Light splitting distance regulation and control device
By using a simplified beam spacing control device and a high-precision motor to drive the mirror rotation, high-precision beam spacing control is achieved, solving the problems of complexity, high cost, and large energy loss of existing devices, and improving control accuracy and efficiency.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-31
- Publication Date
- 2026-03-13
AI Technical Summary
Existing beam splitting distance control devices are complex in structure, high in cost, low in control accuracy, and have large energy losses.
A simple beam splitting distance adjustment device is adopted, which achieves high-precision adjustment through a first beam splitting adjustment component and a second beam splitting adjustment component. A high-precision motor is used to control the rotation angle of the reflector and adjust the beam spacing. The device includes a first reflector and a second reflector, which are driven by a first adjustable base and a second adjustable base, respectively.
It achieves high-precision beam spacing control, reduces energy loss, and improves working efficiency.
Smart Images
Figure CN223989152U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of laser processing technology, and in particular to a beam splitting distance control device. Background Technology
[0002] In the field of laser technology, adjusting the beam splitting distance is a crucial step in optimizing laser beam splitting performance. By precisely controlling the position or angle of the splitting element, accurate adjustment of the sub-beam spacing can be achieved, thereby improving laser processing efficiency, spectral analysis accuracy, and the reliability of scientific experiments. However, existing beam splitting distance control devices have the following drawbacks:
[0003] 1. The structure is complex and the investment cost is high.
[0004] 2. Difficult to control precisely, resulting in low control accuracy.
[0005] 3. The regulation process involves significant energy loss. Utility Model Content
[0006] In view of the shortcomings of the existing technology, the purpose of this utility model is to provide a beam splitting distance control device, which has a simple structure, can be precisely controlled, has high control accuracy, generates little loss during beam splitting control, and has high working efficiency.
[0007] The embodiments of this utility model are achieved through the following technical solutions:
[0008] A beam splitting spacing control device, comprising:
[0009] Laser input unit that outputs a laser beam;
[0010] A beam expander and a first beam splitter are arranged sequentially along the output direction of the laser beam. The laser beam is emitted as a first beam and a second beam through the first beam splitter.
[0011] A second beam splitter is used to adjust the output of the first beam. The second beam splitter is disposed on one side of the first beam splitter, and the first beam passes through the second beam splitter and is emitted.
[0012] A first beam splitting adjustment component and a second beam splitting adjustment component are used to adjust the output path of the second beam. The first beam splitting adjustment component is located behind the first beam splitter, and the second beam splitting adjustment component is located behind the second beam splitter. The second beam passes through the first beam splitting adjustment component and the second beam splitting adjustment component in sequence before entering the second beam splitter. The first beam splitting adjustment component includes a first reflector and a first adjustable base, and the second beam splitting adjustment component includes a second reflector and a second adjustable base.
[0013] The laser output unit outputs both the first beam and the second beam after passing through the second beam splitter.
[0014] According to a preferred embodiment, the laser input unit includes a laser and an aperture arranged sequentially.
[0015] The laser output unit includes a galvanometer and a field mirror arranged in sequence.
[0016] According to a preferred embodiment, the first adjustable base includes a first motor and a first base, wherein the first motor causes the first reflector to rotate via the first base.
[0017] According to a preferred embodiment, the second adjustable base includes a second motor and a second base, wherein the second motor causes the second reflector to rotate via the second base.
[0018] According to a preferred embodiment, both the first base and the second base include a motor plate and a rotating base, the top of the rotating base is provided with an output end, and the side wall of the rotating base is provided with an input end.
[0019] According to a preferred embodiment, a first beam cutter is disposed between the first beam splitter and the second beam splitter.
[0020] According to a preferred embodiment, a second beam cutter is disposed between the first beam splitting adjustment component and the second beam splitting adjustment component.
[0021] According to a preferred embodiment, the rotation angle unit of the first reflector and the rotation angle unit of the second reflector are 0.01 degrees.
[0022] The technical solution of this utility model embodiment has at least the following advantages and beneficial effects:
[0023] This utility model has a simple structure and achieves precise control of the output beam spacing through the first beam splitting adjustment component and the second beam splitting adjustment component. The first adjustable base can drive the first reflector to rotate with high precision, and the second adjustable base can drive the second reflector to rotate with high precision. The control accuracy is high, the loss during the beam splitting output control process is low, and the working efficiency is high. Attached Figure Description
[0024] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0025] Figure 1 A schematic diagram of the structure of a beam splitting spacing control device provided in an embodiment of this utility model;
[0026] Figure 2 A side view of a beam splitting spacing control device provided in an embodiment of this utility model;
[0027] Figure 3 for Figure 1 A schematic diagram of a local structure.
[0028] Icons: 1-Laser, 2-Aperture, 3-Beam expander, 4-First beam splitter, 5-Second beam splitter, 6-Galvanometer, 7-Field mirror, 8-First motor, 9-First base, 10-First reflector, 11-Second motor, 12-Second base, 13-Second reflector, 14-Motor plate, 15-First beam cutter, 16-Second beam cutter, A-First beam, B-Second beam, G-Laser beam. Detailed Implementation
[0029] To better understand and implement this invention, the technical solutions in the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings.
[0030] In the description of this utility model, it should be noted that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.
[0031] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.
