Light spot shaping device for preparing laser printing support plate
The spot shaping device, composed of a laser and shaping components, enables high-precision microgroove processing, solves the problem of insufficient sidewall smoothness in traditional laser processing, avoids the use of hazardous chemicals, and improves the quality and efficiency of laser printing.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-03
- Publication Date
- 2026-03-13
AI Technical Summary
Traditional laser processing technology struggles to ensure smooth sidewalls in microgroove processing, especially as the width of the microgroove decreases. The handling of HF acid solution presents risks and challenges in precise control, affecting the quality and efficiency of laser printing.
A spot shaping device consisting of a laser, shaping components, and a focusing module uses diffractive optical elements or a spatial light modulator to achieve a multi-focal two-dimensional distribution. By controlling the energy and position of each focal point, a high-precision microgroove is formed, avoiding the use of HF acid solution.
It significantly improves the smoothness of the microgroove sidewalls, reduces production costs and environmental risks, improves the quality and efficiency of laser printing, and adapts to the processing needs of various microgroove shapes and sizes.
Smart Images
Figure CN223993016U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of laser processing technology, and in particular to a spot shaping device for preparing laser printing substrates. Background Technology
[0002] In the field of laser processing technology, especially laser printing technology, the processing quality of microgrooves has a crucial impact on the performance of the final product. Although traditional laser grooving methods and optical shaping techniques have made some progress in improving grooving efficiency and quality, it is difficult to guarantee the smoothness of the sidewalls when processing microgrooves, especially when the width of the microgrooves is getting smaller and smaller. The roughness of the sidewalls not only affects the transfer efficiency of the paste, but may also lead to difficulties in the laser printing process.
[0003] In related technologies, chemical treatment methods, such as acid etching with HF acid solution, are commonly used to improve the smoothness of the microgroove sidewalls. However, this method has several problems: First, HF acid solution is a hazardous chemical, posing potential hazards to operators and the environment; second, as the width of the microgroove decreases, it becomes difficult to precisely control the HF acid solution, which can easily lead to an enlarged microgroove opening, failing to meet processing requirements. Utility Model Content
[0004] The main purpose of this invention is to propose a spot shaping device for preparing laser printing substrates, which aims to improve the smoothness of the sidewalls of the microgrooves formed by the device.
[0005] To achieve the above objectives, the present invention proposes a spot shaping device for preparing laser-printed substrates, comprising:
[0006] A laser, the laser being used to output a laser beam;
[0007] A shaping device, wherein the shaping device is used to shape the laser beam into a multi-focal two-dimensional distribution, and is used to design and control the energy of each of the focal points; and
[0008] A focusing module is used to focus the shaped laser beam onto the surface of the substrate to be processed.
[0009] In one embodiment, the shaping device is a diffractive optical element.
[0010] In one embodiment, the shaping device is a spatial light modulator.
[0011] In one embodiment, the laser beam shaping device for preparing the laser-printed substrate includes a beam expanding module located between the laser and the shaping device, and used to expand the laser beam.
[0012] In one embodiment, the focusing module is a high NA value objective lens.
[0013] In one embodiment, the laser beam shaping device for preparing the laser printing substrate includes a reflector disposed between the shaping device and the focusing module, and is used to guide the shaped laser beam to the focusing module.
[0014] In one embodiment, the multifocal two-dimensional distribution is designed as a V-shaped distribution, and the energy of the focal points gradually decreases from the center to both sides.
[0015] In one embodiment, the multifocal two-dimensional distribution is designed as a rectangular matrix distribution, and the energy of the focal points gradually decreases from the central column to the two side columns.
[0016] In one embodiment, the multifocal two-dimensional distribution is designed as a rectangular matrix distribution, wherein the energy of the focal points gradually decreases from the two central columns to the outer columns; and / or
[0017] The multifocal two-dimensional distribution is designed as a swallowtail matrix distribution, and the energy of the focal points gradually decreases from the two central columns to the two side columns.
[0018] In one embodiment, the multifocal two-dimensional distribution is designed as a rectangular matrix distribution, with each focal point having the same energy.
