Discharging robot of large-size mask production line

Abstract

The utility model relates to the technical field of mask plate blanking, and discloses a blanking robot of a large-size mask plate production line, which comprises a blanking manipulator for grabbing mask plates, and is characterized in that a blanking clamping jaw assembly is detachably mounted at the movable end of the blanking manipulator; the discharging clamping jaw assembly comprises a linear driving module and two sets of sliding bases driven by the linear driving module, the clamping jaw module comprises a movable clamping block, a fixed clamping block and a microswitch with an elastic piece, and the distance between the movable clamping block and the fixed clamping block is adjustable. And the camera identification assembly is used for identifying corner characteristics of the Box to confirm a plate placing position. According to the utility model, the arm of the blanking robot is modified, the clamping jaw capable of coping with various sizes of G8.6-generation masks is added, the blanking robot can be connected with the observation mechanism and the boxing mechanism at the upstream and the downstream, and the CCD camera is aligned with four corners of the Box, so that the masks can be taken and placed at high precision.

Description

Technical Field

[0001] This utility model relates to the field of mask blanking technology, specifically a blanking robot for a large-size mask production line. Background Technology

[0002] In the flat panel display industry, photomasks play a crucial role. As master templates for pattern transfer, they are key materials and tools for realizing design pattern transfer in chip manufacturing. Especially with technological advancements and the emergence of G8.6 generation line technology, primarily targeting the production of medium to large-sized panels, it utilizes larger glass substrates, significantly improving production efficiency and cost-effectiveness, making it particularly suitable for the IT product market, such as tablets and laptops.

[0003] In the production process of G8.6 generation photomasks, the requirements for precision are extremely high; any slight deviation can lead to product quality problems. However, the existing photomask unloading mechanism is manual, requiring personnel to use a fixture of the corresponding size to move the photomask into the box. This has poor precision control, a risk of bumps and knocks, and the personnel are close to the photomask, posing a risk of dust accumulation. Overall, the unloading efficiency is low. Utility Model Content

[0004] (a) Technical problems to be solved

[0005] To address the shortcomings of existing technologies, this utility model provides a material unloading robot for a large-size photomask production line, which solves the problems of poor precision control in the unloading and packaging of photomasks in the existing photomask production process, the risk of bumps and dust accumulation, and the overall low unloading efficiency.

[0006] (II) Technical Solution

[0007] To achieve the above objectives, this utility model provides the following technical solution:

[0008] A material unloading robot for a large-size photomask production line includes a material unloading manipulator for gripping photomasks. The movable end of the manipulator is detachably equipped with a material unloading gripper assembly. The gripper assembly includes a linear drive module and two sets of sliding bases driven by the linear drive module. The two sets of sliding bases move synchronously towards or away from each other under the drive of the linear drive module. Gripper modules are symmetrically arranged on the sliding bases. Each gripper module includes a movable gripper block, a fixed gripper block, and a microswitch with a spring. The distance between the movable gripper block and the fixed gripper block is adjustable. The microswitch detects whether the photomask has reached the gripping position by contacting the photomask with the spring. A camera recognition component is provided on one side of the sliding base to identify the corner features of the photomask box to confirm the placement position.

[0009] Preferably, a light-shielding plate is fixedly provided on one side of the sliding base, and the linear drive module has several sets of photoelectric switches arranged in the vertical direction to cooperate with the light-shielding plate to position the stroke of the sliding base.

[0010] Preferably, a synchronization bracket is fixedly connected to one side of the sliding base, and the end of the synchronization bracket away from the sliding base is movably connected to the back of the linear drive module via a cable chain. The camera recognition component is fixedly connected to the sliding base via a mounting bracket.

[0011] Preferably, photoelectric sensors are arranged on both sets of sliding bases, and the photoelectric sensors are used to sense the mask between the gripper modules.

[0012] Preferably, the gripper module further includes a fixed base, which is fixedly mounted on the sliding base. A drive cylinder is fixedly mounted on one end of the fixed base, and the piston end of the drive cylinder is fixedly connected to the movable gripper block. The fixed gripper block is fixedly mounted on the end of the fixed base away from the drive cylinder, and a micro switch is fixedly mounted on one side of the fixed base.

[0013] Preferably, the end face edges of the movable clamping block and the fixed clamping block that are close to each other are arranged at a 45° inclination angle.

[0014] Preferably, an observation platform is arranged around the unloading robot, and a mask clamping assembly is arranged on the observation platform. The mask clamping assembly is used to clamp and fix the mask transported by the unloading robot so that personnel can observe the surface of the mask.

