Vacuum pump gear mounting and leveling device

Abstract

The utility model provides a vacuum pump gear installation leveling device, and belongs to the technical field of vacuum pump leveling. Comprising a Roots rotor, a bearing plate is installed at the end of the Roots rotor, a gear is installed on the bearing plate, a gear flattening tool is attached to the gear, the gear flattening tool is connected with a gear alignment plate, through holes are formed in the gear flattening tool and the gear alignment plate, and a first fixing device penetrates through the through holes to be fixed; a plurality of ejector heads are installed on the gear flattening tool, a plurality of through holes are formed in the aligning plate, and a second fixing device penetrates through the through holes to make contact with the ejector heads. The vacuum pump gear leveling device is simple in structure, rapid and convenient to assemble, capable of completing assembly work of leveling of the vacuum pump gear only through simple hole site connection, capable of preventing deformation of the gear after heating and installation, and capable of improving the working efficiency of the vacuum pump gear. Therefore, the assembly efficiency and the assembly yield are improved.

Description

Technical Field

[0001] This utility model belongs to the field of vacuum pump leveling technology, specifically relating to a vacuum pump gear mounting and leveling device. Background Technology

[0002] In the precision assembly of semiconductor vacuum pumps, gears, as the core component of the entire transmission system, play a crucial role. The accuracy of the gear mounting plane and the degree of meshing between them have a decisive impact on the overall performance of the vacuum pump. This not only relates to whether the pump can operate efficiently and stably, but also directly affects its vacuuming speed, ultimate vacuum level, and long-term operational reliability.

[0003] Currently, most semiconductor vacuum pumps in the industry use a heat-assembly method for gear mounting. This method heats the gear, causing it to expand, making it relatively easy to install onto the shaft or into the gearbox. However, once the gear cools and contracts, maintaining its mounting height and the flatness of the mounting surface become challenges. Especially during the cooling process, without appropriate tooling or methods to limit gear movement or deformation, it is difficult to ensure the gear achieves an ideal mounting state.

[0004] Unrestricted tooling often leads to a series of problems. First, the mounting height of gears may change due to uneven contraction during cooling, directly affecting the meshing clearance between gears and consequently impacting the smoothness and efficiency of the transmission. Second, the mounting flatness of gears may also be affected by uneven cooling contraction, causing gear wobble or vibration during operation. This not only increases noise but also accelerates gear wear, thus shortening the service life of the vacuum pump. More seriously, these problems can also lead to unstable operation, affecting the overall performance and reliability of the vacuum pump.

[0005] Therefore, in the gear assembly process of semiconductor vacuum pumps, effectively controlling the gear mounting height and flatness to ensure that the gears maintain an ideal meshing state after cooling is key to improving vacuum pump performance and extending service life. This requires continuous exploration and innovation in assembly processes to find more precise and reliable assembly methods. Utility Model Content

[0006] The purpose of this invention is to solve the problems of low assembly efficiency, short service life, and large vibration caused by the inability to accurately control the installation height and flatness of gears during hot assembly in vacuum pump assembly, and to provide a vacuum pump gear installation and leveling device.

[0007] To achieve the above objectives, the present invention adopts the following technical solution:

[0008] A vacuum pump gear mounting and leveling device includes a Roots rotor, a bearing plate mounted on the end of the Roots rotor, a gear mounted on the bearing plate, a gear flattening fixture fitted to the gear, a gear leveling plate connected to the gear flattening fixture, and through holes opened on both the gear flattening fixture and the gear leveling plate, and a first fixing device passing through the through holes for fixing.

[0009] Several tops are installed on the gear flattening fixture, and several through holes are provided on the gear straightening plate. The second fixing device passes through the through holes and is in contact with the tops.

[0010] The through hole corresponds to the position of the top head.

[0011] A gear limiting plate is installed on the bearing plate.

[0012] The gear is mounted on the gear limiting plate.

[0013] A force-equalizing shim is fixed between the gear flattening fixture and the gear straightening plate.

[0014] The force equalizing pad has a through hole, which is consistent with the through hole on the gear flattening fixture and the gear adjusting plate.

[0015] The through hole is adapted to the size of the first fixing device.

[0016] The first fixing device is an M12 bolt.

[0017] The second fixing device is an M6 bolt.

[0018] After leveling, use a feeler gauge to check between the gear and the gear limit plate, and adjust the second fixing device according to the test results.

