Universal horizontal automatic inspection device of inspection manipulator for furnace tubes

Abstract

The utility model discloses a universal horizontal automatic inspection device of an inspection manipulator for furnace tubes, which comprises a base plate, two second supports are fixedly connected onto the base plate, connecting seats are hinged onto the second supports, mounting plates are fixedly connected onto the connecting seats, a plurality of laser emitters are uniformly distributed on one mounting plate, and a plurality of laser emitters are uniformly distributed on the other mounting plate. A laser receiver is fixedly connected to the position, corresponding to the laser transmitter, of the other mounting plate; according to the utility model, the plurality of laser emitters and laser receivers are used for detecting the levelness and spacing of the ceramic grabbing pieces, and the position offset of the ceramic grabbing pieces is converted into the time interval of signal blocking and receiving, so that the levelness and spacing of the ceramic grabbing pieces are automatically detected at regular intervals with high precision; therefore, the surface of the wafer is prevented from being damaged due to the position deviation of the ceramic grabbing sheet. And meanwhile, the mounting plate is horizontally adjusted, so that inaccurate inspection results caused by errors of the inspection device can be avoided.

Description

Technical Field

[0001] This utility model relates to the field of robotic arm inspection technology, and in particular to a horizontal automatic inspection device for a universal inspection robot arm for furnace tubes. Background Technology

[0002] A wafer robotic arm is an automated wafer transfer mechanism used to transport wafers. Its structure mainly consists of a robotic arm and ceramic grippers. Most existing furnace tube equipment uses multi-wafer robotic arms, which use multiple ceramic grippers to transport multiple wafers at a time. During machine adjustments or prolonged operation, the levelness and spacing of the ceramic grippers can shift, causing scratches on the wafer surface, reducing wafer yield or rendering them unusable. Therefore, a universal inspection robot for furnace tubes with an automatic horizontal inspection function is proposed. Utility Model Content

[0003] The purpose of this invention is to provide a universal horizontal automatic inspection device for furnace tubes using a robotic arm, in order to solve the problems mentioned in the background art.

[0004] To solve the above-mentioned technical problems, this utility model provides the following technical solution: a horizontal automatic inspection device for a universal inspection robot for furnace tubes, including a base plate, two second brackets fixedly connected to the base plate, a connecting seat hinged to the second bracket, and a mounting plate fixedly connected to the connecting seat. Multiple laser emitters are evenly distributed on one mounting plate, and a laser receiver is fixedly connected to the other mounting plate at the position corresponding to the laser emitter.

[0005] Preferably, a level is fixedly connected to one of the mounting plates.

[0006] Preferably, a second screw is mounted on the second bracket, and the second screw is threaded onto the substrate.

[0007] Preferably, a third screw is installed on the connector, and the third screw is threaded onto the mounting plate.

[0008] Preferably, both the laser emitter and the laser receiver are equipped with a fourth screw, and the fourth screw is threaded onto the mounting plate.

[0009] Preferably, a first bracket is fixedly connected to the base plate, a threaded rod is rotatably connected to the first bracket, a knob is fixedly connected to one end of the threaded rod, a slider is threadedly connected to the threaded rod, connecting plates are fixedly connected to both outer walls of the slider, a rack is fixedly connected to the connecting plate, a gear is meshed on the rack, a connecting shaft is provided at the top of the slider, and the connecting shaft is hinged to the second bracket, a connecting seat is fixedly connected to the connecting shaft, and the gear is fixedly connected to the connecting shaft.

[0010] Preferably, the first bracket is equipped with a slide rail, and the slider is slidably connected to the slide rail.

[0011] Preferably, a first screw is installed on the slide rail, and the first screw is threaded onto the base plate.

[0012] This invention provides a universal inspection robot for furnace tubes, with the following advantages: This invention utilizes multiple laser emitters and receivers to detect the level and spacing of ceramic grippers, converting the positional offset of the ceramic grippers into signal blocking and reception time intervals. This enables periodic, high-precision automated inspection of the level and spacing of the ceramic grippers, thus preventing wafer surface damage caused by positional offset of the ceramic grippers. Furthermore, this invention avoids inaccurate inspection results due to errors in the inspection device itself by adjusting the level of the mounting plate. Attached Figure Description

[0013] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0014] Figure 1 This is a schematic diagram of the overall three-dimensional structure of this utility model;

[0015] Figure 2 This is an exploded view of the overall three-dimensional structure of this utility model;

[0016] Figure 3 for Figure 2 Enlarged view of the structure of region A in the middle;

[0017] Figure 4 This is a top view schematic diagram of the overall structure of this utility model.

