Magnetron structural member leak detection tool and magnetron leak detection machine

Abstract

The utility model relates to the field of magnetron detection equipment, and especially relates to a magnetron structural member leak detection tool and a magnetron leak detection machine. The leak detection tool for the magnetron structural member comprises a base and a detection seat arranged on the base, a sealing groove used for embedding the magnetron structural member is formed in the detection seat, and a vacuum cavity is defined between the magnetron structural member and the sealing groove. The detection seat is provided with a vacuum pressure maintaining hole, the vacuum pressure maintaining hole extends into the vacuum cavity, and the vacuum pressure maintaining hole is used for communicating the detection seat and the air exhaust member. According to the utility model, structural members with air leakage points can be screened out, the influence on the sealing performance of the assembled magnetron is avoided, and the reliable performance of the magnetron is ensured.

Description

Technical Field

[0001] This utility model relates to the field of magnetron testing equipment, and in particular to a magnetron structural component leak detection fixture and a magnetron leak detection machine. Background Technology

[0002] A magnetron is an electronic device used to generate microwaves, and it is widely used in radar, microwave ovens, and industrial heating. A magnetron mainly consists of a top cover, a reaction shell, and a bottom cover. The top cover houses the cathode assembly, the reaction shell houses the anode assembly, and the bottom cover houses the exhaust pipe assembly. These components are welded together to form the overall magnetron structure. During welding, it is necessary to ensure concentricity and vacuum between the components, as well as to guarantee a good seal between them.

[0003] If there are leaks in the upper cover, reaction shell and / or lower shell during the welding and assembly of the various structures of the magnetron, the magnetron may leak after welding and assembly, affecting its internal sealing performance, causing the magnetron to fail and become scrap, resulting in material loss. Utility Model Content

[0004] To address the shortcomings of existing technologies, this invention provides a magnetron structural component leak detection fixture and a magnetron leak detection machine, which can screen out magnetron structural components with leaks, thus avoiding affecting the sealing performance of the assembled magnetron.

[0005] To solve the above-mentioned technical problems, this utility model provides a leak detection tool for magnetron structural components, including a base and a detection seat disposed on the base. The detection seat has a sealing groove for embedding the magnetron structural component, and the magnetron structural component and the sealing groove form a vacuum cavity.

[0006] The detection seat is provided with a vacuum pressure holding hole, which extends into the vacuum chamber and is used to connect the detection seat and the vacuum pump.

[0007] As an improvement to the above solution, the sealing groove has an inner wall and an outer wall, wherein a sealing element is arranged on the inner wall, and the sealing element seals against the inner wall of the magnetron structure.

[0008] As an improvement to the above solution, the bottom wall surface of the sealing groove is a horizontal plane.

[0009] As an improvement to the above solution, the inner diameter of the outer wall is greater than or equal to the outer diameter of the magnetron structure.

[0010] As an improvement to the above solution, the base is equipped with a vacuum gauge, which is used to detect the vacuum level of the vacuum chamber;

[0011] The base is provided with a plurality of detection seats, each of the detection seats forming a vacuum chamber, and the vacuum gauge is connected to the plurality of vacuum chambers;

[0012] Alternatively, the detection seat may be provided with a plurality of sealing grooves, each sealing groove forming a vacuum chamber, and the vacuum gauge may be connected to the plurality of vacuum chambers.

[0013] As an improvement to the above solution, it also includes:

[0014] A lifting support plate is disposed on the base, and a connecting plate is connected to the lifting support plate, and the connecting plate slides vertically relative to the lifting support plate;

[0015] An inflation tube is provided on the side of the connecting plate facing the detection seat, and the inflation tube is located above one of the sealing grooves. An inflation port is arranged on the outer wall of the inflation tube.

[0016] As an improvement to the above solution, the inner diameter of the inflation tube is larger than the inner diameter of the outer wall of the sealing groove.

[0017] As an improvement to the above solution, the inflation tube is arranged coaxially with the sealing groove.

[0018] As an improvement to the above solution, a buffer pad is arranged at the end of the inflation tube away from the connecting plate.

[0019] Accordingly, this utility model also provides a magnetron leak detector, including an air circuit system and a magnetron structural component leak detection fixture as described in any one of the above-mentioned embodiments, wherein the air circuit system is connected to the magnetron structural component leak detection fixture through a connecting pipe.

