External energy-saving liquid cooling temperature control system

Abstract

An external energy-saving liquid cooling temperature control system comprises a processing device, a liquid cooling device, a temperature control device, a processing pipeline and a liquid cooling pipeline. The temperature control device comprises an externally-hung machine base detachably installed on the processing device in an externally-hung mode, a heat exchanger, an intelligent control unit and at least one sensor, wherein the heat exchanger and the intelligent control unit are arranged on the externally-hung machine base. And the processing pipeline is connected in series with the processing equipment, the heat exchanger and the liquid cooling equipment and is used for circulation of process fluid. The liquid cooling pipeline is connected with the heat exchanger and used for circulation of cooling fluid. The intelligent control unit can dynamically adjust the flow of the cooling fluid according to the operation state of the process equipment and judge whether the liquid cooling equipment is started for refrigeration to strongly cool the process fluid, so that the efficiency can be improved, and the energy consumption can be reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to a kind of semiconductor process equipment, in particular to a kind of external hanging energy-saving liquid cooling temperature control system. BACKGROUND

[0002] With the continuous progress of semiconductor technology, the operating power demand of semiconductor process equipment gradually increases, and the heat generated is more and more, which may affect the performance and stability of the process equipment, so the process equipment must be cooled. The existing cooling method such as air cooling has low cooling efficiency and poor energy efficiency, which can easily cause the process equipment to overheat, thereby causing a significant reduction in production efficiency and product quality.

[0003] Currently, the industry has developed liquid cooling. One existing liquid cooling device includes a compressor, a condenser, an expansion valve, and an evaporator for circulating cooling fluid, so that the process fluid flowing through the evaporator is significantly cooled. However, regardless of the operating state of the process equipment, whether it is idle, low load or overload, the actual temperature change achieved, the liquid cooling device will perform the same steps and generate the same amount of refrigeration, and cannot adjust the cooling intensity according to the operating state of the process equipment. In addition, the compressor consumes a lot of electricity, which will relatively increase the overall energy consumption, which is quite a waste. Therefore, the design of the existing liquid cooling device still needs to be improved. SUMMARY

[0004] The utility model aims to provide an external hanging energy-saving liquid cooling temperature control system that can at least overcome the shortcomings of the background art.

[0005] The external hanging energy-saving liquid cooling temperature control system of the utility model comprises a process equipment, a liquid cooling device, a temperature control device, a process pipeline, and a liquid cooling pipeline.

[0006] The liquid cooling device is installed on the process equipment and can be controlled to start cooling.

[0007] The temperature control device includes an external hanging base that can be detachably installed on the process equipment, a heat exchanger and an intelligent control unit provided on the external hanging base, and at least one sensor connected to the intelligent control unit.

[0008] The process pipeline is used to guide the heat generated by the process equipment during operation, and includes an output pipe connected between the process equipment and the heat exchanger for carrying process fluid with heat from the process equipment to the heat exchanger, a connecting pipe connected between the heat exchanger and the liquid cooling device for carrying process fluid cooled by the heat exchanger to the liquid cooling device, and an input pipe connected between the liquid cooling device and the process equipment for returning process fluid through the liquid cooling device to the process equipment.

[0009] The liquid cooling pipeline is connected to the heat exchanger and supplies cooling fluid to cool the heat exchanger.

[0010] The at least one sensor is used to sense the temperature of the process fluid and send information. The intelligent control unit receives and analyzes the information and adjusts the flow rate of the cooling fluid into the heat exchanger accordingly. When the intelligent control unit determines that the temperature of the process fluid is higher than the temperature range, it will start the liquid cooling device to cool the process fluid.

[0011] The external energy-saving liquid cooling temperature control system of this utility model includes a sensor installed on the connecting pipe, which is used to sense the temperature of the process fluid output from the heat exchanger.

[0012] The external energy-saving liquid cooling temperature control system of this utility model has an intelligent control unit installed on the liquid cooling pipeline, which can be used to control the flow rate of the cooling fluid.

[0013] The external energy-saving liquid cooling temperature control system of this utility model includes an inlet pipe for the intelligent control unit to set and for the cooling fluid to flow into the heat exchanger, and an outlet pipe for the cooling fluid to flow out of the heat exchanger.

[0014] The external energy-saving liquid cooling temperature control system of this utility model uses plant cooling water as the cooling fluid.

