to achieve a better adsorption effect; (2) the jointing slope can provide good joint performance or sealing performance between the sealing structure and the suction cup, while facilitating its adaptive deformation with the warped adsorbed object; (3) the limiting ring can limit the extreme position of the rising of the sealing structure to prevent the sealing structure from detaching from the upper surface of the suction cup due to excessive rising; (4) the limiting slope of the limiting ring can cooperate with the jointing slope to provide good joint performance or sealing performance between the sealing structure and the suction cup; (5) the first clamping ring and the second clamping ring can realize the fixation between the sealing structure and the driving mechanism, while having Smaller footprint; (6) The first and second clamping rings are fixed by the retaining ring and the clamping ring limiting boss, and the first clamping ring, sealing structure and second clamping ring are assembled by the retaining ring; (7) The support structure can provide support force to the joint, avoid the joint from being deformed by pressure, and clamp the joint with the limiting ring; (8) The clamping groove is used to accommodate the fixing part of the sealing structure, and the fixing part is reliably fixed by the clamping protrusion; (9) The driving mode of multiple selectable driving mechanisms is realized by the first medium source, elastic element and second medium source; (10) The conical structure of the bottom plug realizes the closure of the driving mechanism housing, while allowing the first cavity to communicate with the first medium channel; (11) Multiple driving mechanisms are matched with multiple first medium channels, and multiple first medium channels are connected to the same first medium source, thereby realizing the synchronous driving of multiple driving mechanisms. It should be noted that different embodiments may produce different beneficial effects. In different embodiments, the beneficial effects that may be produced can be any one or a combination of the above, or any other possible beneficial effects. Attached Figure Description

[0018] This specification will be further described by way of exemplary embodiments, which will be described in detail with reference to the accompanying drawings. The same numbers in the drawings denote the same structures or steps.

[0019] Figure 1 This is a schematic diagram of an adsorption device according to some embodiments of this specification.

[0020] Figure 2 This is a schematic diagram of the sealing structure and drive mechanism of the adsorption device according to some embodiments of this specification.

[0021] Figure 3 yes Figure 2 A magnified view of a portion of the image.

[0022] Figure 4 This is a schematic diagram of the lower surface of the adsorption device shown in some embodiments of this specification.

[0023] Figure 5 This is a cross-sectional schematic diagram of an adsorption device according to some embodiments of this specification.

[0024] Figure 6 yes Figure 5 A magnified view of a portion of the image.

[0025] Figure 7 This is a schematic diagram of the sealing structure of the adsorption device in the first position according to some embodiments of this specification.

[0026] Figure 8 yes Figure 7 A magnified view of a portion of the image.

[0027] Figure 9 This is a schematic diagram of the sealing structure of the adsorption device in the second position according to some embodiments of this specification.

[0028] Figure 10 This is a schematic diagram of the drive mechanism of the adsorption device shown in some embodiments of this specification.

[0029] The diagram shows the following markings: 1. Suction cup; 2. Sealing structure; 21. Fixing part; 22. Joint part; 221. Jointing slope; 3. Drive mechanism; 31. Drive mechanism housing; 311. Cylindrical structure; 312. Bottom plug; 313. Base plate; 314. Conical structure; 315. First hole; 316. Second hole; 317. Third hole; 32. Drive piston; 321. Working end; 322. Piston head; 33. First cavity; 34. Second cavity; 35. Elastic element; 4. Limiting ring; 41. Limiting slope; 5. Fixing device; 51. First clamping ring; 52. Second clamping ring; 521. Supporting slope; 522. Clamping notch; 523. Clamping protrusion; 61. Snap ring; 62. Clamping ring limiting boss; 71. First medium channel; 72. Second medium channel; 8. Sealing ring; 100. Lifting structure; 101. Fork groove. Detailed Implementation

[0030] To more clearly illustrate the technical solutions of the embodiments in this specification, the embodiments will be described in detail below with reference to the accompanying drawings. Obviously, the content described below are some examples or embodiments of this specification. For those skilled in the art, without creative effort, the technical solutions or means disclosed in this specification can be applied to other scenarios based on this technical content.

[0031] It should be understood that the terms "system," "device," "equipment," "part" and / or "component," "unit" and / or "module" used in this specification are a method of distinguishing different components, elements, parts, sections, or assemblies at different levels. However, if other words can achieve the same purpose, they may be replaced by other expressions.

[0032] Unless otherwise specified, the technical terms used to describe components, elements, etc. in this specification are not singular but may include plural. Generally speaking, terms such as "comprising" or "including" only indicate that explicitly identified steps, elements, or components are included, and these steps, elements, and components do not constitute an exclusive list, as the described method or apparatus may also include other steps or components.

[0033] In the description of this specification, it should be understood that the directional descriptions, such as up, down, front, back, left, and right, indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings. These descriptions are for the convenience of describing this application and for simplification, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. In the description of this specification, unless otherwise expressly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly. Those skilled in the art can reasonably determine the specific meaning of the above terms in this specification in conjunction with the specific content of the technical solution.

