Sand paving uniformity detection device and sand paving device

Abstract

The utility model discloses a sand paving uniformity detection device and a sand paving device, and relates to the technical field of semiconductors, the sand paving uniformity detection device comprises a machine base, a mold, a driving part, a scraper assembly and a monitoring assembly; the mold is rotationally mounted on the machine base along an up-down axis, and is provided with a containing groove for containing quartz sand; the driving part is arranged on the machine base, the driving part is movably arranged above the mold, the driving part has at least two degrees of freedom, and the driving part is provided with a first mounting surface and a second mounting surface which are adjacent to each other; the scraper assembly is arranged on the first mounting surface, and comprises at least one scraper used for scraping the quartz sand; the monitoring assembly comprises a monitoring piece, and the monitoring piece is fixedly arranged on the second mounting surface, faces the accommodating groove and is used for measuring the surface uniformity of the quartz sand; according to the technical scheme provided by the utility model, the accuracy of sand laying detection can be improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a sand spreading uniformity detection device and a sand spreading device. Background Technology

[0002] Sanding is a common operation in high-temperature processes (such as the semiconductor or photovoltaic industry). It is mainly used to protect the crucible and optimize the crystallization process of molten materials. Specifically, a layer of quartz sand with specific particles is laid on the inner wall or bottom of the crucible. It is usually used as a protective layer or process auxiliary layer. For example, at high temperatures, molten silicon is prone to react with the inner wall of the crucible. Sanding as a protective layer can reduce direct contact and avoid silicon material sticking and crucible damage.

[0003] Uniformity testing is a crucial step in the semiconductor and solar energy industries. It is used to detect the uniformity of high-purity quartz sand in a rotating mold during the manufacture of quartz crucibles, ensuring the production quality of the quartz crucibles and production safety. However, the relevant technologies rely on manual measurement of the sand layer thickness using probes or micrometers, which depends on the operator's skill and experience, resulting in significant uncertainties and errors.

[0004] Therefore, improving the accuracy of sand-laying detection has become an urgent problem for those skilled in the art. Utility Model Content

[0005] The main purpose of this invention is to provide a sand-laying uniformity detection device and a sand-laying apparatus, which aims to improve the accuracy of sand-laying detection.

[0006] To achieve the above objectives, the sand spreading uniformity testing device proposed in this utility model includes a base, a mold, a drive unit, a scraper assembly, and a monitoring assembly. The mold is rotatably mounted on the base along a vertical axis and has a receiving groove for accommodating quartz sand. The drive unit is located on the base and is movably positioned above the mold. The drive unit has at least two degrees of freedom and has adjacent first and second mounting surfaces. The scraper assembly is located on the first mounting surface and includes at least one scraper for smoothing the quartz sand. The monitoring assembly includes a monitoring element, which is fixedly mounted on the second mounting surface and faces the receiving groove for measuring the surface uniformity of the quartz sand.

[0007] In one embodiment, the monitoring component further includes a shock absorber disposed between the monitoring component and the second mounting surface.

[0008] In one embodiment, the scraper assembly includes a mounting base, a first scraper, and a second scraper; the mounting base is fixedly disposed on the first mounting surface; the first scraper is rotatably mounted on the mounting base, with its blade surface arranged in a straight line, for scraping the quartz sand on the inner sidewall of the receiving groove; the second scraper is rotatably mounted on the mounting base around the same axis as the first scraper, with its blade surface arranged in an arc, for scraping the quartz sand on the bottom wall of the receiving groove.

[0009] In one embodiment, the first scraper and the second scraper are provided with through holes; the scraper assembly further includes a screw and a driving member; the screw is screwed to the mounting base and passes through the through hole; the driving member drives the screw to rotate, so as to rotate one of the first scraper and the second scraper to the working position.

