Temperature control system and test equipment

Abstract

The utility model belongs to the technical field of semiconductor testing, and discloses a temperature control system and testing equipment. The temperature control system comprises a compressor, a condenser and a temperature control pressure head which are sequentially communicated to form a closed refrigerating loop; the temperature control pressure head comprises a flow guide part, a jet flow part and an evaporation heat exchange part which are communicated in sequence; the flow guide part is used for guiding the liquid refrigerant into the jet flow part; the jet flow part comprises a throttling hole and is used for throttling and expanding a liquid refrigerant into a two-phase refrigerant and jetting the two-phase refrigerant into the evaporation heat exchange part; the evaporation heat exchange part is used for controlling the temperature of the to-be-tested element; the temperature control pressure head is provided with an air outlet and a liquid outlet; the air outlet communicates with an inlet of the compressor through the partial refrigerating loop. The liquid outlet communicates with the temperature control pressure head or the first pipeline through a bypass branch, and the first pipeline is a part of refrigerating loop between an outlet of the compressor and an inlet of the temperature control pressure head. When the temperature control system is used, the distance between the refrigerant and the to-be-tested element is reduced, so that the thermal resistance of the whole temperature control system is reduced, and the overshoot value of the temperature of the to-be-tested element is reduced.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor testing technology, and in particular to temperature control systems and testing equipment. Background Technology

[0002] In semiconductor testing, temperature control accuracy has a direct impact on test results. Therefore, a dedicated temperature control system is needed to form an efficient heat exchange with the semiconductor components waiting to be tested, so as to ensure that they can remain stably within the target temperature range.

[0003] In existing technologies, temperature control systems include a heat exchanger and a pressure head. The heat exchanger has a flow channel for refrigerant, and the heat exchanger is in contact with the pressure head, which in turn is in contact with the element under test. As the refrigerant flows within the flow channel, it exchanges heat with the pressure head, which in turn exchanges heat with the element under test, thereby achieving temperature control of the element under test.

[0004] During the heat exchange process, the amount of heat exchanged between the refrigerant and the pressure head will affect the upper limit of the power of the component under test that can be compressed, while the gap between the flow channel and the component under test will affect the thermal resistance between them, and the thermal resistance will affect the overshoot value of the temperature of the component under test.

[0005] However, during the heat exchange process described above, the refrigerant has difficulty making sufficient contact with the pressure head, resulting in a low upper limit for the heat exchange between the refrigerant and the pressure head. Consequently, the upper limit of the chip power that the refrigerant can suppress is also small. Furthermore, the flow channel and the device under test are separated by the pressure head, which itself has multiple structures such as an adapter plate and a supplementary heat source. The thermal resistance between the two is relatively large, resulting in a large overshoot value of the temperature of the device under test. Utility Model Content

[0006] The purpose of this invention is to provide a temperature control system and testing equipment, which solves the problem that the upper limit of heat exchange is low in the prior art, resulting in a small upper limit of chip power that can be suppressed. At the same time, it solves the problem that the thermal resistance between the flow channel and the device under test is large, resulting in a large overshoot value of the device under test.

[0007] To achieve this objective, the present invention adopts the following technical solution:

[0008] In a first aspect, this application provides a temperature control system, which includes a compressor, a condenser and a temperature control head connected in sequence to form a closed refrigeration circuit;

[0009] The temperature control head includes a flow guide section, a jet section, and an evaporation heat exchange section connected in sequence; the flow guide section is used to guide the liquid refrigerant output from the condenser into the jet section; the jet section includes a throttling orifice with a reduced aperture, used to throttle and expand the liquid refrigerant into a two-phase refrigerant, and jet it into the evaporation heat exchange section for evaporation heat exchange; the evaporation heat exchange section is used to control the temperature of the element under test;

[0010] The temperature control head also includes an air outlet and a liquid outlet connected to the evaporation heat exchange section; the air outlet is connected to the compressor inlet through a portion of the refrigeration circuit; the liquid outlet is connected to the temperature control head or a first pipeline through a bypass branch, the first pipeline being a portion of the refrigeration circuit between the compressor outlet and the temperature control head inlet.

[0011] Optionally, the bypass branch connects the liquid outlet of the evaporation heat exchange section to the first pipeline, and is used to guide the liquid refrigerant output from the liquid outlet into the first pipeline.