[0019] In this invention, the laser (such as a solid-state laser, fiber laser, or CO2 laser) outputs a high-energy-density laser beam. The shaping device can use diffractive optical elements or spatial light modulators to achieve a multi-focal two-dimensional distribution on the focal plane, such as a V-shaped, rectangular, or dovetail distribution. The energy of each focal point is designed and controlled, with the central focal point having higher energy for etching the depth of the microgroove, and the two side focal points having lower energy for polishing the sidewalls of the microgroove. The focusing module can be a high-NA focusing lens to focus the shaped laser beam onto the surface of the substrate to be processed, ensuring that the focused spot can accurately act on the surface of the substrate to form a microgroove of a specific shape. By employing a multi-focal two-dimensional distribution design, particularly by controlling the polishing effect of the low-energy focal points on both sides on the sidewalls of the microgroove, the smoothness of the microgroove sidewalls is significantly improved, avoiding the use of hazardous chemicals such as HF acid solution, and reducing production costs and environmental risks. High-precision microgroove processing is achieved through precise control of the energy and distribution of each focal point using shaping devices, improving the quality and efficiency of laser printing. Furthermore, the distribution and energy of the focal points can be flexibly designed according to different processing requirements, adapting to various microgroove shapes and sizes. Attached Figure Description
[0020] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.
[0021] Figure 1 A schematic diagram of an embodiment of the laser spot shaping device for preparing laser printing substrates provided by this utility model;
[0022] Figure 2 This invention provides a schematic diagram of the multifocal two-dimensional distribution of multiple carrier plates to be processed.
[0023] Explanation of icon numbers:
[0024] 100. A spot shaping device for preparing laser-printed substrates; 1. Laser; 2. Beam expander module; 3. Shaping device; 4. Mirror; 5. Focusing module.
[0025] The realization of the purpose, functional features and advantages of this utility model will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation
[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.
[0027] It should be noted that if the embodiments of this utility model involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a specific posture. If the specific posture changes, the directional indicators will also change accordingly.
[0028] Furthermore, if the embodiments of this utility model involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the use of "and / or" or "and / or" throughout the text includes three parallel solutions. For example, "A and / or B" includes solution A, solution B, or a solution where both A and B are satisfied simultaneously. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this utility model.
[0029] This utility model proposes a spot shaping device 100 for preparing laser printing substrates.
[0030] Please see Figure 1 In one embodiment of this utility model, the laser spot shaping device 100 for preparing laser printing substrate includes a laser 1, a shaping device 3, and a focusing module 5. The laser 1 is used to output a laser beam; the shaping device 3 is used to shape the laser beam into a multi-focal two-dimensional distribution and to design and control the energy of each focal point; the focusing module 5 is used to focus the shaped laser beam onto the surface of the substrate to be processed.
[0031] In this utility model, the laser 1 (such as a solid-state laser 1 or a fiber laser 1) outputs a high-energy-density laser beam; the shaping device 3 can use diffractive optical elements or spatial light modulators to achieve a multi-focal two-dimensional distribution on the focal plane, such as a V-shaped, rectangular, or dovetail distribution, and the energy of each focal point is designed and controlled. The central focal point has higher energy and can be used to etch the depth of the microgroove, while the two side focal points have lower energy and are used to polish the sidewalls of the microgroove; the focusing module 5 can be a high-NA focusing lens to focus the shaped laser beam onto the surface of the substrate to be processed, ensuring that the focused spot can accurately act on the surface of the substrate to form a microgroove of a specific shape. By employing a multi-focal two-dimensional distribution design, particularly by controlling the polishing effect of the low-energy focal points on both sides on the sidewalls of the microgroove, the smoothness of the microgroove sidewalls is significantly improved, avoiding the use of hazardous chemicals such as HF acid solution, and reducing production costs and environmental risks. The shaping device 3 precisely controls the energy and distribution of each focal point, achieving high-precision microgroove processing and improving the quality and efficiency of laser printing. The distribution and energy of the focal points can be flexibly designed according to different processing requirements, adapting to the requirements of various microgroove shapes and sizes.
[0032] In one embodiment, the shaping device 3 is a diffractive optical element (DOE). By etching specific microstructures on the surface of the DOE, the laser beam is shaped using the principle of diffraction. These microstructures can decompose the incident single laser beam into multiple diffracted beams with specific intensities and directions, forming a specific multi-focal two-dimensional distribution. By adjusting the microstructures on the DOE, the energy of each focal point can be designed and controlled. The central focal point has higher energy and can be used to etch the depth of the microgroove, while the two side focal points have lower energy and can be used to polish the sidewalls of the microgroove, significantly improving the smoothness of the sidewalls. By precisely controlling the energy and distribution of each focal point, high-precision microgroove processing is achieved, meeting the processing requirements of increasingly smaller microgroove widths and improving the quality and efficiency of laser printing. The distribution and energy of the focal points can be flexibly designed according to different processing requirements. For example, the number, position, and energy distribution of the focal points can be adjusted to adapt to different microgroove shapes and size requirements.