[0010] In one embodiment, the mounting base has a positioning hole circumferentially provided on the rotating shaft, and the scraper assembly further includes a spring pin, which is disposed on the first scraper and / or the second scraper, and is used to extend into the positioning hole when one of the first scraper and / or the second scraper is rotated to the working position.

[0011] In one embodiment, the scraper assembly further includes an electromagnetic locking block and a ferromagnetic locking groove; the electromagnetic locking block is disposed on the side wall of the mounting base; the ferromagnetic locking groove is formed on the surface of the scraper shaft, when the scraper rotates to the working position, the electromagnetic locking block is energized to attract the locking groove, and the locking is released after the power is turned off.

[0012] In one embodiment, the surface of the scraper is coated with a wear-resistant material.

[0013] In one embodiment, the monitoring component further includes a distance sensor disposed on the base for measuring the vertical distance from the base to the monitoring element; the drive unit is movable vertically and rotatable along a horizontal axis to orient the distance sensor toward the wall of the receiving groove.

[0014] In one embodiment, the base includes a frame and a turntable; the frame is used to mount the drive unit; the turntable is disposed within the frame and is used to rotatably mount the mold.

[0015] This utility model also proposes a sand-spreading device, including a sand-spreading uniformity detection device. The sand-spreading uniformity detection device includes a base, a mold, a drive unit, a scraper assembly, and a monitoring component. The mold is rotatably mounted on the base along a vertical axis and has a receiving groove for receiving quartz sand. The drive unit is located on the base and is movably positioned above the mold. The drive unit has at least two degrees of freedom and has adjacent first and second mounting surfaces. The scraper assembly is located on the first mounting surface and includes at least one scraper for smoothing the quartz sand. The monitoring component includes a monitoring element, which is fixedly mounted on the second mounting surface and faces the receiving groove, for measuring the distance from the second mounting surface to the surface of the quartz sand.

[0016] The technical solution of this utility model uses a monitoring component and a scraper assembly to detect and smooth the uniformity of quartz sand. First, the drive unit moves the monitoring component to a certain position above the mold, controls the mold to rotate, and the monitoring component measures the surface uniformity of the quartz sand to obtain uniformity information at that height. Then, the drive unit moves the monitoring component to a certain position at different heights and performs the above operation. By combining the position information and uniformity information of all the above points, the overall uniformity information can be detected. Furthermore, the scraper assembly is controlled to smooth the sand to maintain its uniformity. The monitoring component and the scraper assembly are respectively set on two adjacent planes of the drive unit, resulting in a small structural footprint and avoiding positional errors during installation, thus improving the accuracy of sand spreading detection. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0018] Figure 1 A schematic diagram of an embodiment of the sand spreading uniformity detection device provided by this utility model;

[0019] Figure 2 for Figure 1 A schematic diagram of the scraper assembly structure in the middle;

[0020] Figure 3 A schematic diagram illustrating the steps of an embodiment of the sand spreading uniformity detection device provided by this utility model.

[0021] Explanation of icon numbers:

[0022] 100. Sand spreading uniformity testing device; 1. Base; 11. Frame; 12. Turntable; 2. Mold; 21. Receiving groove; 3. Drive unit; 4. Scraper assembly; 41. Mounting base; 42. First scraper; 43. Second scraper; 44. Screw; 45. Positioning hole; 46. Spring pin; 5. Monitoring component.

[0023] The realization of the purpose, functional features and advantages of this utility model will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0025] It should be noted that if the embodiments of this utility model involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a specific posture. If the specific posture changes, the directional indicators will also change accordingly.

[0026] Furthermore, if the embodiments of this utility model involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the use of "and / or" or "and / or" throughout the text includes three parallel solutions. For example, "A and / or B" includes solution A, solution B, or a solution where both A and B are satisfied simultaneously. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this utility model.

[0027] In related technologies, the thickness of sand layers is measured directly by manual use of probes or micrometers, which depends on the operator's skill and experience, resulting in large uncertainties and errors.

