Pressure regulating valve detection system

Abstract

The utility model relates to the technical field of gas pressure control, in particular to a pressure regulating valve detection system, which comprises a pressure simulation module used for regulating gas output pressure and forming a first branch; the flow simulation module is used for adjusting the gas output flow and is provided with a second branch; the second branch and the first branch are connected in parallel to form a convergence position; the test module is connected in series with the confluence position, the test module is provided with a station to be tested, and the station to be tested is used for testing the performance of the pressure regulating valve; the switching module is connected to the first branch circuit and the second branch circuit in series, and the switching module is used for switching the access path of the first branch circuit and the access path of the second branch circuit. The performance of the pressure regulating valve is tested by simulating pressure fluctuation and flow fluctuation, and the technical effect of improving the reliability of performance evaluation of the pressure regulating valve is achieved.

Description

Technical Field

[0001] This application relates to the field of gas pressure control technology, and in particular to a pressure regulating valve detection system. Background Technology

[0002] This technology is applied to gas boxes / GAS panels requiring precise pressure control, ultimately used in the fabrication processes of photovoltaics or semiconductors, such as diffusion / oxidation / CVD / ALD or other epitaxial processes. Currently, dozens of different specialty gases are used in photovoltaic / semiconductor manufacturing processes, and with the iterative updates of processes, even more specialty gases will be involved in the future. The most crucial core parameter for the successful verification of these product processes lies in the precise control of the flow rates of the different specialty gases involved in the process; therefore, pressure stability and accuracy are paramount. Currently, the calibration and accuracy of different gas pressures are generally tested by the pressure regulating valve supplier before shipment. When operating conditions change, the pressure stabilization effect of the pressure regulating valve determines its functional positioning, and the stability of the pressure regulating valve becomes increasingly important in more precise processes.

[0003] In existing technologies, the stability of flow meters relies on the stability of the upstream pressure. Since the plant shares a single pipeline, sudden changes in flow rate caused by the sudden supply or cessation of gas supply to the shared equipment can lead to pressure changes in the main pipeline, ultimately causing fluctuations in the flow rate of the normally operating special gas pipeline and affecting the process results. In other words, sudden pressure changes in the shared pipeline due to equipment start-up and shutdown cause flow fluctuations. Traditional pressure regulating valves' factory calibration cannot adapt to dynamic operating conditions, necessitating a system that can simulate pressure / flow fluctuations and test the pressure regulating valve's stabilizing performance.

[0004] Therefore, the technical problem with the existing technology is that the reliability of the performance evaluation of the pressure regulating valve is low. Utility Model Content

[0005] This application provides a pressure regulating valve testing system that tests the performance of the pressure regulating valve by simulating pressure fluctuations and flow fluctuations, thereby improving the reliability of pressure regulating valve performance evaluation.

[0006] This application provides a pressure regulating valve detection system, which adopts the following technical solution:

[0007] A pressure regulating valve testing system includes: a pressure simulation module for adjusting gas output pressure and forming a first branch; a flow simulation module for adjusting gas output flow rate and forming a second branch; the second branch and the first branch are connected in parallel to form a confluence location; a testing module connected in series at the confluence location, the testing module having a test station for testing the performance of the pressure regulating valve; and a switching module connected in series on the first branch and the second branch, the switching module being used to switch the path between the first branch and the second branch.

[0008] Preferably, the pressure simulation module includes a first air inlet and a first pressure regulating valve, wherein the first air inlet is used for gas input and the first pressure regulating valve is connected in series with the first air inlet.

[0009] Preferably, the flow simulation module includes a second air inlet, a second pressure regulating valve, and a first flow meter, wherein the second pressure regulating valve and the first flow meter are both connected in series with the second air inlet.

[0010] Preferably, the pressure simulation module further includes a first switching valve connected in series with the front end of the first pressure regulating valve.

[0011] Preferably, the pressure simulation module further includes a third switching valve connected in series with the front end of the second pressure regulating valve.