[0020] The present invention has the following beneficial effects:

[0021] The magnetron leak detection fixture in this embodiment allows for the detection of leaks in magnetron components. The magnetron component is placed in the sealing groove of the detection base, and a vacuum chamber is evacuated through a vacuum pressure-holding hole using a vacuum extraction device. If the vacuum level in the chamber meets the requirements, the corresponding magnetron component has no leaks; if the vacuum level does not meet the requirements, the corresponding magnetron component has leaks. By utilizing vacuum pressure-holding detection of the magnetron components, components with leaks can be eliminated before welding and assembly to avoid affecting the sealing performance of the assembled magnetron, thus ensuring stable and reliable magnetron performance and preventing functional failure. Attached Figure Description

[0022] Figure 1 This is a three-dimensional structural schematic diagram of a leak detection tool for a magnetron structure in one embodiment of this utility model;

[0023] Figure 2 This is a three-dimensional structural diagram of the detection seat in one embodiment of the present invention;

[0024] Figure 3 This is an exploded structural diagram of the magnetron in one embodiment of the present invention. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of this utility model clearer, the following will describe this utility model in further detail with reference to the accompanying drawings. It is hereby declared that the terms "up," "down," "left," "right," "front," "back," "inner," and "outer," etc., appearing or about to appear in this document, are based solely on the accompanying drawings and are not intended to specifically limit this utility model.

[0026] The leak detection tool for magnetron structural components provided by this utility model can screen out structural components with leaks, avoid affecting the sealing performance of the assembled magnetron, ensure the reliability of the magnetron performance, and prevent functional failure.

[0027] In one specific embodiment of this utility model, such as Figure 1 and Figure 2 As shown, the magnetron structure leak detection fixture includes a base 1 and a detection seat 2 disposed on the base 1. The detection seat 2 has a sealing groove 21 for embedding the magnetron structure 4, and the magnetron structure 4 and the sealing groove 21 enclose a vacuum cavity. The detection seat 2 is provided with a vacuum pressure holding hole 22, which extends into the vacuum cavity and is used to connect the detection seat 2 and the vacuum pump.

[0028] In this embodiment, the magnetron structure leak detection fixture, when detecting whether the magnetron structure 4 is leaking, places the magnetron structure 4 in the sealing groove 21 of the detection seat 2, and evacuates the vacuum chamber through the vacuum pressure holding hole 22 using an air extraction device. If the vacuum level of the vacuum chamber meets the requirements, the corresponding magnetron structure 4 has no leaks; if the vacuum level of the vacuum chamber does not meet the requirements, the corresponding magnetron structure 4 has leaks. Furthermore, by utilizing the vacuum pressure holding detection of the magnetron structure 4, components with leaks can be screened out before welding and assembly to avoid affecting the sealing performance of the assembled magnetron, thereby ensuring the stable and reliable performance of the magnetron and preventing functional failure.

[0029] It should be noted that when determining whether the vacuum level of the vacuum chamber meets the requirements, the vacuum level can be judged by the vacuum gauge reading, or by manually grasping the magnetron structure 4 and checking whether the magnetron structure 4 is adsorbed into the sealing groove 21, thus determining the vacuum level of the vacuum chamber.

[0030] It should also be noted that, such as Figure 3As shown, the magnetron structure 4 can be one of the magnetron upper cover 41, the magnetron reaction shell 42, and the magnetron lower cover 43. The magnetron upper cover 41 is equipped with a cathode assembly, the magnetron reaction shell 42 is equipped with an anode assembly, and the magnetron lower cover 43 is equipped with an exhaust pipe assembly, etc.

[0031] Before assembling the magnetron, the upper cover 41 and lower cover 43 of the magnetron can be inverted and placed in the sealing groove 21. Vacuum pressure is then used to screen either the upper cover 41 or the lower cover 43, eliminating any covers with leaks. Figure 1 The image shows the magnetron cover 41 being inverted and placed in the sealing groove 21. When testing the reaction shell 42, one of the openings of the reaction shell 42 can be embedded in the sealing groove 21, and the other opening can be sealed by a sealing cover or other sealing structure, so as to achieve leakage screening of the reaction shell 42 by using vacuum pressure.

[0032] Specifically, to ensure the accuracy of test results, such as Figure 2 As shown, the sealing groove 21 has an inner wall surface 211 and an outer wall surface 212. The inner wall surface 211 is provided with a sealing element 213, which seals against the inner wall surface of the magnetron structure 4. The sealing element 213 ensures a sealed contact between the inner wall surface of the magnetron structure 4 and the inner wall surface 211 of the sealing groove 21, preventing vacuum leakage in the vacuum chamber due to gaps in the connection between the magnetron structure 4 and the inner wall surface 211. This prevents vacuum leakage from affecting the judgment results of the vacuum pressure test and ensures the accuracy of the vacuum pressure test.

[0033] Preferably, the seal 213 is a rubber sealing ring.

[0034] Furthermore, the bottom wall of the sealing groove 21 is a horizontal surface to ensure that the seal 213 is evenly pressurized, avoid local stress concentration in the seal 213 due to tilting, ensure the sealing performance of the seal 213 during long-term use, and further ensure the accuracy and reliability of vacuum pressure testing.