[0028] Based on this, this utility model proposes a sand spreading uniformity detection device 100. Please refer to [link / reference]. Figure 1 and Figure 2In one embodiment of this utility model, the sand spreading uniformity detection device 100 includes a base 1, a mold 2, a drive unit 3, a scraper assembly 4, and a monitoring component. The mold 2 is rotatably mounted on the base 1 along a vertical axis and has a receiving groove 21 for receiving quartz sand. The drive unit 3 is disposed on the base 1 and is movably disposed above the mold 2. The drive unit 3 has at least two degrees of freedom and has adjacent first mounting surfaces and second mounting surfaces. The scraper assembly 4 is disposed on the first mounting surface and includes at least one scraper for scraping the quartz sand evenly. The monitoring component includes a monitoring element 5, which is fixedly disposed on the second mounting surface and faces the receiving groove 21 for measuring the distance from the second mounting surface to the surface of the quartz sand.

[0029] The technical solution of this utility model uses a monitoring component 5 and a scraper assembly 4 to cooperate in order to detect and smooth the uniformity of quartz sand. First, the driving unit 3 drives the monitoring component to move to a certain position above the mold 2, controls the mold 2 to rotate, and the monitoring component 5 measures the surface uniformity of the quartz sand to obtain the uniformity information at that height. Then, the driving unit 3 drives the monitoring component to move to a certain position at different heights and performs the above operation. By combining the position information and uniformity information of all the above points, the overall uniformity information can be detected. And the scraper assembly 4 is controlled to smooth the sand to maintain the uniformity of the quartz sand. Furthermore, the monitoring component 5 and the scraper assembly 4 are respectively set on two adjacent planes of the driving unit 3, which occupies little space and avoids positional errors during the installation of the monitoring component 5 and the scraper assembly 4, thereby improving the accuracy of sand spreading detection. The driving unit 3 includes at least two degrees of freedom, which allows the scraper assembly 4 and the monitoring component to operate on the bottom and walls of the receiving tank 21.

[0030] It should be noted that during the monitoring and scraping process, you can scrape and monitor a certain location first, or you can monitor the whole area first and then scrape. The specific order can be flexibly adjusted according to actual needs.

[0031] In one embodiment, the monitoring component 5 is a distance measuring device used to measure the distance it reaches the quartz sand. Uniformity is detected by the distance change. Given the known positional parameters of each position on the inner wall of the receiving tank 21 and the known positional parameters of the monitoring component 5 when it moves to a certain position, the thickness of the quartz sand at that position can be obtained. First, the driving unit 3 drives the monitoring component to a certain position above the mold 2. The monitoring component 5 measures the distance it reaches the surface of the quartz sand. Then, keeping the monitoring component 5 stationary, the mold 2 is rotated, and the distances from the monitoring component 5 to multiple points at the same height at that position are measured. The above data are compared. If the data changes, it indicates that the sand distribution at that height in the mold 2 is uneven. In the subsequent leveling operation, the feed rate of the scraper component 4 is controlled, i.e., it is brought closer to the receiving tank 21 for leveling. Next, the driving unit 3 drives the monitoring component to another position at a different height of the mold 2, and the above operation is performed. Simultaneously, the thickness at this position is compared with the previous height position, and the thickness at different points at the same height at this position, to control the overall thickness of the quartz sand.

[0032] In another embodiment, the monitoring device 5 is a high-resolution camera used to capture images of a designated location. The images can be analyzed using image processing algorithms, and the uniformity of the rotating sand surface can be calculated by combining the positional information of each image. This allows for the determination of the uniformity of the sand distribution. The specific process is as follows: Figure 3 As shown.

[0033] The drive unit 3 can be a multi-axis motion system formed by the cooperation of multiple slides in different directions, or it can be a robotic arm, capable of at least changing its vertical position and orientation. In a specific embodiment, the drive unit 3 is a six-axis robotic arm.

