Automatic laser focusing device and laser processing equipment

Abstract

The utility model discloses a laser automatic focusing device, and discloses a laser processing device with the laser automatic focusing device, the laser automatic focusing device comprises a workbench, a detection mechanism, a laser mechanism, a moving mechanism and an adjusting mechanism, the workbench is used for fixing a workpiece; the detection mechanism comprises a CCD camera and a distance sensor, the CCD camera is used for detecting the horizontal position deviation of the workpiece, and the distance sensor is used for detecting the height deviation of the machined surface of the workpiece; the laser mechanism comprises a focusing module, and the focusing module is used for focusing the focus height position of laser processing; the moving mechanism is used for driving the workbench or the laser mechanism to horizontally move; the adjusting mechanism controls the moving mechanism to adjust the horizontal position of the workpiece and controls the focusing module to focus the focus height position of laser processing according to detection data of the detection mechanism. The automatic laser focusing device can improve the precision of the horizontal position and the height position of a laser focusing focus, and meets the high-precision laser processing requirement of a battery piece in photovoltaic manufacturing.

Description

Technical Field

[0001] This utility model relates to the technical field of laser processing, and in particular to a laser autofocus device and laser processing equipment. Background Technology

[0002] In recent years, lasers have been widely used as a processing tool in fields such as cutting, welding, and additive manufacturing.

[0003] In photovoltaic manufacturing, laser scribing technology is often used in the manufacturing process of solar cells to cut, isolate, or form conductive channels in the cells.

[0004] In traditional laser processing, manual or semi-automatic focusing is usually required, which can only focus on the height position of the laser focal point.

[0005] However, the focusing methods of traditional laser processing equipment have low accuracy in the horizontal and vertical positions of the laser focus, making it difficult to meet the high-precision laser processing requirements of solar cells in photovoltaic manufacturing. Utility Model Content

[0006] This invention aims to solve at least one of the technical problems existing in the prior art. To this end, this invention proposes a laser autofocus device that can improve the horizontal and vertical position accuracy of the laser focusing point, meeting the high-precision laser processing requirements of solar cells in photovoltaic manufacturing.

[0007] This utility model also proposes a laser processing device having the above-mentioned laser autofocus device.

[0008] The laser autofocus device according to a first aspect embodiment of the present invention includes:

[0009] A worktable is used to hold workpieces in place.

[0010] The inspection mechanism includes a CCD camera and a distance sensor, wherein the CCD camera is used to detect the horizontal position deviation of the workpiece, and the distance sensor is used to detect the height deviation of the machined surface of the workpiece.

[0011] A laser mechanism, including a focusing module for focusing the focal height position of laser processing;

[0012] A moving mechanism is used to drive the worktable or the laser mechanism to move horizontally.

[0013] The adjustment mechanism controls the moving mechanism to adjust the horizontal position of the workpiece and the focusing module to focus the laser processing focal height position based on the detection data from the detection mechanism.

[0014] The laser autofocus device according to the embodiments of the present invention has at least the following beneficial effects:

[0015] 1. This utility model uses a CCD camera to detect the horizontal position of the workpiece. By using the image information data collected by the CCD camera, the horizontal position deviation of the workpiece can be analyzed, which facilitates the subsequent calibration of the horizontal position deviation of the workpiece. This improves the horizontal position accuracy of the laser focus on the workpiece and helps to improve the accuracy of laser processing.

[0016] 2. This utility model incorporates a distance sensor to detect the height data of the workpiece's machined surface. By utilizing the height data of various points on the workpiece's machined surface collected by the distance sensor, it is possible to facilitate subsequent determination of the height position of the laser autofocus point, thereby improving the height position accuracy of the laser focus on the workpiece and enhancing the precision of laser processing.

[0017] 3. This utility model provides a laser mechanism, which includes a focusing module for focusing the laser processing focal point height position. This enables the laser mechanism to focus on the laser focal point height position using the focusing module.

[0018] 4. This utility model provides a moving mechanism to drive the worktable or laser mechanism to a horizontal position, thereby facilitating the adjustment of the horizontal relative position of the workpiece and the laser focus, as well as controlling the processing feed of the laser mechanism on the workpiece.

