Sample table

Abstract

A sample table belongs to the technical field of coating devices and comprises a base, a lifting assembly, a transmission plate, a rotating assembly and a workbench, the lifting assembly is mounted on the base and comprises a first rotating rod, the transmission plate is in transmission connection with the first rotating rod, the first rotating rod is rotatably mounted on the base, the rotating assembly is mounted on the transmission plate, and the rotating assembly comprises a second rotating rod. The workbench is in transmission connection with the second rotating rod, and the second rotating rod is rotationally installed on the transmission plate. The sample table disclosed by the utility model has the beneficial effects that through the lifting assembly and the rotating assembly, the sample table can adjust the lifting and the angle of a sample, so that metal particles more comprehensively cover the surface of the sample during film coating, and the film coating quality is improved.

Description

Technical Field

[0001] This utility model relates to the field of coating equipment technology, and in particular to a sample stage. Background Technology

[0002] Magnetron sputtering is an advanced physical vapor deposition technology. Its core lies in using the sputtering effect to transfer target atoms to the surface of the substrate, thereby forming a thin film.

[0003] During coating, metal particles are sputtered at a specific angle. The distance between the sample and the metal target, as well as the shape of the sample, will affect the coating effect. Conventional sample stages are difficult to adjust the sample height and orientation in a timely manner. Utility Model Content

[0004] To overcome the existing technical problems, this utility model proposes a sample stage, the specific technical solution of which is as follows:

[0005] A sample stage includes a base, a lifting assembly, a transmission plate, a rotating assembly, and a worktable. The lifting assembly is mounted on the base and includes a first rotating rod that passes through the transmission plate. The transmission plate is throttledly connected to the first rotating rod. The rotating assembly is mounted on the transmission plate and includes a second rotating rod. The worktable is throttledly connected to the second rotating rod.

[0006] Furthermore, the lifting assembly also includes a gear assembly, the transmission plate is provided with a clearance groove, the transmission plate is fixedly connected with a rack, the first rotating rod passes through the clearance groove, the first rotating rod is provided with a first knob, the first knob is located at the head end of the first rotating rod, the first rotating rod is rotatably mounted on the base, and the gear assembly cooperates with the rack.

[0007] Furthermore, the lifting assembly also includes a first elastic element and a first tightening nut. The first tightening nut is threadedly connected to the end of the first rotating rod. The first elastic element is installed on the first rotating rod, and both ends of the first elastic element abut against the base and the first tightening nut.

[0008] Furthermore, the lifting assembly also includes a first support ring, a first washer, and a first isolation ring. The first support ring, the first washer, and the first isolation ring are mounted on the first rotating rod. The base is provided with a first mounting hole. The first support ring is mounted in the first mounting hole. There are two first washers, which are located on both sides of the first support ring and contact the front and rear surfaces of the base. The first isolation ring abuts against the gear hub of the gear assembly and is located between the gear assembly and one of the first washers. The first elastic element is located between the first tightening nut and the other of the first washers.

[0009] Further, the rotating assembly comprises a connecting seat, the second rotating rod is rotationally installed on the transmission plate, the first end of the second rotating rod is provided with a second knob, the connecting seat is fixedly connected with the second rotating rod in a circumferential direction, and the workbench is clamped on the connecting seat.

[0010] Further, the lifting assembly further comprises a second elastic member and a second tightening nut, the second tightening nut is threadedly connected with the tail end of the second rotating rod, the number of the second elastic members is two, one second elastic member abuts against the second knob and the transmission plate, and the other second elastic member abuts against the second tightening nut and the connecting seat.

[0011] Further, the lifting assembly further comprises a second support ring and a second gasket, the second support ring and the second gasket are installed on the second rotating rod, the transmission plate is provided with a second mounting hole, the second support ring is installed on the second mounting hole, the number of the second gaskets is two, the two gaskets are located on the two sides of the second support ring, one gasket is located between the connecting seat and the transmission plate, and the other gasket is located between the second elastic member and the transmission plate.