[0019] Compared with the prior art, the present invention has the following beneficial effects:

[0020] This utility model provides a vacuum pump gear mounting and leveling device, including a Roots rotor, a bearing plate mounted on the end of the Roots rotor, a gear mounted on the bearing plate, a gear flattening fixture attached to the gear, and a gear adjusting plate connected to the gear flattening fixture. Both the gear flattening fixture and the gear adjusting plate have through holes, through which a first fixing device passes for fixation. Several tops are mounted on the gear flattening fixture, and several through holes are provided on the adjusting plate. A second fixing device passes through the through holes and contacts the tops. By rotating and adjusting the contact depth between the second fixing device and the tops, the gear flattening fixture is driven to level the gear. This utility model has a simple structure and is quick and convenient to assemble. It only requires simple hole connections to complete the assembly of the vacuum pump gear leveling, preventing deformation caused by gear heating after installation, thereby improving assembly efficiency and the yield rate of finished products.

[0021] Furthermore, by setting up several second fixing devices, the stability of the device is improved, preventing the device from changing its displacement due to excessive vibration, which would affect assembly efficiency and extend the device's lifespan.

[0022] Furthermore, the gear limit plate restricts the range of motion of the gear to ensure that the mechanical device operates within a safe and controllable range.

[0023] Furthermore, the force-equalizing pads can evenly distribute the pressure of the second fixing device, playing a role in shock absorption and buffering, preventing excessive local pressure from damaging components. This helps protect mechanical parts and extend their service life. Attached Figure Description

[0024] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is an exploded view of the tooling components of this device;

[0026] Figure 2 This is a schematic diagram of the tooling installation for this device;

[0027] Figure 3 This is a side view of the tooling installation of this device;

[0028] Figure 4 This is a schematic diagram of the working state of this device;

[0029] Figure 5 This is a schematic diagram of the tooling inspection for this device;

[0030] The following are the annotations in the attached figures: 1. First fixing device; 2. Second fixing device; 3. Gear adjusting plate; 4. Force equalizing shim; 5. Top head; 6. Gear flattening fixture; 7. Gear; 8. Gear limiting plate; 9. Bearing plate; 10. Roots rotor. Detailed Implementation

[0031] In the following description, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments can be modified in various ways without departing from the spirit or scope of this invention. Therefore, the drawings and description are considered exemplary in nature and not restrictive.

[0032] In the description of this utility model, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0033] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a communication connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0034] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0035] It should be understood that, when used in this specification and the appended claims, the terms "comprising" and "including" indicate the presence of the described features, integrals, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, integrals, steps, operations, elements, components and / or collections thereof.

[0036] It should also be understood that the terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to limit the scope of the invention. As used in this specification and the appended claims, the singular forms “a,” “an,” and “the” are intended to include the plural forms unless the context clearly indicates otherwise.

[0037] It should also be further understood that the term "and / or" as used in this specification and the appended claims refers to any combination of one or more of the associated listed items and all possible combinations, and includes such combinations.

[0038] The accompanying drawings show various structural schematic diagrams according to embodiments of the present invention. These drawings are not to scale, and some details have been enlarged and may have been omitted for clarity. The shapes of the various regions and layers shown in the drawings, as well as their relative sizes and positional relationships, are merely exemplary and may deviate from reality due to manufacturing tolerances or technical limitations. Furthermore, those skilled in the art can design regions / layers with different shapes, sizes, and relative positions as needed.

[0039] The embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0040] Example 1

[0041] A vacuum pump gear mounting and leveling device, the composition of which is shown below:

[0042] like Figures 1-3 As shown, a vacuum pump gear mounting and leveling device includes a Roots rotor 10, a bearing plate 9 mounted on the end of the Roots rotor 10, a gear limiting plate 8 mounted on the bearing plate 9, and a gear 7 mounted on the gear limiting plate 8 by a gear flattening fixture 6. The gear flattening fixture 6 has several top heads 5 fixed on one side surface of a force equalizing pad 4. The gear flattening fixture 6 is connected to a gear adjusting plate 3, which has several through holes. The through holes correspond to the positions of the top heads 5. A second fixing device 2 passes through the several through holes and contacts and connects with the top heads 5. The gear flattening fixture 6, the force equalizing pad 4, and the gear adjusting plate 3 are provided with through holes of the same diameter. The first fixing device 1 passes through the through holes for fixing.

[0043] Preferably, the through holes on the gear flattening fixture 6, the force equalizing shim 4, and the gear adjusting plate 3 are adapted to the size of the first fixing device 1.

[0044] Preferably, the gear flattening fixture 6 is composed of a disk and a cylinder, the diameter of the cylinder is smaller than the diameter of the disk, and the top head 5 is located on the disk.

