Probe tool and probe replacing system

Abstract

The utility model discloses a probe tool and a probe replacing system, and belongs to the technical field of quantum chip testing equipment. The probe tool is used for mounting a probe on the connecting rod and comprises a first connecting part which is provided with a first hole groove for accommodating part of the probe and a fixing element for fixing the probe on the first connecting part; the second connecting part is connected with the first connecting part, and the second connecting part is provided with a second hole groove used for being detachably connected with the connecting rod; wherein the opening direction of the first hole groove is opposite to the opening direction of the second hole groove. Through the above mode, the probe tool provided by the utility model can achieve the replacement of a lost probe in a vacuum environment, thereby avoiding the unexpected oxidation of a to-be-measured sub-device caused by the damage of the vacuum environment, and guaranteeing that the performance of the to-be-measured sub-device is not affected.

Description

Technical Field

[0001] This application belongs to the field of quantum chip testing equipment technology, and in particular relates to a probe fixture and probe changing system. Background Technology

[0002] During the testing of superconducting quantum chips, non-destructive probes can be used to measure the room-temperature electrical parameters of the quantum bits without damaging the quantum chip or affecting the performance of the quantum bits. Based on the measurement results, laser annealing technology can be used to locally anneal the quantum bits, thereby directionally modifying the frequency parameters of the quantum bits.

[0003] In practical experiments, to prevent oxidation of the superconducting material in the superconducting quantum chip, the above measurements and annealing processes are all performed in a vacuum environment. However, it is well known that the probes in the equipment are consumables and need to be replaced promptly after a certain number of uses. The replacement process inevitably disrupts the vacuum environment, leading to oxidation of the superconducting material. Therefore, there is an urgent need to invent a device that allows for probe replacement without disrupting the vacuum environment. Utility Model Content

[0004] The purpose of this application is to provide a probe fixture and probe replacement system to solve the problem in the prior art where replacing probes in a vacuum environment leads to oxidation of the measured quantum device due to contact with air, thus affecting its performance. This system enables the replacement of worn probes in a vacuum environment to protect the quantum device being tested.

[0005] To solve the above-mentioned technical problems, this utility model provides a probe fixture for mounting a probe on a connecting rod, comprising:

[0006] The first connecting part is provided with a first slot for accommodating a portion of the probe and a fixing element for fixing the probe to the first connecting part;

[0007] A second connecting part connected to the first connecting part, the second connecting part being provided with a second slot for detachable connection with the connecting rod;

[0008] The opening direction of the first slot is opposite to that of the second slot.

[0009] Preferably, the first connecting part and the second connecting part are detachably connected;

[0010] Alternatively, the first connecting part and the second connecting part are integrally formed.

[0011] Preferably, the probe tool is made of one of iron, cobalt, and nickel.

[0012] Preferably, the first connecting part further includes a threaded hole communicating with the first slot and the outer surface of the probe fixture, and the fixing element includes a stud that mates with the threaded hole, the stud being used to fix the probe located in the slot by abutment.

[0013] Preferably, the inner wall of the second hole groove is provided with an internal thread that is threaded to the connecting rod.

[0014] This application also provides a needle changing system, including:

[0015] The aforementioned probe fixture;

[0016] A sample holder that is detachably connected to the probe fixture;

[0017] A drive device with a connecting rod is provided for disassembling or assembling the connecting rod with the probe fixture.

[0018] Preferably, the outer surface of the probe fixture is provided with at least one protrusion;

[0019] The sample holder is provided with a groove that mates with the protrusion, wherein the protrusion and the groove mate to enable the probe fixture to be detachably connected to the sample holder.

[0020] Preferably, the length direction of the groove is parallel to the assembly direction of the probe fixture and the connecting rod.

[0021] Preferably, the inner wall of the second slot is provided with an internal thread, and the end of the connecting rod near the second slot is provided with an external thread that mates with the internal thread;

[0022] The drive device is used to rotate the connecting rod so that the connecting rod and the probe tool are threaded together.

[0023] Preferably, there are multiple probe fixtures, which are respectively disposed in different areas of the sample holder.