[0015] The beneficial effects of this utility model are as follows: the intelligent control unit can dynamically adjust the flow rate of the cooling fluid according to the temperature of the process fluid sensed by the at least one sensor, and determine whether to start the liquid cooling equipment to effectively cool the process fluid, thus improving efficiency and reducing energy consumption. Attached Figure Description

[0016] Other features and effects of this utility model will be clearly presented in the embodiments with reference to the accompanying drawings, wherein:

[0017] Figure 1 This is a three-dimensional schematic diagram of an embodiment of the external energy-saving liquid cooling temperature control system of this utility model;

[0018] Figure 2 This is a perspective view of the temperature control device described in the embodiment;

[0019] Figure 3 This is a flowchart of the embodiment. Detailed Implementation

[0020] See Figure 1 , Figure 2 and Figure 3An embodiment of the external energy-saving liquid cooling temperature control system of this utility model includes a process equipment 1, a liquid cooling equipment 2, a temperature control equipment 3, a process pipeline 4, and a liquid cooling pipeline 5.

[0021] The process equipment 1 can be a semiconductor device or an optoelectronic device, such as, but not limited to, an exposure machine, a thin film deposition device or an etching machine. It generates heat during operation, but its structure is not the focus of this utility model and will not be described in detail.

[0022] The liquid cooling device 2 is installed on the process equipment 1 and can be controlled to start and cool. In this embodiment, the liquid cooling device 2 is the original configuration of the process equipment 1 and includes a compressor, condenser, expansion valve and evaporator (not shown in the figure). However, since it is a common existing structure and not the focus of this utility model, it will not be described in detail.

[0023] The temperature control device 3 includes an external mounting base 31, a heat exchanger 32 mounted on the external mounting base 31, an intelligent control unit 33, and a sensor 34 connected to the intelligent control unit 33. The external mounting base 31 is a hollow body, facilitating detachable external mounting on the process equipment 1. The heat exchanger 32 has a conventional structure and is used to transfer heat from a hot fluid to a cold fluid. The intelligent control unit 33 is connected to the liquid cooling device 2 and can selectively provide a compressor shielding signal or power supply, meaning it can switch between controlling the start-up and shutdown of the liquid cooling device 2 based on information emitted by the sensor 34. The sensor 34 is used to sense temperature. In this embodiment, only one sensor 34 is shown. It should be noted that the number of sensors 34 is not limited to one and can be varied according to actual needs. Furthermore, the location of the sensors 34 is not limited to inside or outside the aforementioned equipment.

[0024] The process piping 4 connects the process equipment 1, the heat exchanger 32, and the liquid cooling device 2 in series, and is used to remove the heat generated by the process equipment 1 during operation. The process piping 4 includes an output pipe 41 connecting the process equipment 1 and the heat exchanger 32, a connecting pipe 42 connecting the heat exchanger 32 and the liquid cooling device 2, and an input pipe 43 connecting the liquid cooling device 2 and the process equipment 1. The output pipe 41 supplies process fluid carrying heat from the process equipment 1 to the heat exchanger 32. The process fluid can be the original cooling water of the process equipment 1. The connecting pipe 42 supplies process fluid cooled by the heat exchanger 32 to the liquid cooling device 2. The connecting pipe 42 is provided with a sensor 34, enabling the sensor 34 to sense the temperature of the process fluid output from the heat exchanger 32. The input pipe 43 returns the process fluid that has passed through the liquid cooling device 2 to the process equipment 1.

[0025] The liquid cooling pipeline 5 connects to the heat exchanger 32 and supplies cooling fluid to cool the heat exchanger 32. The cooling fluid may be, for example, but not limited to, the plant's existing cooling water, with a temperature of 14°C to 20°C. The liquid cooling pipeline 5 includes an inlet pipe 51 for the cooling fluid to flow into the heat exchanger 32 and an outlet pipe 52 for the cooling fluid to flow out of the heat exchanger 32. The inlet pipe 51 is provided by the intelligent control unit 33, enabling the intelligent control unit 33 to control the flow rate of the cooling fluid flowing into the heat exchanger 32.

[0026] In use, the temperature control device 3 is externally mounted on the process equipment 1, and the process equipment 1, the temperature control device 3, and the liquid cooling device 2 are connected via the process piping 4 and the liquid cooling piping 5. The user first sets the temperature range of the process equipment 1 as needed, for example, but not limited to, 20°C to 80°C. The sensor 34 senses the temperature of the process fluid flowing out of the heat exchanger 32 and sends out the information. The intelligent control unit 33 receives and judges the information to monitor and adjust the heat dissipation efficiency of the process equipment 1.