[0012] Optionally, the bypass branch connects the liquid outlet of the evaporation heat exchange section to the jet section, and is used to guide the liquid refrigerant output from the liquid outlet to the jet section for re-throttling expansion and jetting.

[0013] Optionally, the temperature control system further includes:

[0014] The heat exchanger is used to thermally couple the first pipeline and the bypass branch.

[0015] Optionally, the jet section is provided with an ejector hole that communicates with the throttling orifice, the ejector hole being used to introduce refrigerant into the throttling orifice; the bypass branch connects the liquid outlet of the evaporation heat exchange section to the ejector hole.

[0016] Optionally, the throttling orifice includes, in sequence along the refrigerant flow direction, a large-diameter section, a variable-diameter section, and a small-diameter section, and the ejector orifice is connected to the variable-diameter section.

[0017] Optionally, the flow guide has an inlet on one side and multiple branch outlets on the other side. The flow guide has multiple liquid distribution channels, which connect the inlet and the branch outlets to uniformly guide the refrigerant to the multiple branch outlets. The jet section is located on the side of the flow guide with the branch outlets, and each branch outlet is connected to a throttling orifice.

[0018] Optionally, the jet section has an exhaust passage communicating with the air outlet, and the exhaust passage connects the air outlet to the compressor inlet.

[0019] Optionally, the evaporative heat exchanger includes:

[0020] A heat exchange block is attached to the jet section to receive the refrigerant that flows out of the throttling orifice at an accelerated rate;

[0021] The heat exchange frame has a receiving cavity for accommodating the heat exchange block, and the liquid outlet is opened in the heat exchange frame. The liquid outlet is provided with a drain pipe communicating with the receiving cavity.

[0022] Secondly, this application also provides testing equipment, which includes:

[0023] Test platform;

[0024] The temperature control system as described in any one of the first aspects is disposed on the test platform and used to regulate the temperature of the component under test.

[0025] The beneficial effects of this utility model are:

[0026] The refrigerant is introduced into the guide section through the inlet and evenly guided into the throttling orifice of the jet section. As it passes through the reduced-diameter throttling orifice, the refrigerant velocity increases, impacting the evaporative heat exchange section. During this impact, the refrigerant contacts the evaporative heat exchange section and exchanges heat with it. The evaporative heat exchange section then exchanges heat with the element under test, thereby controlling the temperature of the element. After heat exchange, the gaseous refrigerant is discharged through the outlet and flows back into the refrigeration circuit. It then flows along the refrigeration circuit into the compressor inlet, where it is processed by the compressor and condenser, becoming a low-temperature liquid refrigerant again. The saturated liquid refrigerant flows out through the liquid outlet and enters either the temperature control head or the first pipeline for recycling. When this temperature control system is in use, the flow guide can accelerate the flow of refrigerant to the evaporation heat exchange section, thereby ensuring full contact between the refrigerant and the evaporation heat exchange section, increasing the upper limit of heat exchange between the refrigerant and the evaporation heat exchange section, and thus ensuring that the test element can have a highly efficient temperature control effect. The test element can then be tested within a larger power range to meet the test requirements. Furthermore, the direct contact between the evaporation heat exchange section and the test element reduces the distance between the refrigerant and the test element, thereby reducing the thermal resistance of the overall temperature control system and helping to reduce the overshoot value of the test element's temperature. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the structure in which the outlet of the temperature control head in the temperature control system of this utility model is connected to the first pipeline through a bypass branch;

[0028] Figure 2 This is a schematic diagram of the structure in which the outlet of the temperature control head in the temperature control system of this utility model is connected to the throttling orifice through a bypass branch;

[0029] Figure 3 This is a schematic diagram of the temperature control head in the temperature control system of this utility model embodiment;

[0030] Figure 4 This is an exploded structural diagram of the temperature control head in the temperature control system of this utility model embodiment;

[0031] Figure 5 This is a first structural cross-sectional view of the temperature control head in the temperature control system of this utility model embodiment;

[0032] Figure 6This is a schematic diagram of the structure of the temperature control system in this utility model when the throttling cylinder does not have an ejector hole;

[0033] Figure 7 This is a cross-sectional view of the structure of the temperature control system in this utility model embodiment when the throttling cylinder does not have an ejector hole;

[0034] Figure 8 This is a schematic diagram of the structure of the throttling cylinder with an ejector hole in the temperature control system of this utility model embodiment;

[0035] Figure 9 This is a cross-sectional view of the structure of the throttling cylinder with an ejector hole in the temperature control system of this utility model embodiment;

[0036] Figure 10 This is a schematic diagram of the internal structure of the jet section in the temperature control system of this utility model embodiment;

[0037] Figure 11 This is a cross-sectional view of the jet section in the temperature control system of this utility model embodiment;

[0038] Figure 12 This is a second structural cross-sectional view of the temperature control head in the temperature control system of this utility model embodiment;

[0039] Figure 13 This is a schematic diagram of the flow divider in the flow control system of the present invention.

