Ash removal device in single crystal furnace vacuum environment

Abstract

The utility model provides an ash removal device in a single crystal furnace vacuum environment. The ash removal device comprises a vacuum pipeline, a vacuum cavity arranged at the right end of the vacuum pipeline, a bracket arranged on the right side of the vacuum cavity, a speed reducing motor fixedly mounted on the right side of the bracket, a stirring rod rotationally mounted in the vacuum pipeline, and stirring blades mounted on the stirring rod. According to the dust removal device in the single crystal furnace vacuum environment, the vacuum cavity, the gear motor, the stirring blades, the sealing piece, the first coupler, the second coupler, the magnetic fluid and other structures are arranged, the gear motor provides power, the power is accurately transmitted to the stirring blades through the couplings, the stirring blades rotate to gather dust so as to facilitate cleaning, and a vacuum pipeline is kept clean; the sealing piece is matched with the magnetic fluid, sealing of the vacuum cavity is guaranteed, external gas is prevented from entering, the vacuum degree is maintained, crystal growth is prevented from being affected, meanwhile, all the components work cooperatively, energy loss and fault risks are reduced, maintenance cost is reduced, and stable and efficient operation of the single crystal furnace is guaranteed.

Description

Technical Field

[0001] This utility model relates to the field of crystal growth equipment technology, and more specifically, to a dust removal device in a vacuum environment of a single crystal furnace. Background Technology

[0002] During the growth of single-crystal semiconductors, a significant amount of volatiles are generated. These volatiles are removed by a vacuum system through pipes. As they pass through the pipes, the temperature decreases, causing them to gradually deposit as solid particles on the pipe walls. Over time, this accumulation can lead to pipe blockages, affecting the vacuum system's pumping performance and causing other problems. Therefore, a dust removal device is needed to continuously clean the solid particles from the pipe walls during the single-crystal silicon growth process, ensuring the pipes remain unobstructed.

[0003] However, existing dust removal devices have the following problems when in use:

[0004] When dealing with dust issues in a vacuum environment, some operators of single crystal furnaces rely solely on simple manual cleaning methods. After the equipment is shut down, they open the relevant components and use tools (such as a single dust collection device) to remove the dust. However, due to the complex internal structure of the vacuum pipes and the inability to directly access the interior during furnace operation, the dust collection device is ineffective. This method is not only extremely inefficient but also has limited cleaning results.

[0005] This invention can continuously clean solid particles from the pipe wall during the silicon single crystal growth process, ensuring the smooth flow of the pipe. Utility Model Content

[0006] The present invention aims to solve the technical problems mentioned in the background art and provide a dust removal device in a vacuum environment of a single crystal furnace.

[0007] To achieve the above objectives, this utility model provides the following technical solution: a dust removal device in a vacuum environment of a single crystal furnace, comprising: a vacuum pipe, an explosion-proof cover plate hinged to the left end of the vacuum pipe, a dust removal cover plate hinged to the upper end of the vacuum pipe, a vacuum chamber provided at the right end of the vacuum pipe, a support provided on the right side of the vacuum chamber, a reduction motor fixedly installed on the right side of the support, a stirring rod rotatably installed inside the vacuum pipe, and stirring blades installed on the stirring rod, a cover plate installed at the top inside the vacuum chamber, a spherical bearing rotatably installed on the inner side of the cover plate, a sealing element fixedly installed inside the vacuum chamber, a coupling one movably connected to the middle of the vacuum chamber, a magnetic fluid fixedly installed at the right end of the coupling one, and a coupling two fixedly installed at the right end of the magnetic fluid.

[0008] A further preferred embodiment: one end of the stirring blade is fixed to the cover plate by a spherical bearing, and the cover plate is fixedly connected to the vacuum pipe.

[0009] A further preferred embodiment: the other end of the stirring blade is fixedly connected to a shaft on the other side of the vacuum pipe, and the spiral conveying blades on the left and right sides of the stirring blade rotate in opposite directions.

[0010] A further preferred embodiment: the shaft end of the stirring blade is fixedly connected to the magnetic fluid via a coupling.

[0011] A further preferred embodiment: the magnetic fluid is fixed on the vacuum chamber, and the entire vacuum chamber is sealed by a sealing element.

