Multi-suction-nozzle calibration device and test sorting machine

By using the visual inspection and fine-tuning mechanism of the multi-nozzle calibration device, the problems of insufficient calibration accuracy and low efficiency in the existing technology are solved, and accurate and efficient nozzle calibration is achieved.

CN223996675UActive Publication Date: 2026-03-17HANGZHOU CHANGCHUAN TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-01-17
Publication Date
2026-03-17

AI Technical Summary

Technical Problem

The calibration accuracy of existing multi-nozzle robotic arms is insufficient, and the calibration process is cumbersome, making it impossible to quantify the direction and size of deviations, resulting in low calibration efficiency.

Method used

A multi-nozzle calibration device is adopted, including a moving mechanism, a vision inspection mechanism, and a fine-tuning mechanism. The deviation value of the nozzle is calculated by vision inspection, and the nozzle position is adjusted in the intersecting direction by the fine-tuning mechanism to achieve accurate calibration.

Benefits of technology

It improves the accuracy and efficiency of nozzle calibration, quantifies the direction and size of deviations, simplifies the calibration process, and reduces reliance on part machining accuracy and fit errors.

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Abstract

The utility model relates to a multi-suction-nozzle calibration device and a test sorting machine. The multi-suction-nozzle calibration device is used for calibrating the relative positions of the multiple suction nozzles. The multi-suction-nozzle calibration device comprises a moving mechanism, a visual inspection mechanism and a fine adjustment mechanism. The moving mechanism is connected with at least one of the suction nozzles and the visual detection mechanism, and the moving mechanism drives the suction nozzles and the visual detection mechanism to move relatively, so that the multiple suction nozzles appear in the detection range of the visual detection mechanism in sequence. The visual detection mechanism detects the relative coordinate position of each suction nozzle and calculates the deviation value of each suction nozzle. The fine adjustment mechanism is connected to the multiple suction nozzles, and the fine adjustment mechanism is configured to be capable of driving the suction nozzles to move in the two intersecting directions so as to adjust the positions of the suction nozzles. According to the multi-suction-nozzle calibration device and the test sorting machine provided by the invention, the accuracy and the calibration efficiency of suction nozzle calibration can be improved.
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Description

Technical Field

[0001] This application relates to the field of semiconductor testing technology, and in particular to a multi-nozzle calibration device and a test sorting machine. Background Technology

[0002] Currently, the sorting and transfer of ICs (Integrated Circuits, chips) are typically performed using robotic arms. In one existing technology, the robotic arm includes multiple suction nozzles arranged in an array, with each nozzle picking up one IC. This allows the robotic arm to pick up multiple ICs simultaneously in a single operation, significantly improving production efficiency. However, the consistency of spacing and collinearity among the multiple suction nozzles is a crucial factor affecting the suction stability. Poor spacing or collinearity can cause the suction position to deviate from the center of the IC, resulting in poor suction stability, skewed ICs, and difficulties in subsequent unloading. Therefore, the consistency of the suction nozzles needs to be calibrated before a multi-nozzle robotic arm is put into use.

[0003] Current technology primarily uses a pin-insertion calibration method. Specifically, a calibration plate with multiple precisely positioned pin holes is used. The nozzle end has pins (positioning pins) that can be inserted into these pin holes. Calibration is achieved by inserting the pins at the nozzle end into the pin holes of the calibration plate. If all pins can be inserted, the calibration is successful; otherwise, it fails. However, this pin-insertion calibration method has several drawbacks. First, it requires high precision in the machining of the pin holes on the calibration plate and the pins connected to the nozzle end. Insufficient precision in these areas leads to inaccurate nozzle calibration. Second, the calibration process is not quantifiable; it only determines whether a pin can be inserted. When a pin cannot be inserted, it is difficult to determine the direction of deviation causing the insertion failure, resulting in a cumbersome and time-consuming adjustment process.

[0004] Therefore, it is necessary to propose a new technical solution to overcome the shortcomings of existing technologies. Utility Model Content

[0005] Based on this, this application provides a multi-nozzle calibration device and a test sorting machine, which can improve the accuracy and efficiency of nozzle calibration.

