Quartz boat support polishing equipment

Abstract

The utility model provides quartz boat support polishing equipment which comprises a rack, a positioning mechanism and a polishing mechanism, wherein the positioning mechanism and the polishing mechanism are arranged on the rack. The positioning mechanism comprises a positioning seat, a positioning block and a lateral clamping air cylinder, the positioning seat is provided with a first end and a second end which are opposite in the first direction and a first side and a second side which are opposite in the second direction, and the first direction is perpendicular to the second direction; the first end and the first side are each provided with at least one positioning block, and the second end and the second side are each provided with at least one lateral clamping air cylinder. And the first side and the second side are respectively provided with a rotary pressing cylinder. The two polishing mechanisms are arranged on the two sides of the positioning mechanism correspondingly. The grinding mechanism comprises a three-axis moving module, a grinding motor and a grinding wheel. The positioning mechanism can accurately position and effectively fix the quartz boat support, and the welding mechanisms on the two sides can automatically polish the side plates of the quartz boat support, so that the polishing efficiency and the polishing precision are improved, the labor cost is reduced, and the product quality of the quartz boat support is improved.

Description

Technical Field

[0001] This utility model relates to the field of quartz product manufacturing technology, and in particular to a quartz boat holder grinding device. Background Technology

[0002] Quartz products are key components in semiconductor and photovoltaic process equipment. They typically use quartz boats to carry silicon wafers, which are then placed on quartz boat supports and fed into the process furnace. For example... Figure 7 As shown, the quartz boat support 200 generally includes two parallel support plates 201 and two parallel side plates 202, with the two side plates 202 located at opposite ends of the two support plates 201. Each side plate 202 also has a milky-white positioning block 203 at each of its two corners to facilitate positioning of the quartz boat support 200 within the process furnace. Currently, the positioning blocks are typically welded to the corners of the side plates, and the welded areas require fine grinding afterward. However, this grinding is currently mostly done manually, which makes precise positioning of the quartz boat support difficult, labor-intensive, inefficient, and results in poor grinding accuracy. Utility Model Content

[0003] The purpose of this invention is to address the shortcomings of existing technologies by proposing a quartz boat holder grinding device that can effectively fix the quartz boat holder, thereby improving the grinding efficiency and precision of the quartz boat holder.

[0004] To achieve the above objectives, the present invention adopts the following technical solution:

[0005] This utility model provides a quartz boat grinding device, which includes a frame and a positioning mechanism and a grinding mechanism disposed on the frame.

[0006] The positioning mechanism includes a positioning seat, a positioning block, and a lateral clamping cylinder. The positioning seat is disposed on the frame along a first direction. The positioning seat has a first end and a second end opposite to each other in the first direction, and a first side and a second side opposite to each other in the second direction. The first direction and the second direction are perpendicular to each other. At least one positioning block is provided at the first end and the first side, and at least one lateral clamping cylinder is provided at the second end and the second side.

[0007] The grinding mechanism has two sets, which are respectively located on both sides of the positioning mechanism in the first direction. The grinding mechanism includes a three-axis moving module, a grinding motor and a grinding wheel. The grinding motor is movably mounted on the three-axis moving module. The output shaft of the grinding motor is set downward in the vertical direction. The grinding wheel is connected to the output shaft of the grinding motor.

[0008] Preferably, the piston rod of the lateral clamping cylinder is arranged in a horizontal direction, and the end of the piston rod of the lateral clamping cylinder is provided with a push plate.

[0009] Preferably, the positioning seat is provided with a base plate along the second direction, and the two ends of the base plate are respectively provided with rotary pressing cylinders.

[0010] Preferably, the bottom plate has a guide groove at one end corresponding to the second side, and the guide groove extends along the second direction; a slider is provided at the bottom of the rotary pressing cylinder corresponding to the second side, the structure of the slider matches the structure of the guide groove, and the slider is slidably disposed in the guide groove.

[0011] Preferably, the pressure arm of the rotary pressing cylinder is provided with a pressure block.

[0012] Preferably, the pressure arm is provided with a waist-shaped hole, the pressure block is provided with a connecting rod, the connecting rod passes through the waist-shaped hole and is fixed by a nut.