[0012] A further preferred embodiment: the other side of the magnetohydrodynamic shaft is fixedly connected to the output end of the geared motor via a second coupling.

[0013] A further preferred embodiment: The geared motor is fixed to the right end of the bracket, and the geared motor is connected to the shaft end of one end of the stirring blade through coupling two, magnetic fluid, and coupling one, and drives the stirring blade to rotate.

[0014] Beneficial effects:

[0015] 1. By setting up stirring blades, coupling one, coupling two, and a geared motor, the geared motor serves as the power source, providing stable and reliable power output for the entire dust removal operation. Coupling one and coupling two can effectively compensate for minor offsets, angular deviations, and axial displacements between shafts during power transmission, ensuring that the power of the geared motor is accurately and efficiently transmitted to the stirring blades, reducing power loss and equipment vibration caused by shaft errors, and improving the stability and reliability of power transmission. After receiving power, the stirring blades begin to rotate, and the spiral conveying blades on its left and right sides, rotating in opposite directions, can push the solid particles deposited near the air inlet in the vacuum pipe towards the center, achieving effective stirring and conveying of dust, keeping the dust in a suspended or loose state, making it easier to be extracted and removed later. This ensures the cleanliness of the vacuum pipe in the single crystal furnace, maintains the stability of the vacuum environment, and thus ensures the normal operation of the single crystal furnace, reduces the risk of dust impurities affecting the crystal growth quality and process, and improves the overall performance and service life of the equipment.

[0016] 2. By incorporating a magnetic fluid and sealing components, the magnetic fluid is fixed to the vacuum chamber and connects the geared motor to the internal components. This not only transmits torque to drive the internal components but also provides a seal in a vacuum environment. In conjunction with the sealing components, it effectively prevents external gases from entering the vacuum chamber, maintains the vacuum level, and avoids the impact of vacuum environment damage on crystal growth. At the same time, good sealing reduces energy loss, ensures long-term stable operation of the equipment, reduces maintenance costs and failure risks, and ensures stable and efficient operation of the single crystal furnace.

[0017] 3. In summary, this dust removal device in the vacuum environment of a single crystal furnace, through the arrangement of a vacuum chamber, a geared motor, stirring blades, seals, coupling one, coupling two, and a magnetic fluid, etc., provides power, which is precisely transmitted to the stirring blades through the couplings. The rotating stirring blades collect dust for cleaning, maintaining the cleanliness of the vacuum pipeline. The seals and the magnetic fluid work together to ensure the sealing of the vacuum chamber, preventing the entry of external gases, maintaining the vacuum level, and avoiding affecting crystal growth. At the same time, the coordinated work of all components reduces energy loss and failure risk, lowers maintenance costs, and ensures the stable and efficient operation of the single crystal furnace. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0019] Figure 2 This is a schematic diagram of the internal structure of this utility model.

[0020] Figure 3 This is a front view structural diagram of the present invention.

[0021] Figure 4 This is a top view of the structure of this utility model.

[0022] Figure 1-4 In the middle: 1. Vacuum pipe; 2. Explosion-proof cover plate; 3. Dust removal cover plate; 4. Vacuum chamber; 5. Support; 6. Gear motor; 7. Stirring blade; 8. Cover plate; 9. Spherical bearing; 10. Seal; 11. Coupling one; 12. Magnetofluid; 13. Coupling two. Detailed Implementation

[0023] The following will refer to the appendix in the embodiments of this utility model. Figures 1-4 The technical solutions in the embodiments of this utility model will be clearly and completely described.

