Chip cleaning jig and chip cleaning device

Abstract

The utility model relates to the field of LED chip production, and discloses a chip cleaning jig and a chip cleaning device.The chip cleaning jig comprises a bearing part and a jig taking and placing device, a plurality of placing grooves are formed in the bearing part, taking and placing grooves are formed in the side faces of at least one opposite direction of the placing grooves, and the jig taking and placing device is arranged in the taking and placing grooves. At least one liquid passing hole penetrating through the bearing part is formed in the bottom face of the containing groove, and the jig taking and placing device is located on one side of the bearing part and used for taking and placing the bearing part. The pick-and-place grooves are formed in the side faces, in the opposite directions, of the placement grooves, so that the clamping tools can be firstly placed in the pick-and-place grooves in the side edges of the placement grooves in the pick-and-place process, the pick-and-place grooves are used for avoiding the clamping tools, and therefore the chips in the placement grooves can be clamped conveniently.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of LED chip production, and in particular to a chip cleaning jig and a chip cleaning device. BACKGROUND

[0002] Micro-LED (Micro light emitting diode) as a new type of display technology, because of its fast response, high color gamut, high PPI and low energy consumption, etc. Significant advantages, is gradually becoming a research hotspot in the field of display devices. However, due to the small size of the Micro-LED chip, usually between 100 microns to 50 microns, the pixel points and the connecting lines are extremely fine, and any slight pollution may cause the chip circuit function to be damaged, and even the whole chip to be invalid. Therefore, the cleaning process is crucial in the manufacturing process of Micro-LED chips. The conventional LED chip cleaning equipment is mainly suitable for cleaning of 4-inch or larger size chips. For Micro-LED small size chips (100-5000um), there are problems such as inconvenient operation, difficulty in clamping the chip, and easy to scratch the chip. CONTENT OF THE UTILITY MODEL

[0003] Therefore, the purpose of the present application is to overcome the deficiencies in the prior art, and to provide a chip cleaning jig and a chip cleaning device.

[0004] To achieve the above-mentioned purpose, the technical scheme adopted by the present application is as follows:

[0005] The present application provides:

[0006] A chip cleaning jig, the chip cleaning jig comprising:

[0007] A bearing part, a plurality of placing grooves are formed on the bearing part, at least one side surface of the placing grooves in the opposite direction is provided with a taking and placing groove, and at least one liquid passing hole penetrating through the bearing part is formed on the bottom surface of the placing grooves;

[0008] A jig taking and placing device is located on one side of the bearing part, and the jig taking and placing device is used for taking and placing the bearing part.

[0009] Further, each corner of the placing groove is provided with an arc surface, and the corners of two adjacent placing grooves are connected through the arc surface.

[0010] Further, the bearing part is provided with a avoiding groove penetrating through it.

[0011] Further, the circumferential edge of the bearing part is provided with a surrounding part, and the circumferential edge of the bearing part away from the plane where the placing grooves are located is provided with a supporting part.

[0012] Further, the jig taking and placing device comprises:

[0013] a handle, the handle being provided with a guide hole in the axial direction;

[0014] a transmission member, the transmission member being slidingly arranged in the guide hole;

[0015] an abutting member, the abutting member being mounted at the end of the transmission member;

[0016] a screwing member, the screwing member being mounted at the end of the transmission member away from the abutting member;

[0017] a resilient member, the resilient member being sleeved on the transmission member, one end of the resilient member abutting against the handle, and the end of the resilient member away from the handle abutting against the screwing member.

[0018] Further, the handle comprises a guide portion, an abutting portion being provided on the end surface of the guide portion towards the screwing member, the diameter of the abutting portion being greater than that of the guide portion, and the guide hole axially penetrating the guide portion and the abutting portion.

[0019] Further, the jig taking and placing device further comprises a first positioning transmission structure, the abutting member being detachably connected with the transmission member, the transmission member being positioned and transmitted with the abutting member through the first positioning transmission structure, the first positioning transmission structure comprising a first recess provided on the end surface of the abutting member towards the transmission member, and a first protrusion provided on the end surface of the transmission member towards the abutting member.