[0024] Compared with the prior art, this application provides a probe fixture, which includes a first connecting part and a second connecting part for connecting a probe and a connecting rod, respectively, and is detachably connected to the connecting rod. The probe can be replaced in a vacuum environment by mechanical movement within a vacuum cavity including a probe stage, thus avoiding unexpected oxidation of the quantum device under test in a vacuum environment and ensuring its quantum performance. Attached Figure Description

[0025] Figure 1 This is a cross-sectional schematic diagram of the probe tooling structure provided in the embodiments of this application;

[0026] Figure 2 This is a schematic diagram of the probe fixture structure provided in an embodiment of this application;

[0027] Figure 3 This is a schematic diagram of a probe fixture with fixed elements provided in an embodiment of this application.

[0028] Explanation of reference numerals in the attached drawings: 1-first connecting part, 11-first hole / slot, 2-second connecting part, 21-second hole / slot, 3-fixing element. Detailed Implementation

[0029] The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0030] In the description of this application, it should be understood that the terms "center", "upper", "lower", "left", "right", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0031] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0032] Superconducting quantum chips are the core components of quantum computers, requiring extremely high performance and stability. Therefore, non-destructive probes play a crucial role in the subsequent detection of superconducting quantum chips after fabrication. For example, non-destructive probes can be used to detect the connectivity of internal circuits within the superconducting quantum chip, ensuring normal communication and signal transmission between individual qubits and between qubits and control circuits.

[0033] Open circuits and short circuits in the circuitry of superconducting quantum chips can severely impact chip performance. Non-destructive probes can quickly locate these problems. Furthermore, non-destructive probes can also be used to detect defects that may exist during chip manufacturing, such as pores and impurities in superconducting thin films. These defects can disrupt the stability of the superconducting state, leading to a decrease in qubit performance. Non-destructive probes can detect these minute defects and assess their impact on chip performance.

[0034] When using probes to inspect superconducting quantum chips, the probe tip or other critical parts gradually wear down during contact or proximity with the object being inspected. For example, after repeated contact with the chip surface, the material at the probe tip will be worn away due to friction, causing the tip to become blunt. Furthermore, with increasing usage time, the probe's performance indicators will gradually decline. Therefore, probes need to be replaced after a limited number of uses.

[0035] It is worth noting that the key qubits in the superconducting quantum chips being tested and repaired are made of superconducting materials. When superconducting materials are in a non-vacuum environment (especially an oxygen-containing natural environment), they undergo oxidation and deteriorate, thus affecting the performance of the superconducting quantum chip. Currently, when probes are replaced, the vacuum environment must be disrupted, which exposes the superconducting quantum chip to the natural environment, causing the superconducting materials to oxidize and further affecting its performance.

[0036] To solve the above problems, refer to Figure 1 and reference Figure 2 The illustrated embodiment provides a probe fixture for mounting a probe to a connecting rod, comprising:

[0037] The first connecting part 1 is provided with a first slot 11 for accommodating a portion of the probe and a fixing element 3 for fixing the probe to the first connecting part 1;

[0038] A second connecting part 2 connected to the first connecting part 1, the second connecting part 2 being provided with a second slot 21 for detachable connection with the connecting rod;

[0039] The opening direction of the first slot 11 is opposite to the opening direction of the second slot 21.

[0040] Specifically, the first connecting part 1 is used to hold the probe. The length of the first slot 11 is less than the length of the probe. When the probe is placed in the first connecting part 1, the tail of the probe is fixed, while the head of the probe is exposed outside the first slot 11 for subsequent detection and other processes. In order for the probe to be fixed in the first slot 11, the first slot 11 is set to be cylindrical, and its diameter is slightly larger than the diameter of the probe, so that one or more types of probes can be installed in the first slot 11 and fixed in the first slot 11 by the fixing element 3, thereby increasing the applicability of the probe fixture.

[0041] Furthermore, since the superconducting quantum chip is measured using a non-destructive probe within a vacuum chamber (providing a vacuum environment), in order not to disrupt the vacuum environment, the probe fixture and the probe can be replaced as a whole. This allows for a detachable connection between the connecting rod and the probe fixture, enabling the replacement of the probe fixture and the probe mounted on it within the vacuum chamber by controlling the connecting rod.