[0034] An adsorption device is used to apply negative pressure to adsorb objects, temporarily fixing the objects to the device for easier handling, transportation, and testing. In some embodiments, the adsorbed object can be a thin sheet, such as a circular sheet. In some embodiments, the thickness of the adsorbed object can be 20 μm to 1 mm, for example, 20 μm, 525 μm, 625-675 μm, 725 μm, 775 μm, etc.

[0035] In some embodiments, due to the inherent physical properties of the sheet-like objects, they may warp during production, transportation, and storage. For example, the sheet-like objects and their attachments may warp due to stress caused by the difference in material expansion coefficients. This warping reduces the contact area between the adsorbed object and the adsorption device, or prevents the edges of the adsorption device from adhering to the adsorbed object, resulting in weakened adsorption force and unstable adsorption effect. In some embodiments, unstable adsorption effect may cause the adsorbed object to slip or shift during transportation, thereby affecting the accuracy and safety of transportation. In some embodiments, unstable adsorption effect may also prevent the adsorbed object from being accurately placed at the predetermined detection position, or from undergoing the predetermined rotation during the detection process as required, or affect the adsorption surface shape of the adsorbed object, thereby affecting the accuracy of the detection results.

[0036] In some related embodiments, the adsorption device may be arranged with a sealing structure (e.g., a sealing ring with a certain degree of flexibility or elasticity) to fit as closely as possible to the surface and / or periphery of the warped sheet-like object, thereby enhancing the sealing performance of the adsorption area and stabilizing the adsorption effect.

[0037] In some relevant application scenarios, the adsorption device may include a lifting structure that elevates the object to be adsorbed from the surface of the adsorption device. For example, some adsorption devices capable of handling sheet-like objects may include a first pin that lifts the sheet-like object. In some embodiments, the stroke of the first pin may be 8-12 mm, for example, 10 mm. For example, some adsorption devices capable of performing stress tests on sheet-like objects may also include a second pin that lifts the sheet-like object. In some embodiments, the stroke of the second pin may be 2-3 mm. However, in some embodiments, the sealing structure may interfere with the stroke of the pin. In some embodiments, the sealing structure above the surface of the adsorption device may come into contact with the sheet-like object lifted by the pin, thereby affecting the test results.

[0038] In some related embodiments, the adsorption device may include a first pin that lifts the sheet-like object, and the associated equipment may include a fork for inserting, carrying, and transferring the sheet-like object from below. In this related embodiment, the sealing structure may interfere with the fork. Furthermore, in this related embodiment, considering the operational requirements of the fork, when arranging the sealing structure, the stroke of the first pin needs to be further increased to allow the fork to be inserted from above the sealing structure below the sheet-like object after the first pin lifts it, thereby achieving the carrying and transfer of the sheet-like object.

[0039] Based on this, one or more embodiments of this specification provide a sealing device that enables the sealing structure to rise or fall. When the sealing ring is in the rising position, it can adaptively fit with the object being adsorbed to form a vacuum cavity, ensuring the adsorption effect. After the sealing ring fits with the object being adsorbed, it can fall to a certain extent to allow the edge of the warped object being adsorbed to move downward, thereby achieving the adsorption of the warped object and ensuring the adsorption effect. When the sealing ring is in the falling position, it can avoid interference with other mechanisms such as the lifting structure and / or the fork.

[0040] Figure 1 These are schematic diagrams of the adsorption apparatus shown in some embodiments of this specification. Figure 2 This is a schematic diagram of the sealing structure and drive mechanism of the adsorption device according to some embodiments of this specification. See also Figure 1 , Figure 2 As shown, in one or more embodiments of this specification, the adsorption device may include: a suction cup 1, a sealing structure 2 disposed on the suction cup 1, and a driving mechanism 3 for driving the sealing structure 2 to rise or fall relative to the suction cup 1. In some embodiments, the suction cup 1 is used to apply negative pressure adsorption to the adsorbed object. In some embodiments, the sealing structure 2 is used to cooperate with the surface of the adsorbed object to form a sealed negative pressure area between the adsorbed object and the suction cup 1, thereby ensuring the adsorption effect and preventing the warped adsorbed object from detaching due to vacuum breaking. In some embodiments, the sealing structure 2 may have a certain thickness or a certain height, thereby enclosing the space between the adsorbed object and the suction cup 1 to form a sealed negative pressure area. In some embodiments, the sealing structure 2 may adaptively conform to the surface of the adsorbed object to achieve a seal. In some embodiments, the sealing structure 2 may be made of a flexible or elastic material. In some embodiments, the sealing structure 2 may be made of a rubber-based material, such as nitrile rubber, hydrogenated nitrile rubber, silicone rubber, fluororubber, etc. In some embodiments, the sealing structure 2 may be made of a partially plastic or synthetic resin-based material, such as polyurethane, polytetrafluoroethylene, etc.

[0041] The sealing structure 2 conforms to the warped sheet through its own deformation, ensuring that a closed vacuum cavity can be formed.

[0042] In some embodiments, the drive mechanism 3 can drive the sealing structure 2 to at least a first position or a second position. For example, the drive mechanism 3 can drive the sealing structure 2 to descend to the first position, or drive the sealing structure 2 to rise to the second position. In some embodiments, the drive mechanism 3 can also drive the sealing structure 2 to an intermediate position between the first and second positions.