[0006] Therefore, this application adopts the following technical solution: a multi-nozzle calibration device for calibrating the relative positions of multiple nozzles. The multi-nozzle calibration device includes a moving mechanism, a vision detection mechanism, and a fine-tuning mechanism. The moving mechanism is connected to at least one of the nozzles and the vision detection mechanism. The moving mechanism drives the nozzles to move relative to the vision detection mechanism so that the multiple nozzles appear sequentially within the detection range of the vision detection mechanism. The vision detection mechanism detects the relative coordinate position of each nozzle and calculates its deviation value. The fine-tuning mechanism is connected to the multiple nozzles and is configured to drive the nozzles to move in two intersecting directions to adjust the position of the nozzles.

[0007] In some embodiments, the fine-tuning mechanism includes:

[0008] A fixed connector is connected to the suction nozzle, and the two are fixed relative to each other;

[0009] A movable connector is connected to the fixed connector, and the two are movable relative to each other; and

[0010] A first adjusting member is disposed between the fixed connecting member and the movable connecting member, and the first adjusting member drives the fixed connecting member and the suction nozzle connected thereto to move relative to the movable connecting member.

[0011] In some embodiments, the movable connector includes an upper connector and an adapter that are movable relative to each other, the adapter being connected between the upper connector and the fixed connector.

[0012] In some embodiments, the fine-tuning mechanism includes a second adjusting member disposed between the upper connector and the adapter to drive the adapter to move relative to the upper connector.

[0013] In some embodiments, the adapter and the fixed connector have relative movement space in a first direction and are relatively fixed in a second direction perpendicular to the first direction. The first adjusting member drives the fixed connector and its connected nozzle to move relative to the adapter in the first direction; and / or

[0014] The adapter and the upper connector have relative movement space in the second direction, and are relatively fixed in the first direction perpendicular to the second direction. The second adjusting member drives the adapter and its fixed connector and nozzle to move relative to the upper connector in the second direction.

[0015] In some embodiments, the adapter and the fixed connector are provided with a first slider and a first groove that cooperate with each other, and the first slider and the first groove can slide relative to each other only in the first direction; the adapter and the upper connector are provided with a second slider and a second groove that cooperate with each other, and the second slider and the second groove can slide relative to each other only in the second direction.

[0016] In some embodiments, the first and second adjusting members are adjusting screws.

[0017] In some embodiments, the first adjusting member is threadedly connected to the fixed connecting member, and the end of the first adjusting member abuts against the adapter; the second adjusting member is threadedly connected to the upper connecting member, and the end of the second adjusting member abuts against the adapter.

[0018] In some embodiments, the fine-tuning mechanism includes a first connecting bolt and a second connecting bolt, the first connecting bolt connecting the adapter and the fixed connector in a third direction perpendicular to the first and second directions, and the second connecting bolt connecting the upper connector and the adapter in the third direction.

[0019] This application also adopts the following technical solution: a test sorting machine, which includes a frame, a robotic arm movably connected to the frame, and a multi-nozzle calibration device as described in any of the above embodiments, wherein the plurality of nozzles are connected to the robotic arm and are driven by the robotic arm to pick up test elements.

[0020] The multi-nozzle calibration device provided in this application includes a vision inspection mechanism and a fine-tuning mechanism. The vision inspection mechanism detects the relative coordinate position of each nozzle and calculates its deviation value. This not only detects whether there is a deviation in the nozzle position, but also quantifies the direction and size of the deviation, allowing the operator to clearly understand how to adjust it. Then, the fine-tuning mechanism can drive the nozzle to move in two intersecting directions to adjust the position of the nozzle. Compared with the traditional pin calibration method, which can only determine whether it is working or not and cannot guide the operator to make adjustments, the calibration process deviation of this application can be quantified, and the calibration does not need to focus on the size of the part fitting error, which can improve the calibration efficiency and accuracy. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this application or the conventional technology, the drawings used in the description of the embodiments or the conventional technology will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a perspective view of an embodiment of the multi-nozzle calibration device of this application.

