Multifunctional semiconductor gas gate valve maintenance and detection platform
By designing a multifunctional semiconductor gas valve repair and testing platform, and utilizing the coordinated movement of the pressurizing components and clamping rods, the problem of gas valves falling off under high pressure in semiconductor manufacturing was solved, thus achieving stability and accuracy in the testing process.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-30
- Publication Date
- 2026-03-17
AI Technical Summary
In existing semiconductor manufacturing, the connection method between gas valves and pipelines or detection equipment is difficult to provide continuous and stable axial and radial restraint forces under high gas pressure, leading to the problem of valve detachment.
A multifunctional semiconductor gas valve repair and testing platform was designed. Through the mechanical structure of the pressurizing component and the clamping rod, and by utilizing the coordinated movement of the transmission rod and the rotating shaft, an additional and continuous stable clamping force is provided to prevent the valve from falling off under high pressure.
It effectively prevents valves from falling off under high pressure due to insufficient tightening force, ensures the stability and accuracy of the testing process, provides continuous mechanical protection, and improves the reliability and accuracy of test data.
Smart Images
Figure CN224004665U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of gas valve testing technology, specifically a multifunctional semiconductor gas valve repair and testing platform. Background Technology
[0002] In the semiconductor manufacturing field, gas valves are key components that ensure the stable and efficient operation of the production process. With the rapid development of semiconductor manufacturing technology, chip manufacturing processes are constantly moving towards smaller process nodes, which puts extremely stringent requirements on the precision and stability of semiconductor production equipment.
[0003] Existing valves are often connected to pipelines or testing equipment using traditional threaded connections or flange connections. These connections lack sufficient redundancy in terms of tightening force when dealing with gradually increasing gas pressure, making it difficult to provide continuous and stable axial and radial restraint forces. As the gas pressure rises, the impact force of the gas on the valve gradually exceeds the limit that the connection structure can withstand, thus causing the valve to fall off. Utility Model Content
[0004] The purpose of this invention is to provide a multifunctional semiconductor gas valve repair and testing platform to solve the problems mentioned in the background art.
[0005] To achieve the above objectives, this utility model provides the following technical solution: a multifunctional semiconductor gas valve repair and testing platform, comprising:
[0006] A sliding chamber, on which a fixed chamber is slidably connected, and a fixed plate is fixedly connected to the bottom of the fixed chamber;
[0007] A pressurizing assembly is placed inside a sliding chamber. The pressurizing assembly includes a first transmission rod slidably connected inside the sliding chamber, a first rotating shaft rotatably connected to the first transmission rod, a second transmission rod rotatably connected to the first rotating shaft, a second rotating shaft rotatably connected to the second transmission rod, a sliding plate rotatably connected to the second rotating shaft, and a clamping rod fixedly connected to the first transmission rod.
[0008] A fixed block is fixedly connected to a fixed plate. The first rotating shaft is rotatably connected to the fixed block. The sliding plate is slidably connected to the fixed block. A test chamber is fixedly connected to the sliding plate. An installation port is fixedly connected to the test chamber. An electric telescopic rod is fixedly connected to the test chamber. The side of the electric telescopic rod away from the test chamber is fixedly connected to the fixed plate. A rubber piston is slidably connected to the test chamber.
[0009] Furthermore, a slot is provided on the fixed block, and a first sliding block is rotatably connected to the bottom of the first rotating shaft. The first sliding block is slidably connected in the slot on the fixed block.
[0010] The above technical solution is adopted: by setting a first sliding block and setting the first sliding block to slide in the slot on the fixed block, the first sliding block is used to limit the first rotating shaft, thereby limiting the first transmission rod.
[0011] Furthermore, a limiting groove is provided on the test chamber, and a second sliding block is fixedly connected to the bottom of the clamping rod. The second sliding block is slidably connected in the limiting groove on the test chamber.