[0024] Please see Figure 1-4In this embodiment of the present invention, a dust removal device in a vacuum environment of a single crystal furnace includes: a vacuum pipe 1, an explosion-proof cover plate 2 hinged to the left end of the vacuum pipe 1, a dust removal cover plate 3 hinged to the upper end of the vacuum pipe 1, a vacuum chamber 4 provided at the right end of the vacuum pipe 1, a bracket 5 provided on the right side of the vacuum chamber 4, a reduction motor 6 fixedly installed on the right side of the bracket 5, a stirring rod rotatably installed inside the vacuum pipe 1, and a stirring blade 7 installed on the stirring rod, a cover plate 8 installed at the top inside the vacuum chamber 4, and a spherical surface rotatably installed on the inner side of the cover plate 8. Bearing 9; a seal 10 is fixedly installed inside the vacuum chamber 4; a coupling 11 is movably connected to the middle of the vacuum chamber 4; a magnetic fluid 12 is fixedly installed at the right end of the coupling 11; and a coupling 2 13 is fixedly installed at the right end of the magnetic fluid 12. When it is necessary to clean the inside of the vacuum pipe 1, first open the cleaning cover 3. Since the cleaning cover 3 is connected to the upper end of the vacuum pipe 1 by a hinge, it can be opened relatively easily, exposing the internal space of the vacuum pipe 1 for subsequent operations. Start the reduction motor 6; the power of the reduction motor 6 is transmitted... The output shaft transmits power through couplings and other components. Specifically, the power is transmitted sequentially to the stirring rod via coupling 2 13, magnetohydrodynamic fluid 12, and coupling 1 11. Because the stirring rod is rotatably installed inside the vacuum pipe 1 and is equipped with stirring blades 7, the stirring rod drives the stirring blades 7 to start rotating. The rotation of the stirring blades 7 stirs up dust and other impurities in the vacuum pipe 1, agitating the dust adhering to the inner wall of the pipe and making it suspended or loose, which facilitates subsequent cleaning. During the stirring process, if flammable gases are generated or there is a risk of explosion, the explosion-proof cover 2 can play a certain protective role. It is connected to the left end of the vacuum pipe 1 by a hinge. In the event of abnormal pressure or other situations that may cause an explosion, the explosion-proof cover 2 can be opened at a certain angle to release some pressure and prevent the explosion from causing serious damage to the equipment. After the dust removal operation is completed, the dust removal cover 3 is closed to restore the relative sealing state of the vacuum pipe 1, preparing for the single crystal furnace to continue working in a vacuum environment. At this time, the entire dust removal device is in standby mode, waiting for the next dust removal requirement.

[0025] In this embodiment of the invention, one end of the stirring blade 7 is fixed to the cover plate 8 via a spherical bearing 9. The cover plate 8 is fixedly connected to the vacuum pipe 1. The other end of the stirring blade 7 is fixedly connected to the shaft on the other side of the vacuum pipe 1. The spiral conveying blades on the left and right sides of the stirring blade 7 rotate in opposite directions. The shaft end of the stirring blade 7 is fixedly connected to the magnetic fluid 12 via a coupling 11. The reduction motor 6 is fixed to the right end of the bracket 5. The reduction motor 6 is connected to the shaft end of the stirring blade 7 via a coupling 13, the magnetic fluid 12, and the coupling 11, and drives the stirring blade 7 to rotate. When it is necessary to start the dust removal device for dust removal, the operator starts the reduction motor. Machine 6, the geared motor 6 starts running, and the power it generates is transmitted to the magnetorheological fluid 12 through coupling 13. After receiving the power, the magnetorheological fluid 12 continues to transmit the power to the shaft end of the stirring blade 7 through coupling 11, causing the stirring blade 7 to start rotating. The magnetorheological fluid 12 here plays a role in sealing and transmitting torque, ensuring that power is transmitted from the motor side to the stirring blade side in a vacuum environment, while preventing gas leakage between the vacuum chamber and the external environment. The stirring blade 7 starts to rotate. Since the spiral conveying blades on the left and right sides of the stirring blade 7 rotate in opposite directions, when rotating, the spiral conveying blades on the left and right sides will generate different airflow and material conveying directions. Inside the vacuum pipe 1, solid particles may continuously enter from the two air inlets. These particles will gradually deposit near the air inlets. During the rotation of the stirring blades 7, the spiral conveying blades on both sides will push the solid particles that begin to deposit at the air inlets towards the center. Because the spiral conveying blades on both sides rotate in opposite directions, they can work together to push the solid particles towards the center. Under the push of the stirring blades 7, the solid particles will be transported to the central exhaust port of the vacuum pipe 1. The pump unit is in a continuous working state, and a suction force will be generated at the central exhaust port. When the solid particles are transported to the central exhaust port, they will be sucked away by the suction force generated by the pump unit, thereby cleaning the solid particles inside the vacuum pipe 1. The purpose is to continuously rotate the stirring blades 7, constantly transporting the solid particles that enter and deposit from the air inlet to the intermediate air extraction port. At the same time, the pump group continuously removes these particles, realizing continuous dust removal operation and maintaining a relatively clean state inside the vacuum pipeline 1 to ensure the normal operation of the single crystal furnace in a vacuum environment. When the dust removal operation is completed or the single crystal furnace operation is finished, the geared motor 6 is turned off, the rotation of the stirring blades 7 is stopped, and the dust removal device enters standby mode, waiting for the next start. After the geared motor 6 is turned off, the vacuum state inside the vacuum pipeline 1 and vacuum chamber 4 can be maintained due to the system's sealing components 10 and other sealing structures. At the same time, the pump group can also be turned off to complete the dust removal operation.