[0023] Figure 2 This is a perspective view of another embodiment of the multi-nozzle calibration device of this application.

[0024] Figure 3 This is a three-dimensional assembly diagram of the fine-tuning mechanism and the nozzle in one embodiment of the multi-nozzle calibration device of this application.

[0025] Figure 4 This is an exploded perspective view of the fine-tuning mechanism and the nozzle in one embodiment of the multi-nozzle calibration device of this application.

[0026] Figure 5 This is a cross-sectional view of the fine-tuning mechanism and the nozzle in one embodiment of the multi-nozzle calibration device of this application.

[0027] Figure 6 This is another cross-sectional view of the fine-tuning mechanism and the nozzle in one embodiment of the multi-nozzle calibration device of this application.

[0028] Figure 7 This is a schematic diagram showing the arrangement of multiple nozzles in one embodiment of the multi-nozzle calibration device of this application.

[0029] The components are labeled as follows: 100, multi-nozzle calibration device; 10, nozzle; 20, visual inspection mechanism; 201, inspection window; 30, fine-tuning mechanism; 31, fixed connector; 310, airway interface; 311, first slider; 312, first adjusting plate; 313, first threaded hole; 32, movable connector; 33, adapter; 331, first slide groove; 332, limiting plate; 333, first operating hole; 334, second slider; 335, limiting cavity; 34, upper connector; 341, second slide groove; 342, second adjusting plate; 35, first adjusting component; 36, second adjusting component; 371, first connecting bolt; 372, second connecting bolt. Detailed Implementation

[0030] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0031] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on the other component or there may be an intermediate component. When a component is considered to be "connected to" another component, it can be directly connected to the other component or there may be an intermediate component present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application's specification are for illustrative purposes only and do not represent the only possible implementation.

[0032] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0033] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature and the second feature are in indirect contact through an intermediate medium. Furthermore, "above," "over," and "on top" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0034] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in this application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The term "and / or" as used in this application includes any and all combinations of one or more of the associated listed items.

[0035] Please see Figures 1 to 7As shown, this application provides a multi-nozzle calibration device 100 for calibrating the relative positions of multiple nozzles 10. The multi-nozzle calibration device 100 includes a moving mechanism, a vision inspection mechanism 20, and a fine-tuning mechanism 30. The moving mechanism is connected to at least one of the nozzles 10 and the vision inspection mechanism 20, driving relative movement between the nozzles 10 and the vision inspection mechanism 20, so that the multiple nozzles 10 sequentially appear within the detection range of the vision inspection mechanism 20. The vision inspection mechanism 20 detects the relative coordinate position of each nozzle 10 and calculates its deviation value. The fine-tuning mechanism 30 is connected to the multiple nozzles 10 and can drive the nozzles 10 to move in two intersecting directions to adjust the position of the nozzles 10.

[0036] The multi-nozzle calibration device 100 provided in this application uses a vision inspection mechanism 20 to detect the relative coordinate position of each nozzle 10 and calculate its deviation value. This not only detects whether the nozzle 10 is misaligned, but also quantifies the direction and size of the deviation, allowing operators to clearly understand how to adjust it. Then, a fine-tuning mechanism 30 drives the nozzle 10 to move in two intersecting directions to adjust its position. Compared to traditional pin-based calibration methods, where calibration accuracy is limited by the processing precision of the pins and calibration board, and can only determine whether it works or not without guiding operators to make adjustments, the calibration process deviation of this application is quantifiable, and calibration does not require attention to the processing precision of parts or the magnitude of fitting errors, thus improving calibration efficiency and accuracy.