[0015] (III) Beneficial Effects

[0016] This utility model has the following beneficial effects:

[0017] This large-size photomask production line's unloading robot, through its linear drive module and sliding base, can grip photomasks of different sizes, greatly improving the robot's versatility. Its gripper module allows for stable gripping of photomasks of varying thicknesses by adjusting the distance between the movable and fixed grippers, ensuring stable gripping operations. Furthermore, a microswitch enables the gripper module to move closer to the photomask via the sliding base. The contact between the spring and the end face of the mask is precisely identified, and the mask is positioned at the predetermined clamping position. Then, the mask is stably clamped by the movable clamping block and the fixed clamping block, thus achieving precise positioning and clamping of the mask. The camera recognition component identifies the corner features of the mask box on the boxing mechanism to confirm the placement position. Then, the unloading robot puts the mask down according to the corner position of the box, achieving high-precision placement of the mask. Afterwards, the gripper module on the unloading robot opens, rises, and exits the boxing mechanism, completing the handover of the mask. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the application state structure of this utility model;

[0019] Figure 2 This is a schematic diagram of the overall structure of this utility model;

[0020] Figure 3 This is a schematic diagram of the layout structure of the linear drive module and the sliding base of this utility model;

[0021] Figure 4 This is a schematic diagram of the layout structure of the gripper module and camera recognition component of this utility model;

[0022] Figure 5 This is a schematic diagram of the overall structure of the gripper module of this utility model.

[0023] In the diagram: 1. Unloading robot; 2. Unloading gripper assembly; 21. Linear drive module; 22. Sliding base; 23. Light shield; 24. Photoelectric switch; 25. Synchronization bracket; 26. Cable chain; 27. Photoelectric sensor; 28. Gripper module; 281. Fixed base; 282. Drive cylinder; 283. Movable clamping block; 284. Fixed clamping block; 285. Micro switch; 286. Spring; 3. Camera recognition assembly; 31. Mounting bracket; 4. Mask; 5. Mask clamping assembly; 6. Observation table. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] Please see Figure 1 This utility model provides a technical solution: a material unloading robot for a large-size mask production line, including a material unloading manipulator 1 for gripping the mask 4. The movable end of the material unloading manipulator 1 is detachably equipped with a material unloading gripper assembly 2. The material unloading gripper assembly 2 includes a linear drive module 21 and two sets of sliding bases 22 driven by the linear drive module 21. The two sets of sliding bases 22 move synchronously towards or away from each other under the drive of the linear drive module 21. Symmetrically arranged on the sliding bases 22 are... The gripper module 28 includes a movable gripper block 283, a fixed gripper block 284, and a micro switch 285 with a spring 286. The distance between the movable gripper block 283 and the fixed gripper block 284 is adjustable. The micro switch 285 detects whether the mask 4 has reached the gripping position by contacting the mask 4 with the spring 286. A camera recognition component 3 is provided on one side of the sliding base 22. The camera recognition component 3 is used to identify the corner features of the mask 4Box to confirm the placement position.

[0026] This invention, through the linear drive module 21 and the sliding base 22, enables the unloading and gripping of mask plates 4 of different sizes, greatly improving the applicability of the entire unloading robot; through the gripper module 28, the distance between the movable gripper block 283 and the fixed gripper block 284 can be adjusted to stably grip mask plates 4 of different thicknesses, ensuring that the entire unloading gripper assembly 2 can stably grip the mask plate 4; through the micro switch 285, when the sliding base 22 drives the gripper module 28 to approach the mask plate 4, the micro switch can activate via a spring. The contact between the 286 and the end face of the mask plate 4 is accurately identified, and the mask plate 4 is brought to the predetermined clamping position. Then, the movable clamping block 283 cooperates with the fixed clamping block 284 to stably clamp the mask plate 4, thereby achieving precise positioning and clamping of the mask plate 4. Through the set camera recognition component 3, the camera recognizes the corner features of the mask plate 4 Box on the boxing mechanism to confirm the placement position. Then, the unloading robot puts down the mask plate according to the corner position of the Box, achieving high-precision placement of the mask plate. Afterwards, the gripper module 28 on the unloading robot opens, rises, and exits the boxing mechanism to complete the handover of the mask plate.

[0027] Reference Figure 2 and 3As shown, in this embodiment, a light-shielding plate 23 is fixedly provided on one side of the sliding base 22, and a number of photoelectric switches 24 are arranged in the vertical direction of the linear drive module 21 to cooperate with the light-shielding plate 23 to position the stroke of the sliding base 22. Through the light-shielding plate 23 and the photoelectric switches 24, the formation of the sliding base 22 can be accurately positioned, ensuring the precise movement of the sliding base 22 and the gripper module 28 on it.

[0028] Reference Figure 3 As shown, in this embodiment, a synchronization bracket 25 is fixedly connected to one side of the sliding base 22. The end of the synchronization bracket 25 away from the sliding base 22 is movably connected to the back of the linear drive module 21 via a drag chain 26. The camera recognition component 3 is fixedly connected to the sliding base 22 via a mounting bracket 31. The synchronization bracket 25 and drag chain 26 further improve the stability of the sliding base 22 during movement, ensuring that the gripper module 28 on the sliding base 22 accurately clamps the mask plate 4.