[0034] In one embodiment of this utility model, the monitoring component further includes a shock absorber disposed between the monitoring component 5 and the second mounting surface. This reduces the impact of external vibrations and the scraping action of the scraper assembly 4 on monitoring accuracy, ensuring stable and reliable data and further improving the accuracy of sand spreading uniformity detection.

[0035] In one embodiment of this utility model, the scraper assembly 4 includes a mounting base 41, a first scraper 42, and a second scraper 43. The mounting base 41 is fixedly disposed on the first mounting surface. The first scraper 42 is rotatably mounted on the mounting base 41, with a straight blade surface, for scraping the quartz sand on the inner sidewall of the receiving groove 21. The second scraper 43 is rotatably mounted on the mounting base 41 around the same axis as the first scraper 42, with an arc-shaped blade surface, for scraping the quartz sand on the bottom wall of the receiving groove 21. Thus, by selecting the appropriate scraper based on the different curvatures of different positions in the receiving groove 21, the optimal scraping effect is ensured.

[0036] Furthermore, the arc surface of the second scraper 43 can be set to a shape with gradually changing curvature, so as to select different positions of the arc surface for scraping according to different curvatures, thereby adapting to the receiving groove 21 with different needs and improving the overall scraping accuracy.

[0037] In one embodiment of this utility model, the first scraper 42 and the second scraper 43 are provided with through holes; the scraper assembly 4 further includes a screw 44 and a driving component; the screw 44 is screwed to the mounting base 41 and passes through the through hole; the driving component drives the screw 44 to rotate, thereby causing one of the first scraper 42 and the second scraper 43 to rotate to the working position. Thus, by precisely controlling the scraper angle and position, the quartz sand layer is uniformly leveled, ensuring consistent sand thickness in all parts of the mold 2, and improving overall process accuracy and product quality.

[0038] In one embodiment of this utility model, the mounting base 41 has a positioning hole 45 circumferentially formed on the rotating shaft. The scraper assembly 4 further includes a spring pin 46, which is disposed on the first scraper 42 and / or the second scraper 43, and is used to extend into the positioning hole 45 when one of the first scraper 42 and / or the second scraper 43 is rotated to the working position. Thus, the locking action of the spring pin 46 ensures that the scraper is stable and reliable after rotating to the working position, preventing displacement due to vibration or improper operation, further ensuring the leveling accuracy and sand spreading uniformity, and improving the stability and reliability of the overall process.

[0039] "And / or" means that one or both can be selected simultaneously, depending on the actual needs.

[0040] In another embodiment of this utility model, the scraper assembly 4 further includes an electromagnetic locking block and a ferromagnetic locking groove; the electromagnetic locking block is disposed on the side wall of the mounting base 41; the ferromagnetic locking groove is formed on the surface of the scraper shaft. When the scraper rotates to the working position, the electromagnetic locking block is energized to attract the locking groove, and the locking is released after the power is turned off. In this way, the electromagnetic locking ensures that the scraper is stable in any position, further optimizing the leveling effect, improving the uniformity of sand spreading, ensuring the uniform thickness of the quartz sand layer in the mold 2, and enhancing the overall process accuracy. In addition, the driving component can be a stepper motor to precisely control the rotation angle of the scraper and ensure the accuracy of each leveling action.

[0041] Furthermore, the surface of the scraper is coated with a wear-resistant material. This not only extends the scraper's service life but also maintains the sharpness of the blade surface, ensuring a long-lasting and stable leveling effect, and improving overall work efficiency and product quality. The wear-resistant material can be tungsten carbide or ceramic coating, whose high hardness and corrosion resistance effectively resist quartz sand abrasion, ensuring that the flatness of the blade surface remains unchanged during long-term use, further consolidating the leveling accuracy and mold quality.