[0012] Preferably, the test module includes a first pressure detection unit, a second pressure detection unit, and a second flow meter connected in series with the workstation under test. The first pressure detection unit is connected in series at the front end of the workstation under test, and the second pressure detection unit and the second flow meter are connected in series at the rear end of the workstation under test.

[0013] Preferably, the first pressure detection unit includes a first pressure sensor and a first pressure pulsation sensor connected in series.

[0014] Preferably, the second pressure sensor includes a second pressure sensor and a second pressure pulsation sensor connected in series.

[0015] Preferably, the switching module includes a second switching valve and a fourth switching valve, wherein the second switching valve is connected in series in the first branch; and the fourth switching valve is connected in series in the second branch.

[0016] Preferably, the test module further includes a fifth switching valve, which is connected in series at the rear end of the second flow meter.

[0017] In summary, this application includes at least one of the following beneficial technical effects:

[0018] The modular design supports independent testing of pressure and flow. By controlling the variable method, the influence of pressure and flow is separated, accurately simulating actual working conditions and improving the reliability of pressure regulating valve performance evaluation. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the detection system described in this application;

[0020] Figure 2 This is a schematic diagram of the detection system described in this application.

[0021] Explanation of reference numerals in the attached diagram: 100, Pressure simulation module; 110, First air inlet; MV1, First switching valve; REG1, First pressure regulating valve; 120, First branch; 200, Flow simulation module; 210, Second air inlet; MV3, Third switching valve; REG2, Second pressure regulating valve; MFC1, First flow meter; 220, Second branch; 300, Merging position; 400, Test module; 410, First pressure unit; PT1, First pressure sensor; PP1, First pressure pulsation sensor; 420, Test station; 430, Second pressure unit; PT2, Second pressure sensor; PP2, Second pressure pulsation sensor; MFC2, Second flow meter; MV5, Fifth switching valve; 500, Switching module; MV2, Second switching valve; MV4, Fourth switching valve. Detailed Implementation

[0022] The serial numbers assigned to components in this document, such as "first" and "second," are used solely to distinguish the described objects and have no sequential or technical meaning. The terms "connection" and "linkage" used in this application, unless otherwise specified, include both direct and indirect connections (linkages). It should be understood that the terms "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are used solely for the convenience of describing this application and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0023] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0024] This application provides a pressure regulating valve testing system that tests the performance of the pressure regulating valve by simulating pressure fluctuations and flow fluctuations, thereby improving the reliability of pressure regulating valve performance evaluation.

[0025] To better understand the above technical solutions, a detailed description of the technical solutions will be provided below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of this application and are not intended to limit the scope of this application.

[0026] This application provides a pressure regulating valve testing system that accurately tests the pressure regulating valve's stabilizing performance by simulating pressure fluctuations and flow changes. Figure 1 As shown, the pressure regulating valve testing system includes a pressure simulation module 100, a flow simulation module 200, a test module 400, and a switching module 500. The pressure simulation module 100 is used to adjust the gas output pressure and forms a first branch 120. The flow simulation module 200 is used to adjust the gas output flow rate and forms a second branch 220. The second branch 220 is connected in parallel with the first branch 120 to form a confluence position 300. The test module 400 is connected in series with the confluence position 300 and has a test station 420, which is used to test the performance of the pressure regulating valve. The switching module 500 is connected in series with the first branch 120 and the second branch 220 and is used to switch the path between the first branch 120 and the second branch 220.

[0027] like Figure 1 , 2 As shown, the pressure simulation module 100 includes a first air inlet 110 and a first pressure regulating valve REG1. The first air inlet 110 is used for gas input, and the first pressure regulating valve REG1 is connected in series with the first air inlet 110. Furthermore, the pressure simulation module 100 also includes a first switching valve MV1 connected in series with the front end of the first pressure regulating valve REG1. In other words, the pressure simulation module 100, from the front end to the rear end, includes the first air inlet 110, the first switching valve MV1, and the first pressure regulating valve REG1, thus forming the first branch 120. The gas pressure is adjusted by the first pressure regulating valve REG1, and the gas flow is controlled by the first switching valve MV1.