[0037] Please see Figure 7 As shown, in one embodiment, the robotic arm includes eight suction nozzles. Figure 7 The eight nozzles, designated 1 to 8, are arranged in two rows and four columns. Nozzles 1-4 and 5-8 are in the same row. Adjusting the nozzles along the X direction (as shown in the figure) adjusts the spacing between adjacent nozzles in the same row. Adjusting them along the Y direction (as shown in the figure) adjusts the collinearity of multiple nozzles in the same row. During use after calibration, the eight nozzles can be configured to move with variable spacing in the X or Y direction, or in both directions, or the spacing can be fixed. For nozzles capable of variable spacing, they can be configured to allow all nozzles to move, or to use one or a column of nozzles as a fixed reference point while the others move. In short, this application does not limit the movement of the nozzles during use after calibration. Furthermore, the number and arrangement of the nozzles are not limited to the aforementioned two rows and four columns; in other embodiments, any other row and column arrangement is possible.

[0038] Please refer to it again. Figure 1 and Figure 2As shown, the visual inspection mechanism 20 detects the position of the nozzle 10 to be inspected based on optical components, which can be achieved through methods such as taking pictures or using light sensors. In this embodiment, the visual inspection mechanism 20 includes a CCD (Charge Coupled Device) module and a host system. The host system includes a housing, a lens group disposed within the housing, and cables, connectors, and electrical components required for operation. In this embodiment, to meet portability requirements, the lens group adopts an angled reflection method, such as... Figure 1 As shown, the visual inspection mechanism 20 has an upward-facing inspection window 201, the length of the main system is horizontal, the optical axis of a portion of the lenses in the lens group extends horizontally, and the light changes its transmission direction through a reflector at the corner. This arrangement can reduce the height of the main system, making the visual inspection mechanism 20 more compact and portable.

[0039] Although not shown in the figure, the moving mechanism is readily understood to be a collection of components capable of driving relative movement between the suction nozzle 10 and the vision inspection mechanism 20. In one embodiment, the vision inspection mechanism 20 remains fixed, and the moving mechanism drives each suction nozzle 10 to move so that multiple suction nozzles 10 sequentially appear within the detection range of the detection window 201 of the vision inspection mechanism 20; in another embodiment, the moving mechanism drives the vision inspection mechanism 20 to move so that multiple suction nozzles 10 sequentially appear within the detection range of the detection window 201 of the vision inspection mechanism 20; in still other embodiments, the moving mechanism can drive the suction nozzles 10 and the vision inspection mechanism 20 to move separately. In some embodiments, the moving mechanism may specifically be a synchronous belt drive mechanism mainly composed of a motor, synchronous pulley, synchronous belt, etc.; or a gear drive mechanism mainly composed of a motor, gear set or gear rack set; or a worm gear mechanism driven by a motor; or a lead screw mechanism driven by a motor, etc. In summary, the moving mechanism can be connected to at least one of the nozzle 10 and the vision inspection mechanism 20 to drive relative movement between the nozzle 10 and the vision inspection mechanism 20; this application does not limit the specific configuration of the moving mechanism.

[0040] Please see Figure 1 and Figure 7 As shown, when calibrating multiple nozzles 10, the vision inspection mechanism 20 is first fixed, and the moving mechanism drives nozzle 1 to move into the inspection window 201 of the vision inspection mechanism 20, making nozzle 1 as close as possible to the center of the field of view of the inspection window 201. The vision inspection mechanism 20 identifies the center of the circle through the shape of the nozzle 10 and records the coordinate point, setting this point as the reference nozzle point. Since this point is set as the reference nozzle point, the deviation of nozzle 10 in both the X and Y directions is 0.

[0041] Then, nozzle 10 calibrates by moving a robotic arm a preset distance along the X direction. This preset distance is the target distance between two adjacent nozzles 10 in the same row, for example, 40mm, so that nozzle 10 appears in the field of view of the detection window 201. A real-time photo is taken, displaying the real-time coordinates. By comparing the coordinates of nozzle 10 with those of the reference nozzle, the deviation value of nozzle 10 can be automatically calculated. The sign of the deviation value represents the direction of the deviation, and the absolute value represents the size of the deviation. Based on the sign and size of the deviation value, the position of nozzle 10 is adjusted by the fine-tuning mechanism 30. After the position of nozzle 10 is adjusted, a real-time photo is taken again, and the coordinates and deviation value of nozzle 10 are updated synchronously. This process can be repeated multiple times until the position of nozzle 10 meets the requirements. In this embodiment, a deviation value within ±0.02 is considered sufficient for the position to meet the requirements. During the calibration process, the robotic arm can move back and forth several times to eliminate the error of the vision inspection mechanism 20 itself by repeatedly calculating the nozzle position.