[0040] Figure 14 This is a schematic diagram of the liquid distribution channel of the guide section in the temperature control system of this utility model embodiment.

[0041] In the picture:

[0042] 10. Compressor; 20. Condenser; 30. Temperature control head; 40. Bypass branch; 401. First control valve; 402. Second control valve; 50. First pipeline; 60. Heat exchanger;

[0043] 1. Diversion section; 11. Inlet; 12. Diversion outlet; 13. Main flow path; 14. Diversion path; 15. Primary diversion branch; 16. Secondary diversion branch;

[0044] 2. Jet section; 21. Throttling orifice; 211. Large diameter section; 212. Variable diameter section; 213. Small diameter section; 22. Insulation block; 23. Throttling cylinder; 24. Injection hole; 25. Air outlet; 26. Exhaust channel;

[0045] 3. Evaporation heat exchange section; 31. Heat exchange block; 32. Heat exchange frame; 321. Receiving cavity; 33. Drain pipe; 34. Heating fins; 341. Assembly cavity. Detailed Implementation

[0046] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.

[0047] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0048] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0049] In the description of this embodiment, the terms "upper," "lower," "left," and "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0050] This application provides a temperature control system and testing equipment.

[0051] Reference Figures 1 to 5The temperature control system includes a compressor 10, a condenser 20, and a temperature control head 30, which are connected in sequence to form a closed refrigeration circuit. The temperature control head 30 includes a guide section 1, a jet section 2, and an evaporation heat exchange section 3, which are connected in sequence. The guide section 1 is used to guide the liquid refrigerant output from the condenser 20 into the jet section 2. The jet section 2 includes a throttling orifice 21 with a reduced aperture, which is used to throttle and expand the liquid refrigerant into a two-phase refrigerant and jet it into the evaporation heat exchange section 3 for evaporation heat exchange. The evaporation heat exchange section 3 is used to control the temperature of the element under test. The temperature control head 30 also includes an outlet 25 and a liquid outlet connected to the evaporation heat exchange section 3. The outlet 25 is connected to the inlet of the compressor 10 through a part of the refrigeration circuit. The liquid outlet is connected to the temperature control head 30 or a first pipeline 50 through a bypass branch 40. The first pipeline 50 is a part of the refrigeration circuit between the outlet of the compressor 10 and the inlet of the temperature control head 30.

[0052] Specifically, the compressor 10 and the condenser 20 are connected in sequence and connected to the temperature control head 30 through a pipe to form a refrigeration circuit. The compressor 10 and the condenser 20 work together to generate low-temperature liquid refrigerant. The refrigerant can flow into the inlet 11 of the guide section 1 of the temperature control head 30 along the refrigeration circuit. The guide section 1 has multiple flow channels that are connected to the inlet 11. The multiple flow channels are evenly distributed along the circumference of the guide section 1 so that the refrigerant can flow evenly into the multiple flow channels.

[0053] The jet section 2 includes an insulation block 22 with multiple through holes. Each through hole contains a throttling cylinder 23, and a throttling orifice 21 is disposed through the throttling cylinder 23. Each throttling orifice 21 is connected to the flow channel of the guide fluid to introduce refrigerant into the throttling orifice 21. When the refrigerant enters the throttling orifice 21 with a changed orifice diameter, the pressure changes, causing the refrigerant to expand and become a two-phase mixture of gas and liquid. The orifice diameter of the throttling orifice 21 decreases, increasing the refrigerant flow velocity to impact the evaporation heat exchange section 3. Since the jet section 2 in this application has both the functions of jetting refrigerant and throttling expansion, the temperature control head 30 in this application can replace the traditional solution of placing the throttling valve externally in the refrigeration circuit. The throttling function (achieved through the jet section 2 of the temperature control head 30) and the evaporation heat exchange function (achieved through the evaporation heat exchange section 3 of the temperature control head 30) are integrated inside the temperature control head 30, thereby improving the heat exchange efficiency. It should be understood that the throttling cylinder 23 can be detachably connected to the insulation block 22 to facilitate the replacement of throttling cylinders 23 with different orifice diameters, while the insulation block 22 is made of a material with a good thermal insulation coefficient to ensure that the heat exchange efficiency of the refrigerant is low during the flow process.