[0029] Reference Figure 4 As shown, in this embodiment, photoelectric sensors 27 are arranged on both sets of sliding bases 22. The photoelectric sensors 27 are used to sense the mask plate 4 between the gripper modules 28. Through the photoelectric sensors 27, in conjunction with the micro switches 285 arranged on the gripper modules 28, the presence of the mask plate 4 between the gripper modules 28 can be accurately detected. At the same time, when the gripper modules 28 approach the mask plate 4, after accurately identifying that the mask plate 4 is in the preset clamping position, the movable clamping block 283 is activated to cooperate with the fixed clamping block 284 to stably clamp the mask plate 4, thereby achieving precise positioning and clamping of the mask plate 4, so as to cooperate with the unloading robot 1 to accurately and stably unload the clamped mask plate 4.

[0030] In this embodiment, the gripper module 28 further includes a fixed base 281, which is fixedly mounted on the sliding base 22. A drive cylinder 282 is fixedly mounted on one end of the fixed base 281, and a movable clamping block 283 is fixedly connected to the piston end of the drive cylinder 282. A fixed clamping block 284 is fixedly mounted on the end of the fixed base 281 away from the drive cylinder 282, and a micro switch 285 is fixedly mounted on one side of the fixed base 281.

[0031] Reference Figure 5As shown, in this embodiment, the edges of the movable clamping block 283 and the fixed clamping block 284 that are close to each other are both arranged at a 45° angle. After the spring 286 on the micro switch 285 detects that the mask plate 4 is in the defined clamping position, the micro switch 285 activates the drive cylinder 282, which in turn drives the movable clamping block 283 to move, cooperating with the fixed clamping block 284 to clamp the fixed mask plate 4. By using the 45° chamfer on the edges of the fixed clamping block 284 and the movable clamping block 283, if the position of the mask plate 4 deviates slightly during removal, it will slide into the slot from the chamfer, eliminating the risk of edge chipping.

[0032] In this embodiment, an observation platform 6 is arranged around the unloading robot 1, and a mask clamping assembly 5 is arranged on the observation platform 6. The mask clamping assembly 5 is used to clamp and fix the mask 4 transported by the unloading robot 1 so that personnel can observe the surface of the mask 4.

[0033] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, the phrase "comprising an element defined as..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0034] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A blanking robot of a large-size mask line, comprising a blanking manipulator for grabbing a mask, characterized in that: The movable end of the blanking manipulator is detachably provided with a blanking gripper assembly, the blanking gripper assembly comprises a linear drive module and two groups of sliding bases driven by the linear drive module, the two groups of sliding bases are synchronously moved towards or away from each other under the driving of the linear drive module, a gripper module is symmetrically arranged on the sliding base, the gripper module comprises a movable clamping block, a fixed clamping block and a micro switch with a spring piece, the distance between the movable clamping block and the fixed clamping block is adjustable, and the micro switch detects whether the mask plate reaches the clamping position by the resistance of the spring piece to the mask plate.

2. The unloading robot of a large-size mask production line according to claim 1, wherein: An optical shade is fixedly arranged on one side of the sliding base, and a plurality of groups of photoelectric switches are arranged on the linear drive module in the vertical direction, so as to cooperate with the optical shade to position the stroke of the sliding base.

3. The unloading robot of a large mask production line according to claim 2, characterized in that: A synchronous support is fixedly connected to one side of the sliding base, one end of the synchronous support away from the sliding base is movably connected to the back of the linear drive module through a drag chain, and the camera recognition assembly is fixedly connected to the sliding base through a mounting bracket.

4. The unloading robot of a large-size mask plate production line according to claim 1 or 2, characterized in that: Photoelectric sensors are arranged on the two groups of sliding bases, and the photoelectric sensors are used to sense the mask plate between the gripper modules.

5. The unloading robot of a large mask production line according to claim 1, wherein: The gripper module further comprises a fixed base, the fixed base is fixedly arranged on the sliding base, one end of the fixed base is fixedly provided with a driving cylinder, the piston end of the driving cylinder is fixedly connected with the movable clamping block, the end of the fixed base away from the driving cylinder is fixedly provided with the fixed clamping block, and one side of the fixed base is fixedly provided with a micro switch.

6. The unloading robot of a large mask production line according to claim 5, characterized in that: The end faces of the movable clamping block and the fixed clamping block are both arranged with 45° inclination.

7. The unloading robot of a large mask production line according to claim 6, characterized in that: An observation platform is arranged around the blanking manipulator, a mask plate clamping assembly is arranged on the observation platform, and the mask plate clamping assembly is used to clamp and fix the mask plate conveyed by the blanking manipulator, so that personnel can observe the surface of the mask plate.

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