[0020] Further, the jig taking and placing device further comprises a second positioning transmission structure, the second positioning transmission structure comprising a second recess provided on the end surface of the screwing member towards the transmission member, and a second protrusion provided on the end surface of the transmission member towards the screwing member.

[0021] Further, the end surface of the abutting portion towards the screwing member and the end surface of the screwing member towards the abutting portion are both provided with a positioning groove, and the resilient member is partially located in the positioning groove.

[0022] The application further provides a chip cleaning device, the chip cleaning device comprising the chip cleaning jig as described above.

[0023] The application opens a taking and placing groove on the side surface opposite to the placing groove, so that when taking and placing, the clamping tool can be first placed in the taking and placing groove on the side of the placing groove, and the clamping tool is avoided through the taking and placing groove, so that the chip in the placing groove is conveniently clamped.

[0024] In order to make the above objectives, characteristics and advantages of the present application more apparent and easy to understand, the following preferred embodiments are specifically described below, and the accompanying drawings are referred to, and the detailed description is as follows. BRIEF DESCRIPTION OF DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0026] Figure 1 A three-dimensional structure schematic diagram of the jig of the present application is shown;

[0027] Figure 2 A top view structure schematic diagram of the jig of the present application is shown;

[0028] Figure 3 A bottom view schematic diagram of the jig of the present application is shown;

[0029] Figure 4 A bottom view three-dimensional schematic diagram of the jig of the present application is shown;

[0030] Figure 5 A three-dimensional schematic diagram of the taking and placing device of the present application is shown;

[0031] Figure 6 A sectional view structure schematic diagram of the taking and placing device of the present application is shown;

[0032] Figure 7 A packaging state schematic diagram of the taking and placing device of the present application is shown;

[0033] Figure 8 A structure schematic diagram of the transmission member of the present application is shown;

[0034] Figure 9 A structure schematic diagram of the screwing member of the present application is shown.

[0035] Main element symbol explanation: 100-chip cleaning jig; 110-bearing member; 120-placing groove; 130-taking and placing groove; 140-liquid passing hole; 150-arc surface; 160-enclosure member; 170-supporting member; 180-avoidance groove; 200-jig taking and placing device; 210-handle; 211-guiding part; 212-abutting part; 220-transmission member; 230-abutting member; 240-screwing member; 250-elastic member; 260-first positioning transmission structure; 261-first groove; 262-first protrusion; 270-second positioning transmission structure; 271-second groove; 272-second protrusion; 280-positioning groove. DETAILED DESCRIPTION

[0036] Embodiments of the present application are described below in detail with reference to examples shown in the drawings, wherein the same or similar numerals represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by reference to the drawings are exemplary only, and are merely intended to explain the present application, and are not to be understood as limiting the present application.

[0037] In the description of the present application, it needs to be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like is based on the orientation or positional relationship shown in the drawings, and is only for the purpose of facilitating the description of the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0038] In addition, the terms "first", "second" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise explicitly specified and limited.

[0039] In the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting", "fixing" and the like should be understood broadly, for example, it can be fixed connection, or detachable connection, or integral; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through intermediate medium, or it can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0040] In the present application, unless otherwise explicitly specified and limited, the first feature "on" or "under" the second feature can be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature "above", "above" and "above" the second feature can be that the first feature is directly above or obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature can be that the first feature is directly below or obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0041] In the prior art, small-sized chips are not easy to be picked up and placed by a picking tool such as a tweezers during cleaning, and the chip surface is easily scratched during picking up and placing. Therefore, the application opens a picking and placing groove 130 at a position of a side surface of the placing groove 120 in an opposite direction, so that the two clamping legs of the tweezers are located in the picking and placing grooves 130 on both sides of the chip, the chip is clamped on both sides, the chip is picked up, and the chip surface is not easily scratched.

