Adjustable EBSD test sample table

Abstract

The utility model discloses an adjustable EBSD test sample table, which relates to the technical field of test appliances and comprises a first support rod, a second support rod is slidably clamped on the upper portion of the first support rod, a fixing plate is arranged at the top end of the second support rod, and a shell is fixedly mounted at the top end of the fixing plate. A second screw is rotatably installed in the middle of the shell, a worm gear is fixedly installed at the end, penetrating through the shell, of the second screw, a worm is arranged on the upper portion of the worm gear and connected with the worm gear in a meshed mode, a second motor is arranged on one side of the shell, and one end of the worm is fixedly installed at the driving end of the second motor; the angle of the clamp can be adjusted under the driving of the second motor, so that an operator can flexibly change the angle of the sample table to ensure that the surface of a sample is perpendicular to an electron beam as far as possible when facing an irregular-shaped sample, and the acquisition quality of a back scattering diffraction pattern is greatly improved; therefore, the accuracy of a crystal orientation analysis result is improved.

Description

Technical Field

[0001] This utility model relates to the field of testing equipment technology, specifically an adjustable EBSD test sample stage. Background Technology

[0002] Background Technology Electron backscatter diffraction (EBSD) is a key technology in materials science used to analyze the microstructure and crystal orientation of materials. Its principle is based on the interaction between the electron beam and the sample. During the test, a high-energy electron beam emitted from the electron gun is focused by an electromagnetic lens and incident on the sample surface at a high angle (usually close to 90°). Electrons undergo elastic and inelastic scattering with atoms inside the sample. Some electrons are backscattered out of the sample surface, forming backscattered electrons. These backscattered electrons produce diffraction phenomena in the crystal structure near the sample surface, forming specific diffraction patterns, namely Kikuchi patterns.

[0003] However, existing EBSD test stages have difficulty achieving perpendicular alignment between the surface of irregularly shaped samples and the electron beam, which leads to a decrease in the quality of the acquired backscattered diffraction pattern and thus affects the accuracy of crystal orientation analysis. Traditional stage adjustments are cumbersome, requiring operators to manually fine-tune multiple components, which not only consumes a lot of time but is also prone to inaccurate adjustments due to human error. Utility Model Content

[0004] To address the issue that existing EBSD test sample stages require manual symmetrical fine-tuning of the sample angle to ensure perpendicular alignment of the sample surface with the electron beam, the purpose of this invention is to provide an adjustable EBSD test sample stage.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following technical solution: an adjustable EBSD test sample stage, including a first support rod, a second support rod slidably mounted on the upper part of the first support rod, a fixed plate at the top of the second support rod, a housing fixedly mounted on the top of the fixed plate, a second screw rotatably mounted in the middle of the housing, a worm gear fixedly mounted on one end of the second screw that passes through the housing, a worm on the upper part of the worm gear, the worm and the worm gear meshing with each other, a second motor on one side of the housing, one end of the worm fixedly mounted on the drive end of the second motor, a sliding plate threadedly mounted in the middle of the second screw, connecting rods fixedly mounted on both sides of the sliding plate, a clamp rotatably mounted on one side of the top of the fixed plate, and the other ends of the two connecting rods movably mounted on one side of the bottom of the clamp.

[0006] The upper part of the second support rod is rotatably mounted with a first screw. A drive assembly is provided on one side of the first screw. A moving block is fixedly mounted in the middle of the bottom end of the fixed plate. The moving block is threaded onto the outer surface of the middle part of the first screw. An electric actuator is fixedly mounted on the lower inner surface of the first support rod. The middle part of the second support rod is fixedly mounted on the drive end of the electric actuator.

[0007] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0008] 1. This application enables the angle of the fixture to be adjusted by the drive of a second motor. When dealing with irregularly shaped samples, the operator can flexibly change the angle of the sample stage to ensure that the sample surface is as perpendicular as possible to the electron beam, which greatly improves the acquisition quality of the backscatter diffraction pattern and thus enhances the accuracy of the crystal orientation analysis results.