[0043] In some embodiments, see Figure 7 , Figure 8As shown, when the sealing structure 2 is in the first position, the upper end of the sealing structure 2 is flush with or lower than the upper surface of the suction cup 1, to avoid interference between the sealing structure 2 and other mechanisms of the suction cup 1, such as to avoid interference with the lifting structure inside the suction cup 1. See also Figure 1 As shown, Figure 1 The suction cup 1 is shown to include one or more lifting structures 100 located in its central part. The upper end of the lifting structure 100 can rise relative to the upper surface of the suction cup 1 to lift the object to be adsorbed, so that there is a certain distance between the lower surface of the object to be adsorbed and the upper surface of the suction cup 1. In some embodiments, the descent of the sealing structure 2 can prevent the sealing structure 2 from interfering with the side or lower surface of the lifted object to be adsorbed, thereby avoiding affecting the handover or inspection work.

[0044] In some embodiments, see Figure 9 As shown, when the sealing structure 2 is in the second position, the sealing structure 2 is directly or indirectly engaged with the suction cup 1, and the upper end of the sealing structure 2 protrudes from the upper surface of the suction cup 1. In some embodiments, the sealing structure 2 may be directly engaged with the suction cup 1. In other embodiments, the sealing structure 2 may be engaged with other components arranged on the suction cup 1. In some embodiments, engagement may refer to the sealing structure 2 fitting against certain portions of the suction cup 1 or certain portions of other components. In some further embodiments, engagement may further refer to the formation of a seal between the sealing structure 2 and the suction cup 1, and the maintenance of the seal between the sealing structure 2 and the suction cup 1 and between the sealing structure 2 and the object being adsorbed when the suction cup 1 performs adsorption, thereby forming a negative pressure area.

[0045] In some possible embodiments, when the sealing structure 2 is in the first position, or in a position between the first and second positions, the sealing structure 2 may engage with the side of the suction cup 1, or may have a gap between it and the side of the suction cup 1.

[0046] Since the sealing structure 2 can be in the first or second position according to the working requirements, when the suction cup 1 is not adsorbing the adsorbed object, the upper end of the sealing structure 2 can be lower than the surface of the suction cup 1, avoiding interference with the lifting structure and thus avoiding the impact on transportation; it can also avoid contact between the upper end of the sealing structure 2 and the adsorbed object after the lifting structure lifts the adsorbed object, thus avoiding the impact on the detection effect.

[0047] Since the sealing structure 2 can be in the first or second position according to the working requirements, when the suction cup 1 is not adsorbing the adsorbed object, the upper end of the sealing structure 2 can be lower than the surface of the suction cup 1, which can avoid interference with the fork and reduce the required stroke of the lifting structure.

[0048] In one or more embodiments of this specification, see Figure 1As shown, the suction cup 1 has an adsorption area, and a sealing structure is arranged around the adsorption area. In some embodiments, the adsorption area can be a dense ring, protrusions, microporous ceramic, or the like. In some embodiments, the adsorption area can include multiple adsorption grooves, for example... Figure 1 The generally annular groove is shown in the figure. In some embodiments, the adsorption region may include a plurality of adsorption micropores capable of communicating with a negative pressure source.

[0049] In some embodiments, the adsorption area may be circular. In other embodiments, the adsorption area may be irregularly shaped. In some related embodiments, the device associated with the adsorption apparatus may include a fork for transferring the adsorbed object. In some embodiments, the fork may be inserted beneath the adsorbed object and lift and transfer the adsorbed object from the suction cup of the adsorption apparatus. See also Figure 1 As shown, the suction cup 1 has a fork groove 101 for avoiding the fork. In some embodiments, the fork groove 101 is not provided with an adsorption groove or adsorption micropore, that is, the adsorption area of ​​the suction cup 1 has a notch for avoiding the fork, thereby making the adsorption area irregular in shape. In some embodiments, the fork may be I-shaped, U-shaped or Y-shaped, and the adsorption area has a notch of the corresponding shape.

[0050] In some embodiments, see Figure 2 As shown, there can be multiple driving mechanisms 3. In some embodiments, the driving mechanisms 3 are arranged around the adsorption area. In some embodiments, the driving mechanisms can be located at the outer edge of the adsorption area and at the notch of the adsorption area, so that they can achieve synchronous or nearly synchronous lifting of the sealing structure 2.

[0051] In one or more embodiments of this specification, see Figures 6 to 9 As shown, the sealing structure 2 includes a fixing part 21 fixedly connected to the driving mechanism 3 and a joining part 22 capable of engaging with the outer edge of the adsorption area of ​​the suction cup 1 to form a seal. In some embodiments, the fixing part 21 and the joining part 22 of the sealing structure 2 can be directly connected. In other embodiments, a connecting part can also be provided between the fixing part 21 and the joining part 22 of the sealing structure 2. In some embodiments, the sealing structure 2 can be an integral structure.