[0026] In this embodiment of the invention, the magnetic fluid 12 is fixed to the vacuum chamber 4, and the entire vacuum chamber 4 is sealed by the sealing element 10. The other side of the shaft end of the magnetic fluid 12 is fixedly connected to the output end of the geared motor 6 through a coupling 2 13. Fixing the magnetic fluid 12 to the vacuum chamber 4 facilitates the transmission of power from the geared motor 6 to the relevant components inside the vacuum chamber 4 through the coupling 2 13. The magnetic fluid 12 acts as a bridge connecting the geared motor 6 and the inside of the vacuum chamber 4, allowing the power generated by the motor to be transmitted to the inside of the vacuum chamber 4, thereby driving the internal components (such as the stirring blade 7) to work. This ensures the integrity of the power transmission link of the entire device. Fixing it to the vacuum chamber 4 provides a stable installation position for the magnetic fluid 12, preventing displacement or shaking during operation and ensuring the stability of its function. Reliability is crucial. During long-term operation, a stable position helps reduce connection failures and component wear caused by component movement, improving the durability of the entire dust removal device. Maintaining a vacuum state is essential in the vacuum environment of a single crystal furnace. The magnetic fluid 12 seals the entire vacuum chamber 4 through the sealing element 10, effectively preventing external gases from entering the vacuum chamber 4 and avoiding disruption of the vacuum environment. This is very important for the normal operation of the single crystal furnace, as disruption of the vacuum environment may affect the quality and process of crystal growth. The sealing structure formed by the sealing element 10 and the magnetic fluid 12 helps reduce the risk of gas leakage. Even with a certain pressure difference in a vacuum environment, a good seal can reduce energy loss and the impact on the system vacuum level caused by gas leakage, ensuring the stability of the system performance.

[0027] Working principle: When it is necessary to clean the inside of vacuum pipe 1, the operator opens the cleaning cover 3. Since the cleaning cover 3 is connected to the upper end of vacuum pipe 1 by a hinge, it can be easily opened, exposing the internal space of vacuum pipe 1, creating conditions for subsequent cleaning operations. The geared motor 6 is started, and it begins to operate as a power source. The power generated by the geared motor 6 is transmitted to the magnetic fluid 12 through coupling 13. The magnetic fluid 12 plays a key role here. It not only transmits power but also has a sealing function, ensuring that power is effectively transmitted from the motor side to the inside of vacuum chamber 4 in a vacuum environment, preventing gas leakage between the vacuum chamber and the external environment. The magnetic fluid 12 receives the power through coupling 1. 1. The signal is transmitted to the shaft end of the stirring rod, which drives the stirring rod to rotate. The stirring rod drives the stirring blades 7 to rotate, and the spiral conveying blades on the stirring blades 7 begin to agitate dust and other impurities inside the vacuum pipe 1. The rotation causes dust adhering to the inner wall of the pipe to be suspended or loosened, increasing the fluidity of the dust and preparing it for subsequent conveying and cleaning. During the stirring process, if flammable gases are generated or there is an explosion risk (e.g., due to dust reacting with other substances), the explosion-proof cover 2 provides protection. It is connected to the left end of the vacuum pipe 1 via a hinge. In case of abnormal pressure that may trigger an explosion, the explosion-proof cover 2 can be opened at a certain angle to release some pressure and prevent serious damage to the equipment from an explosion. The spiral conveying blades on both sides of blade 7, rotating in opposite directions, begin to operate. Inside the vacuum pipe 1, solid particles continuously enter from the two air inlets and deposit near them. As the stirring blade 7 rotates, the spiral conveying blades on both sides generate different airflow and material conveying directions due to their different rotation directions. The spiral conveying blades on both sides work together to push the solid particles depositing at the air inlets towards the center. This utilizes the characteristics of spiral conveying blades, which can transport particles from both sides to the center. When the solid particles are pushed by the spiral conveying blades of the stirring blade 7 to the central exhaust port of the vacuum pipe 1, the pump unit operates continuously, generating suction at the central exhaust port. The solid particles are sucked away by the pump unit's suction force, thus... The system effectively cleans solid particles from the vacuum pipe 1, maintaining a relatively clean environment. The geared motor 6 continuously drives the stirring blades 7 to rotate, which in turn continuously stirs and transports the solid particles. The pump unit continuously removes the particles, thus achieving continuous dust removal. This continuous dust removal effectively prevents the accumulation of particles in the vacuum pipe 1, ensuring the single crystal furnace operates normally in a vacuum environment. When the dust removal operation is completed or the single crystal furnace operation is finished, the operator turns off the geared motor 6. After the geared motor 6 stops rotating, the stirring blades 7 also stop, and the dust removal device enters standby mode. At the same time, due to the presence of the seals 10 and other sealing structures in the system, the vacuum state in the vacuum pipe 1 and vacuum chamber 4 is maintained.