[0012] The above technical solution is adopted: by opening a limiting groove on the test chamber and setting a second sliding block to slide in the limiting groove, it is convenient to use the second sliding block to limit the clamping rod during use.
[0013] Furthermore, the sliding chamber is slidably connected to the fixed plate, and a sealing gasket is fixedly connected to the side of the fixed chamber near the sliding chamber.
[0014] The above technical solution improves the sealing performance between the fixed chamber and the sliding chamber during use by incorporating a sealing gasket.
[0015] Furthermore, the test chamber has an opening, and the mounting port is fixedly connected to the opening on the sliding chamber.
[0016] The above technical solution is adopted: by opening the test chamber, it is easy to fix the installation port to the test chamber during use. After the valve is installed on the installation port with bolts, the air pressure in the test chamber can act on the valve.
[0017] Furthermore, the rubber piston is fixedly connected to the fixed plate, the test chamber has an opening, a sealing gasket is fixedly connected to the rubber piston, and the rubber piston is slidably connected in the opening on the test chamber.
[0018] The above technical solution involves setting a rubber piston fixed to a fixed plate. When the test chamber is pushed to slide towards the side closer to the rubber piston, the air pressure inside the test chamber increases.
[0019] Compared with the prior art, the advantages and positive effects of this utility model are as follows:
[0020] In this invention, when the electric telescopic rod is activated, its extension action causes the test chamber, which is fixedly connected to it, to slide towards the side closer to the rubber piston. During this process, the sliding plate fixedly connected to the test chamber also slides synchronously. Since the sliding plate is rotatably connected to the second rotating shaft, the movement of the sliding plate will cause the second rotating shaft to rotate, which in turn will actuate the second transmission rod to produce displacement. One end of the second transmission rod is rotatably connected to the first rotating shaft. As the second transmission rod is displaced, the first rotating shaft begins to rotate, driving the first transmission rod fixedly connected to it to move. The first transmission rod is rotatably connected to the first rotating shaft and fixedly connected to a clamping rod. The first sliding block rotatably connected to the bottom of the first rotating shaft is slidably connected to the slot on the fixed block. This structure limits the movement trajectory of the first rotating shaft, so that the first transmission rod can only slide in a specific direction on the fixed block. The two first transmission rods are driven to clamp inward, and the clamping rod also moves inward, tightly squeezing the valve placed on the installation port. As the air pressure gradually increases, it provides the valve with additional and continuous stable clamping force from the mechanical structure level, effectively preventing the valve from falling off under high pressure due to insufficient fastening force of the traditional connection method. Attached Figure Description
[0021] Figure 1 This is a schematic diagram of the overall structure of a multifunctional semiconductor gas valve repair and testing platform.
[0022] Figure 2 This is a schematic diagram of the sliding chamber removal state of a multifunctional semiconductor gas valve repair and testing platform.
[0023] Figure 3 This is a schematic diagram of the sliding plate position of a multifunctional semiconductor gas valve repair and testing platform.
[0024] Figure 4 This is a schematic diagram showing the position of the electric telescopic rod of a multifunctional semiconductor gas valve repair and testing platform.
[0025] Figure 5 This is a schematic diagram of the rubber piston position in a multifunctional semiconductor gas valve repair and testing platform.
[0026] Numbering on the map:
[0027] 1. Sliding chamber; 11. Fixed chamber; 12. Fixed plate; 13. Rubber piston;
[0028] 2. Pressurization assembly; 21. First transmission rod; 22. First rotating shaft; 23. Second transmission rod; 24. Second rotating shaft; 25. First sliding block; 26. Electric telescopic rod; 27. Clamping rod; 28. Sliding plate; 29. Second sliding block;
[0029] 3. Fixing block; 31. Test chamber; 32. Installation port. Detailed Implementation
[0030] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0031] Example:
[0032] like Figures 1-5 As shown, this utility model provides a technical solution: a multifunctional semiconductor gas valve repair and testing platform, comprising:
[0033] A sliding compartment 1 is slidably connected to a fixed compartment 11, and a fixed plate 12 is fixedly connected to the bottom of the fixed compartment 11.