[0013] Preferably, electronic rulers are provided at both ends of the frame in the first direction.

[0014] Preferably, a protective plate is provided on the upper side of the frame.

[0015] Compared with the prior art, the beneficial effects of this utility model are as follows: In the quartz boat holder grinding equipment of this utility model, the positioning mechanism can accurately position and effectively fix the quartz boat holder, and the welding mechanisms on both sides can automatically grind the side plates of the quartz boat holder, thereby improving grinding efficiency and grinding accuracy, reducing labor costs, and improving the product quality of the quartz boat holder. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of a quartz boat-shaped grinding device according to the present invention.

[0017] Figure 2 This is a schematic diagram of the internal structure of a quartz boat-shaped grinding device according to the present invention.

[0018] Figure 3 This is a schematic diagram of the positioning mechanism in this utility model.

[0019] Figure 4 This is a schematic diagram of the positioning seat in this utility model.

[0020] Figure 5 This is a schematic diagram of the rotary clamping cylinder in this utility model.

[0021] Figure 6 This is a schematic diagram of the welding mechanism in this utility model.

[0022] Figure 7 This is a schematic diagram of the structure of a quartz boat support.

[0023] In the diagram, 100-quartz boat support grinding equipment, 10-frame, 11-protective plate, 12-electronic ruler, 20-positioning mechanism, 21-positioning seat, 211-first end, 212-second end, 213-first side, 214-second side, 22-positioning block, 23-lateral clamping cylinder, 231-push plate, 24-base plate, 241-guide groove, 25-rotary clamping cylinder, 251-pressure arm, 252-waist-shaped hole, 253-pressure block, 254-connecting rod, 255-nut, 26-slider, 30-grinding mechanism, 31-three-axis moving module, 32-grinding motor, 33-grinding wheel. 200-quartz boat support, 201-support plate, 202-side plate, 203-positioning block. Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the described embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. It is understood that, without conflict, some technical means of the various embodiments described herein can be substituted for or combined with each other.

[0025] In the description of this utility model, the terms "first," "second," etc., are used only to distinguish the described objects and have no sequential or technical meaning. Therefore, objects specified with "first," "second," etc., may explicitly or implicitly include one or more of those objects. Furthermore, the words "one" or "a" do not indicate a quantity limitation, but rather indicate the presence of at least one, while "multiple" indicates at least two.

[0026] In the description of this utility model, references to "one embodiment" or "some embodiments" mean that one or more embodiments of the utility model include the specific features, structures, or characteristics described in connection with that embodiment. Therefore, the phrases "one embodiment," "some embodiments," "other embodiments," "and other embodiments," etc., appearing in different parts of this specification do not necessarily refer to the same embodiment, but rather mean "one or more, but not all, embodiments," unless otherwise specifically emphasized.

[0027] like Figure 7As shown, the quartz boat support 200 includes two parallel support plates 201 and two parallel side plates 202, with the two side plates 202 located at both ends of the two support plates 201. Each side plate 202 also has a milky-white positioning block 203 at each of its two corners to facilitate the positioning of the quartz boat support 200 within the process furnace.

[0028] This utility model provides a quartz boat support grinding device for grinding the quartz side plate after welding positioning blocks, thereby improving production efficiency and product quality. (Refer to...) Figure 1 The quartz boat holder grinding equipment 100 includes a frame 10 and a positioning mechanism 20 and a grinding mechanism 30 mounted on the frame 10. The positioning mechanism 10 is used to accurately position and effectively fix the quartz boat holder 200, and the grinding mechanism 30 is used to grind the side plates of the quartz boat holder 200.

[0029] Specifically, in conjunction with reference Figures 2 to 5 The positioning mechanism 20 includes a positioning seat 21, positioning blocks 22, and lateral clamping cylinders 23. The positioning seat 21 is mounted on the frame 10 along a first direction X. The positioning seat 21 has a first end 211 and a second end 212 opposite each other in the first direction X, and a first side 213 and a second side 214 opposite each other in the second direction Y. The first direction X and the second direction Y are perpendicular to each other. The first direction X can correspond to the left-right direction of the frame 10, and the second direction Y can correspond to the front-back direction of the frame 10. At least one positioning block 22 is provided at the first end 211 and the first side 213, and at least one lateral clamping cylinder 23 is provided at the second end 212 and the second side 214. The number and spacing of the positioning blocks 22 and the lateral clamping cylinders 23 can be reasonably set according to actual needs.