[0032] Example
[0033] Please refer to Figures 1 to 3A beam splitting distance adjustment device includes: a laser input unit for outputting a laser beam; a beam expander and a first beam splitter arranged sequentially along the laser beam output direction, wherein the laser beam is emitted as a first beam and a second beam after passing through the first beam splitter; a second beam splitter for adjusting the output of the first beam, the second beam splitter being disposed on one side of the first beam splitter, wherein the first beam passes through the second beam splitter and is emitted; a first beam splitting adjustment component and a second beam splitting adjustment component for adjusting the output path of the second beam, the first beam splitting adjustment component being located behind the first beam splitter and the second beam splitting adjustment component being disposed behind the second beam splitter, wherein the second beam passes through the first beam splitting adjustment component and the second beam splitting adjustment component sequentially before entering the second beam splitter; the first beam splitting adjustment component includes a first reflector and a first adjustable base, and the second beam splitting adjustment component includes a second reflector and a second adjustable base; and a laser output unit, wherein both the first beam and the second beam are output toward the laser output unit after passing through the second beam splitter.
[0034] Preferably, the laser input unit includes a laser and an aperture arranged in sequence; the laser output unit includes a galvanometer and a field mirror arranged in sequence.
[0035] Preferably, the first adjustable base includes a first motor and a first base, wherein the first motor causes the first reflector to rotate via the first base.
[0036] Preferably, the second adjustable base includes a second motor and a second base, wherein the second motor causes the second reflector to rotate via the second base.
[0037] Preferably, both the first base and the second base include a motor plate and a rotating base, with an output end on the top of the rotating base and an input end on the side wall of the rotating base.
[0038] Preferably, a first beam cutter is disposed between the first beam splitter and the second beam splitter.
[0039] Preferably, a second beam cutter is disposed between the first beam splitting adjustment component and the second beam splitting adjustment component.
[0040] Preferably, the rotation angle unit of the first reflector and the rotation angle unit of the second reflector are 0.01 degrees.
[0041] The working principle of this utility model:
[0042] In this embodiment, both the first motor and the second motor are high-precision motors, and servo motors can be selected.
[0043] In this embodiment, the first beam splitter splits a laser beam into two beams (a first beam and a second beam). The first beam is transmitted to the first reflector, while the second beam is transmitted to the second beam splitter. The second beam, after passing through the first reflector, is transmitted to the second reflector. The laser beam after passing through the second reflector passes through the second beam splitter. The two beams (the first beam and the second beam) pass through the second beam splitter and then converge at the laser output unit (galvanometer) to form two adjustable laser beams that enter the galvanometer. Finally, after being focused by the laser output unit (field mirror), two laser beams are formed on the surface to process the substrate. When the number of lines being processed is odd, an unwanted beam can be cut off by the first or second beam cutter. When the number of lines is even, it is not necessary to activate the beam cutting function of the first or second beam cutter.
[0044] Specifically, in this embodiment, the transmission of reflected light (the second beam) can be controlled by adjusting the angle of the high-precision motor (first motor) to rotate the first reflector, and then the angle of reflected light (the second beam) can be controlled by adjusting the angle of the high-precision motor (second motor) to rotate the second reflector. Finally, the light is transmitted to the galvanometer aperture through the second beam splitter to converge into two beams. The first and second motors can be precisely controlled at the μm level via software, with rotation angles down to 0.01 degrees, and the corresponding spacing adjustable from 10 μm to 10 mm. Figure 3 As shown, the arrows indicate the transmission directions of the laser beam, the first beam, and the second beam.
[0045] In this embodiment, the output end of the first motor is connected to the input end of the side wall of the first base through the motor board. Similarly, the output end of the second motor is connected to the input end of the side wall of the second base through the motor board.
[0046] The technical means disclosed in this utility model are not limited to those disclosed in the above embodiments, but also include technical solutions composed of any combination of the above technical features. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of this utility model, and these improvements and modifications are also considered within the scope of protection of this utility model.
Claims
1. An optical path length regulating device, characterized by comprising: The application relates to a light splitting distance regulation device. The laser input unit outputs a laser beam; a beam expander, a first light splitting prism arranged in sequence along the direction of the laser beam output, the laser beam being split into a first beam and a second beam by the first light splitting prism; a second light splitting prism for adjusting the output of the first beam, the second light splitting prism being arranged on one side of the first light splitting prism, the first beam passing through the second light splitting prism and being output; a first light splitting adjustment assembly and a second light splitting adjustment assembly for adjusting the output path of the second beam, the first light splitting adjustment assembly being arranged on the rear side of the first light splitting prism, the second light splitting adjustment assembly being arranged on the rear side of the second light splitting prism, the second beam passing through the first light splitting adjustment assembly and the second light splitting adjustment assembly in sequence and being input into the second light splitting prism, the first light splitting adjustment assembly comprising a first reflector and a first adjustable base, and the second light splitting adjustment assembly comprising a second reflector and a second adjustable base; a laser output unit, the first beam and the second beam being output towards the laser output unit after passing through the second light splitting prism.
2. The light splitting distance regulation device according to claim 1, wherein the laser input unit comprises a laser and a diaphragm arranged in sequence; the laser output unit comprises a galvanometer and a field lens arranged in sequence.
3. The light splitting distance regulation device according to claim 1, wherein the first adjustable base comprises a first motor and a first base, the first motor driving the first reflector to rotate through the first base.
4. The light splitting distance regulation device according to claim 3, wherein the second adjustable base comprises a second motor and a second base, the second motor driving the second reflector to rotate through the second base.
5. The light splitting distance regulation device according to claim 4, wherein the first base and the second base each comprise a motor plate and a rotating base, the rotating base being provided with an output end on the top and an input end on the side wall.
6. The light splitting distance regulation device according to claim 1, wherein a first light cutting mirror is arranged between the first light splitting prism and the second light splitting prism.
7. The light splitting distance regulation device according to claim 6, wherein a second light cutting mirror is arranged between the first light splitting adjustment assembly and the second light splitting adjustment assembly.
8. The light splitting distance regulation device according to claim 1, wherein the rotation angle unit of the first reflector and the rotation angle unit of the second reflector are 0.01 degrees.