[0034] The pressurizing component 2 is placed inside the sliding chamber 1. The pressurizing component 2 includes a first transmission rod 21 slidably connected inside the sliding chamber 1, a first rotating shaft 22 rotatably connected to the first transmission rod 21, a second transmission rod 23 rotatably connected to the first rotating shaft 22, a second rotating shaft 24 rotatably connected to the second transmission rod 23, a sliding plate 28 rotatably connected to the second rotating shaft 24, and a clamping rod 27 fixedly connected to the first transmission rod 21.
[0035] Fixed block 3 is fixedly connected to fixed plate 12. First rotating shaft 22 is rotatably connected to fixed block 3. Sliding plate 28 is slidably connected to fixed block 3. Test chamber 31 is fixedly connected to sliding plate 28. Installation port 32 is fixedly connected to test chamber 31. Electric telescopic rod 26 is fixedly connected to test chamber 31. The side of electric telescopic rod 26 away from test chamber 31 is fixedly connected to fixed plate 12. Rubber piston 13 is slidably connected to test chamber 31.
[0036] In this invention, when the electric telescopic rod 26 is activated, its extension action causes the test chamber 31, which is fixedly connected to it, to slide towards the side closer to the rubber piston 13. During this process, the sliding plate 28 fixedly connected to the test chamber 31 also slides synchronously. Since the sliding plate 28 is rotatably connected to the second rotating shaft 24, the movement of the sliding plate 28 will cause the second rotating shaft 24 to rotate, thereby actuating the second transmission rod 23 to produce displacement. One end of the second transmission rod 23 is rotatably connected to the first rotating shaft 22. As the second transmission rod 23 displaces, the first rotating shaft 22 begins to rotate, driving the first transmission rod 21 fixedly connected to it to move. The first transmission rod 21 is rotatably connected to the first rotating shaft 22 and fixedly connected to a clamping rod 27. The first sliding block 25, which is rotatably connected to the bottom of the rotating shaft 22, is slidably connected to the slot on the fixed block 3. This structure limits the movement trajectory of the first rotating shaft 22, so that the first transmission rod 21 can only slide in a specific direction on the fixed block 3. The two first transmission rods 21 are driven to move inward and clamp, and the clamping rod 27 also moves inward, tightly squeezing the valve placed on the mounting port 32. When the air pressure gradually increases, it provides the valve with an additional and continuous stable clamping force from the mechanical structure level, effectively preventing the valve from falling off under high pressure due to insufficient fastening force of the traditional connection method.
[0037] A slot is provided on the fixed block 3, and a first sliding block 25 is rotatably connected to the bottom of the first rotating shaft 22. The first sliding block 25 is slidably connected in the slot on the fixed block 3. The slot provides precise sliding guidance for the first sliding block 25, constraining its displacement path and ensuring that it can only move linearly in a predetermined direction. This constraint mechanism acts on the first rotating shaft 22, effectively limiting its rotation range and avoiding unexpected swaying caused by external impacts or component wear, thereby ensuring the consistency and accuracy of the movement of the first transmission rod 21. During each transmission, the first transmission rod 21 can stably drive the clamping rod 27 according to the preset trajectory, effectively improving the overall reliability of the pressurizing assembly 2, providing a solid mechanical guarantee for the long-term and complex valve testing process, and ensuring the precise and efficient execution of the valve clamping and fastening action.