[0027] Under normal conditions, the temperature sensed by the sensor 34 is within the specified temperature range. The intelligent control unit 33 provides a shielding signal to the compressor, causing the liquid cooling device 2 to stop cooling. At this time, the process fluid carrying heat flows out of the process equipment 1 to the heat exchanger 32 for heat exchange. After being cooled by the heat exchanger 32, the process fluid flows back to the process equipment 1 through the liquid cooling device 2 to cool the process equipment 1.

[0028] When the process equipment 1 is under low load or idle, the intelligent control unit 33 receives and analyzes the information from the sensor 34. If it determines that the temperature of the process fluid is below the specified temperature range, it will adjust and reduce the flow rate of the cooling fluid into the heat exchanger 32. At this time, the intelligent control unit 33 also provides a compressor shielding signal, causing the liquid cooling device 2 to stop cooling, thereby reducing energy consumption.

[0029] When the process equipment 1 is under high load or generates high heat, the intelligent control unit 33 receives and analyzes the information sent by the sensor 34. When it determines that the temperature of the process fluid is higher than the temperature range, it will activate the liquid cooling device 2 to effectively cool the process fluid and quickly cool the process equipment 1.

[0030] In addition, the intelligent control unit 33 can also determine whether the process equipment 1 is overloaded through the information. If it is overloaded, it will send a signal to the alarm device (not shown) and issue an alarm signal, such as, but not limited to, sound or light.

[0031] In summary, the external energy-saving liquid cooling temperature control system of this utility model allows the temperature control device 3 to be externally installed on the existing process equipment 1 without requiring significant modifications to the existing process equipment 1 or the purchase of a new one. Therefore, it is highly convenient, practical, and cost-effective. Furthermore, the intelligent control unit 33 can dynamically adjust the flow rate of the cooling fluid based on the temperature of the process fluid sensed by the sensor 34, and determine whether to activate the liquid cooling device 2 for efficient cooling of the process fluid. This improves efficiency and reduces energy consumption, thereby achieving temperature control and ensuring the stable operation of the process equipment 1. Therefore, this utility model effectively achieves its intended purpose.

[0032] The above description is merely a specific embodiment of this utility model and should not be construed as limiting the scope of the claims of this utility model. Equivalent variations made based on the contents of the claims and description of this utility model should also be covered by the scope of the claims of this utility model.

Claims

1. An external energy-saving liquid cooling temperature control system, comprising: a process equipment and a liquid cooling equipment, the liquid cooling equipment is installed on the process equipment and can be controlled to start cooling, characterized in that: The external energy-saving liquid cooling temperature control system further comprises: a temperature control device, including an external mount base detachably mounted on the process equipment, a heat exchanger and an intelligent control unit arranged on the external mount base, and at least one sensor connected to the intelligent control unit; a process pipeline for leading out heat generated by the process equipment during operation, and including an output pipe connected between the process equipment and the heat exchanger and used for carrying process fluid with heat of the process equipment to the heat exchanger, a connecting pipe connected between the heat exchanger and the liquid cooling device and used for carrying process fluid cooled by the heat exchanger to the liquid cooling device, and an input pipe connected between the liquid cooling device and the process equipment and used for carrying process fluid through the liquid cooling device back to the process equipment; and a liquid cooling pipeline connected to the heat exchanger and used for flowing cooling fluid to cool the heat exchanger.

2. The external energy-saving liquid cooling temperature control system according to claim 1, characterized in that: The temperature control device includes a sensor arranged on the connecting pipe, and the sensor is used for sensing temperature of the process fluid output from the heat exchanger.

3. The external energy-saving liquid cooling temperature control system according to claim 1 or 2, characterized in that: The intelligent control unit is arranged on the liquid cooling pipeline and can be used for controlling flow of the cooling fluid.

4. The external energy-saving liquid cooling temperature control system according to claim 3, characterized in that: The liquid cooling pipeline includes an inflow pipe for arranging the intelligent control unit and for flowing the cooling fluid into the heat exchanger, and an outflow pipe for flowing the cooling fluid out of the heat exchanger.

5. The external energy-saving liquid cooling temperature control system according to claim 4, characterized in that: The cooling fluid is factory cooling water.

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