[0045] Preferably, the force-equalizing pad 4 is disc-shaped, and its outer diameter is the same as that of the cylindrical outer diameter of the gear flattening fixture 6 and is fitted to the cylinder for installation.

[0046] Preferably, the first fixing device 1 is an M12 bolt, and the second fixing device 2 is an M6 bolt, or an adjustable rotatable stud.

[0047] Example 2

[0048] A vacuum pump gear mounting and leveling device, the method of use of which is as follows:

[0049] like Figures 4-5As shown, when hot-fitting the gear, first install the gear limiting plate 8 to limit the gear installation height. After the gear 7 is installed on the gear limiting plate 8, install the gear flattening fixture 6. Next, install the force equalizing shim 4 and the gear adjusting plate 3 in sequence. Install the M12 bolt connecting shaft through the middle through hole. Then, use 3 M6 socket head cap screws to connect the lower brass top head 5 through the holes on the gear adjusting plate 3. Adjust the tightness of the three M6 bolts to level the gear.

[0050] After leveling, as follows Figure 5 The marked positions are checked using a 0.03mm feeler gauge, and the gears are calibrated and leveled based on the results. After the gears have cooled, a final check and adjustment are performed. The specific testing method is as follows:

[0051] Insert the selected feeler gauge into the gap between the leveling device and the measuring plane. During insertion, gradually apply slight pressure until resistance is felt or the feeler gauge can just slide freely but cannot move easily. While using the feeler gauge, record the readings of the measuring instrument at the marking points; these readings reflect the flatness or tilt of the leveling device. Compare the measurement data with preset flatness or tilt standards. If it exceeds the standard range, the leveling device needs adjustment. Based on the analysis results, adjust the leveling device accordingly. After adjustment, use the feeler gauge and measuring instrument again to ensure the leveling device meets the requirements.

[0052] Finally, it should be noted that the above embodiments only describe the basic principles, main features, and advantages of this utility model. For those skilled in the art, it is obvious that this utility model is not limited to the details of the above exemplary embodiments, and that it can be implemented in other specific forms without departing from the spirit or basic characteristics of this utility model. Therefore, the embodiments should be considered exemplary and non-limiting in all respects. The scope of this utility model is defined by the appended claims rather than the foregoing description, and thus all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this utility model. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0053] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can be appropriately combined to form other embodiments that can be understood by those skilled in the art. The above content is only for illustrating the technical concept of this utility model and should not be used to limit the scope of protection of this utility model. Any modifications made to the technical solutions based on the technical concept proposed by this utility model shall fall within the scope of protection of the claims of this utility model.

Claims

1. A vacuum pump gear mounting levelling device, characterised in that, It includes Roots rotor (10), Roots rotor (10) end mounting bearing plate (9), bearing plate (9) mounting gear (7), gear (7) is provided with gear flattening tooling (6), gear flattening tooling (6) connects gear adjusting plate (3), gear flattening tooling (6) and gear adjusting plate (3) are all provided with through hole, first fixing device (1) passes through the through hole and is fixed; Gear flattening tooling (6) is provided with several jacks (5), gear adjusting plate (3) is provided with several through holes, second fixing device (2) passes through the through hole and is connected with jacks (5).

2. A vacuum pump gear mounting levelling device according to claim 1, characterised in that, The position of the through hole corresponds to the position of the jacks (5).

3. A vacuum pump gear mounting levelling device according to claim 1, characterised in that, Bearing plate (9) is provided with gear limiting plate (8).

4. A vacuum pump gear mounting levelling device according to claim 3, characterised in that, Gear (7) is mounted on gear limiting plate (8).

5. A vacuum pump gear mounting levelling device according to claim 1, characterised in that, Force equalizing washer (4) is fixed between gear flattening tooling (6) and gear adjusting plate (3).

6. A vacuum pump gear mounting levelling device according to claim 5, characterised in that, The through hole in the force equalizing washer (4) is consistent with the through hole in gear flattening tooling (6) and gear adjusting plate (3).

7. A vacuum pump gear mounting levelling device according to claim 6, characterised in that, The size of the through hole is adapted to the size of the first fixing device (1).

8. A vacuum pump gear mounting levelling device according to claim 7, characterised in that, The first fixing device (1) is M12 bolt.

9. A vacuum pump gear mounting levelling device according to claim 1, characterised in that, The second fixing device (2) is M6 bolt.

10. A vacuum pump gear mounting levelling device according to claim 1, characterised in that, After leveling, the distance between gear (7) and gear limiting plate (8) is detected by using a plug gauge, and the second fixing device (2) is adjusted according to the detection result.

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