[0009] 2. This application can change the horizontal position and height of the sample to be tested by setting the first motor and electric actuator, thereby solving the problem of the need for continuous and tedious manual adjustment of the position of the equipment, greatly saving the time required for testing, avoiding the problem of inaccurate adjustment caused by human operation error, and effectively improving the testing efficiency. Attached Figure Description

[0010] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0011] Figure 1 This is a schematic diagram of the structure of this utility model.

[0012] Figure 2 This is a cross-sectional structural diagram of the present invention.

[0013] Figure 3 This is a schematic diagram of the connection structure between the clamp and the fixing plate in this utility model.

[0014] Figure 4 This utility model Figure 3 Enlarged view of point A in the middle.

[0015] In the diagram: 1. First support rod; 11. Mounting column; 12. Positioning hole; 13. Second support rod; 14. Electric actuator; 15. Cavity; 16. First motor; 17. First screw; 18. Slide groove; 19. Moving block; 2. Fixing plate; 21. Housing; 22. Second motor; 221. Support plate; 23. Worm gear; 24. Worm wheel; 25. Slot; 26. Connecting rod; 27. Second screw; 271. Sliding plate; 3. Fixture. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0017] Example: Figure 1-4 As shown, this utility model provides an adjustable EBSD test sample stage, including a first support rod 1. A second support rod 13 is slidably mounted on the upper part of the first support rod 1. A fixing plate 2 is provided at the top of the second support rod 13. A housing 21 is fixedly installed at the top of the fixing plate 2. A second screw 27 is rotatably mounted in the middle of the housing 21. A worm gear 24 is fixedly mounted at one end of the second screw 27 that passes through the housing 21. A worm 23 is provided on the upper part of the worm gear 24. The worm 23 and the worm gear 24 are meshed and connected to each other. A second motor 22 is provided on one side of the housing 21. One end of the worm 23 is fixedly mounted on the drive end of the second motor 22. A sliding plate 271 is threadedly mounted in the middle of the second screw 27. Connecting rods 26 are fixedly mounted on both sides of the sliding plate 271. A clamp 3 is rotatably mounted on one side of the top of the fixing plate 2. The other ends of the two connecting rods 26 are movably mounted on one side of the bottom of the clamp 3.

[0018] The upper part of the second support rod 13 is rotatably mounted with the first screw 17. A drive assembly is provided on one side of the first screw 17. A moving block 19 is fixedly mounted in the middle of the bottom end of the fixed plate 2. The moving block 19 is threaded onto the outer surface of the middle part of the first screw 17. An electric actuator 14 is fixedly mounted on the lower inner surface of the first support rod 1. The middle part of the second support rod 13 is fixedly mounted on the drive end of the electric actuator 14.

[0019] The drive assembly includes a first motor 16, which is fixedly mounted on the upper side of the second support rod 13. One side of the first screw 17 is fixedly mounted on the drive end of the first motor 16. By setting the first motor 16, the first screw 17 can be driven to rotate under the drive of the first motor 16.

[0020] A support plate 221 is fixedly installed on one side of the housing 21, and the bottom end of the second motor 22 is fixedly installed on the top end of the support plate 221. By setting the support plate 221, the second motor 22 can be supported and fixed.

[0021] The upper part of the second support rod 13 is provided with a sliding groove 18, and the moving block 19 is slidably locked in the middle of the sliding groove 18. By setting the sliding groove 18, the moving block 19 can be limited, so that when the first screw 17 rotates, the moving block 19 can be driven to slide stably and will not rotate with the rotation of the first screw 17.

[0022] The housing 21 has slots 25 on both sides. The lower part of the two connecting rods 26 is slidably locked in the middle of the slots 25. By setting the slots 25, one end of the connecting rod 26 can be limited, so that when the second screw 27 rotates, the sliding plate 271 can slide stably.

[0023] The first support rod 1 has a cavity 15 in the middle, and the lower part of the second support rod 13 is slidably locked inside the cavity 15. By setting the cavity 15, the second support rod 13 can slide inside the cavity 15 inside the first support rod 1, thereby making it convenient to adjust the height of the second support rod 13.