[0042] The subsequent adjustment of nozzles 3 and 4 is performed in the same way as the adjustment of nozzle 2. In a specific experimental embodiment, the coordinates and deviation values ​​of nozzles 1 to 4, recorded by the visual inspection mechanism 20, are shown in the table below.

[0043] nozzle name X-coordinate / mm Y-coordinate / mm X-axis deviation / mm Y-axis deviation / mm Reference nozzle 5.32 4.77 0 0 No. 2 suction nozzle 5.30 4.85 -0.02 +0.08 No. 3 suction nozzle 5.44 4.62 +0.12 -0.15 No. 4 suction tip 5.50 4.86 +0.18 +0.09

[0044] After the above operations, the positions of the four suction nozzles 10 (numbers 1-4) in the same row are adjusted. Then, the positions of the four suction nozzles 10 (numbers 5-8) in the other row are adjusted. During adjustment, using one of the adjusted suction nozzles 10 (numbers 1-4) as a reference (e.g., nozzle 1), the moving mechanism drives the four suction nozzles 10 (numbers 5-8) in the other row to move a preset distance along the Y direction. This preset distance is the target spacing between two adjacent suction nozzles 10 in the same column, for example, 60mm. This ensures that nozzle 10 (number 5) appears in the field of view of the detection window 201. Clicking "real-time capture" displays the real-time coordinates. By comparing the coordinates of nozzle 10 (number 5) with the coordinates of the reference nozzle point, the deviation value of nozzle 10 (number 5) can be automatically calculated. The sign of the deviation value indicates the direction of the deviation, and the absolute value of the deviation value indicates the size of the deviation. Based on the sign and magnitude of the deviation value, the position of nozzle 5 10 is adjusted via fine-tuning mechanism 30. After the position of nozzle 5 10 is adjusted, real-time photo capture is clicked again, and the coordinate value and deviation value of nozzle 5 10 are updated synchronously. This process can be repeated multiple times until the position of nozzle 5 10 meets the requirements. In this embodiment, a deviation value within ±0.02 is considered sufficient to meet the position requirements. Then, using nozzle 5 10 as a reference, and referring to the lateral spacing adjustment method of nozzle 10 in the aforementioned parallel processes, nozzles 6 to 8 can be adjusted.

[0045] Please see Figures 4 to 6 The diagram illustrates the specific structure of one embodiment of the fine-tuning mechanism 30. Each nozzle 10 is correspondingly provided with a fine-tuning mechanism 30, and each fine-tuning mechanism 30 is used to adjust the position of its corresponding nozzle 10. In this embodiment, the fine-tuning mechanism 30 includes a fixed connector 31, a movable connector 32, and a first adjusting member 35. The fixed connector 31 is connected to the nozzle 10, and the two are relatively fixed. The movable connector 32 is connected to the fixed connector 31, and the two can move relative to each other. The first adjusting member 35 is disposed between the fixed connector 31 and the movable connector 32, and the first adjusting member 35 drives the fixed connector 31 and its connected nozzle 10 to move relative to the movable connector 32.