[0019] 5. This utility model, by setting an adjustment mechanism, controls the moving mechanism to adjust the horizontal position of the workpiece and the focal height position of the focusing module for laser processing based on the detection data of the detection mechanism. Thus, by utilizing the horizontal and vertical position deviation data collected and calculated by the CCD camera and distance sensor, and then controlling the moving mechanism to compensate for the horizontal position deviation of the workpiece and the focal height position of the focusing module for laser processing based on the horizontal and vertical position deviation data, the accuracy of the horizontal and vertical position of the laser focusing point can be improved, meeting the high-precision laser processing requirements of solar cells in photovoltaic manufacturing.

[0020] According to some embodiments of this utility model, the CCD camera, the distance sensor, and the laser mechanism are arranged sequentially along the feed direction of the worktable.

[0021] The advantages of this invention are as follows: By arranging the CCD camera, distance sensor, and laser mechanism sequentially along the feed direction of the worktable, on the one hand, the CCD camera can detect the correct machining trajectory of the workpiece before the height sensor measures the height of the workpiece's machining trajectory surface. This improves the accuracy of the distance sensor's detection position on the workpiece's machining surface. On the other hand, the CCD camera and distance sensor can detect the horizontal position and the height position of the workpiece's machining surface before the workpiece is fed to the laser processing position. This improves the detection accuracy of the CCD camera and distance sensor and avoids missed detections.

[0022] According to some embodiments of the present invention, the focusing module includes a lifting base and a focusing lens disposed on the lifting base. The focusing lens is used to focus the laser beam, and the lifting base drives the focusing lens to rise and fall to focus on the laser processing focal point height position.

[0023] The advantage of this invention is that by setting a lifting seat on the focusing module and a focusing lens on the lifting seat, the focusing lens is used to focus the laser beam. The lifting seat drives the focusing lens to rise and fall to focus the laser processing focal point height position. It can be understood that by using the lifting seat to drive the lifting and falling of the focusing lens, the focal point height position of the focusing lens can be automatically adjusted.

[0024] According to some embodiments of the present invention, the distance sensor is disposed on the lifting base.

[0025] The advantage of this invention is that by placing the distance sensor on the lifting base, the distance sensor and the focusing lens can be raised and lowered synchronously. This facilitates the comparison and compensation calculation between the detection data of the workpiece surface height by the distance sensor and the focusing point height of the focusing lens.

[0026] According to some embodiments of the present invention, the laser mechanism further includes a laser output module, which is used to deliver a laser beam. The laser output module includes a first laser source and an optical path transmission component, which is used to guide and deliver the laser beam output from the first laser source to the focusing module.

[0027] The advantage of this invention is that by including a laser output module in the laser mechanism, the laser output module is used to transport the laser beam. The laser output module includes a first laser source and an optical path transmission component. The optical path transmission component is used to guide and transport the laser beam output from the first laser source to the focusing module, thereby facilitating the path guidance of the laser beam and making the arrangement of the first laser source more flexible.

[0028] According to some embodiments of the present invention, the laser output module further includes a second laser source, and the optical path transmission component includes a laser beam combiner, which is used to combine the laser beam output from the first laser source and the laser beam output from the second laser source.

[0029] The advantages of this invention are as follows: By including a second laser source in the laser output module and a laser beam combiner in the optical path transmission component, the laser beam combiner combines the laser beams output from the first laser source and the laser beams output from the second laser source. This means that by combining the two laser beams from the first and second laser sources to obtain a composite laser beam for processing, several advantages are achieved. Firstly, different materials have significantly different absorption rates for laser wavelengths; the composite laser beam can combine multiple wavelengths to optimize energy absorption efficiency, thereby expanding the range of processable materials. Secondly, by adjusting the power, pulse width, and timing of different lasers, the composite laser can reduce local heat accumulation, thereby reducing thermal deformation and microcracks. The combination of multiple wavelengths can reduce slag and recast layers, improving the smoothness of the scribing edges. Furthermore, the composite laser beam can adjust parameters such as wavelength, power, and focus position in real time to adapt to different line widths, depths, or material thicknesses. Finally, the composite laser can achieve energy superposition through multi-beam collaborative work, shortening processing time.

[0030] According to some embodiments of the present invention, the optical path transmission component further includes a collimator, which is used to correct the direction of the composite laser beam output by the laser beam combiner.