[0052] In some embodiments, see Figure 2 , Figure 3 As shown, the fixing part 21 provides an area for fixed connection with the drive mechanism 3. In some embodiments, the fixing part 21 may be arranged horizontally or vertically relative to the surface of the suction cup 1. In some embodiments, the fixing part 21 may be adjusted based on the fixing structure of the drive mechanism 3.

[0053] In some embodiments, see Figure 5 , Figure 6 As shown, the joint 22 is used to achieve a seal between the sealing structure 2 and the suction cup 1, and a seal between the sealing structure 2 and the object being adsorbed. In some embodiments, a portion of the joint 22 (e.g. Figure 7 , Figure 9 The lower end of the joint 22 shown can be directly or indirectly abutted against the outer edge of the suction cup 1 to achieve a seal. In some embodiments, a portion of the joint 22 (e.g., Figure 7 , Figure 9 The upper end of the joint 22 shown in the figure can be fitted to the lower surface of the adsorbed object to achieve a seal.

[0054] In some embodiments, the joining portion 22 includes a joining slope 221, which is inclined relative to the upper surface of the suction cup 1. Exemplarily, the joining portion 22 may be an annular plate-like structure inclined relative to the upper surface of the suction cup 1, i.e., the cross-section of the joining portion 22 may be "\" shaped, with the joining slope 221 provided on the surface of the joining portion 22 facing the center of the suction cup 1. Exemplarily, the joining portion 22 may be an annular structure with a triangular cross-section, with the joining slope 221 provided on one inclined surface of the joining portion 22. In some embodiments, the joining slope 221 can enclose the adsorption area to form an adsorption space.

[0055] In some embodiments, see Figures 6 to 9 As shown, the cross-section of the sealing structure 2 can be “∠” shaped.

[0056] In one or more embodiments of this specification, see Figures 6 to 9 As shown, the adsorption device further includes a limiting ring 4, which is connected to the suction cup 1. Exemplarily, the limiting ring 4 is fixedly connected to the outer edge of the suction cup 1 by fasteners such as bolts. In some embodiments, the limiting ring 4 surrounds the outer edge of the suction cup 1. In some embodiments, a portion of the limiting ring 4 may protrude beyond the outer edge of the suction cup 1. In some embodiments, the limiting ring 4 has a limiting inclined surface 41, and the engaging inclined surface 221 of the joint portion 22 of the sealing structure 2 can engage with the limiting inclined surface 41 to achieve a seal (i.e., indirectly fitting against the outer edge of the suction cup 1). In some embodiments, the engaging inclined surface 221 can form an adsorption space by enclosing the limiting ring and the upper surface of the suction cup 1 (e.g., the adsorption area of ​​the suction cup 1).

[0057] In some embodiments, when the sealing structure 2 rises and is in the second position, the engagement ramp 221 can abut against the limiting ramp 41. In some embodiments, the limiting ramp 41 can limit the engagement ramp 221 to prevent the sealing structure 2 from rising further. Based on this, the limiting ring 4 can limit the extreme position of the rising of the sealing structure 2. In some embodiments, the limiting ramp 41 is a rigid surface so that a portion of the engagement ramp 221 is deformed under pressure when the sealing structure 2 rises, achieving a tight fit, preventing air leakage from the vacuum cavity, and thus improving the sealing performance.

[0058] In some embodiments, the limiting ring 4 is annular, and the cross-section of the limiting ring 4 can be trapezoidal, such as a right trapezoid. In some embodiments, a limiting slope 41 is formed at the inclined waist of the right trapezoid. In some embodiments, the portion of the limiting ring 4 protruding from the suction cup 1 forms the limiting slope 41.

[0059] In some embodiments, the upper surface of the limiting ring 4 is flush with the upper surface of the suction cup 1. In other embodiments, since the upper surface of the suction cup 1, such as the adsorption area of ​​the suction cup 1, has high precision, the upper surface of the limiting ring 4 can be configured to be lower than the upper surface of the suction cup 1 to reduce the machining precision of the limiting ring 4.

[0060] In one or more embodiments of this specification, the driving mechanism 3 may be a linear driving mechanism. In some embodiments, the driving mechanism 3 includes: a driving mechanism housing 31 and a driving piston 32 capable of linear movement relative to the driving mechanism housing 31, the driving piston 32 being disposed inside the driving mechanism housing 31. In some embodiments, the driving piston 32 may be along a vertical direction (e.g., a direction perpendicular to the surface of the suction area of ​​the suction cup 1, for example...). Figure 7 or Figure 9 The piston moves in the vertical direction. In some embodiments, the drive piston 32 may also be tilted relative to the vertical direction. In some embodiments, the working end 321 of the drive piston 32 is connected to the fixing part 21 of the sealing structure 2.

[0061] In one or more embodiments of this specification, the working end 321 of the drive piston 32 is connected to the fixing part 21 of the sealing structure 2 via a fixing device 5. See also the embodiments described above. Figures 7 to 9 As shown, the fixing device 5 includes a first clamping ring 51 and a second clamping ring 52 disposed on the working end 321 of the drive piston 32, and the fixing part 21 is clamped between the first clamping ring 51 and the second clamping ring 52. In some embodiments, the first clamping ring 51 and the second clamping ring 52 are sleeved on the working end 321 of the drive piston 32.