[0046] In this embodiment, the fixing connector 31 is assembled and fixed with the suction nozzle 10; in other embodiments, the fixing connector 31 may be an integral part of the suction nozzle 10, consisting of a portion of the upper part of the suction nozzle 10. The fixing connector 31 has an air extraction channel, and an air pipe interface 310 is connected to the outlet of the air extraction channel. The air pipe interface 310 can be connected to a device such as an air pump to extract gas, causing the suction nozzle 10 to form a negative pressure suction force. The fixing connector 31 is provided with a first slider 311 and a first adjusting plate 312. In this embodiment, there are two first sliders 311, located at the upper end of the fixing connector 31, and the first adjusting plate 312 is connected between the two first sliders 311. In the first direction F1, i.e., the width direction of the first adjusting plate 312, the width of the first adjusting plate 312 is smaller than the width of the first slider 311. From a top view, the two first sliders 311 and the first adjusting plate 312 are connected in an I-shape. The first adjusting plate 312 is provided with a first threaded hole 313 extending along the first direction F1, and a first adjusting member 35 is threadedly connected to the first threaded hole 313. In this embodiment, the first adjusting member 35 is an adjusting screw, and the length of the adjusting screw is greater than the length of the first threaded hole 313, that is, both ends of the adjusting screw can protrude from the first threaded hole 313. The two ends of the adjusting screw are used to abut against the movable connecting member 32 to keep the position of the movable connecting member 32 relatively fixed in the first direction F1. When the adjusting screw rotates, the first adjusting plate 312 can be driven to move in the first direction F1 through the threaded engagement, that is, the fixed connecting member 31 can be driven to move in the first direction F1, so as to realize the fine adjustment of the suction nozzle 10 in the first direction F1.

[0047] In this embodiment, the movable connector 32 includes an upper connector 34 and an adapter 33 that are capable of relative movement. The adapter 33 is connected between the upper connector 34 and the fixed connector 31. The adapter 33 and the fixed connector 31 have relative movement space in a first direction F1 and are relatively fixed in a second direction F2 perpendicular to the first direction F1. The first adjusting member 35 is threadedly connected to the fixed connector 31, and the end of the first adjusting member 35 abuts against the adapter 33. The first adjusting member 35 drives the fixed connector 31 and its connected suction nozzle 10 to move relative to the adapter 33 in the first direction. Specifically, the adapter 33 has a first sliding groove 331 and a limiting plate 332. The first sliding groove 331 and the limiting plate 332 are disposed on the lower side of the adapter 33 to cooperate with the first slider 311 and the first adjusting plate 312 on the fixed connector 31. The limiting plate 332 consists of two spaced-apart plates arranged at intervals in the first direction F1. One of the plates has a first operating hole 333. The first operating hole 333 allows an operating tool to pass through to rotate the first adjusting member 35. When the adapter 33 is assembled with the fixed connector 31, the first slider 311 is located in the first slide groove 331, and the dimensions of the first slider 311 and the first slide groove 331 are equivalent in the second direction F2 perpendicular to the first direction F1. Thus, due to the cooperation between the first slider 311 and the first slide groove 331, the fixed connector 31 and the adapter 33 cannot move relative to each other in the second direction F2. The two plates of the limiting plate 332 are located on both sides of the first adjusting plate 312, and the dimension (i.e., its width) of the first adjusting plate 312 in the first direction F1 is smaller than the distance between the two plates of the limiting plate 332. Thus, the fixed connector 31 and the adapter 33 can move relative to each other in the first direction F1. That is, the adapter 33 and the fixed connector 31 are provided with a first slider 311 and a first groove 331 that cooperate with each other. The first slider 311 and the first groove 331 can slide relative to each other only in the first direction F1, so as to realize the fine adjustment of the nozzle 10 in the first direction F1.