[0012] Further, the front surface of the transmission plate is marked with a vertical scale and a circumferential scale, the vertical scale is located on one side of the avoiding groove, the circumferential scale is located on the edge of the second mounting hole, the base is provided with an indicating plate, the indicating plate extends to the front surface of the transmission plate, the indicating plate points to the vertical scale, the second knob is marked with an indicating groove, and the indicating groove points to the circumferential scale.

[0013] Further, the top edge of the connecting seat is recessed inward to form a matching groove, the lower surface of the workbench is protruded to form a matching block, and the matching block and the matching groove are matched so that the workbench is clamped on the connecting seat.

[0014] Further, the matching groove comprises a first region and a second region, the first region penetrates through the surface of the connecting seat, the second region is larger than the first region, the second region is a square, and the matching block is a square.

[0015] The lifting assembly and the rotating assembly are used, so that the sample table can adjust the lifting and angle of the sample, metal particles can be more comprehensively covered on the sample surface during film plating, and the film plating quality is improved. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is a perspective view of the sample table.

[0017] Figure 2 It is a perspective view of the sample table.Figure 1 A partial structural view of a sample stage;

[0018] Figure 3 For Figure 1 Another partial structural view of a sample stage;

[0019] Figure 4 For Figure 1 An elevational view of a sample stage;

[0020] Figure 5 For Figure 4 A sectional view of a sample stage;

[0021] In the figure: 1, base; 11, first mounting hole; 12, indicator plate; 2, transmission plate; 21, avoiding slot; 22, second mounting hole; 23, rack; 24, vertical scale; 25, circumferential scale; 3, lifting assembly; 31, first rotating rod; 311, first knob; 32, gear assembly; 33, first locking nut; 34, first elastic member; 35, first isolation ring; 36, first support ring; 37, first gasket; 4, rotating assembly; 41, second rotating rod; 42, connecting seat; 421, matching groove; 4211, first area; 4212, second area; 43, second locking nut; 44, second elastic member; 45, second support ring; 46, second gasket; 5, workbench; 51, matching block. DETAILED DESCRIPTION

[0022] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0023] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model. Figures 1-5 The utility model will be further described below:

[0024] A sample stage comprises a base 1, a transmission plate 2, a lifting assembly 3, a rotating assembly 4 and a workbench 5.

[0025] The base 1 is provided with a first mounting hole 11 and an indicator plate 12, the indicator plate 12 is used to indicate the scale

[0026] The transmission plate 2 is provided with an avoiding slot 21, a second mounting hole 22 and a rack 23, the side of the avoiding slot 21 is provided with a vertical scale 24, the edge of the second mounting hole 22 is provided with a circumferential scale 25, the rack 23 is fixed to the transmission plate 2, specifically, in the embodiment, the avoiding slot 21 is a waist-shaped slot.

[0027] The lifting assembly 3 comprises a first rotating rod 31, a gear assembly 32, a first locking nut 33, a first elastic member 34, a first isolation ring 35, a first support ring 36, and a first gasket 37. The first rotating rod 31 is provided with a first knob 311, and the first rotating rod 31 is provided with a thread at the end. The first locking nut 33 is threadedly connected to the end of the first rotating rod 31. The gear assembly 32 is fixed to the first rotating rod 31. The first isolation ring 35, the first support ring 36, and the first gasket 37 are installed on the first rotating rod 31. Specifically, in the embodiment, the number of the first gasket 37 is two, and the two first gaskets 37 are located at the two ends of the first support ring 36. The first isolation ring 35 is located between the gear assembly 32 and the first gasket 37, and the first isolation ring 35 abuts against the gear hub of the gear assembly 32. The first elastic member 34 is installed on the first rotating rod 31, and the first elastic member 34 abuts against the first locking nut 33 and the other first gasket 37. Specifically, in the embodiment, the first support ring 36 is a peek ring, the first gasket 37 is a polytetrafluoroethylene gasket, and the first elastic member 34 is a disc spring. The peek ring and the polytetrafluoroethylene gasket play a lubricating role, and the disc spring arranged in the axial direction is used to increase the pre-tightening force and assist in fixing the first rotating rod 31.