[0042] In one embodiment of this application, the first connecting part 1 and the second connecting part 2 are detachably connected, for example, by magnetic attraction or snap-fit ​​connection. Since the diameter of the probes is not the same, a fixed-size first connecting part 1 may not be able to assemble all types of probes. Therefore, multiple first connecting parts 1 can be provided, and the diameter of any first slot 11 can be set to different sizes to assemble probes of various sizes, thereby realizing the selection of any detachable probe according to the actual experimental needs in a vacuum environment.

[0043] Alternatively, the first connecting part 1 and the second connecting part 2 can be integrally formed, which simplifies the manufacturing process of the probe fixture. Furthermore, since most of the quantum devices tested by the probe are nanoscale in size, even the slightest movement can lead to inaccurate measurement results. The integrally formed first connecting part 1 and the second connecting part 2 can achieve relative fixation, thus avoiding the possibility of assembly misalignment and undoubtedly preventing testing errors.

[0044] Specifically, the materials used for probe fixtures include iron, cobalt, and nickel, and the choice of material is crucial to the performance and stability of the entire system. The probe fixture needs sufficient strength and rigidity to withstand various forces that the probe may experience during the detection process, such as pressure when in contact with the object being detected and inertial forces generated during the movement of the lever arm. If the probe fixture lacks sufficient strength, it may deform or even break, affecting the probe's positioning accuracy and detection stability; insufficient rigidity will lead to large elastic deformation under stress, causing the probe's position to shift and reducing detection accuracy. Common high-strength, high-rigidity materials include metal alloys, such as stainless steel and aluminum alloys.

[0045] In this application Figure 3 In one embodiment shown, the first connecting part 1 further includes a threaded hole communicating with the first slot 11 and the outer surface of the probe fixture. The fixing element 3 includes a stud that mates with the threaded hole, wherein the stud fixes the probe located in the first slot 11 by abutting. That is, when the stud is turned so that one end of the stud approaches and enters the first slot 11, one side of the probe located in the first slot 11 is abutted by the stud, and the other side is abutted by the inner wall of the first slot 11, thereby fixing the probe in the first slot 11. When the stud is turned so that the stud moves away from the first slot 11, the probe located in the first slot 11 is not subjected to pressure from the stud, thereby allowing the probe to be detached from the first slot 11 for replacement. Alternatively, the fixing element 3 may also be a protrusion provided at the end of the probe entering the first slot 11, and an "L"-shaped groove on the inner wall of the first slot 11. After one end of the probe enters the first slot 11, the probe can be disassembled and installed by rotating the protrusion to engage with the groove.

[0046] In one embodiment of this application, in order to achieve a detachable connection between the connecting rod and the probe fixture, the inner wall of the second slot 21 is provided with an internal thread that is threaded to the connecting rod, and the two are assembled or disassembled by means of a knob.

[0047] In one embodiment of this application, a needle changing system is also provided, comprising: the probe fixture described in the above embodiments; a sample holder detachably connected to the probe fixture; and a driving device with a connecting rod for driving the connecting rod to disassemble or assemble with the probe fixture.

[0048] To enable the replacement of worn probes in a vacuum environment without disrupting the vacuum, the probe fixture, sample holder, and drive unit are all housed within a vacuum. When replacement of a worn probe is required, the drive unit actuates the connecting rod to disassemble the worn probe and its associated probe fixture onto the sample holder. The connecting rod then assembles the worn probe with other probe fixtures on the sample holder, thus achieving probe replacement without disturbing the vacuum environment.

[0049] Specifically, the outer surface of the probe fixture has at least one protrusion; the sample holder has a groove that mates with the protrusion; when the probe is replaced, the connecting rod applies an external force to the probe fixture, and the protrusion and groove are designed to resist this external force and prevent the probe fixture from unexpectedly detaching from the sample holder. The length direction of the groove is parallel to the assembly direction of the probe fixture and the connecting rod; the protrusion and groove are used to hold the probe fixture in place in the sample holder in a direction perpendicular to the assembly direction. Furthermore, if the connection between the connecting rod and the second slot 21 is configured as a rotary connection, the protrusion and groove can also restrict the probe fixture from rotating with the connecting rod, allowing the probe fixture and the connecting rod to be installed smoothly.