[0035] The inner diameter of the outer wall surface 212 is greater than or equal to the outer diameter of the magnetron structure 4 to ensure that the sealing groove 21 can accommodate the magnetron structure 4 with a certain outer diameter tolerance. This facilitates the embedding of the magnetron structure 4 into the sealing groove 21 without forcibly squeezing the magnetron structure 4 during assembly, thus reducing the wear on the outer surface of the magnetron structure 4. Preferably, a clearance fit is formed between the outer diameter of the magnetron structure 4 and the inner diameter of the outer wall surface 212.

[0036] In this embodiment, the base 1 is equipped with a vacuum gauge (not shown in the figure). The vacuum gauge is used to detect the vacuum degree of the vacuum chamber, so as to provide a real-time and accurate vacuum degree value of the vacuum chamber, thereby quantifying the sealing performance of the magnetron structure 4 and improving the detection accuracy.

[0037] Meanwhile, the magnetron structure leak detection fixture can simultaneously perform vacuum pressure testing on multiple magnetron structures 4 to improve testing efficiency. The placement of the detection seat 2 and the magnetron structure 4 can be achieved using the following methods:

[0038] In the first placement method, the base 1 is equipped with multiple detection seats 2, each of which forms a vacuum chamber. The vacuum gauge is connected to the multiple vacuum chambers so that the multiple detection seats 2 can carry the corresponding number of magnetron structural components 4, and the multiple detection seats 2 can be vacuumed and pressure maintained at the same time, so as to realize the simultaneous vacuum pressure maintenance test of multiple magnetron structural components 4 and improve the detection efficiency.

[0039] In the second placement method, the detection seat 2 is arranged with multiple sealing grooves 21, each sealing groove 21 forming a vacuum chamber. The vacuum gauge is connected to multiple vacuum chambers. During the test, multiple magnetron structural components 4 can be placed in the corresponding sealing grooves 21, and the multiple sealing grooves 21 can be evacuated and pressure maintained at the same time, so as to realize the simultaneous vacuum pressure test of multiple magnetron structural components 4 and improve the test efficiency.

[0040] Furthermore, it should be noted that when performing pressure holding tests on multiple magnetron components 4 simultaneously, the vacuum level value provided by the vacuum gauge can indicate whether there are any leaks in the multiple magnetron components 4. If the vacuum level value provided by the vacuum gauge reaches the predetermined value, it indicates that there are no leaks in the multiple magnetron components 4; if the vacuum level value provided by the vacuum gauge does not reach the predetermined value, it indicates that one or more magnetron components 4 have leaks. In this case, the leak performance of the corresponding batch of magnetron components 4 will be individually tested to screen out the magnetron components 4 with leaks. By combining coarse and fine inspections, the detection efficiency is improved, while ensuring that no magnetron components 4 with leaks are missed.

[0041] In embodiments of this utility model, when multiple magnetron structural components 4 are simultaneously detected, and one or more of these components 4 have leaks, to improve the detection accuracy of the leaks, as follows: Figure 1 As shown, the leak detection fixture for the magnetron structure also includes a lifting support plate 3. The lifting support plate 3 is disposed on the base 1, and a connecting plate 31 is connected to the lifting support plate 3, with the connecting plate 31 sliding vertically relative to the lifting support plate 3. An inflation pipe 32 is disposed on the side of the connecting plate 31 facing the detection seat 2, and the inflation pipe 32 is located above one of the sealing grooves 21, with an inflation port 33 arranged on the outer wall of the inflation pipe 32.

[0042] Understandably, when the vacuum level provided by the vacuum gauge fails to reach the predetermined value, the connecting plate 31 moves the inflation tube 32 towards the detection seat 2, and covers the end of the inflation tube 32 facing the detection seat 2 with the sealing groove 21, thus encasing the magnetron structure 4 through the inflation tube 32. Subsequently, air is injected into the inflation tube 32 through the inflation port 33, and the change in the vacuum level of the vacuum gauge is used to determine whether there is a leak in the magnetron structure 4 encased by the inflation tube 32. This allows for accurate identification of leaks by monitoring the pressure changes in the vacuum chamber during inflation.

[0043] Specifically, if the vacuum level value of the vacuum gauge does not change, it indicates that there is no leakage point in the corresponding magnetron structure 4. If the vacuum level value of the vacuum gauge changes by a certain amount, it indicates that there is a leakage point in the corresponding magnetron structure 4, and the gas in the gas filling tube 32 flows into the vacuum chamber to disrupt the vacuum environment.

[0044] The inflation port 33 is connected to a gas source via a connecting pipe, preferably a helium source. Alternatively, a nitrogen source or a compressed air source can also be used, depending on actual needs.