[0028] The rotating assembly 4 comprises a second rotating rod 41, a connecting seat 42, a second locking nut 43, a second elastic member 44, a second support ring 45, and a second gasket 46. The second rotating rod 41 is provided with a second knob 411 at the first end. The second rotating rod 41 is fixedly connected to the connecting seat 42 in the circumferential direction. The second elastic member 44, the second support ring 45, and the second gasket 46 are installed on the second rotating rod 41. The second rotating rod 41 is provided with a thread at the end. The second locking nut 43 is threadedly connected to the end of the second rotating rod 41. Specifically, in the embodiment, the number of the second elastic member 44 and the second gasket 46 is two. The second gasket 46 is located on the two sides of the second support ring 45. One second elastic member 44 abuts against the second knob 411 and one second gasket 46. The other second elastic member 44 abuts against the second locking nut 43 and the connecting seat 42. One second gasket 46 is located between the second support ring 45 and the connecting seat 42. Specifically, in the embodiment, the second support ring 45 is a peek ring, the second gasket 46 is a polytetrafluoroethylene gasket, the second elastic member 44 is a disc spring, and the second knob 411 is engraved with an indicating needle. The top edge of the connecting seat 42 is inwardly recessed to form a matching groove 421. Specifically, the shape of the matching groove 421 is a square.

[0029] The top edge of the connecting seat 42 is inwardly recessed to form a matching groove 421. The matching groove 421 comprises a first area 4211 and a second area 4212. The first area 4211 penetrates the upper surface of the connecting seat 42. The second area 4212 is larger than the first area 4211. The second area 4212 is a square.

[0030] The bottom of the workbench 5 is protruded to form a matching block 51.

[0031] The utility model discloses a connecting relationship of sample stage:

[0032] The first support ring 36 of the lifting assembly 3 is installed in the first mounting hole 11 of the base 1, two first gaskets 37 are in contact with the front and rear end faces of the base 1, the front end of the first rotating rod 31 passes through the avoiding slot 21 of the transmission plate 2, the gear assembly 32 is connected with the gear of the rack 23, so that the first rotating rod 31 moves up and down in the avoiding slot 21, the second support ring 45 of the rotating assembly 4 is installed in the second mounting hole 22 of the transmission plate 2, two second gaskets 46 are in contact with the front and rear end faces of the transmission plate 2, the matching block 51 of the workbench 5 is matched with the matching groove 421 of the connecting seat 42, so that the workbench 5 is clamped in the connecting seat 42, and it is convenient to take and place samples, the indicating plate 12 of the base 1 extends to the front side of the transmission plate 2, the indicating plate 12 points to the vertical scale 24 on the transmission plate 2, and the indicating needle of the rotating assembly 4 points to the circumferential scale 25 on the transmission plate 2; the range of the vertical scale 24 is 0-20mm, and the range of the circumferential scale 25 is ± 35 °.

[0033] The utility model discloses a working process of sample stage:

[0034] The first knob 311 of the rotating lifting assembly 3 is rotated, so that the gear assembly 32 is matched with the rack 23 on the transmission plate 2, the transmission plate 2 is lifted and lowered, the indicating plate 12 fixed with the base 1 indicates the lifting height, the second knob 411 of the rotating assembly 4 is rotated, the connecting seat 42 is driven to move along the circumference of the second rotating rod 41, so that the workbench 5 fixedly connected with the connecting seat 42 rotates circumferentially, the posture of the sample on the workbench 5 is changed, and the second knob 411 indicates the rotation angle.

[0035] The utility model discloses the beneficial effect that through lifting assembly 3 and rotating assembly 4, sample stage can adjust the lifting and angle of sample, so that metal particles can be more comprehensive covered on the sample surface when coating, and the quality of coating is improved.