[0062] In some embodiments, the working end 321 of the driving piston 32 is provided with a retaining ring 61 and a clamping ring limiting boss 62. In some embodiments, the working end 321 of the driving piston 32 is provided with a retaining groove, and a retaining ring 61 is arranged in the retaining groove. In some embodiments, the driving piston 32 is arranged perpendicular to the adsorption surface of the suction cup 1, for example along... Figure 7 , Figure 9 The first clamping ring 51 is positioned vertically within the first clamping ring 51. In some embodiments, the retaining ring 61 is located above the clamping ring limiting boss 62. In some embodiments, the second clamping ring 52 is located above the first clamping ring 51. In some embodiments, the first clamping ring 51 and the second clamping ring 52 are located between the retaining ring 61 and the clamping ring limiting boss 62.

[0063] For example, during assembly, the first clamping ring 51 is assembled to the clamping ring limiting boss 62, the fixing part 21 of the sealing structure 2 is attached to the upper surface of the first clamping ring 51, and the second clamping ring 52 is sleeved onto the working end 321 of the drive piston 32, so that the second clamping ring 52 and the first clamping ring 51 jointly clamp the fixing part 21, and the second clamping ring 52 and the first clamping ring 51 are clamped together by the retaining ring 61.

[0064] In some embodiments, the second clamping ring 52 includes a supporting ramp 521 that supports the joint portion 22 of the sealing structure 2. In some embodiments, the supporting ramp 521 supports the lower portion of the joint portion 22 of the sealing structure 2. Exemplarily, the supporting ramp 521 supports the joint portion 22 of the sealing structure 2 directly opposite the position of the limiting ramp 41, so that the joint portion 22 is less likely to collapse when it abuts against the limiting ring 4, thus avoiding seal failure. In some embodiments, the supporting ramp 521 can cooperate with the limiting ramp 41 to clamp the joint portion 22 of the sealing structure 2, thereby improving the sealing effect.

[0065] In some embodiments, the second clamping ring 52 has a clamping notch 522, which, together with the first clamping ring 52, forms a clamping groove for clamping the fixing portion 21 of the sealing structure 2. In some embodiments, the fixing portion 21 of the sealing structure 2 is clamped inside the clamping groove. In some further embodiments, the fixing portion 21 of the sealing structure 2 is sleeved on the working end 321 of the drive piston 32 and clamped inside the clamping groove.

[0066] In some embodiments, the surface of the clamping notch 522 of the second clamping ring 52 extends toward the fixing portion 21 of the sealing structure 2 to form a clamping protrusion 523. In some embodiments, the number of clamping protrusions can be one or more. In some embodiments, the clamping protrusion can be a ridge structure protruding from the surface of the clamping notch 522. The clamping protrusion is used to deform the fixing portion 21 of the sealing structure 2 to improve the fixing effect.

[0067] In one or more embodiments of this specification, the working end 321 of the drive piston 32 is connected to the fixing portion 21 of the sealing structure 2 via a second fixing device. In some embodiments, the second fixing device may include a skeleton disposed inside the fixing portion 21 of the sealing structure 2. In some embodiments, a portion of the material of the sealing structure 2 (e.g., rubber or synthetic resin) covers the skeleton to form the fixing portion 21. In some embodiments, the second fixing device further includes a first fastener and a second fastening screw threadedly connected to the working end 321 of the drive piston 32. In some embodiments, the first fastener and the second fastener may be a first fastening nut and a second fastening nut. In some embodiments, the working end 321 of the drive piston 32 passes through the skeleton, and the skeleton is fixed to a suitable position on the working end 321 of the drive piston 32 by the first fastening nut and the second fastening nut.

[0068] In some embodiments, see Figure 7 , Figure 9 As shown, the piston head 322 of the drive piston 32 divides the interior of the drive mechanism housing 31 into a first cavity 33 located at the bottom and a second cavity 34 located at the top. In some embodiments, the volumes of the first cavity 33 and the second cavity 34 change as the drive piston 32 moves. In some embodiments, positive or negative pressure can be provided to the first cavity 33 to move the drive piston 32, or positive or negative pressure can be provided to the second cavity 34 to move the drive piston 32, depending on design requirements.

[0069] For example, in some embodiments, the suction cup 1 has a first medium channel 71 communicating with the first cavity 33, and the first medium channel 71 is used to connect with the first medium source. In some embodiments, the drive mechanism 3 further includes an elastic member 35, one end of which abuts against the piston head 322 of the drive piston 32, and the other end of which abuts against the inner wall of the drive mechanism housing 31. In some embodiments, the elastic member 35 is disposed inside the second cavity 34 and is used to provide a restoring force to the drive piston 32.

[0070] In this embodiment, a first medium source is used to provide positive pressure to the first cavity 33 through the first medium channel 71, so as to cause the drive piston 32 to rise. In this embodiment, an elastic member 35 is used to provide pressure to the piston head 322. Figure 7 , Figure 9 The downward force causes the drive piston 32 to descend.