[0042] In one embodiment of this utility model, the monitoring component further includes a distance sensor disposed on the base 1 to measure the vertical distance between the base 1 and the monitoring element 5; the drive unit 3 is movable vertically and rotates horizontally to orient the distance sensor toward the wall of the receiving groove 21. Thus, by monitoring the distance change between the base 1 and the monitoring element 5 in real time, the position and angle of the drive unit 3 are precisely adjusted, further optimizing the leveling effect, improving the uniformity of sand spreading, and ensuring consistent quartz sand layer thickness.

[0043] In one embodiment of the present invention, the base 1 includes a frame 11 and a turntable 12; the frame 11 is used to mount the drive unit 3; the turntable 12 is disposed in the frame 11 and is used to rotatably mount the mold 2.

[0044] This utility model also proposes a sand-laying device, which includes the sand-laying uniformity detection device 100. The specific structure of the sand-laying uniformity detection device 100 is as described in the above embodiments. Since the sand-laying device adopts all the technical solutions of all the above embodiments, it has at least all the beneficial effects brought about by the technical solutions of the above embodiments, which will not be described in detail here.

[0045] The above description is merely an exemplary embodiment of the present utility model and does not limit the patent scope of the present utility model. Any equivalent structural transformations made based on the technical concept of the present utility model and the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present utility model.

Claims

1. A sand laying uniformity detection device, characterized by, The device comprises: a base; a mold, which is rotatably installed on the base along an up-down axis and has a containing groove for containing quartz sand; a driving part, which is movably arranged above the mold and has at least two degrees of freedom, and has adjacent first and second installation surfaces; a scraper assembly, which is arranged on the first installation surface and comprises at least one scraper for scraping the quartz sand; a monitoring assembly, which comprises a monitoring member fixedly arranged on the second installation surface and facing the containing groove for measuring the surface uniformity of the quartz sand. The monitoring assembly further comprises a damping member arranged between the monitoring member and the second installation surface.

2. The sand uniformity detection device of claim 1, wherein, The scraper assembly comprises:

3. The sand uniformity detection device of claim 1, wherein, a mounting seat fixedly arranged on the first installation surface; a first scraper rotatably installed on the mounting seat and having a straight-line-shaped blade for scraping the quartz sand on the inner wall of the containing groove; and a second scraper rotatably installed on the mounting seat around the same rotation shaft as the first scraper and having an arc-shaped blade for scraping the quartz sand on the bottom wall of the containing groove. The first and second scrapers are provided with through holes; the scraper assembly further comprises:

4. The sand uniformity detection device of claim 3, wherein a screw rod screwed to the mounting seat and penetrating through the through holes; and a driving member for driving the screw rod to rotate so as to rotate one of the first and second scrapers to a working position. The mounting seat is provided with a positioning hole around the rotation shaft; the scraper assembly further comprises a spring pin arranged on one of the first and second scrapers and extending into the positioning hole when the one of the first and second scrapers is rotated to the working position.

5. The sand uniformity detection device of claim 3, wherein The scraper assembly further comprises:

6. The sand uniformity detection device of claim 3, wherein, an electromagnetic locking block arranged on the side wall of the mounting seat; and a ferromagnetic locking groove arranged on the surface of the rotation shaft of the scraper, which is attracted to the locking groove when the scraper is rotated to the working position and is released from the locking when the electromagnetic locking block is powered off. The surface of the scraper is coated with wear-resistant material.

7. The sand uniformity detection device of claim 1, wherein, The monitoring assembly further comprises a distance sensor arranged on the base for measuring the up-down distance from the base to the monitoring member; 8. The sand uniformity detection device of claim 1, wherein, The driving part is movable up and down and rotatable along a horizontal axis so as to make the distance sensor face the groove wall of the containing groove. The base comprises:

9. The sand uniformity detection device of claim 1, wherein, a frame for mounting the driving part; and a turntable arranged in the frame for rotatably mounting the mold. The device comprises the sand leveling uniformity detection device according to any one of claims 1-9.

10. A sand spreading device, characterized in that The device comprises the sand leveling uniformity detection device according to any one of claims 1-9.

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