[0048] Please see Figure 4 and Figure 5As shown, the adapter 33 and the upper connecting member 34 have relative movement space in the second direction F2, and are relatively fixed in the first direction F1, which is perpendicular to the second direction F2. A second adjusting member 36 is provided between the adapter 33 and the upper connecting member 34. The second adjusting member 36 drives the adapter 33 and causes the fixed connecting member 31 and the suction nozzle 10 to move relative to the upper connecting member 34 in the second direction. Specifically, a second slider 334 is provided on the upper end of the adapter 33, and a limiting cavity 335 is provided on one side of the adapter 33. The upper connecting member 34 is provided with a second sliding groove 341 that cooperates with the second slider 334, and a second adjusting plate 342 that cooperates with the limiting cavity 335. The second slide groove 341, in the first direction F1, is sized similarly to the second slider 334. The second slide groove 341, in the second direction F2, is larger than the second slider 334. The limiting cavity 335, in the first direction F1, is sized similarly to the second adjusting plate 342. The limiting cavity 335, in the second direction F2, is sized similarly to the second adjusting plate 342. Thus, the adapter 33 and the upper connecting member 34 are relatively fixed in the first direction F1 and cannot move relative to each other, but can only move relative to each other in the second direction F2. That is, the adapter 33 and the upper connecting member 34 are provided with mutually cooperating second sliders 334 and second slide grooves 341, and the second sliders 334 and second slide grooves 341 can only slide relative to each other in the second direction F2. The fine-tuning mechanism 30 includes a second adjusting member 36 disposed within the limiting cavity 335 and threadedly connected to the second adjusting plate 342. The second adjusting member 36 is threadedly connected to the upper connecting member 34, and the end of the second adjusting member 36 abuts against the adapter 33. In this embodiment, the second adjusting member 36 is an adjusting screw, and the length of the adjusting screw is greater than the size of the second adjusting plate 342 in the second direction F2, that is, both ends of the adjusting screw can protrude from the second adjusting plate 342. The two ends of the adjusting screw are used to abut against the adapter 33 to keep the position of the adapter 33 relatively fixed in the second direction F2. When the adjusting screw rotates, the second adjusting plate 342 can be driven to move relatively in the second direction F2 within the limiting cavity 335 through the threaded engagement. When the upper connecting member 34 is fixed to the robotic arm, the adapter 33 moves in the second direction F2. The movement of the adapter 33 in the second direction F2 will drive the fixed connecting member 31 and the suction nozzle 10 to move synchronously in the second direction F2, realizing the fine adjustment of the suction nozzle 10 in the second direction F2.

[0049] Please see Figure 5As shown, the fine-tuning mechanism 30 also includes a first connecting bolt 371 and a second connecting bolt 372. The first connecting bolt 371 connects the adapter 33 and the fixed connector 31 in a third direction perpendicular to the first direction F1 and the second direction F2. The second connecting bolt 372 connects the upper connector 34 and the adapter 33 in a third direction. In this embodiment, the first connecting bolt 371 passes through the bolt hole on the second slider 334 and connects to the first slider 311. The size of the bolt hole on the second slider 334 in the first direction F1 is larger than the diameter of the first connecting bolt 371. That is, the first connecting bolt 371 connects the fixed connector 31 and the adapter 33 in the third direction but does not affect their relative movement in the first direction F1. Similarly, the second connecting bolt 372 passes through the second groove 341 of the upper connector 34 and connects to the adapter 33, but the second connecting bolt 372 does not affect the relative movement of the upper connector 34 and the adapter 33 in the second direction F2.

[0050] The multi-nozzle calibration device 100 provided in this application, during use, drives the nozzles 10 to move via a moving mechanism, so that multiple nozzles 10 sequentially appear within the detection range of the vision inspection mechanism 20. After the vision inspection mechanism 20 detects the relative coordinate position of each nozzle 10 and calculates its deviation value, the fine-tuning mechanism 30 drives the nozzles 10 to move, thereby adjusting the position of the nozzles 10. The multi-nozzle calibration device 100 provided in this application can not only detect whether there is a deviation in the position of the nozzles 10, but also quantify its deviation direction and deviation size, so that the operator can clearly know how to adjust it. Compared with the traditional pin calibration method, which can only judge whether it is acceptable or not, and cannot guide the operator to make adjustments, the calibration process deviation of this application can be quantified, and the calibration does not need to focus on the size of the part fitting error, which can improve the calibration efficiency and accuracy.

[0051] This application also provides a test sorting machine, which includes a frame, a robotic arm movably connected to the frame, and a multi-nozzle calibration device 100 as described in any of the above embodiments, wherein a plurality of nozzles 10 are connected to the robotic arm and are driven by the robotic arm to pick up test elements.

[0052] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0053] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the scope of protection of this application. Therefore, the patent protection scope of this application should be determined by the appended claims.