[0030] Reference Figure 1 or Figure 2 There are two sets of grinding mechanisms 30, which are respectively located on both sides of the positioning mechanism 20 in the first direction X. Specifically, refer to... Figure 6 The grinding mechanism 30 includes a three-axis moving module 31, a grinding motor 32, and a grinding wheel 33. The grinding motor 32 is movably mounted on the three-axis moving module 31, and its output shaft is oriented downwards in the vertical direction Z. The grinding wheel 33 is connected to the output shaft of the grinding motor 32. The three-axis moving module 31 drives the grinding motor 32 to move in the X, Y, and Z directions, and the grinding motor 32 drives the grinding wheel 33 to rotate. The three-axis moving module 31 can be a pre-existing three-axis moving module product, such as a gantry-type three-axis module; the grinding motor 32 can be a pre-existing servo motor, and its structure and working principle are existing technologies, which will not be described further here.

[0031] In the aforementioned quartz boat holder grinding equipment 100, the positioning mechanism 20 can accurately position and effectively fix the quartz boat holder 200, and the welding mechanisms 30 on both sides can automatically grind the side plates of the quartz boat holder 200, thereby improving grinding efficiency and precision, reducing labor costs, and enhancing the product quality of the quartz boat holder.

[0032] In application, the welded quartz boat support 200 is placed on the positioning seat 21. Positioning blocks 22 at the first end 211 and the first side 213 respectively position one side plate and one support plate of the quartz boat support 200. The lateral clamping cylinder 23 at the second end 212 advances towards the quartz boat support 200 along the first direction X, thereby positioning and clamping the quartz boat support 200 in the first direction X. The lateral clamping cylinder 23 at the second side 214 advances towards the quartz boat support along the second direction Y, thereby positioning and clamping the quartz boat support 200 in the second direction Y. Afterwards, the three-axis moving module 31 in the two grinding mechanisms 30 drives the grinding wheel 33 to move to the desired grinding position. The grinding motor 32 drives the grinding wheel 33 to rotate at high speed, thereby achieving precise grinding of the side plate of the quartz boat support 200.

[0033] Reference Figure 4 In some preferred embodiments, the piston rod of the lateral clamping cylinder 23 is arranged horizontally, and a push plate 231 is provided at the end of the piston rod of the lateral clamping cylinder 23. The push plate 231 can increase the contact area between the lateral clamping cylinder 23 and the quartz boat support 200, thereby preventing the quartz boat support 200 from breaking due to uneven force. Furthermore, a flexible gasket can also be provided on the side of the push plate 231 facing the quartz boat support 100 to play a buffering role and reduce the impact force on the quartz boat support 200.

[0034] Combined with reference Figure 3 and Figure 4 In some preferred embodiments, a base plate 24 is provided on the positioning seat 21 along the second direction Y, and rotary clamping cylinders 25 are respectively provided at both ends of the base plate 24. After the positioning block 22 cooperates with the lateral clamping cylinder 23 to position and clamp the quartz boat support 200 in the first direction X and the second direction Y, the rotary clamping cylinder 25 can be used to press the quartz boat support 200 in the vertical direction Z, further enhancing the stability of the quartz boat support 200, preventing the quartz boat support 200 from shifting or shaking during the grinding process, thereby improving the grinding quality. The rotary clamping cylinder 25 can be a rotary clamping cylinder product in the prior art, and its structure and working principle are prior art, which will not be described in detail here.

[0035] Furthermore, in conjunction with reference Figure 4 and Figure 5The base plate 24 has a guide groove 241 at one end corresponding to the second side 214, which extends along the second direction Y. A slider 26 is provided at the bottom of the rotary clamping cylinder 25 corresponding to the second side 214. The structure of the slider 26 matches the structure of the guide groove 241, and the slider 26 is slidably disposed within the guide groove 241. This structural cooperation between the slider 26 and the guide groove 241 facilitates adjustment of the distance between the two opposing rotary clamping cylinders 25 according to quartz boat supports of different widths, thereby improving the applicability of the equipment.