[0054] The evaporative heat exchange section 3 can be made of a material with high thermal conductivity, such as aluminum alloy. The bottom of the evaporative heat exchange section 3 directly presses against the element under test to form efficient heat exchange with the element under test. After heat exchange, the refrigerant will form a two-phase state of gas and liquid. The gaseous refrigerant is generated from the liquid refrigerant during heat exchange. The gaseous refrigerant can be discharged from the temperature control head 30 through the outlet 25 and flow back into the refrigeration circuit. It flows into the inlet of the compressor 10 along the refrigeration circuit and is processed by the compressor 10 and condenser 20 to become low-temperature liquid refrigerant again. The liquid refrigerant that comes into contact with the evaporative heat exchange section 3 becomes saturated liquid refrigerant, and its temperature rises. This part of the liquid refrigerant is discharged through the liquid outlet. The bypass branch 40 can guide it into the throttling orifice 21 of the temperature control head 30 to regulate the temperature of the newly entering liquid refrigerant. Alternatively, it can be recycled by entering the first pipeline 50. Specifically, the gas outlet 25 and the liquid outlet can both be set on the evaporation heat exchange section 3, or they can be set on the jet section 2 and the steam heat exchange section respectively, and the gas outlet 25 is set above the liquid outlet so that the gaseous refrigerant and the liquid refrigerant are discharged from different pipes respectively.

[0055] Refrigerant is introduced into the guide section 1 through inlet 11 and uniformly guided into the throttling orifice 21 of the jet section 2. As the refrigerant passes through the reduced-diameter throttling orifice 21, its flow velocity increases, impacting the evaporation heat exchange section 3. During this impact, the refrigerant contacts the evaporation heat exchange section 3, forming a heat exchange. The evaporation heat exchange section 3 then exchanges heat with the element under test, thereby controlling the temperature of the element. After heat exchange, the gaseous refrigerant is discharged through outlet 25 and flows back into the refrigeration circuit. It flows along the refrigeration circuit into the inlet of compressor 10, where it is processed by compressor 10 and condenser 20, becoming a low-temperature liquid refrigerant again. The saturated liquid refrigerant flows out through the liquid outlet and enters the temperature control head 30 or the first pipeline 50 for recycling. When this temperature control system is in use, the flow guide 1 enables the refrigerant to flow faster to the evaporation heat exchange section 3, thereby ensuring full contact between the refrigerant and the evaporation heat exchange section 3, increasing the upper limit of heat exchange between the refrigerant and the evaporation heat exchange section 3, thus ensuring that the component under test can have a highly efficient temperature control effect. The component under test can then be tested within a larger power range to meet the test requirements. Furthermore, the direct contact between the evaporation heat exchange section 3 and the component under test reduces the distance between the refrigerant and the component under test, thereby reducing the thermal resistance of the overall temperature control system and helping to reduce the overshoot value of the temperature of the component under test.

[0056] Reference Figure 1 , Figure 6 and Figure 7 Optionally, in one embodiment, the bypass branch 40 connects the liquid outlet of the evaporation heat exchange section 3 to the first pipeline 50, for guiding the liquid refrigerant output from the liquid outlet into the first pipeline 50.

[0057] Specifically, a three-way valve is installed at the outlet of compressor 10, with one outlet connected to bypass branch 40 and the other outlet connected to the first pipeline 50. A first control valve 401 is installed on bypass branch 40 to control the opening and closing of bypass branch 40. This allows the saturated liquid refrigerant to no longer pass through compressor 10, but instead mix with the superheated vapor at the outlet of compressor 10, thereby reducing the outlet temperature of compressor 10 and also reducing the operating power of compressor 10, thus improving energy efficiency. At this time, only a throttling orifice 21 needs to be installed in the jet section 2.

[0058] Reference Figure 2 , Figure 8 and Figure 9 Optionally, in another embodiment, the bypass branch 40 connects the liquid outlet of the evaporation heat exchange section 3 with the jet section 2, and is used to guide the liquid refrigerant output from the liquid outlet to the jet section 2 for re-throttling expansion and jetting.