[0045] It should also be noted that, such as Figure 1 As shown, the connecting plate 31 is slidably connected to the lifting support plate 3 via the slide rail assembly 34. The slide rail assembly 34 includes a drive motor, a lead screw, a guide rail, and a slider. The drive motor, lead screw, and guide rail are all vertically arranged on the lifting support plate 3. The slider is located on the side of the connecting plate 31 facing the lifting support plate 3. The drive motor drives the lead screw to rotate, and the lead screw drives the slider to slide up and down along the guide rail, thereby causing the connecting plate 31 and the inflation tube 32 to move up and down relative to the lifting support plate 3.

[0046] The inner diameter of the inflation tube 32 is larger than the inner diameter of the outer wall 212 of the sealing groove 21, so as to ensure that the inflation tube 32 can completely wrap the magnetron structure 4 after being pressed down. The gas in the inflation tube 32 can be evenly distributed on the outer wall of the magnetron structure 4 in the sealing groove 21, ensuring that there are no blind spots in the detection of the magnetron structure 4, and further improving the detection accuracy.

[0047] Furthermore, the inflation tube 32 and the sealing groove 21 are arranged coaxially. When the inflation tube 32 is pressed down to wrap the magnetron structure 4, it can avoid the problem that the gap between the inner wall of the inflation tube 32 and the outer wall of the magnetron structure 4 is too small on one side and too large on the other side, further avoiding the phenomenon of missed detection on one side, thereby further improving the detection accuracy.

[0048] In this embodiment, a buffer pad (not shown in the figure) is arranged at the end of the inflation tube 32 away from the connecting plate 31. When the inflation tube 32 is pressed down, the buffer pad can be used to reduce the contact noise between the inflation tube 32 and the detection seat 2 during the pressing process.

[0049] Accordingly, this utility model also provides a magnetron leak detector, which includes an air circuit system and a magnetron structural component leak detection fixture as described in any of the above embodiments. The air circuit system is connected to the magnetron structural component leak detection fixture via a connecting pipe. The magnetron leak detector includes all the beneficial effects of the magnetron structural component leak detection fixture described in the above embodiments, which will not be repeated here.

[0050] The gas path system includes a pump unit, control valves, and piping. The pump unit is connected to the vacuum pressure holding port 22 in the detection seat 2 via the piping. The control valves are located between the piping and the pump unit, and between the piping and the detection seat 2, to control the on / off state of the corresponding connected pipes or the gas flow rate. The pump unit includes, but is not limited to, vacuum pumps and gas pumps. The specific piping arrangement of the piping unit can be arranged according to actual needs and is not specifically limited here.

[0051] The above description is the preferred embodiment of this utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this invention, and these improvements and modifications are also considered to be within the protection scope of this utility model.

Claims

1. A magnetron structure leak detection tooling, characterized in that, The detection seat is provided with a vacuum pressure hole extending into the vacuum cavity, and the vacuum pressure hole is used for connecting the detection seat and a pumping device. The sealing groove is formed with an inner side wall surface and an outer side wall surface, wherein the inner side wall surface is arranged with a sealing element in sealing abutment with an inner wall surface of the magnetron structure member.

2. The magnetron structure leak detection tooling of claim 1, wherein, The bottom wall surface of the sealing groove is a horizontal surface.

3. The magnetron structure leak detection tooling of claim 2, wherein, The inner diameter of the outer side wall surface is greater than or equal to the outer diameter of the magnetron structure member.

4. The magnetron structure leak detection tooling of claim 2, wherein, The base is provided with a vacuum gauge for detecting the vacuum degree of the vacuum cavity.

5. The magnetron structure leak detection tool of claim 1, wherein, The base is arranged with a plurality of detection seats, each of which is formed with a vacuum cavity, and the vacuum gauge is connected with the plurality of vacuum cavities. Or, the detection seat is arranged with a plurality of sealing grooves, each of which forms a vacuum cavity, and the vacuum gauge is connected with the plurality of vacuum cavities. Further comprising:

6. The magnetron structure leak hunting tool of claim 1, wherein, A lifting support plate is arranged on the base, and the lifting support plate is connected with a connecting plate which slides along the vertical direction relative to the lifting support plate. The side of the connecting plate facing the detection seat is provided with an inflation tube located above one of the sealing grooves, and the outer wall surface of the inflation tube is arranged with an inflation port. The inner diameter of the inflation tube is greater than the inner diameter of the outer side wall surface of the sealing groove.

7. The magnetron structure leak detection tool of claim 6, wherein, The inflation tube is coaxially arranged with the sealing groove.

8. The magnetron structure leak detection tooling of claim 6 or 7, wherein, The end of the inflation tube away from the connecting plate is arranged with a buffer pad.

9. The magnetron structure leak detection tool of claim 6, wherein, The gas circuit system is connected with the magnetron structure member leak detection tool through a communication pipeline.

10. A magnetron leak detector, characterized by ​

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