[0018] In the diagram: 1. Base plate; 11. First bracket; 12. Slide rail; 13. First screw; 14. Threaded rod; 15. Knob; 16. Slider; 17. Connecting plate; 18. Rack; 19. Gear; 110. Connecting shaft; 2. Second bracket; 21. Second screw; 22. Connecting seat; 23. Third screw; 24. Mounting plate; 25. Laser emitter; 26. Fourth screw; 27. Level; 28. Laser receiver. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0020] Please see the appendix Figure 1 -Appendix Figure 4This utility model provides an embodiment of a universal inspection robot for furnace tubes, comprising a base plate 1. Two second supports 2 are fixedly connected to the base plate 1. Connecting seats 22 are hinged to the second supports 2. Mounting plates 24 are fixedly connected to the connecting seats 22. One mounting plate 24 has multiple laser emitters 25 evenly distributed on it. A laser receiver 28 is fixedly connected to the other mounting plate 24 at the corresponding positions of the laser emitters 25. The connecting seats 22 are adjustable to level the mounting plates 24. The mounting plates 24 are used to mount the laser emitters 25 and laser receivers 28. The laser emitters 25 are used to emit laser signals. Laser receiver 28 is used to receive laser signals; a level 27 is fixedly connected to one of the mounting plates 24, and the level 27 is used to detect the level of the mounting plate 24; a second screw 21 is installed on the second bracket 2, and the second screw 21 is threaded to the base plate 1, and the second screw 21 is used to fix the second bracket 2; a third screw 23 is installed on the connecting seat 22, and the third screw 23 is threaded to the mounting plate 24, and the third screw 23 is used to fix the connecting seat 22; both laser emitter 25 and laser receiver 28 are installed with a fourth screw 26, and the fourth screw 26 is threaded to the mounting plate 24, and the fourth screw... Wire 26 is used to fix the laser emitter 25 and the laser receiver 28; a first bracket 11 is fixedly connected to the substrate 1, a threaded rod 14 is rotatably connected to the first bracket 11, a knob 15 is fixedly connected to one end of the threaded rod 14, a slider 16 is threadedly connected to the threaded rod 14, connecting plates 17 are fixedly connected to the outer walls of both sides of the slider 16, a rack 18 is fixedly connected to the connecting plate 17, a gear 19 is meshed on the rack 18, a connecting shaft 110 is provided at the top of the slider 16, and the connecting shaft 110 is hinged to the second bracket 2, a connecting seat 22 is fixedly connected to the connecting shaft 110, and the gear 19 is fixedly connected to the connecting... On the connecting shaft 110, the first bracket 11 is used to install the threaded rod 14, the knob 15 is used to rotate the threaded rod 14, the threaded rod 14 is used to drive the slider 16, the connecting plate 17 is used to connect the slider 16 and the rack 18, the rack 18 is used to drive the gear 19, and the connecting shaft 110 is used to realize the deflection adjustment of the connecting seat 22; a slide rail 12 is installed on the first bracket 11, and the slider 16 is slidably connected to the slide rail 12, the slide rail 12 is used to assist the sliding of the slider 16; a first screw 13 is installed on the slide rail 12, and the first screw 13 is threaded to the base plate 1, the first screw 13 is used to fix the slide rail 12 and the first bracket 11.