[0028] like Figure 1 , 2 As shown, the flow simulation module 200 includes a second air inlet 210, a second pressure regulating valve REG2, and a first flow meter MFC1. Both the second pressure regulating valve REG2 and the first flow meter MFC1 are connected in series with the second air inlet 210. Furthermore, the flow simulation module 200 also includes a third switching valve MV3 connected in series with the front end of the second pressure regulating valve REG2. In other words, the flow simulation module 200, from the front end to the rear end, includes the second air inlet 210, the third switching valve MV3, the second pressure regulating valve REG2, and the first flow meter MFC1, thus forming the second branch 220. The first flow meter MFC1 controls the gas flow rate, and the third switching valve MV3 controls the gas flow on / off.

[0029] like Figure 1 , 2 As shown, it should be noted that the pressure simulation module 100 and the flow simulation module 200 are connected in parallel. That is, the first branch 120 formed by the pressure simulation module 100 and the second branch 220 formed by the flow simulation module 200 are connected in parallel. The first branch 120 and the second branch 220 form a confluence position 300, which is used to connect to the test module 400. Under the control of the switching module 500, the test module 400 can be connected to either the pressure simulation module 100 or the flow simulation module 200; the first branch 120 and the test module 400 can form a path to perform pressure detection on the valve under test; or the second branch 220 and the test module 400 can form a path to perform flow detection on the valve under test.

[0030] like Figure 1 , 2As shown, the test module 400 includes a first pressure detection unit 410, a second pressure detection unit 430, and a second flow meter MFC2, all connected in series with the test station 420. The first pressure detection unit 410 is connected in series at the front end of the test station 420, and the second pressure detection unit 430 and the second flow meter MFC2 are connected in series at the rear end of the test station 420. The first pressure detection unit 410 includes a first pressure sensor PT1 and a first pressure pulsation sensor PP1 connected in series; the second pressure detection unit 430 includes a second pressure sensor PT2 and a second pressure pulsation sensor PP2 connected in series. The test module 400 also includes a fifth switching valve MV5, which is connected in series at the rear end of the second flow meter MFC2. Specifically, the test module 400 is connected in series at the confluence position 300. The test module 400 includes, from the front end to the rear end, a first pressure sensor PT1, a first pressure pulsation sensor PP1, a test station 420 (REG3), a second pressure sensor PT2, a second pressure pulsation sensor PP2, a second flow meter MFC2, and a fifth switching valve MV5. Among them, the first pressure unit 410 is used to detect the pressure and fluctuation at the front end of the test station 420; the second detection unit 430 is used to detect the pressure stabilization effect at the rear end of the test station 420; and the second flow meter MFC2 is used to control the flow rate to be constant or fully open.

[0031] like Figure 1 , 2 As shown, the switching module 500 includes a second switching valve MV2 and a fourth switching valve MV4. The second switching valve MV2 is connected in series in the first branch 120; the fourth switching valve MV4 is connected in series in the second branch 220. Specifically, the second switching valve MV2, connected in series in the first branch 120, is used to control the opening and closing state between the first branch 120 and the test module 400; the fourth switching valve MV4, connected in series in the second branch 220, is used to control the opening and closing state between the second branch 220 and the test module 400. Thus, by controlling the second switching valve MV2 and the fourth switching valve MV4 to control the on / off state of the first branch 120 and the second branch 220 respectively, the test module 400 can switch between pressure testing and flow testing.

[0032] Specifically, such as Figure 2As shown, the pressure fluctuation test mode is as follows: the first switching valve MV1, the second switching valve MV2, and the fifth switching valve MV5 are opened, and the fourth switching valve MV4 is closed; the gas path is: first air inlet 110 → first switching valve MV1 → first pressure regulating valve REG1 → second switching valve MV2 → first pressure sensor PT1 → first pressure pulsation sensor PP1 → test station 420 → second pressure sensor PT2 → second pressure pulsation sensor PP2 → second flow meter MFC2 → fifth switching valve MV5; the front-end pressure is adjusted by the first pressure regulating valve REG1, the first pressure sensor PT1 and the first pressure pulsation sensor PP1 detect pressure fluctuations, and the second flow meter MFC2 maintains a constant flow rate, thus evaluating the pressure stabilization performance of the pressure regulating valve on the test station 420 under pressure fluctuations.