[0059] Specifically, one end of the bypass branch 40 is connected to the liquid outlet, and a channel connected to the throttling orifice 21 is opened on the side wall of the jet section 2. The other end of the bypass branch 40 is connected to the outlet of the compressor 10 and then to the channel, so that the saturated liquid refrigerant flows through the bypass branch 40 and through the first pipeline 50 before flowing into the throttling orifice 21. It can mix with the low-temperature liquid refrigerant in the throttling orifice 21, thereby adjusting the temperature of the refrigerant in the throttling orifice 21 and controlling the heat exchange efficiency at the evaporation heat exchange section 3. A first control valve 401 and a second control valve 402 are sequentially installed on the bypass branch 40. Both the first control valve 401 and the second control valve 402 can be solenoid valves. By regulating the first control valve 401 and the second control valve 402, it can be ensured that the refrigerant entering the throttling orifice 21 remains in a gaseous state after heat exchange in the first pipeline 50, and the flow rate of the gaseous refrigerant can be controlled, thereby controlling the dryness value of the refrigerant to achieve the effect of adjusting the enthalpy value of the refrigerant, and thus making the overall heat exchange effect adjustable.

[0060] Optionally, the temperature control system also includes a heat exchanger 60, through which the first pipe 50 and the bypass branch 40 are thermally coupled.

[0061] Specifically, a heat exchanger 60 is installed in the first pipeline 50 near the outlet of the compressor 10. A bypass pipeline is connected to the heat exchanger 60, which allows saturated liquid refrigerant to be guided into the heat exchanger 60 for heat exchange, raising the temperature of the liquid refrigerant to a specific temperature higher than the refrigerant temperature at the outlet of the condenser 20. The liquid refrigerant after heat exchange in the heat exchanger 60 then enters the throttling orifice 21 and mixes with the refrigerant flowing in from the guide section 1, thereby controlling the enthalpy of the refrigerant in the throttling orifice 21 and further improving the heat exchange effect between the refrigerant and the evaporative heat exchanger 60. Moreover, the mixing of the two temperatures of refrigerant in the throttling orifice 21 increases the flow rate of the refrigerant, which on the one hand facilitates rapid mixing for precise control of the enthalpy, and on the other hand allows the controlled refrigerant to quickly exchange heat with the evaporative heat exchange section 3, reducing the heat loss of the refrigerant and further improving the heat exchange effect.

[0062] Optionally, the jet section 2 is provided with an ejector hole 24 that communicates with the throttling orifice 21. The ejector hole 24 is used to introduce refrigerant into the throttling orifice 21. The bypass branch 40 connects the liquid outlet of the evaporation heat exchange section 3 with the ejector hole 24.

[0063] Specifically, an ejector hole 24 is opened on the side of the jet section 2, and an ejector hole 24 is opened for each throttling orifice 21. The ejector hole 24 is located on the side of the jet section 2 close to the evaporator heat exchanger 60, and the axis of the ejector hole 24 can be perpendicular to the axis of the throttling orifice 21, so that the two refrigerants at different temperatures can form an impact in the throttling orifice 21, thereby improving the mixing effect and thus improving the enthalpy control effect of the refrigerant.

[0064] Optionally, the throttling orifice 21 includes, in sequence along the refrigerant flow direction, a large-diameter section 211, a variable-diameter section 212, and a small-diameter section 213, and the ejector orifice 24 is connected to the variable-diameter section 212.

[0065] Specifically, the diameter of the throttling orifice 21 decreases from the side near the flow guide 1 to the side near the evaporation heat exchange section 3, and is specifically divided into a large diameter section 211, a variable diameter section 212, and a small diameter section 213. The diameters of the large diameter section 211 and the small diameter section 213 do not change gradually, but the diameter of the large diameter section 211 is larger than that of the small diameter section 213, and the diameter of the large diameter section 211 is also larger than the diameter of the flow channel inside the flow guide 1. Therefore, the refrigerant can expand when it enters the large diameter section 211. The diameter of the variable diameter section 212 gradually decreases from the diameter of the large diameter section 211 to the diameter of the small diameter section 213, so as to increase the flow velocity of the expanded refrigerant. During this process, the refrigerant guided by the ejector hole 24 is introduced into the throttling hole 21 and mixes fully with the refrigerant entering the throttling hole 21 from the guide section 1 to complete the enthalpy control. After the enthalpy control, it enters the small diameter section 213 to maintain a stable flow velocity and contact the evaporation heat exchange section 3 for heat exchange.