[0042] The chip cleaning jig 100 includes a bearing member 110 and a jig picking and placing device 200. The bearing member 110 has a plurality of placing grooves 120. At least one side surface of the placing groove 120 in an opposite direction has a picking and placing groove 130. The bottom surface of the placing groove 120 has at least one liquid passing hole 140 that penetrates the bearing member 110. The jig picking and placing device 200 is located on one side of the bearing member 110 and is used for picking and placing the bearing member 110.

[0043] The bearing member 110 is a circular plate body. The bearing member 110 can also have other shapes, such as a quadrilateral, a pentagon, a hexagon, etc. The shape of the bearing member 110 is not limited.

[0044] In this embodiment, a plurality of chips are placed in the bearing member 110. In order to facilitate the placement of the chip-loaded jig into a cleaning machine for cleaning, the jig picking and placing device 200 drives the bearing member 110 to move for picking up and placing, so that the bearing member 110 is placed into and taken out of the cleaning machine.

[0045] Referring to FIGS. 1, 2, and 3, Figure 1 and Figure 2 The upper surface of the bearing member 110 has a plurality of placing grooves 120, and the placing grooves 120 are uniformly distributed about the center of the bearing member 110. The shape and size of the placing groove 120 can be set according to the size of the chip. The shape of the placing groove 120 is exemplarily illustrated as a rectangle. In order to facilitate the placement of the chip into the placing groove 120 and the taking out of the chip from the placing groove 120, a picking and placing groove 130 is opened on the side surface of the placing groove 120 in an opposite direction. When the chip is picked up and placed, the clamping leg of the picking tool can be deeply inserted into the picking and placing groove 130 in the opposite direction, so that the chip is clamped between the two clamping legs. When the chip is placed or taken out, the chip can be clamped and placed by the two clamping legs, that is, the clamping force is applied to the side edge of the chip, so that the chip surface is not easily scratched and damaged.

[0046] In some embodiments, the placing grooves 120 are provided with taking and placing grooves 130 in four directions of front, back, left and right. If the placing grooves 120 are polygons with more than four sides, the taking and placing grooves 130 should be provided at the positions of each side, so that the chip can be taken out from any direction.

[0047] Further, in order to completely immerse the chip in the placing grooves 120 into the cleaning liquid, a surrounding part 160 is provided at the circumferential edge of the bearing part 110 to surround, so that the space formed by the surrounding part 160 and the bearing part 110 can accommodate the cleaning liquid for immersing the chip in the placing grooves 120, so that the cleaning is more thorough.

[0048] Please refer to Figure 1 、 Figure 2 、 Figure 3 and Figure 4 When the chip is taken out from the placing grooves 120, there will be some cleaning liquid in the placing grooves 120. In order to drain the cleaning liquid in the placing grooves 120, at least one liquid hole 140 is provided in the inner bottom wall of the placing grooves 120, and the liquid in the placing grooves 120 is drained through the liquid hole 140.

[0049] In this embodiment, when the chip needs to be cleaned, the chip is first placed in the placing grooves 120, and then the bearing part 110 is placed in the ultrasonic cleaning tank, and the depth of the cleaning liquid in the ultrasonic cleaning tank should be immersed in the chip.

[0050] The placing grooves 120 are provided with arc surfaces 150 at each corner, and the corners of two adjacent placing grooves 120 are connected by the arc surfaces 150.

[0051] Participate Figure 1 and Figure 2 In order to facilitate the cleaning liquid to quickly enter the inside of the placing grooves 120 and flow therein, the arc surfaces 150 are provided at each corner of the placing grooves 120, and the corners are connected by the arc surfaces 150, which reduces the resistance of the liquid and facilitates the flow and uniform distribution of the liquid.

[0052] In one embodiment, two adjacent placing grooves 120 are connected by the taking and placing grooves 130, so as to accelerate the liquid to enter the inside of each placing groove 120 for cleaning the chip.