[0071] In this embodiment, the second chamber 34 is enclosed, and the upward and downward forces driving the piston 32 are provided by the positive pressure of the gas in the first chamber 33 and the elastic force of the spring 35, respectively. When the piston head 322 rises under the influence of positive pressure, the gas inside the second chamber 34 is compressed, and based on the reduction in the volume of the second chamber 34, the remaining gas inside provides an increased downward force acting on the piston head 322, thereby providing a certain buffering effect.

[0072] For example, in some embodiments, the suction cup 1 has a first medium channel 71 communicating with the first cavity 33, and the first medium channel 71 is used to connect with the first medium source. In some embodiments, the drive mechanism 3 further includes an elastic member 35, one end of which abuts against the piston head 322 of the drive piston 32, and the other end of which abuts against the inner wall of the drive mechanism housing 31. In some embodiments, the elastic member 35 is disposed inside the second cavity 34 and is used to provide a restoring force to the drive piston 32. In some embodiments, a second medium channel 72 communicating with the second cavity 34 is formed between the suction cup 1 and the drive mechanism housing 31, and the second medium channel 72 is connected to the atmosphere.

[0073] In this embodiment, a first medium source is used to provide positive pressure to the first cavity 33 through the first medium channel 71, causing the drive piston 32 to rise, while simultaneously discharging gas from the second cavity 34 through the second medium channel 72. In this embodiment, the elastic member 35 is used to provide pressure to the piston head 322 as follows: Figure 7 , Figure 9 The downward force causes the drive piston 32 to descend, while simultaneously introducing gas into the interior of the second cavity 34 through the second medium channel 72.

[0074] In this embodiment, the second chamber 34 is open, and the upward and downward forces driving the piston 32 are provided by the positive pressure of the gas in the first chamber 33 and the elastic force of the spring 35, respectively. The second chamber 34 does not provide a buffering force, which can produce a more rapid response effect.

[0075] For example, in some embodiments, the suction cup 1 has a first medium channel 71 communicating with the first cavity 33, and the first medium channel 71 is used to connect with the first medium source. In some embodiments, the driving mechanism 3 further includes an elastic member 35, one end of which abuts against the piston head 322 of the driving piston 32, and the other end of which abuts against the inner wall of the driving mechanism housing 31. In some embodiments, the elastic member 35 is disposed inside the second cavity 34 and is used to provide a restoring force to the driving piston 32. In some embodiments, a second medium channel 72 communicating with the second cavity 34 is formed between the suction cup 1 and the driving mechanism housing 31, and the second medium channel 72 is connected to the second medium source.

[0076] In this embodiment, a first medium source is used to provide positive pressure to the first cavity 33 through the first medium channel 71, causing the drive piston 32 to rise. In this embodiment, a second medium source may include a positive pressure source, which provides positive pressure to the second cavity 34 through the second medium channel 72, causing the drive piston 32 to descend. In this embodiment, an elastic member 35 is used to provide pressure to the piston head 322 as follows: Figure 7 , Figure 9 The downward force causes the drive piston 32 to descend.

[0077] In this embodiment, the upward force driving the piston 32 is provided by the positive gas pressure in the first chamber 33, and the downward force driving the piston 32 is provided by the positive gas pressure in the second chamber 34 and the elastic force of the spring 35, enabling the piston 32 to descend more quickly. In a further embodiment of this embodiment, the second medium source may further include a negative pressure source, and the upward force driving the piston 32 may also be provided by the positive gas pressure in the first chamber 33 and the negative gas pressure in the second chamber 34, enabling the piston 32 to rise more quickly.

[0078] For example, in some embodiments, the suction cup 1 has a first medium channel 71 communicating with the first cavity 33, and the first medium channel 71 is used to connect with the first medium source. In some embodiments, a second medium channel 72 communicating with the second cavity 34 is formed between the suction cup 1 and the drive mechanism housing 31, and the second medium channel 72 is connected with the second medium source.

[0079] In this embodiment, a first medium source is used to provide positive pressure to the first cavity 33 through the first medium channel 71, so as to cause the drive piston 32 to rise. In this embodiment, a second medium source may include a positive pressure source, which provides positive pressure to the second cavity 34 through the second medium channel 72, so as to cause the drive piston 32 to fall.

[0080] For example, in some embodiments, the suction cup 1 has a first medium channel 71 communicating with the first cavity 33, and the first medium channel 71 is used to connect to a first medium source. In some embodiments, the first medium source may include a positive pressure source and a negative pressure source.

[0081] In this embodiment, positive pressure can be provided to the first cavity 33 through the first medium channel 71 to cause the drive piston 32 to rise. In this embodiment, negative pressure can be provided to the first cavity 33 through the first medium channel 71 to cause the drive piston 32 to fall. In a further embodiment of this embodiment, the second cavity 34 can be open (e.g., connected to the atmosphere) or closed. In a further embodiment of this embodiment, the second cavity 34 can also be connected to a second medium source, which can include a positive pressure source and a negative pressure source to provide negative or positive pressure to the second cavity 34, thereby coordinating with the rising or falling of the drive piston 32.