Claims

1. A multi-nozzle calibration device for calibrating relative positions between a plurality of nozzles (10), characterized by, The multi-nozzle calibration device comprises a moving mechanism, a visual detection mechanism (20) and a fine adjustment mechanism (30), the moving mechanism is connected with at least one of the nozzles (10) and the visual detection mechanism (20), the moving mechanism drives the relative movement between the nozzles (10) and the visual detection mechanism (20) to make the multiple nozzles (10) appear in the detection range of the visual detection mechanism (20) in turn, the visual detection mechanism (20) detects the relative coordinate position of each nozzle (10) and calculates the deviation value, the fine adjustment mechanism (30) is connected to the multiple nozzles (10), and the fine adjustment mechanism (30) is configured to drive the nozzles (10) to move in two intersecting directions to adjust the positions of the nozzles (10).

2. The multi-nozzle calibration device of claim 1, wherein, The fine adjustment mechanism (30) comprises: a fixed connecting piece (31) connected with the nozzles (10) and fixed relative to each other; a movable connecting piece (32) connected with the fixed connecting piece (31) and capable of moving relative to each other; and a first adjusting piece (35) arranged between the fixed connecting piece (31) and the movable connecting piece (32), the first adjusting piece (35) drives the fixed connecting piece (31) and the nozzles (10) connected thereto to move relative to the movable connecting piece (32).

3. The multi-nozzle calibration device of claim 2, wherein, The movable connecting piece (32) comprises an upper connecting piece (34) and an adapter (33) capable of moving relative to each other, and the adapter (33) is connected between the upper connecting piece (34) and the fixed connecting piece (31).

4. The multi-nozzle calibration device of claim 3, wherein, The fine adjustment mechanism (30) comprises a second adjusting piece (36) arranged between the upper connecting piece (34) and the adapter (33) to drive the adapter (33) to move relative to the upper connecting piece (34).

5. The multi-nozzle calibration device of claim 4, wherein, The adapter (33) and the fixed connecting piece (31) have a relative movement space in a first direction and are fixed relative to each other in a second direction perpendicular to the first direction, the first adjusting piece (35) drives the fixed connecting piece (31) and the nozzles (10) connected thereto to move relative to the adapter (33) in the first direction; and / or, The adapter (33) and the upper connecting piece (34) have a relative movement space in a second direction and are fixed relative to each other in a first direction perpendicular to the second direction, the second adjusting piece (36) drives the adapter (33) and the fixed connecting piece (31) and the nozzles (10) connected thereto to move relative to the upper connecting piece (34) in the second direction.

6. The multi-nozzle calibration device of claim 5, wherein, The adapter (33) and the fixed connecting piece (31) are provided with a first sliding block (311) and a first sliding groove (331) matched with each other, and the first sliding block (311) and the first sliding groove (331) can slide relative to each other only in the first direction; the adapter (33) and the upper connecting piece (34) are provided with a second sliding block (334) and a second sliding groove (341) matched with each other, and the second sliding block (334) and the second sliding groove (341) can slide relative to each other only in the second direction.

7. The multi-nozzle calibration device of claim 5, wherein, The first adjusting piece (35) and the second adjusting piece (36) are adjusting screws.

8. The multi-nozzle calibration device of claim 7, wherein, The first adjusting piece (35) is threadedly connected with the fixed connecting piece (31), and an end of the first adjusting piece (35) abuts against the adapter (33); the second adjusting piece (36) is threadedly connected with the upper connecting piece (34), and an end of the second adjusting piece (36) abuts against the adapter (33).

9. The multi-nozzle calibration device of claim 5, wherein, The fine adjustment mechanism (30) comprises a first connecting bolt (371) and a second connecting bolt (372), the first connecting bolt (371) connects the adapter (33) and the fixed connecting piece (31) in a third direction perpendicular to the first direction and the second direction, and the second connecting bolt (372) connects the upper connecting piece (34) and the adapter (33) in the third direction.

10. A test handler characterized by, A machine comprising a frame, a mechanical arm movably connected to the frame, and the multi-nozzle calibration device according to any one of claims 1 to 9, wherein the plurality of nozzles (10) are connected to the mechanical arm and are driven by the mechanical arm to suck test elements.