[0038] A limiting groove is provided on the test chamber 31. A second sliding block 29 is fixedly connected to the bottom of the clamping rod 27. The second sliding block 29 is slidably connected within the limiting groove on the test chamber 31. After the testing process starts, all components operate at high speed in coordination. Even slight deviations can easily trigger a chain of negative effects, significantly impacting the testing accuracy. The limiting groove on the test chamber 31 cooperates with the second sliding block 29 at the bottom of the clamping rod 27 to provide precise constraints on the movement of the clamping rod 27. The limiting groove strictly limits the sliding trajectory of the second sliding block 29, preventing unexpected horizontal and vertical displacements of the clamping rod 27 as it approaches the valve. In this way, the squeezing force applied to the valve by the clamping rod 27 is kept vertically and evenly distributed, ensuring a tight and precise fit between the valve and the mounting port 32. This ensures that the air pressure inside the test chamber 31 acts on the valve efficiently and without loss, creating ideal contact conditions for accurate testing and providing a reliable data acquisition basis for subsequent valve performance evaluation based on air pressure parameters.
[0039] The sliding chamber 1 is slidably connected to the fixed plate 12. A sealing gasket is fixedly connected to the side of the fixed chamber 11 near the sliding chamber 1. Any gas leakage will interfere with the testing process. As a basic component of the platform architecture, the sealing between the fixed chamber 11 and the sliding chamber 1 is extremely critical. The sealing gasket acts as a key sealing barrier, effectively preventing the intrusion of external gases by filling the gap between the two chambers, ensuring the purity and pressure stability of the test gas, and maintaining the carefully constructed gas pressure environment within the test chamber 31. Whether in the low-pressure fine screening stage or the high-pressure extreme pressure stage, the sealing gasket always performs its sealing function, ensuring the continuity of the testing process, improving the authenticity and reliability of the test data, and reducing the interference of external factors on the test results.
[0040] The test chamber 31 has an opening, and the mounting port 32 is fixedly connected to the opening on the sliding chamber 1. The design of the opening in the test chamber 31 and the matching mounting port 32 creates conditions for optimizing the valve installation and testing process. With the help of the opening, the mounting port 32 can be securely embedded, providing a standard and reliable installation point for the valve. When the valve is fixed to the mounting port 32 with bolts, the air pressure inside the test chamber 31 can accurately act on the valve, eliminating air pressure transmission loss and deviation caused by unreasonable installation structure. This design simplifies the installation process, reduces error factors introduced during installation, lays a solid foundation for subsequent valve performance testing based on air pressure monitoring, and ensures that valve performance feedback can be obtained at the beginning of the testing process.
[0041] A rubber piston 13 is fixedly connected to a fixed plate 12. An opening is provided in the test chamber 31, and a sealing gasket is fixedly connected to the rubber piston 13. The rubber piston 13 slides within the opening in the test chamber 31. As the test chamber 31 approaches the rubber piston 13 driven by the electric telescopic rod 26, the air pressure regulation process unfolds in an orderly manner. The rubber piston 13, relying on its own elasticity and sealing characteristics, works in conjunction with the sealing gasket to tightly seal the opening in the test chamber 31, causing the internal space of the test chamber 31 to gradually compress, and the air pressure to rise steadily. During this process, the sealing gasket enhances its sealing performance, preventing reverse gas leakage and ensuring the stability of the unidirectional increase in air pressure. This avoids sudden changes or fluctuations in air pressure caused by minor leaks. Therefore, whether simulating normal operating conditions or conducting extreme air pressure tests, a stable and reliable air pressure environment can be created for the valve, accurately detecting the valve's performance under different air pressures and providing a basis for subsequent maintenance decisions.
[0042] Working principle: such as Figures 1-5 As shown, when using it, first install the gas pressure detector (model: XP-703D gas detector) in the sliding chamber 1 and the test chamber 31, fix the valve to the installation port 32 with bolts, and the operator manually pushes the sliding chamber 1 into the fixed chamber 11 and fixes the sliding chamber 1 and the fixed chamber 11 with bolts.
[0043] Activate the electric telescopic rod 26, which causes the test chamber 31 to slide towards the side closer to the rubber piston 13, thereby increasing the air pressure component inside the test chamber 31. At this time, the air pressure detector inside the test chamber 31 detects the pressure change value inside the test chamber 31, and the air pressure detector inside the sliding chamber 1 detects the air pressure change value inside the sliding chamber 1.