[0050] Furthermore, the inner wall of the second slot 21 is provided with an internal thread, and the end of the connecting rod near the second slot 21 is provided with an external thread that mates with the internal thread; the driving device is used to rotate the connecting rod to assemble or disassemble the connecting rod and the probe fixture. It can be understood that the driving device can be configured to rotate the connecting rod about its central axis, thereby assembling or disassembling the connecting rod and the probe fixture by rotating the connecting rod so that the external thread at one end of the connecting rod mates with the internal thread of the second slot 21.

[0051] In one embodiment of this application, there are multiple probe fixtures, which are respectively disposed in different areas of the sample holder; the driving device is also used to drive the connecting rod to select the probe fixtures in different areas for assembly.

[0052] During sample testing, the probes used will experience varying degrees of wear due to factors such as usage intensity and time. The time it takes for a probe to need replacement is inconsistent and unpredictable. Therefore, to ensure that probes can be replaced using the probe replacement system described in the above embodiments whenever a probe is damaged, multiple probe fixture accommodating positions can be provided on the sample holder. Each probe fixture equipped with a new probe is positioned in a different area of ​​the sample holder with specific location information. The driving device has a selection function; that is, the driving connecting rod selects the probe according to its specific location. After selection, the connecting rod and probe fixture can be assembled. In addition, the sample holder should also have at least one empty probe fixture accommodating position. When a probe needs to be replaced, the driving device must first disassemble the probe fixture with the worn probe and place it in the empty accommodating position of the sample holder.

[0053] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," or "specific example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments. In addition, those skilled in the art can combine and integrate the different embodiments or examples described in this specification.

[0054] The above description, based on the embodiments shown in the drawings, details the structure, features, and effects of this application. The above description is only a preferred embodiment of this application, but this application does not limit the scope of implementation to what is shown in the drawings. Any changes made in accordance with the concept of this application, or modifications to equivalent embodiments, that do not exceed the spirit covered by the specification and drawings, should be within the protection scope of this application.

Claims

1. A probe tool for mounting a probe to a connecting rod, characterized by, The probe tool comprises: a first connecting part (1) provided with a first hole (11) for accommodating a part of a probe and a fixing element (3) for fixing the probe to the first connecting part (1); a second connecting part (2) connected to the first connecting part (1), the second connecting part (2) being provided with a second hole (21) for detachably connecting with a connecting rod; wherein the opening direction of the first hole (11) is opposite to the opening direction of the second hole (21).

2. The probe tool of claim 1, wherein, The first connecting part (1) and the second connecting part (2) are detachably connected; or, the first connecting part (1) and the second connecting part (2) are integrally formed.

3. The probe tool of claim 1, wherein, The material of the probe tool is one of iron, cobalt and nickel.

4. The probe tool of claim 1, wherein, The first connecting part (1) further comprises a threaded hole communicating with the first hole (11) and the outer surface of the probe tool, and the fixing element (3) comprises a stud cooperating with the threaded hole, the stud being used for fixing the probe in the first hole (11) by abutting.

5. The probe tool of claim 1, wherein, The inner wall of the second hole (21) is provided with an internal thread for threadedly connecting with the connecting rod.

6. A needle changing system characterized by, The probe tool comprises: the probe tool of any one of claims 1 to 5; a sample holder detachably connected with the probe tool; a driving device provided with a connecting rod, the driving device being used for driving the connecting rod to detach or assemble with the probe tool.

7. The needle changing system of claim 6, wherein, The outer surface of the probe tool is provided with at least one protrusion. The sample holder is provided with a groove cooperating with the protrusion, wherein the protrusion and the groove cooperate to detachably connect the probe tool with the sample holder.

8. The needle changing system of claim 7, wherein, The length direction of the groove is parallel to the assembling direction of the probe tool and the connecting rod.

9. The needle changing system of claim 8, wherein, The inner wall of the second hole (21) is provided with an internal thread, and the end of the connecting rod close to the second hole (21) is provided with an external thread cooperating with the internal thread. The driving device is used for rotating the connecting rod to threadedly connect the connecting rod with the probe tool.

10. The needle changing system of claim 7, wherein, There are a plurality of probe tools, and each of the probe tools is arranged in a different area of the sample holder.

Images