[0053] The bearing part 110 is provided with an avoiding groove 180 penetrating therethrough.

[0054] Please refer to Figures 1 to 4 In order to not directly contact with the cleaning liquid in the ultrasonic cleaning tank, the bearing part 110 is taken and placed in the ultrasonic cleaning tank by the jig taking and placing device in the following text in cooperation with the avoiding groove 180, so as to reduce the harm to people.

[0055] The surrounding member 160 is arranged at the circumferential edge of the bearing member 110, and the bearing member 110 is provided with a support member 170 at the circumferential edge away from the plane on which the placing groove 120 is located.

[0056] Referring to Figure 3 and Figure 4 In order to prevent the bottom surface of the bearing member 110 from directly contacting the bottom surface of the ultrasonic cleaning tank, the support member 170 is arranged at the axial edge of the bottom surface of the bearing member 110, and the bearing member 110 is supported by the support member 170. Specifically, the support member 170 is a plurality of arc-shaped plates, and the curvature of the arc-shaped plates is adapted to the bearing member 110.

[0057] The embodiment of the present application discloses a placing jig taking and placing device 200, which comprises a handle 210, a transmission member 220, an abutting member 230, a screwing member 240 and an elastic member 250.

[0058] Specifically, the handle 210 has a guide hole arranged through in the axial direction, the transmission member 220 is slidingly arranged in the guide hole, the abutting member 230 is installed at the end of the transmission member 220, the screwing member 240 is installed at the end of the transmission member 220 away from the abutting member 230, the elastic member 250 is sleeved on the transmission member 220, one end of the elastic member 250 abuts against the handle 210, and the end of the elastic member 250 away from the handle 210 abuts against the screwing member 240.

[0059] Referring to Figure 5 The transmission member 220 is located in the axial guide hole of the handle 210, and the length of the transmission member 220 should be greater than the length of the handle 210. The end of the handle 210 is installed with an abutting member 230 which is adapted to the shape of the surrounding member 160, and the abutting member 230 can be deeply inserted into the surrounding member 160. The transmission member 220 is connected with the screwing member 240, and the screwing member 240 transmits the rotating force to the abutting member 230 through the transmission member 220, so that the abutting member 230 changes the angle.

[0060] It can be understood that when the carrier 110 needs to be placed into or taken out of the cleaning tank, the rotating member 240 drives the transmission member 220 to move downward against the elasticity of the elastic member 250 to move the abutting member 230, and then the abutting member 230 needs to pass through the surrounding member 160 to the lower side of the carrier 110, and then the rotating member 240 rotates to drive the abutting member 230 to rotate to change the angle of the abutting member 230, at this time, the carrier 110 is located between the upper surface of the abutting member 230 and the bottom end surface of the handle 210, and the abutting member 230 abuts against the lower surface of the carrier 110 under the elastic force of the elastic member 250, and the bottom end surface of the handle 210 abuts against the upper surface of the carrier 110, so as to fix the carrier 110, at this time, the cleaned carrier 110 with the chips can be taken out of the cleaning tank by lifting the handle 210 upward, or the carrier 110 with the chips can be placed into the cleaning tank by moving downward, and after taking out or placing, the abutting member 230 can be separated from the carrier 110 by reversing the above operation, that is, the abutting member 230 passes through the surrounding member 160 to the upper side of the carrier 110 to achieve separation.

[0061] In one embodiment, the length of the abutting member 230 is a1, the width is b1, and the height is h1, a1 is greater than b1, the length of the surrounding member 160 is a2, and the width is b2, a2>b2; the height of the supporting member 170 is h2, and a1<a2, b1<b2, a1>b2, and h1<h2 should be met, the purpose of a1<a2 and b1<b2 is to make the abutting member 230 more easily pass through the surrounding member 160, and h1<h2 is to make the abutting member 230 have a relatively sufficient rotating space to prevent collision during rotation.