[0082] In one or more embodiments of this specification, the first medium source and / or the second medium source may provide a gaseous medium. In some embodiments, the drive mechanism 3 may be a cylinder.

[0083] In one or more embodiments of this specification, the drive mechanism housing 31 includes: a cylindrical structure 311 with an open lower end and a bottom plug 312 fixedly connected to the bottom of the cylindrical structure. In some embodiments, the bottom plug 312 includes: a base plate 313 connected to the bottom of the cylindrical structure 311 and a conical structure 314 fixedly connected to the base plate 313.

[0084] In some embodiments, see Figure 10 As shown, the cylindrical structure 311 has a first hole 315 communicating with the first medium channel 71, and a tapered structure 314 is disposed inside the cylindrical structure 311, with the first hole 315 facing the tapered structure 314. In some embodiments, the first hole 315 is located at the first cavity 33. In some embodiments, the tapered structure 314 provides a bottom seal for the drive mechanism housing 31 while reserving space in the lower part of the drive mechanism housing 31 to allow communication between the horizontally arranged first medium channel 71 and the vertically arranged cylindrical structure 311. In some embodiments, see Figure 10 As shown, a sealing ring 8 is provided between the cylindrical structure 311 and the suction cup 1 to achieve a seal between the first hole 315 and the first medium channel 71. In some embodiments, the sealing ring 8 may be an O-ring.

[0085] In some embodiments, see Figure 10 As shown, the cylindrical structure 311 has a second hole 316 that communicates with the second medium channel 72. In some embodiments, the second hole 316 is located at the second cavity 34.

[0086] In some embodiments, see Figure 10As shown, the suction cup 1 has a third hole 317 that communicates with the second medium channel 72. In some embodiments, a working medium (e.g., gas) is provided to the second medium channel 72 through the third hole 317. In some embodiments, the working medium enters the second cavity 34 through the third hole 317, the second medium channel 72, and then through the second hole 316. In some embodiments, negative pressure is provided to the second cavity 34 through the third hole 317, the second medium channel 72, and then through the second hole 316.

[0087] In some embodiments, at least one side of the base plate 313 protrudes from the cylindrical structure 311. In some embodiments, the base plate 313 is fixedly connected to the suction cup 1. The portion of the base plate 313 protruding from the cylindrical structure 311 provides a portion for fixing to the suction cup 1. In some embodiments, fasteners may penetrate the portion of the base plate 313 protruding from the cylindrical structure 311 and be fastened to the suction cup 1.

[0088] In one or more embodiments of this specification, a plurality of driving mechanisms 3 are included. The suction cup 1 has a number of first media channels 71 corresponding to the number of driving mechanisms 3. The plurality of first media channels 71 are connected to the same first media source. In some embodiments, the same first media source provides positive or negative pressure to the plurality of first media channels 71 so that the plurality of driving mechanisms 3 work synchronously, thereby causing the sealing structure 2 to rise or fall synchronously as a whole.

[0089] In one or more embodiments of this specification, the suction cup 1 has an adsorption area, and a sealing groove is formed on the suction cup 1, the sealing groove being disposed around the adsorption area, and the sealing groove being configured to accommodate a sealing structure 2. In some embodiments, the shape of the sealing structure 2 matches the shape of the adsorption area.

[0090] In one or more embodiments of this specification, see Figure 4 As shown, the suction cup 1 also has a drive mechanism receiving groove 11 for accommodating the drive mechanism 3. In some embodiments, the drive mechanism receiving groove 11 may be formed along the height direction of the suction cup 1. In some embodiments, the drive mechanism receiving groove 11 may extend through the height direction of the suction cup 1. In some embodiments, the drive mechanism receiving groove 11 may be a through hole. In some embodiments, the drive mechanism receiving groove 11 may communicate with a sealing groove.

[0091] In one or more embodiments of this specification, the drive mechanism 3 may also be other linear motion mechanisms besides cylinders, such as push-pull electromagnets.

[0092] In some application scenarios, the drive mechanism 3 drives the sealing structure 2 to rise to the second position, and the fork places the sheet-like object (e.g., a warped sheet-like object) on the suction cup 1. The lower surface of the sheet-like object contacts the sealing structure 2. The weight of the sheet-like object causes the sealing structure 2 to deform, thereby making the sealing structure 2 fit with the sheet-like object. The suction cup 1 works to provide negative pressure, thereby achieving the adsorption of the sheet-like object.

[0093] In some applications, the suction cup 1 stops providing negative pressure, the drive mechanism 3 drives the sealing structure 2 to descend to a first position, and the lifting structure (e.g., the first ejector pin and / or the second ejector pin) rises to lift the sheet-like object. In some applications, this also includes subsequent detection or transfer of the sheet-like object.

[0094] The basic concepts have been described above. It is obvious that the detailed disclosure above is merely illustrative and does not constitute a limitation of this specification. Although not explicitly stated herein, various modifications, improvements, and corrections may be made to this specification by those skilled in the art. Such modifications, improvements, and corrections are taught in this specification and therefore remain within the spirit and scope of the exemplary embodiments described herein.