[0031] The advantages are: by setting up a collimator, which is used to correct the direction of the composite laser beam output by the laser beam combiner, this invention helps to improve the path direction accuracy of the composite laser beam and at the same time improves the laser uniformity of the composite laser beam.

[0032] According to some embodiments of the present invention, the optical path transmission component further includes a first reflector, a second reflector, and a third reflector. The first reflector is used to guide the laser beam output from the first laser source, the second reflector is used to guide the laser beam output from the second laser source, and the third reflector is used to guide the composite laser beam collimated by the collimator.

[0033] The advantages of this invention are: by setting a first reflector, a second reflector, and a third reflector, the first reflector is used to guide the laser beam output from the first laser source, the second reflector is used to guide the laser beam output from the second laser source, and the third reflector is used to guide the composite laser beam collimated by the collimator. This facilitates the guidance of the laser beam output from the first laser source, the laser beam output from the second laser source, and the composite laser beam collimated by the collimator, thereby making the arrangement of the first laser source, the second laser source, and the collimator more flexible.

[0034] According to some embodiments of the present invention, the moving mechanism includes an X-axis translation stage and a Y-axis translation stage, wherein the X-axis translation stage and the Y-axis translation stage respectively control the worktable to translate along the X and Y directions.

[0035] The advantage of this invention is that by including an X-axis translation stage and a Y-axis translation stage in the moving mechanism, the X-axis translation stage and the Y-axis translation stage respectively control the worktable to translate along the X and Y directions, thereby facilitating the position control of the worktable in the X and Y directions.

[0036] The laser processing equipment according to a second aspect of the present invention includes the laser autofocus device of the first aspect of the present invention, and the laser processing equipment is used for scribing or cutting solar cells.

[0037] The laser processing equipment according to the embodiments of the present invention has at least the following beneficial effects:

[0038] 1. This utility model sets up a CCD camera in the laser autofocus device. The CCD camera is used to detect the horizontal position of the workpiece. Thus, the image information data collected by the CCD camera can be used to analyze the horizontal position deviation of the workpiece, which facilitates the subsequent calibration of the horizontal position deviation of the workpiece. In this way, the horizontal position accuracy of the laser focus on the workpiece is improved, which is beneficial to improving the laser processing accuracy.

[0039] 2. This utility model sets a distance sensor in the laser autofocus device. The distance sensor is used to detect the height data of the workpiece's processed surface. Thus, the height data of each point on the workpiece's processed surface collected by the distance sensor can be used to facilitate the subsequent height position of the laser autofocus point, thereby improving the height position accuracy of the laser focus on the workpiece and improving the precision of laser processing.

[0040] 3. This utility model provides a laser mechanism in the laser autofocus device. The laser mechanism includes a focusing module, which is used to focus on the focal height position of the laser processing. Thus, the laser mechanism can use the focusing module to focus on the focal height position of the laser.

[0041] 4. This utility model provides a moving mechanism in the laser autofocus device. The moving mechanism is used to drive the worktable or laser mechanism to move horizontally, thereby facilitating the adjustment of the horizontal relative position between the workpiece and the laser focus and controlling the processing feed of the laser mechanism on the workpiece.

[0042] 5. This utility model, by setting an adjustment mechanism in the laser autofocus device, controls the moving mechanism to adjust the horizontal position of the workpiece and the focal height position of the focusing module for laser processing based on the detection data of the detection mechanism. Thus, by using the horizontal and vertical position deviation data collected and calculated by the CCD camera and distance sensor, and then controlling the moving mechanism to compensate for the horizontal position deviation of the workpiece and the focal height position of the focusing module for laser processing based on the horizontal and vertical position deviation data, the accuracy of the horizontal and vertical position of the laser focusing point can be improved, meeting the high-precision laser processing requirements of solar cells in photovoltaic manufacturing.

[0043] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0044] To more clearly illustrate the technical solutions of the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0045] Figure 1 This is a schematic diagram of the structure of the laser autofocus device according to an embodiment of the present invention;

[0046] Figure 2 for Figure 1 The top view shown;

[0047] Figure 3 for Figure 1 The diagram shows the structure of the laser mechanism.