[0062] For example, the length of a1 is 30 mm, the width of b1 is 10 mm, and the height of h1 is 6.5 mm, if the abutting member 230 needs to pass through the surrounding member 160, a2 should be greater than a1 and b2 should be greater than b1, so that the length of a2 is 32 mm and the width of b2 is 11.5 mm, and because the length and width of the surrounding member 160 are greater than the length and width of 320, the abutting member 230 can easily pass through the surrounding member 160. Further, when the carrier 110 is placed in the cleaning device, after the abutting member 230 passes through the surrounding member 160, in order to prevent the abutting member 230 from directly contacting the cleaning device and preventing the abutting member 230 from touching the bottom surface of the carrier 110, the height of the supporting member 170 needs to be greater than the thickness of the abutting member 230, that is, h2 is greater than h1, and the height of h can be 13 mm, at this time, the abutting member 230 can rotate in the space formed by the supporting member 170 without touching the bottom surface of the carrier 110 and the cleaning device. It should be noted that the parameters in the above description can be designed according to actual needs, and the specific values are not limited here.

[0063] The handle 210 includes a guide portion 211, and an abutment portion 212 is provided on the end face of the guide portion 211 facing the screwing member 240. The diameter of the abutment portion 212 is larger than that of the guide portion 211, and the guide hole axially penetrates the guide portion 211 and the abutment portion 212.

[0064] See Figures 5 to 7 As shown, in order to make it easy to hold, the handle 210 is configured as two parts: a guide part 211 and a stop part 212. The guide part 211 mainly serves as a guide and a stop part, which is used for the stop of the elastic element 250. Both the guide part 211 and the stop part 212 are cylindrical and coaxial. The guide hole axially penetrates the guide part 211 and the stop part 212.

[0065] The fixture pick-and-place device further includes a first positioning transmission structure 260. The abutment 230 is detachably connected to the transmission member 220. The transmission member 220 is positioned and driven by the abutment 230 through the first positioning transmission structure 260. The first positioning transmission structure 260 includes a first groove 261 formed on the end face of the abutment 230 facing the transmission member 220, and a first protrusion 262 provided on the end face of the transmission member 220 facing the abutment 230.

[0066] The fixture pick-and-place device further includes a second positioning transmission structure 270, which includes a second groove 271 formed on the end face of the screwing member 240 facing the transmission member 220, and a second protrusion 272 provided on the end face of the transmission member 220 facing the screwing member 240.

[0067] See Figure 6 , Figure 7 as well as Figure 8As shown, the abutting member 230 is detachably connected with the transmission member 220, and the screwing member 240 is detachably connected with the transmission member 220, and the detachable connection can be achieved by screwing. Specifically, in order to enable the rotation force from the screwing member 240 to be transmitted to the transmission member 220, and then transmitted to the abutting member 230 through the transmission member 220, the screwing member 240 and the transmission member 220 are connected through the second recess 271 and the second protrusion 272, and the second protrusion 272 is inserted into the second recess 271 to achieve the connection. Specifically, the second protrusion 272 is arranged on the upper end surface of the transmission member 220, and the second recess 271 is arranged on the end surface of the screwing member 240. Alternatively, the second recess 271 can be arranged on the upper end surface of the transmission member 220, and the second protrusion 272 can be arranged on the end surface of the screwing member 240. Similarly, the transmission member 220 and the abutting member 230 are connected through the first recess 261 and the first protrusion 262, and the first protrusion 262 is inserted into the first recess 261. In one embodiment, the shapes of the first recess 261, the first protrusion 262, the second recess 271, and the second protrusion 272 are not limited herein, as long as the connection can be achieved.

[0068] The end surface of the abutting portion 212 facing the screwing member 240 and the end surface of the screwing member 240 facing the abutting portion 212 are both provided with a positioning groove 280, and the elastic member 250 is partially arranged in the positioning groove 280.