[0033] In another embodiment, the shaping device 3 is a spatial light modulator (SLM). A SLM is a dynamic optical element that, by controlling a pixelated electrode array, can adjust the phase and amplitude of a laser beam in real time, thereby shaping the laser beam. The SLM can dynamically adjust the beam distribution to achieve a specific multi-focal two-dimensional distribution. By designing the modulation mode of the SLM, the incident single laser beam can be decomposed into multiple beams with specific intensities and directions. By controlling the pixelated electrodes of the SLM, the energy of each focal point can be precisely controlled. The higher energy of the central focal point can be used to etch the depth of the microgroove, while the lower energy of the two side focal points is used to polish the sidewalls of the microgroove, significantly improving the smoothness of the microgroove sidewalls. By precisely controlling the energy and distribution of each focal point, high-precision microgroove processing is achieved. The dynamic adjustment capability of the SLM allows the beam distribution to be optimized in real time according to the actual processing conditions, improving the flexibility and accuracy of the processing. The focal point distribution and energy can be flexibly designed according to different processing requirements. The dynamic modulation capability of the SLM enables it to adjust the beam distribution in real time to adapt to different microgroove shapes and sizes.
[0034] Further, please refer to Figure 1In one embodiment of this utility model, the laser beam shaping device 100 for preparing a laser printing substrate includes a beam expanding module 2. The beam expanding module 2 is located between the laser 1 and the shaping device 3 and is used to expand the laser beam. The laser beam first passes through the beam expanding module 2, which expands the laser beam and adjusts the beam diameter and divergence angle to meet the requirements of the subsequent shaping device 3. The function of the beam expanding module 2 is to ensure that the beam has a suitable diameter and divergence angle when it enters the shaping device 3, thereby improving the beam quality. The beam expanding module 2 can adjust the diameter and divergence angle of the beam according to the requirements of the shaping device 3, ensuring that the laser beam can be effectively shaped and controlled, thereby achieving a high-precision beam distribution.
[0035] In one embodiment of this invention, the focusing module 5 is a high-NA objective lens. A high-NA objective lens can focus the shaped laser beam onto the surface of the substrate to be processed, forming a high-precision spot, which helps to achieve high-precision microgroove processing, improving processing quality and efficiency. By using a high-NA objective lens, the beam can be focused more precisely onto the surface of the substrate to be processed, forming a smaller spot, which helps to improve the smoothness of the microgroove sidewalls, reduce dependence on chemical treatments (such as HF acid solution), and lower production costs and environmental risks. The use of a high-NA objective lens not only improves focusing accuracy but also enhances the flexibility of the device. By adjusting the focal length and other parameters of the objective lens, it can adapt to different processing needs and achieve microgroove processing of various shapes and sizes.
[0036] Please see Figure 1 In one embodiment of this utility model, the laser spot shaping device 100 for preparing a laser-printed substrate includes a reflector 4, which is disposed between the shaping device 3 and the focusing module 5, and is used to guide the shaped laser beam to the focusing module 5. The laser 1 outputs a high-energy-density laser beam. The laser beam first passes through the beam expander 2, which expands the beam and adjusts its diameter and divergence angle to match the requirements of the shaping device 3 for the incident spot size. The expanded beam then passes through the shaping device 3, which shapes the laser beam into a basic multi-focal two-dimensional distribution and can dynamically adjust the position and energy of each focal point, causing the energy of the focal points to gradually decrease from the central column to the side columns. The laser beam adjusted by the shaping device 3 enters the reflector 4, which guides the beam to the focusing module 5. The focusing module 5 focuses the beam onto the surface of the substrate to be processed, forming a microgroove of a specific shape. The use of reflector 4 makes the beam guidance more flexible, and the beam propagation direction can be adjusted to ensure that the beam can accurately enter the focusing module 5. This helps to optimize the optical path design and improve the flexibility and adaptability of the device. There can be one or more reflectors 4, and the specific number and configuration depend on the actual optical path design.