[0033] like Figure 2 As shown, the flow change test mode is as follows: the third switch valve MV3, the fourth switch valve MV4, and the fifth switch valve MV5 are opened, and the second switch valve MV2 is closed; the gas path is: second inlet 210 → third switch valve MV3 → second pressure regulating valve REG2 → first flow meter MFC1 → fourth switch valve MV4 → first pressure sensor PT1 → first pressure pulsation sensor PP1 → test station 420 → second pressure sensor PT2 → second pressure pulsation sensor PP2 → second flow meter MFC2 (fully open) → fifth switch valve MV5; the flow rate is adjusted by the first flow meter MFC1, the first pressure sensor PT1 and the first pressure pulsation sensor PP1 monitor the effect of flow rate changes on pressure, and the second flow meter MFC2 is fully open to eliminate flow limitation, thus evaluating the response capability of the pressure regulating valve on the test station 420 under sudden flow changes.

[0034] Although preferred embodiments of this application have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of this application.

[0035] Obviously, those skilled in the art can make various modifications and variations to this application without departing from the spirit and scope of this application. Therefore, if such modifications and variations fall within the scope of the claims of this application and their equivalents, this application also intends to include such modifications and variations.

Claims

1. A pressure regulating valve testing system, characterized by, The utility model relates to a pressure simulation module (100) for regulating the gas output pressure and forming a first branch (120), a flow simulation module (200) for regulating the gas output flow and forming a second branch (220) in parallel with the first branch (120) to form a confluence position (300), a test module (400) in series with the confluence position (300) and having a test station (420) for testing the pressure regulating valve performance, and a switching module (500) in series with the first branch (120) and the second branch (220) for switching the passage path of the first branch (120) and the second branch (220). The pressure simulation module (100) comprises a first gas inlet (110) for gas input and a first pressure regulating valve (REG1) in series with the first gas inlet (110). The flow simulation module (200) comprises a second gas inlet (210), a second pressure regulating valve (REG2) and a first flow meter (MFC1), both in series with the second gas inlet (210). The pressure simulation module (100) further comprises a first switch valve (MV1) in series with the front end of the first pressure regulating valve (REG1). The flow simulation module (200) further comprises a third switch valve (MV3) in series with the front end of the second pressure regulating valve (REG2).

2. The pressure regulating valve testing system of claim 1, wherein The test module (400) comprises a first pressure detection unit (410), a second pressure detection unit (430) and a second flow meter (MFC2) in series with the test station (420), the first pressure detection unit (410) being in series with the front end of the test station (420), and the second pressure detection unit (430) and the second flow meter (MFC2) being in series with the rear end of the test station (420).

3. The pressure regulating valve testing system of claim 1, wherein The first pressure detection unit (410) comprises a first pressure sensor (PT1) and a first pressure pulsation sensor (PP1) in series with each other.

4. The pressure regulating valve testing system of claim 2, wherein The second pressure detection unit (430) comprises a second pressure sensor (PT2) and a second pressure pulsation sensor (PP2) in series with each other.

5. The pressure regulating valve testing system of claim 3, wherein The switching module (500) comprises a second switch valve (MV2) in series with the first branch (120) and a fourth switch valve (MV4) in series with the second branch (220).

6. The pressure regulating valve testing system of claim 1, wherein The test module (400) further comprises a fifth switch valve (MV5) in series with the rear end of the second flow meter (MFC2).

7. A pressure regulating valve testing system according to claim 6, wherein ​ 8. The pressure regulating valve detection system of claim 6 or 7, wherein ​ 9. The pressure regulating valve testing system of claim 1, wherein ​ 10. The pressure regulating valve testing system of claim 6, wherein, ​

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