Claims

1. An adsorption device, characterized by, The utility model relates to a kind of vacuum adsorption devices, including: Suction disc (1), sealing structure (2) arranged on the suction disc (1) and drive mechanism (3) driving the sealing structure (2) to ascend or descend relative to the suction disc (1); The drive mechanism (3) can drive the sealing structure (2) at least in first position or second position; When the sealing structure (2) is in the first position, the upper end of the sealing structure (2) is flush with or lower than the upper surface of the suction disc (1); When the sealing structure (2) is in the second position, the sealing structure (2) is directly or indirectly engaged with the suction disc (1) and the upper end of the sealing structure (2) protrudes from the upper surface of the suction disc (1).

2. The adsorption device of claim 1, wherein The suction disc (1) has an adsorption area, and the sealing structure is arranged around the adsorption area; The sealing structure (2) includes a fixed part (21) fixedly connected with the drive mechanism (3) and an engaging part (22) capable of engaging with the outer edge of the adsorption area of the suction disc (1) to form a seal; The engaging part (22) has an engaging slope (221) inclined relative to the upper surface of the suction disc (1); The engaging slope (221) can form an adsorption space with the adsorption area.

3. The adsorption device of claim 2, wherein Further comprising: A limiting ring (4) connected with the suction disc (1), the upper surface of the limiting ring (4) is flush with or lower than the upper surface of the suction disc (1); The limiting ring (4) has a limiting slope (41), and the engaging slope (221) can engage with the limiting slope (41); The engaging slope (221) can form the adsorption space with the limiting ring and the adsorption area.

4. The adsorption device of claim 2, wherein The drive mechanism (3) includes a drive mechanism housing (31) and a drive piston (32) capable of linear motion relative to the drive mechanism housing (31), and the working end (321) of the drive piston (32) is connected with the fixed part (21) of the sealing structure (2).

5. The adsorption device of claim 4, wherein, The working end (321) of the drive piston (32) is connected with the fixed part (21) of the sealing structure (2) through a fixing device (5), and the fixing device (5) includes a first clamping ring (51) and a second clamping ring (52) arranged on the working end (321) of the drive piston (32), and the fixed part (21) is clamped between the first clamping ring (51) and the second clamping ring (52).

6. The adsorption device of claim 5, wherein, A snap ring (61) and a clamping ring limiting boss (62) are arranged on the working end (321) of the drive piston (32); The first clamping ring (51) and the second clamping ring (52) are located between the snap ring (61) and the clamping ring limiting boss (62).

7. The adsorption device according to claim 5 or 6, characterized in that The second clamping ring (52) is located on the upper side of the first clamping ring (51); The second clamping ring (52) has a supporting slope (521) supporting the engaging part (22) of the sealing structure (2). The second clamping ring (52) has a clamping notch (522) which, together with the first clamping ring (52), forms a clamping groove for clamping the fixed part (21) of the sealing structure (2); The surface of the clamping notch (522) of the second clamping ring (52) extends in the direction of the fixed part (21) of the sealing structure (2) to form a clamping protrusion (523).

8. The adsorption device of claim 4, wherein, The piston head (322) of the driving piston (32) divides the inner part of the driving mechanism housing (31) into a first cavity (33) located at the lower part and a second cavity (34) located at the upper part; The suction disc (1) is provided with a first medium channel (71) which is in communication with the first cavity (33) and is used to be connected with a first medium source.

9. The adsorption device of claim 8, wherein, The driving mechanism (3) further comprises an elastic member (35) which is abutted at one end to the piston head (322) of the driving piston (32) and is abutted at the other end to the inner wall of the driving mechanism housing (31).

10. The adsorption device according to claim 8 or 9, characterized in that The suction disc (1) and the driving mechanism housing (31) form a second medium channel (72) which is in communication with the second cavity (34) and is connected with a second medium source or the atmosphere.

11. The adsorption device of claim 8, wherein, The driving mechanism housing (31) comprises a cylindrical structure (311) with an open lower end and a bottom plug (312) which is fixedly connected to the bottom of the cylindrical structure; The bottom plug (312) comprises a bottom plate (313) which is connected to the bottom of the cylindrical structure (311) and a conical structure (314) which is fixedly connected to the bottom plate (313); The cylindrical structure (311) is provided with a first hole (315) which is in communication with the first medium channel (71), and the conical structure (314) is arranged inside the cylindrical structure (311), and the first hole (315) is arranged towards the conical structure (314).

12. The adsorption device of claim 11, wherein, At least one side of the bottom plate (313) protrudes from the cylindrical structure (311); The bottom plate (313) is fixedly connected to the suction disc (1).

13. The adsorption device of claim 8, wherein, A plurality of driving mechanisms (3) are included, and the suction disc (1) is provided with a number of first medium channels (71) corresponding to the number of driving mechanisms (3), and the plurality of first medium channels (71) are connected with the same first medium source.

14. The adsorption device of claim 1, wherein, The suction disc (1) has an adsorption area; The suction disc (1) is provided with a sealing groove which surrounds the adsorption area and is configured to accommodate the sealing structure (2); The shape of the sealing structure (2) matches the shape of the adsorption area.