[0066] By sequentially setting the throttling orifice 21 to a large-diameter section 211, a variable-diameter section 212, and a small-diameter section 213, the refrigerant can expand accordingly, and the flow rate of the refrigerant can be increased while fully mixing with the refrigerant in the throttling orifice 21 to regulate the enthalpy value. Then, the small-diameter section 213 is used to ensure that the temperature-regulated refrigerant flows evenly to the evaporation heat exchange section 3, thereby ensuring that the heat exchange effect meets expectations.

[0067] Reference Figures 10 to 11 Optionally, the jet section 2 has an exhaust passage 26 that communicates with the outlet 25, and the exhaust passage 26 connects the outlet 25 with the inlet of the compressor 10.

[0068] Specifically, a curved exhaust channel 26, such as a figure-7 shape, is provided inside the insulation block 22. The lower end of the channel opens directly opposite the evaporation heat exchange section 3, while the other end serves as the exhaust port 25. The opening near the evaporation heat exchange section 3 is funnel-shaped to allow steam to flow rapidly upward to the exhaust port 25. The steam flowing out of the exhaust port 25 can be retained and processed by the compressor 10 for recycling.

[0069] Optionally, the evaporative heat exchange section 3 includes a heat exchange block 31 and a heat exchange frame 32. The heat exchange block 31 is in contact with the jet section 2 to receive the refrigerant that flows out accelerated from the throttling orifice 21; the heat exchange frame 32 has a receiving cavity 321 for accommodating the heat exchange block 31, and a liquid outlet is opened in the heat exchange frame 32, and the liquid outlet is provided with a drain pipe 33 communicating with the receiving cavity 321.

[0070] Specifically, the heat exchange block 31 can be made of porous copper, with an external heat exchange frame 32. The heat exchange frame 32 is also made of a material with high thermal conductivity. A receiving cavity 321 is formed inside the heat exchange frame 32, and the size of the receiving cavity 321 is adapted to the size of the heat exchange block 31 so that the heat exchange block 31 can be completely embedded in the receiving cavity 321. Multiple liquid outlet channels are provided on the side of the heat exchange frame 32, and the openings of the liquid outlet channels communicating with the outside serve as liquid outlets. A drain pipe 33 is provided at the liquid outlet so that saturated liquid refrigerant can flow out through the liquid outlet. In this embodiment, two liquid outlets can be opened on each of the opposite sides of the heat exchange frame 32. A heating plate 34 is provided on the lower side of the heat exchange frame 32, and an assembly cavity 341 is formed inside the heating plate 34. The component to be tested is placed in the assembly cavity 341, and the heat exchange frame 32 completely closes the assembly cavity 341.

[0071] By setting up a heat exchange block and heat exchange frame 32, the refrigerant can directly contact the heat exchange block 31, and the liquid refrigerant can further flow into the receiving cavity 321 and then flow out through the liquid outlet. Before flowing out, it can fully contact the heat exchange frame 32, thereby improving the heat exchange effect. The heating plate 34 can be heated as needed to adjust the temperature control accuracy.

[0072] Reference Figure 12and Figure 13 Optionally, the top wall of the flow guide 1 has an inlet 11, and the bottom wall has multiple branch outlets 12. The bottom wall is sealed to the top wall of the jet section 2, and each branch outlet 12 is connected to a throttling orifice 21. The flow guide 1 has multiple liquid distribution channels that connect the inlet 11 to the branch outlets 12 to uniformly guide the refrigerant to the multiple branch outlets 12. The horizontal projection shape of the liquid distribution channels is symmetrical, and the multiple branch outlets 12 are evenly distributed along the liquid distribution channels.

[0073] Specifically, the liquid distribution channel includes a main channel 13 connected to the inlet 11, with branch channels 14 at both ends of the main channel 13. The main channel 13 and the branch channels 14 form an H-shape in horizontal projection. Each end of the branch channel 14 is provided with a primary branch 15. The branch channel 14 and the two primary branch channels 15 form an H-shape in horizontal projection. Each end of the primary branch channel 15 is provided with a secondary branch channel 16. The primary branch channel 15 and the two secondary branch channels 16 form an H-shape in horizontal projection. Each end of the secondary branch channel 16 is provided with a branch port 12.