[0048] Reference numerals: 100-Worktable, 110-Detection mechanism, 120-CCD camera, 130-Distance sensor, 140-Laser mechanism, 150-Focusing module, 160-Moving mechanism, 170-Lifting seat, 180-Focusing lens, 190-Laser output module, 200-First laser source, 210-Optical path transmission component, 220-Second laser source, 230-Laser beam combiner, 240-Collimator, 250-First reflecting mirror, 260-Second reflecting mirror, 270-Third reflecting mirror, 280-X-axis translation stage, 290-Y-axis translation stage. Detailed Implementation

[0049] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0050] In the description of this utility model, it should be understood that the directional descriptions, such as up, down, front, back, left, right, etc., indicate the directional or positional relationship based on the directional or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0051] In the description of this utility model, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. If "first" and "second" are mentioned, it is only for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance or implicitly indicating the number of indicated technical features or the order of the indicated technical features.

[0052] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation, connection, and linkage" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0053] The laser autofocus device and laser processing equipment according to embodiments of the present invention are described below with reference to the accompanying drawings.

[0054] This utility model aims to provide embodiments of a laser autofocus device and a laser processing equipment.

[0055] In this embodiment, the laser processing equipment mainly includes a laser autofocus device, and the laser processing equipment is used to scribing or cutting solar cells.

[0056] Reference Figure 1 The laser autofocus device of this utility model includes a worktable 100, a detection mechanism 110, a laser mechanism 140, a moving mechanism 160, and an adjustment mechanism.

[0057] The worktable 100 is used to fix the workpiece.

[0058] Specifically, the worktable can be vacuum-adsorbed and fixed to the workpiece, thereby avoiding damage to the workpiece.

[0059] For the inspection mechanism 110, the inspection mechanism 110 includes a CCD camera 120 and a distance sensor 130. The CCD camera 120 is used to detect the horizontal position deviation of the workpiece, and the distance sensor 130 is used to detect the height deviation of the machined surface of the workpiece.

[0060] In this embodiment, a CCD camera 120 is set up to detect the horizontal position of the workpiece. Thus, the image information data collected by the CCD camera 120 can be used to analyze the horizontal position deviation of the workpiece, which facilitates the subsequent calibration of the horizontal position deviation of the workpiece. In turn, the horizontal position accuracy of the laser focus on the workpiece is improved, which is beneficial to improving the laser processing accuracy.

[0061] In this embodiment, a distance sensor 130 is set up to detect the height data of the workpiece's machined surface. Thus, the height data of each point on the workpiece's machined surface collected by the distance sensor 130 can be used to facilitate the subsequent determination of the height position of the laser autofocus point, thereby improving the height position accuracy of the laser focus on the workpiece and improving the precision of laser processing.

[0062] Reference Figure 2 and Figure 3 For the laser mechanism 140, the laser mechanism 140 includes a focusing module 150, which is used to focus on the height position of the laser processing focal point, thereby enabling the laser mechanism 140 to focus on the height position of the laser focal point using the focusing module 150.

[0063] In some specific embodiments, the laser mechanism 140 further includes a laser output module 190, which is used to deliver a laser beam. The laser output module 190 includes a first laser source 200 and an optical path transmission component 210. The optical path transmission component 210 is used to guide and deliver the laser beam output by the first laser source 200 to the focusing module 150, thereby facilitating the path guidance of the laser beam and making the arrangement of the first laser source 200 more flexible.

[0064] In some specific embodiments, the laser output module 190 further includes a second laser source 220, and the optical path transmission component 210 includes a laser beam combiner 230, which is used to combine the laser beam output from the first laser source 200 and the laser beam output from the second laser source 220.

[0065] It is understandable that processing is achieved by combining the two laser beams output from the first laser source 200 and the second laser source 220 to obtain a composite laser beam. On the one hand, different materials have significantly different absorption rates for laser wavelengths, and the composite laser beam can combine multiple wavelengths to optimize energy absorption efficiency, thereby expanding the range of processable materials. On the other hand, by adjusting the power, pulse width, and timing of different lasers, the composite laser can reduce local heat accumulation, thereby reducing thermal deformation and microcracks. The combination of multiple wavelengths can reduce slag and recast layer, and improve the smoothness of the scribing edges. Furthermore, the composite laser beam can adjust parameters such as wavelength, power, and focus position in real time to adapt to the needs of different line widths, depths, or material thicknesses. Moreover, the composite laser can achieve energy superposition through the collaborative work of multiple beams, shortening the processing time.