[0036] The above embodiment only expresses one implementation of the utility model, but can not be understood as the limitation of the utility model patent range. It should be pointed out that for ordinary skilled person in the art, on the premise of not departing from the utility model concept, a plurality of deformation and improvement evolution can be made, and the equivalent modification and evolution of the above embodiment are made according to the essential technology of the utility model, and these all belong to the protection scope of the utility model.

Claims

1. A sample stage, comprising a base, characterized in that: It also includes a lifting assembly, a transmission plate, a rotating assembly, and a worktable. The lifting assembly is mounted on the base and includes a first rotating rod. The transmission plate is pulsatorically connected to the first rotating rod, and the first rotating rod is rotatably mounted on the base. The rotating assembly is mounted on the transmission plate and includes a second rotating rod. The worktable is pulsatorically connected to the second rotating rod, and the second rotating rod is rotatably mounted on the transmission plate. The rotating assembly includes a connecting seat, and the first end of the second rotating rod is provided with a second knob. The connecting seat is circumferentially fixedly connected to the second rotating rod, and the worktable is snapped into the connecting seat.

2. The sample stage according to claim 1, characterized in that: The lifting assembly also includes a gear assembly, the transmission plate is fixedly connected to a rack, the first rotating rod is provided with a first knob, the first knob is located at the head end of the first rotating rod, the gear assembly is fixedly connected to the first rotating rod, and the gear assembly cooperates with the rack.

3. The sample stage according to claim 2, characterized in that: The lifting assembly further includes a first elastic element and a first tightening nut. The first tightening nut is threadedly connected to the end of the first rotating rod. The first elastic element is installed on the first rotating rod, and both ends of the first elastic element abut against the base and the first tightening nut.

4. The sample stage according to claim 3, characterized in that: The lifting assembly further includes a first support ring, a first washer, and a first isolation ring. The first support ring, the first washer, and the first isolation ring are installed on the first rotating rod. The base is provided with a first mounting hole. The first support ring is installed in the first mounting hole. There are two first washers. The two first washers are located on both sides of the first support ring. The two first washers contact the front and rear surfaces of the base. The first isolation ring abuts against the gear hub of the gear assembly. The first isolation ring is located between the gear assembly and one of the first washers. The first elastic element is located between the first tightening nut and the other first washer.

5. The sample stage according to claim 2, characterized in that: The lifting assembly also includes a second elastic element and a second tightening nut. The second tightening nut is threadedly connected to the end of the second rotating rod. There are two second elastic elements. One second elastic element abuts against the second knob and the transmission plate, and the other second elastic element abuts against the second tightening nut and the connecting seat.

6. The sample stage according to claim 5, characterized in that: The lifting assembly further includes a second support ring and a second gasket. The second support ring and the second gasket are installed on the second rotating rod. The transmission plate is provided with a second mounting hole. The second support ring is installed in the second mounting hole. There are two second gaskets. The two gaskets are located on both sides of the second support ring. One gasket is located between the connecting seat and the transmission plate, and the other gasket is located between the second elastic element and the transmission plate.

7. The sample stage according to claim 6, characterized in that: The transmission plate is provided with a clearance groove, the first rotating rod passes through the clearance groove, the first knob is located on the front side of the transmission plate, the front surface of the transmission plate is engraved with vertical and circumferential scales, the vertical scale is located on one side of the clearance groove, the circumferential scale is located on the edge of the second mounting hole, the base is provided with an indicator plate, the indicator plate extends to the front surface of the transmission plate, the indicator plate points to the vertical scale, the second knob is engraved with an indicator groove, the indicator groove points to the circumferential scale.

8. The sample stage according to claim 2, characterized in that: The top edge of the connector is recessed inward to form a mating groove, and the lower surface of the worktable is raised to form a mating block. The mating block and the mating groove cooperate to make the worktable snap into the connector.

9. The sample stage according to claim 8, characterized in that: The mating groove includes a first region and a second region. The first region extends through the surface of the connecting seat, and the second region is larger than the first region. The second region is square, and the mating block is square.

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