[0036] Reference Figure 5 The rotary clamping cylinder 25 has a clamping block 253 on its clamping arm 251. The rotary clamping cylinder 25 drives the clamping arm 251 to rotate and press down, and the clamping block 253 directly abuts against the support plate of the quartz boat support. The clamping block 253 can be made of flexible materials such as rubber to avoid damaging the quartz boat support.

[0037] Furthermore, the pressure arm 251 is provided with a waist-shaped hole 252, and the pressure block 253 is provided with a connecting rod 254. The connecting rod 254 passes through the waist-shaped hole 252 and is fixed by a nut 255. By adjusting the fixed position of the connecting rod 254 in the waist-shaped hole 252, the position of the pressure block 253 can be adjusted accordingly, thereby matching quartz boat supports of different sizes.

[0038] Reference Figure 1 or Figure 2 Electronic rulers 12 are respectively provided at both ends of the frame 10 in the first direction X. The electronic rulers can be used to calibrate the position of the grinding wheel and improve the grinding positioning accuracy.

[0039] Furthermore, a protective plate 11 is provided on the upper side of the frame 10 to enhance safety.

[0040] In the quartz boat holder grinding equipment of this utility model, the positioning mechanism can accurately position and effectively fix the quartz boat holder, and the welding mechanisms on both sides can automatically grind the side plates of the quartz boat holder, thereby improving grinding efficiency and precision, reducing labor costs, and improving the product quality of the quartz boat holder.

[0041] This utility model has been described by the above-described embodiments; however, these embodiments are merely examples for implementing this utility model. It must be noted that the disclosed embodiments do not limit the scope of this utility model. Conversely, any modifications and refinements made without departing from the spirit and scope of this utility model are within the scope of patent protection of this utility model.

Claims

1. A quartz boat-shaped grinding device, characterized in that: The quartz boat grinding equipment includes a frame and a positioning mechanism and a grinding mechanism mounted on the frame; The positioning mechanism includes a positioning seat, a positioning block, and a lateral clamping cylinder. The positioning seat is disposed on the frame along a first direction. The positioning seat has a first end and a second end opposite to each other in the first direction, and a first side and a second side opposite to each other in the second direction. The first direction and the second direction are perpendicular to each other. At least one positioning block is provided at the first end and the first side, and at least one lateral clamping cylinder is provided at the second end and the second side. The grinding mechanism has two sets, which are respectively located on both sides of the positioning mechanism in the first direction. The grinding mechanism includes a three-axis moving module, a grinding motor and a grinding wheel. The grinding motor is movably mounted on the three-axis moving module. The output shaft of the grinding motor is set downward in the vertical direction. The grinding wheel is connected to the output shaft of the grinding motor.

2. The quartz boat grinding equipment as described in claim 1, characterized in that: The piston rod of the lateral clamping cylinder is arranged in a horizontal direction, and a push plate is provided at the end of the piston rod of the lateral clamping cylinder.

3. The quartz boat-mounted grinding equipment as described in claim 1, characterized in that: The positioning seat is provided with a base plate along the second direction, and the two ends of the base plate are respectively provided with rotary pressing cylinders.

4. The quartz boat-mounted grinding equipment as described in claim 3, characterized in that: The base plate has a guide groove at one end corresponding to the second side, and the guide groove extends along the second direction; the bottom of the rotary pressing cylinder corresponding to the second side has a slider, the structure of which matches the structure of the guide groove, and the slider is slidably disposed in the guide groove.

5. The quartz boat grinding equipment as described in claim 3 or 4, characterized in that: The rotary clamping cylinder has a pressure block on its pressure arm.

6. The quartz boat-mounted grinding equipment as described in claim 5, characterized in that: The pressure arm is provided with a waist-shaped hole, and the pressure block is provided with a connecting rod. The connecting rod passes through the waist-shaped hole and is fixed by a nut.

7. The quartz boat-mounted grinding equipment as described in claim 1, characterized in that: Electronic rulers are respectively installed at both ends of the frame in the first direction.

8. The quartz boat grinding equipment as described in claim 1, characterized in that: The upper side of the frame is equipped with a protective plate.

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