[0037] Please see Figure 2 In one embodiment, the multi-focal two-dimensional distribution is designed as a V-shaped distribution, with the energy of the focal points gradually decreasing from the center to both sides. By designing a V-shaped multi-focal two-dimensional distribution and making the energy of the focal points gradually decrease from the center to both sides, the high-energy focal points in the middle are used to etch the depth of the microgroove, while the low-energy focal points on both sides are used to polish the sidewalls of the microgroove, ultimately forming a V-shaped groove.
[0038] Please see Figure 2 In one embodiment of this utility model, the multi-focal two-dimensional distribution is designed as a rectangular matrix distribution, and the energy of the focal points gradually decreases from the central column to the two side columns. By designing a rectangular matrix distribution (N*M rectangular distribution, where N and M are integers, and the specific number can be designed according to actual conditions) for a multi-focal two-dimensional distribution, and making the energy of the focal points gradually decrease from the central column to the two side columns, the high-energy focal points in the middle are used to etch the depth of the microgroove, and the low-energy focal points on both sides are used to polish the sidewalls of the microgroove, ultimately forming a V-shaped groove.
[0039] Please see Figure 2 In one embodiment of this utility model, the multi-focal two-dimensional distribution is designed as a rectangular matrix distribution (N*M rectangular distribution, where N and M are integers, and the specific number can be designed according to actual conditions). The energy of the focal points gradually decreases from the two central columns to the two side columns. By designing a rectangular matrix distribution for the multi-focal two-dimensional distribution and making the energy of the focal points gradually decrease from the two central columns to the two side columns, the high-energy focal points in the middle are used to etch the depth of the microgroove, and the low-energy focal points on both sides are used to polish the sidewalls of the microgroove, ultimately forming an arched groove.
[0040] Please see Figure 2 In one embodiment, the multi-focal two-dimensional distribution is designed as a swallowtail matrix distribution, where the energy of the focal points gradually decreases from the two central columns to the two side columns. By designing a swallowtail matrix distribution (a swallowtail N*M matrix distribution, where N and M are integers, and the specific number can be designed according to actual conditions) and making the energy of the focal points gradually decrease from the two central columns to the two side columns, the high-energy focal points in the middle are used to etch the depth of the microgroove, while the low-energy focal points on both sides are used to polish the sidewalls of the microgroove, ultimately forming an arched groove.
[0041] Please see Figure 2 In one embodiment of this utility model, the multifocal two-dimensional distribution is designed as a rectangular matrix distribution (N*M rectangular distribution, where N and M are integers, and the specific number can be designed according to actual conditions), and the energy of each focal point is the same. By designing a rectangular matrix distribution for the multifocal two-dimensional distribution and ensuring that the energy of each focal point is the same, a trapezoidal groove is ultimately formed.
[0042] The above description is merely an exemplary embodiment of the present utility model and does not limit the patent scope of the present utility model. Any equivalent structural transformations made based on the technical concept of the present utility model and the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present utility model.
Claims
1. A faceting device for preparing a laser printed carrier sheet, characterized in that The application relates to a laser spot shaping device for preparing a laser printing carrier plate. The laser spot shaping device comprises: a laser for outputting a laser beam; a shaping device for shaping the laser beam into a multi-focus two-dimensional distribution and for designing and regulating the energy of each focus point; and a focusing module for focusing the shaped laser beam onto the surface of a carrier plate to be processed. The focusing module is a high-NA objective lens. The shaping device is a diffractive optical element; or The shaping device is a spatial light modulator. The multi-focus two-dimensional distribution is designed as a V-shaped distribution, and the energy of the focus points gradually decreases from the center to both sides; or The multi-focus two-dimensional distribution is designed as a rectangular matrix distribution, and the energy of the focus points gradually decreases from the center column to both side columns; or The multi-focus two-dimensional distribution is designed as a rectangular matrix distribution, and the energy of the focus points gradually decreases from the center two columns to both side columns; or The multi-focus two-dimensional distribution is designed as a swallow-tail matrix distribution, and the energy of the focus points gradually decreases from the center two columns to both side columns; or 2. The apparatus for preparing a laser printing mask according to claim 1, wherein The multi-focus two-dimensional distribution is designed as a rectangular matrix distribution, and the energy of each focus point is the same.
3. The apparatus for preparing a laser printing mask according to claim 1, wherein The laser spot shaping device for preparing a laser printing carrier plate comprises a beam expansion module located between the laser and the shaping device and used for expanding the laser beam. The laser spot shaping device for preparing a laser printing carrier plate comprises a reflecting mirror arranged between the shaping device and the focusing module and used for guiding the shaped laser beam to the focusing module.