Claims

1. A dust cleaning device in a vacuum environment of a single crystal furnace, comprising: Vacuum pipeline (1), characterized in that: the left end of the vacuum pipeline (1) is hinged with an explosion-proof cover plate (2), the upper end of the vacuum pipeline (1) is hinged with a dust removal cover plate (3), the right end of the vacuum pipeline (1) is provided with a vacuum cavity (4), the right side of the vacuum cavity (4) is provided with a support (5), the right side of the support (5) is fixedly installed with a speed reducer motor (6), the inside of the vacuum pipeline (1) is rotatably installed with a stirring rod, and the stirring rod is installed with stirring blades (7), the inside of the vacuum cavity (4) is installed with a cover plate (8), the inside of the cover plate (8) is rotatably installed with a spherical bearing (9), the inside of the vacuum cavity (4) is fixedly installed with a sealing element (10), the inside of the vacuum cavity (4) is movably connected with a shaft coupling (11), the right end of the shaft coupling (11) is fixedly installed with a magnetic fluid (12), and the right end of the magnetic fluid (12) is fixedly installed with a shaft coupling (13).

2. The ash removal device in a single crystal furnace vacuum environment according to claim 1, characterized in that: One end of the stirring blade (7) is fixed on the cover plate (8) through the spherical bearing (9), and the cover plate (8) is fixedly connected with the vacuum pipeline (1).

3. The ash removal device in a single crystal furnace vacuum environment according to claim 2, characterized in that: The other end of the stirring blade (7) is fixedly connected with the shaft on the other side of the vacuum pipeline (1), and the spiral conveying blades on the left and right sides of the stirring blade (7) rotate in opposite directions.

4. The ash removal device in a single crystal furnace vacuum environment according to claim 1, characterized in that: The shaft end of the stirring blade (7) is fixedly connected with the magnetic fluid (12) through the shaft coupling (11).

5. The ash removal device in a single crystal furnace vacuum environment according to claim 1, characterized in that: The magnetic fluid (12) is fixed on the vacuum cavity (4), and the entire vacuum cavity (4) is sealed by the sealing element (10).

6. The ash removal device in a single crystal furnace vacuum environment according to claim 5, characterized in that: The other side of the shaft end of the magnetic fluid (12) is fixedly connected with the output end of the speed reducer motor (6) through the shaft coupling (13).

7. The ash removal device in a single crystal furnace vacuum environment according to claim 1, characterized in that: The speed reducer motor (6) is fixed on the right end of the support (5), and the speed reducer motor (6) is fixedly connected with one end of the shaft of the stirring blade (7) through the shaft coupling (13), the magnetic fluid (12) and the shaft coupling (11), and drives the stirring blade (7) to rotate.

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