[0066] In some specific embodiments, the optical path transmission component 210 further includes a collimator 240, which is used to correct the direction of the composite laser beam output by the laser beam combiner 230, thereby improving the path direction accuracy of the composite laser beam and improving the laser uniformity of the composite laser beam.

[0067] In some specific embodiments, the optical path transmission component 210 further includes a first reflector 250, a second reflector 260, and a third reflector 270. The first reflector 250 is used to guide the laser beam output by the first laser source 200, the second reflector 260 is used to guide the laser beam output by the second laser source 220, and the third reflector 270 is used to guide the composite laser beam collimated by the collimator 240. This facilitates the guidance of the laser beam output by the first laser source 200, the laser beam output by the second laser source 220, and the composite laser beam collimated by the collimator 240, thereby making the arrangement of the first laser source 200, the second laser source 220, and the collimator 240 more flexible.

[0068] Specifically, the third reflector 270 reflects the horizontal composite laser beam downwards to the focusing module, thereby enabling the laser beam output by the laser mechanism 140 to be focused downwards onto the workpiece surface for processing.

[0069] In some specific embodiments, the second reflector 260 reflects the laser beam output from the second laser source 220 to the laser beam combiner 230, and the first reflector 250 reflects the laser beam output from the first laser source 200 to the second reflector 260. The second reflector 260 allows the laser beam output from the first laser source 200 to penetrate into the laser beam combiner 230, thereby enabling the laser beam output from the first laser source 200 and the laser beam output from the second laser source 220 to be combined in the laser beam combiner 230.

[0070] In some specific embodiments, the focusing module 150 includes a lifting seat 170 and a focusing lens 180 disposed on the lifting seat 170. The focusing lens 180 is used to focus the laser beam, and the lifting seat 170 drives the focusing lens 180 to rise and fall to focus on the laser processing focal point height position.

[0071] It is understandable that the lifting seat 170 is used to lift and lower the focusing lens 180, thereby achieving automatic adjustment of the focal height position of the focusing lens.

[0072] In some specific embodiments, the distance sensor 130 is mounted on the lifting seat 170, thereby enabling the distance sensor 130 and the focusing lens 180 to rise and fall synchronously. This facilitates the comparison and compensation calculation between the detection data of the workpiece machining surface height by the distance sensor 130 and the focusing focal point height of the focusing lens 180.

[0073] The moving mechanism 160 is used to drive the worktable 100 or the laser mechanism 140 to move horizontally, thereby facilitating the adjustment of the horizontal relative position of the workpiece and the laser focus and controlling the processing feed of the laser mechanism 140 on the workpiece.

[0074] In some specific embodiments, the moving mechanism 160 includes an X-axis translation stage 280 and a Y-axis translation stage 290. The X-axis translation stage 280 and the Y-axis translation stage 290 respectively control the worktable 100 to translate along the X and Y directions, thereby facilitating the position control of the worktable 100 in the X and Y directions.

[0075] Specifically, the X-axis translation stage 280 can be moved and mounted on the frame, the Y-axis translation stage 290 can be moved and mounted on the X-axis translation stage 280, and the worktable 100 can be mounted on the Y-axis translation stage 290. Alternatively, the Y-axis translation stage 290 can be moved and mounted on the frame, the X-axis translation stage 280 can be moved and mounted on the Y-axis translation stage 290, and the worktable 100 can be mounted on the X-axis translation stage 280.

[0076] The adjustment mechanism controls the moving mechanism 160 to adjust the horizontal position of the workpiece and controls the focusing module 150 to focus the laser processing focal height position based on the detection data of the detection mechanism 110. Thus, the horizontal position deviation and height position deviation of the workpiece are collected and calculated by the CCD camera 120 and the distance sensor 130. Then, the moving mechanism 160 is controlled to compensate for the horizontal position deviation of the workpiece and the focusing module 150 is controlled to focus the laser processing focal height position based on the horizontal position deviation data and the height position deviation data, respectively. In this way, the horizontal and height position accuracy of the laser focusing focal point can be improved, meeting the high-precision laser processing requirements of solar cells in photovoltaic manufacturing.