[0024] The lower part of the first support rod 1 has four evenly distributed positioning holes 12. The bottom center of the first support rod 1 is fixedly installed with a mounting column 11. By setting the positioning holes 12, the first support rod 1 can be aligned with the equipment. The mounting column 11 is connected to the mounting slot of the EBSD test equipment sample stage for installation.

[0025] Working principle: In actual use, the mounting column 11 is connected to the mounting slot of the sample stage of the EBSD testing equipment for installation. The sample to be observed is placed on the fixture 3. By starting the electric push rod 14, the second support rod 13 can be moved up and down to adjust the height of the sample. By starting the first motor 16, the first screw 17 is rotated, which moves the moving block 19 to one side, thereby moving the upper fixed plate 2, that is, adjusting the horizontal position of the sample. By starting the second motor 22, the worm gear 23 is rotated, that is, the worm wheel 24 is rotated, which in turn rotates the second screw 27, that is, moves the sliding plate 271. Thus, the position of the connecting rod 26 is moved down, causing the fixture 3 to change angle, thereby adjusting the angle of the sample so that the equipment can accurately collect the backscatter diffraction pattern.

[0026] Obviously, those skilled in the art can make various modifications and variations to this utility model without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this utility model and their equivalents, this utility model also intends to include these modifications and variations.

Claims

1. An adjustable EBSD sample stage comprising a first support bar (1), characterized in that: The upper portion of the first supporting rod (1) is slidably provided with a second supporting rod (13), the top end of the second supporting rod (13) is provided with a fixed plate (2), the top end of the fixed plate (2) is fixedly provided with a shell (21), the middle portion of the shell (21) is rotatably provided with a second screw rod (27), one end of the second screw rod (27) penetrating through the shell (21) is fixedly provided with a worm wheel (24), the upper portion of the worm wheel (24) is provided with a worm (23), the worm (23) and the worm wheel (24) are connected with each other, one side of the shell (21) is provided with a second motor (22), one end of the worm (23) is fixedly provided on the driving end of the second motor (22), the middle portion of the second screw rod (27) is threadedly provided with a sliding plate (271), the two sides of the sliding plate (271) are fixedly provided with connecting rods (26), the top end of the fixed plate (2) is rotatably provided with a clamp (3), the other ends of the two connecting rods (26) are movably provided on the bottom end of the clamp (3).

2. The adjustable EBSD sample stage of claim 1, wherein, The upper portion of the second supporting rod (13) is rotatably provided with a first screw rod (17), one side of the first screw rod (17) is provided with a driving assembly, the bottom end of the fixed plate (2) is fixedly provided with a moving block (19), the moving block (19) is threadedly provided on the outer surface of the middle portion of the first screw rod (17), the inner lower surface of the first supporting rod (1) is fixedly provided with an electric push rod (14), the middle portion of the second supporting rod (13) is fixedly provided on the driving end of the electric push rod (14).

3. An adjustable EBSD sample stage according to claim 2, wherein, The driving assembly comprises a first motor (16), the first motor (16) is fixedly provided on the upper portion of the second supporting rod (13), one side of the first screw rod (17) is fixedly provided on the driving end of the first motor (16).

4. The adjustable EBSD sample stage of claim 1, wherein, One side of the shell (21) is fixedly provided with a supporting plate (221), the bottom end of the second motor (22) is fixedly provided on the top end of the supporting plate (221).

5. The adjustable EBSD sample stage of claim 2, wherein, The upper portion of the second supporting rod (13) is provided with a sliding groove (18), the moving block (19) is slidably provided in the middle portion of the sliding groove (18).

6. The adjustable EBSD sample stage of claim 1, wherein, The two sides of the shell (21) are provided with clamping grooves (25), the lower portions of the two connecting rods (26) are slidably provided in the middle portions of the clamping grooves (25).

7. The adjustable EBSD sample stage of claim 1, wherein, The middle portion of the first supporting rod (1) is provided with a cavity (15), the lower portion of the second supporting rod (13) is slidably provided in the cavity (15).

8. The adjustable EBSD sample stage of claim 1, wherein, The lower portion of the first supporting rod (1) is provided with four evenly distributed positioning holes (12), the bottom end of the first supporting rod (1) is fixedly provided with a mounting column (11).

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