[0021] Working principle: When using this utility model for automatic horizontal and spacing inspection of the robotic arm, a ceramic gripper horizontal inspection area is added to the wafer loading area. The device is installed in this area. After installation, the direction of the mounting plate 24 is taken as the Y-axis, and the direction perpendicular to the mounting plate 24 is taken as the X-axis. The device is leveled in the Y-axis direction by turning the knob 15, which drives the slider 16 through the threaded rod 14. The slider 16 slides along the slide rail 12. The slider 16 drives the rack 18 through the connecting plate 17. The rack 18 drives the connecting shaft 110 through the gear 19. The connecting seat 22 on the connecting shaft 110 deflects, causing the mounting plate 24 to rotate. 4. Subsequently, the level 27 determines whether the mounting plate 24 remains horizontal in the Y-axis direction, thus avoiding inaccurate detection results caused by horizontal deviations in the Y-axis direction between the laser emitter 25 and the laser receiver 28. Then, the automatic alignment of the laser emitter 25 and the laser receiver 28 is activated. After confirming that both can receive signals, the level calibration of the ceramic plate of the robotic arm that has entered the inspection area begins. After the robotic arm enters the inspection area, it moves from top to bottom at a fixed speed, and then moves in the opposite direction once. During the movement, the signal from the laser emitter 25 is blocked by the ceramic plate of the robotic arm. This prevents the laser receiver 28 from receiving the signal. By analyzing the signal reception times of multiple laser emitters 25, it can be determined whether the ceramic sheet of the robotic arm has a horizontal or spacing deviation. When multiple laser emitters 25 receive signals simultaneously, it indicates that the ceramic sheet is horizontal in the Y-axis direction. Since the robotic arm moves at a fixed speed, the time from signal obstruction to reception when the ceramic sheet is horizontal in the X-axis direction is a fixed value. By determining whether the actual time interval between signal obstruction and reception equals this fixed value, it can be determined whether the ceramic sheet is horizontal in the X-axis direction. This can be achieved by recording the intervals. By analyzing whether the intervals between signal interruptions are equal, it can be determined whether the spacing between multiple ceramic plates is equal. Equal interruption intervals indicate that the spacing between multiple ceramic plates is equal; otherwise, it can be determined that the spacing is unequal. Among them, the substrate 1 is used to install the device in the inspection area, the first bracket 11 is used to install the threaded rod 14, the first screw 13 is used to fix the slide rail 12 and the first bracket 11, the second bracket 2 is used to install the connecting shaft 110, the second screw 21 is used to fix the second bracket 2, the third screw 23 is used to fix the connecting seat 22, and the fourth screw 26 is used to fix the laser emitter 25 and the laser receiver 28.

[0022] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0023] The device embodiments described above are merely illustrative. The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the modules can be selected to achieve the purpose of this embodiment according to actual needs. Those skilled in the art can understand and implement this without any creative effort.

[0024] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and not to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.

Claims

1. A horizontal automatic inspection apparatus for a universal inspection robot for furnace tubes, comprising a base plate (1), characterized in that: Two second supports (2) are fixedly connected on the substrate (1), a connecting seat (22) is hingedly connected on the second support (2), a mounting plate (24) is fixedly connected on the connecting seat (22), a plurality of laser emitters (25) are uniformly distributed on one of the mounting plates (24), and a laser receiver (28) is fixedly connected on the other mounting plate (24) at a position corresponding to the laser emitters (25).

2. A horizontal automatic inspection apparatus for a universal inspection robot for a furnace tube according to claim 1, characterized in that: A level (27) is fixedly connected on one of the mounting plates (24).

3. A horizontal automatic inspection apparatus for a universal inspection robot for a furnace tube according to claim 1, characterized in that: A second screw (21) is mounted on the second support (2) and is threadedly connected on the substrate (1).

4. A horizontal automatic inspection apparatus for a universal inspection robot for a furnace tube according to claim 1, characterized in that: A third screw (23) is mounted on the connecting seat (22) and is threadedly connected on the mounting plate (24).

5. A horizontal automatic inspection apparatus for a universal inspection robot for boiler tubes according to claim 1, characterized in that: Fourth screws (26) are mounted on the laser emitters (25) and the laser receiver (28) and are threadedly connected on the mounting plate (24).

6. A horizontal automatic inspection apparatus for a universal inspection robot for boiler tubes according to claim 1, characterized in that: A first support (11) is fixedly connected on the substrate (1), a threaded rod (14) is rotatably connected on the first support (11), one end of the threaded rod (14) is fixedly connected with a knob (15), a sliding block (16) is threadedly connected on the threaded rod (14), connecting plates (17) are fixedly connected on the two outer walls of the sliding block (16), a rack (18) is fixedly connected on the connecting plate (17), a gear (19) is meshingly connected on the rack (18), a connecting shaft (110) is arranged at the top of the sliding block (16) and is hingedly connected on the second support (2), the connecting seat (22) is fixedly connected on the connecting shaft (110), and the gear (19) is fixedly connected on the connecting shaft (110).

7. A horizontal automatic inspection apparatus for a universal inspection robot for furnace tubes according to claim 6, characterized in that: A sliding rail (12) is mounted on the first support (11) and the sliding block (16) is slidingly connected on the sliding rail (12).

8. A horizontal automatic inspection apparatus of a universal inspection robot for a furnace tube according to claim 7, characterized in that: A first screw (13) is mounted on the sliding rail (12) and is threadedly connected on the substrate (1).

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