[0077] In some specific embodiments, the CCD camera 120, distance sensor 130, and laser mechanism 140 are arranged sequentially along the feed direction of the worktable 100. This allows the CCD camera 120 to detect the correct machining trajectory of the workpiece before using the height sensor to determine the height of the workpiece's correct machining trajectory surface, thereby improving the accuracy of the distance sensor 130's detection position on the workpiece's machining surface. On the other hand, it enables the CCD camera 120 and distance sensor 130 to perform workpiece horizontal position detection and workpiece machining surface height position detection before the workpiece is fed to the laser processing position, thereby improving the detection accuracy of the CCD camera 120 and distance sensor 130 and avoiding missed detections.

[0078] In the description of this specification, references to terms such as "an embodiment," "some embodiments," "illustrative embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0079] The terms "first," "second," "third," "fourth," etc. (if applicable) in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments described herein can be implemented in a sequence other than that illustrated or described herein.

[0080] It should also be noted that, in the description of this specification, relational terms such as first and second are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations.

[0081] Furthermore, the terms “comprising” and “having”, and any variations thereof, are intended to cover non-exclusive inclusion, such that a process, method, system, product, or apparatus that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may also include other steps or units that are not explicitly listed or that are inherent to such processes, methods, products, or apparatus.

[0082] Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0083] The embodiments of the present utility model have been described in detail above with reference to the accompanying drawings. However, the present utility model is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present utility model.

Claims

1. A laser auto focus device, characterized by, The utility model relates to a laser processing device and method, and specifically relates to a laser processing device and method for processing workpiece. The utility model discloses a laser processing device and method, including: a workbench (100) for fixing workpiece;Detection mechanism (110) including CCD camera (120) and distance sensor (130), the CCD camera (120) is used for detecting the horizontal position deviation of workpiece, and the distance sensor (130) is used for detecting the machining surface height deviation of workpiece; Laser mechanism (140) including focusing module (150), the focusing module (150) is used for focusing the focal point height position of laser processing; Moving mechanism (160) is used for driving the horizontal movement of workbench (100) or laser mechanism (140); Adjusting mechanism controls the moving mechanism (160) to adjust the horizontal position of workpiece and controls the focusing module (150) to focus the focal point height position of laser processing according to the detection data of detection mechanism (110). The CCD camera (120), distance sensor (130) and laser mechanism (140) are sequentially arranged along the feeding direction of workbench (100).

2. The laser autofocusing device according to claim 1, wherein The focusing module (150) includes lifting seat (170), focusing lens (180) arranged on lifting seat (170), focusing lens (180) is used for focusing laser beam, and lifting seat (170) drives focusing lens (180) to lift and focus the focal point height position of laser processing.

3. The laser autofocusing device of claim 1, wherein, The distance sensor (130) is arranged on the lifting seat (170).

4. The laser autofocusing device according to claim 3, wherein The laser mechanism (140) further includes laser output module (190), and the laser output module (190) is used for conveying laser beam, and the laser output module (190) includes first laser source (200), optical path transmission assembly (210), the optical path transmission assembly (210) is used for guiding and conveying the laser beam output by first laser source (200) to focusing module (150).

5. The laser autofocusing device of claim 1, wherein, The laser output module (190) further includes second laser source (220), and the optical path transmission assembly (210) includes laser beam combiner (230), and the laser beam combiner (230) is used for combining the laser beam output by first laser source (200) and the laser beam output by second laser source (220).

6. The laser autofocusing device according to claim 5, wherein The optical path transmission assembly (210) further includes collimator (240), and the collimator (240) is used for correcting the direction of composite laser beam output by laser beam combiner (230).

7. The laser autofocusing device according to claim 6, wherein The optical path transmission assembly (210) further includes first mirror (250), second mirror (260) and third mirror (270), the first mirror (250) is used for guiding the laser beam output by first laser source (200), the second mirror (260) is used for guiding the laser beam output by second laser source (220), and the third mirror (270) is used for guiding the composite laser beam collimated by collimator (240).

8. The laser autofocusing device according to claim 7, wherein ​ 9. The laser autofocusing device of claim 1, wherein, The moving mechanism (160) comprises an X-axis translation stage (280) and a Y-axis translation stage (290), which control the workbench (100) to translate along the X direction and the Y direction respectively.

10. Laser processing apparatus, characterized in that The laser automatic focusing device according to any one of claims 1 to 9 is used for scribing or cutting a solar cell.

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