[0044] During the sliding of the test chamber 31, the sliding plate 28 causes the second rotating shaft 24 to move the second transmission rod 23, which in turn causes the first rotating shaft 22 and the first transmission rod 21 to drive the first sliding block 25 to slide on the fixed block 3. This causes the two first transmission rods 21 to be driven to move inward and clamp, which in turn causes the clamping rod 27 to be driven to move inward and clamp, sliding onto the valve placed on the mounting port 32, squeezing the valve, and making the valve more tightly fixed on the mounting port 32.
[0045] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to preferred embodiments, it is not intended to limit the present utility model. Any person skilled in the art can make some modifications or alterations to the above-described technical content to create equivalent embodiments without departing from the scope of the present utility model. The implementation schemes in the above embodiments can also be further combined or replaced. Any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present utility model without departing from the scope of the present utility model shall still fall within the scope of the present utility model.
Claims
1. A multifunctional semiconductor gas gate valve maintenance detection platform, characterized in that, The utility model relates to a kind of test device for testing the quality of tobacco, including: Sliding bin (1), fixed bin (11) is slidably connected on the sliding bin (1), and fixed plate (12) is fixedly connected at the bottom of the fixed bin (11); Pressurizing assembly (2), the pressurizing assembly (2) is placed in sliding bin (1), and the pressurizing assembly (2) includes first transmission rod (21) slidably connected in sliding bin (1), first rotary shaft (22) is rotatably connected on the first transmission rod (21), second transmission rod (23) is rotatably connected on the first rotary shaft (22), second rotary shaft (24) is rotatably connected on the second transmission rod (23), sliding plate (28) is rotatably connected on the second rotary shaft (24), and clamping rod (27) is fixedly connected on the first transmission rod (21); Fixed block (3), the fixed block (3) is fixedly connected on fixed plate (12), the first rotary shaft (22) is rotatably connected on the fixed block (3), the sliding plate (28) is slidably connected on the fixed block (3), the test bin (31) is fixedly connected on the sliding plate (28), the mounting port (32) is fixedly connected on the test bin (31), the electric telescopic rod (26) is fixedly connected on the test bin (31), and the electric telescopic rod (26) is fixedly connected on the fixed plate (12) on the side away from the test bin (31), and the rubber piston (13) is slidably connected on the test bin (31).
2. The multifunctional semiconductor gas gate valve maintenance and detection platform according to claim 1, characterized in that: The fixed block (3) is provided with a slot, and the first sliding block (25) is rotatably connected at the bottom of the first rotary shaft (22), and the first sliding block (25) is slidably connected in the slot on the fixed block (3).
3. The multifunctional semiconductor gas gate valve maintenance and detection platform according to claim 1, characterized in that: The test bin (31) is provided with a limiting slot, and the second sliding block (29) is fixedly connected at the bottom of the clamping rod (27), and the second sliding block (29) is slidably connected in the limiting slot on the test bin (31).
4. The multi-functional semiconductor gas gate valve maintenance and inspection platform according to claim 1, characterized in that: The sliding bin (1) is slidably connected on the fixed plate (12), and the fixed bin (11) is fixedly connected with sealing gasket on the side close to the sliding bin (1).
5. The multi-functional semiconductor gas gate valve maintenance and inspection platform according to claim 4, characterized in that: The test bin (31) is provided with an opening, and the mounting port (32) is fixedly connected in the opening on the sliding bin (1).
6. The multi-functional semiconductor gas gate valve maintenance and inspection platform according to claim 1, characterized in that: The rubber piston (13) is fixedly connected on the fixed plate (12), the test bin (31) is provided with an opening, the rubber piston (13) is fixedly connected with sealing gasket, and the rubber piston (13) is slidably connected in the opening on the test bin (31).