[0074] By arranging the liquid distribution channels into multiple H-shaped channels, the resistance of the refrigerant is the same when flowing to each liquid distribution port, thereby ensuring that the refrigerant flowing out of each distribution port 12 is uniform. This allows the refrigerant to make effective contact with each position of the steam heat exchange section, thereby further improving the heat exchange effect.

[0075] The testing equipment includes a testing platform and the temperature control system described in the above embodiments. The temperature control system is located on the testing platform and is used to regulate the temperature of the component under test.

[0076] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A temperature control system, characterized by, The compressor (10), the condenser (20) and the temperature control pressure head (30) are sequentially connected to form a closed refrigeration circuit; The temperature control pressure head (30) comprises a flow guide part (1), a jet part (2) and an evaporation heat exchange part (3) which are sequentially connected; the flow guide part (1) is used for guiding the liquid refrigerant output by the condenser (20) into the jet part (2); the jet part (2) comprises a throttling hole (21) with a decreasing diameter, which is used for throttling and expanding the liquid refrigerant into two-phase refrigerant and jetting into the evaporation heat exchange part (3) for evaporation heat exchange; and the evaporation heat exchange part (3) is used for temperature control of a test element. The temperature control pressure head (30) further comprises a gas outlet (25) and a liquid outlet which are in communication with the evaporation heat exchange part (3); the gas outlet (25) is connected to the inlet of the compressor (10) through part of the refrigeration circuit; and the liquid outlet is connected to the temperature control pressure head (30) or a first pipeline (50) through a bypass branch (40), and the first pipeline (50) is part of the refrigeration circuit between the outlet of the compressor (10) and the inlet of the temperature control pressure head (30).

2. The temperature control system of claim 1, wherein, The bypass branch (40) connects the liquid outlet of the evaporation heat exchange part (3) with the first pipeline (50), and is used for guiding the liquid refrigerant output by the liquid outlet into the first pipeline (50).

3. The temperature control system of claim 1, wherein, The bypass branch (40) connects the liquid outlet of the evaporation heat exchange part (3) with the jet part (2), and is used for guiding the liquid refrigerant output by the liquid outlet into the jet part (2) for re-throttling expansion and jetting.

4. The temperature control system of claim 3, wherein, The temperature control system further comprises: A heat exchanger (60) is used for thermally coupling the first pipeline (50) and the bypass branch (40).

5. The temperature control system of claim 3, wherein, The jet part (2) is provided with an injection hole (24) which is in communication with the throttling hole (21) and is used for injecting refrigerant into the throttling hole (21); and the bypass branch (40) connects the liquid outlet of the evaporation heat exchange part (3) with the injection hole (24).

6. The temperature control system of claim 5, wherein, The throttling hole (21) comprises a large-diameter section (211), a variable-diameter section (212) and a small-diameter section (213) which are sequentially connected in the direction of refrigerant flow; and the injection hole (24) is in communication with the variable-diameter section (212).

7. The temperature-controlled system of claim 1, wherein, The flow guide part (1) is provided with an inlet (11) on one side and a plurality of shunt ports (12) on the other side; the flow guide part (1) has a plurality of liquid distribution channels which are respectively in communication with the inlet (11) and the shunt ports (12) to uniformly guide the refrigerant into the plurality of shunt ports (12); and the jet part (2) is arranged on the side of the flow guide part (1) provided with the shunt ports (12), and each shunt port (12) is in communication with one throttling hole (21).

8. The temperature control system of claim 1, wherein, The jet part (2) has an exhaust passage (26) which is in communication with the gas outlet (25) and connects the gas outlet (25) with the inlet of the compressor (10).

9. The temperature control system of claim 1, wherein, The evaporation heat exchange part (3) comprises: A heat exchange block (31) is attached to the jet flow portion (2) to receive the refrigerant accelerated from the throttling hole (21); A heat exchange frame (32) has a receiving cavity (321) for receiving the heat exchange block (31), and the liquid outlet is formed in the heat exchange frame (32) and is provided with a liquid discharge pipe (33) in communication with the receiving cavity (321).

10. Test apparatus, characterized in that Comprise: A test platform; The temperature control system according to any one of claims 1 to 9 is arranged on the test platform and is used to regulate the temperature of the element to be tested.

Images