[0069] Referring to Figure 6 and Figure 9 As shown, the elastic member 250 is arranged on the outer surface of the transmission member 220 and located between the screwing member 240 and the handle 210. In order to prevent the elastic member 250 from being inclined and contacting the surface of the transmission member 220, the end surface of the screwing member 240 and the end surface of the abutting portion 212 are both provided with a positioning groove 280, and the elastic member 250 is partially arranged in the positioning groove 280 to limit the position of the elastic member 250. In this embodiment, the elastic member 250 is a spring.

[0070] The chip cleaning device is also disclosed in the embodiments of the present application.

[0071] In the description of the specification, the description of the terms "one embodiment", "some embodiments", "an example", "a specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are contained in at least one embodiment or example of the present application. In the specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any appropriate manner in any one or more embodiments or examples. In addition, the person skilled in the art can combine and combine the different embodiments or examples described in the specification and the features of the different embodiments or examples without contradiction.

[0072] Although the embodiments of the present application have been shown and described above, it is understood that the above-described embodiments are exemplary and are not to be construed as limiting the present application, and the person skilled in the art can make changes, modifications, replacements and variations to the above-described embodiments within the scope of the present application.

Claims

1. A chip cleaning fixture, characterized in that, include: The carrier (110) has a plurality of placement slots (120) provided on it. At least one side of the placement slot (120) in opposite directions has a pick-and-place slot (130). At least one liquid passage hole (140) penetrating the carrier (110) is provided on the bottom surface of the placement slot (120). A fixture pick-and-place device (200) is located on one side of the carrier (110) and is used to pick up and place the carrier (110).

2. The chip cleaning fixture according to claim 1, characterized in that, Each corner of the placement slot (120) is provided with an arc-shaped surface (150), and the corners of two adjacent placement slots (120) are connected by the arc-shaped surface (150).

3. The chip cleaning fixture according to claim 1, characterized in that, The support member (110) has a through-hole (180).

4. The chip cleaning fixture according to claim 1, characterized in that, A retaining member (160) is provided at the circumferential edge of the bearing member (110), and a support member (170) is provided at the circumferential edge of the bearing member (110) away from the plane where the placement groove (120) is located.

5. The chip cleaning fixture according to claim 1, characterized in that, The fixture pick-and-place device (200) includes: The handle (210) has a guide hole that extends through the handle in the axial direction; A transmission component (220) is slidably disposed within the guide hole; An abutment (230) is mounted on the end of the transmission member (220); A screwing component (240) is mounted on the end of the transmission component (220) away from the abutment component (230); An elastic element (250) is sleeved on the transmission element (220). One end of the elastic element (250) abuts against the handle (210), and the end of the elastic element (250) away from the handle (210) abuts against the screwing element (240).

6. The chip cleaning fixture according to claim 5, characterized in that, The handle (210) includes a guide portion (211), and an abutment portion (212) is provided on the end face of the guide portion (211) facing the screwing member (240). The diameter of the abutment portion (212) is larger than that of the guide portion (211), and the guide hole axially penetrates the guide portion (211) and the abutment portion (212).

7. The chip cleaning fixture according to claim 5, characterized in that, The fixture pick-and-place device further includes a first positioning transmission structure (260). The abutment (230) is detachably connected to the transmission member (220). The transmission member (220) is positioned and driven by the abutment (230) through the first positioning transmission structure (260). The first positioning transmission structure (260) includes a first groove (261) formed on the end face of the abutment (230) facing the transmission member (220) and a first protrusion (262) provided on the end face of the transmission member (220) facing the abutment (230).

8. The chip cleaning fixture according to claim 5, characterized in that, The fixture pick-and-place device further includes a second positioning transmission structure (270), which includes a second groove (271) formed on the end face of the screwing member (240) in the direction toward the transmission member (220), and a second protrusion (272) provided on the end face of the transmission member (220) in the direction toward the screwing member (240).

9. The chip cleaning fixture according to claim 6, characterized in that, The end face of the abutment portion (212) facing the screwing member (240) and the end face of the screwing member (240) facing the abutment portion (212) are both provided with positioning grooves (280), and the elastic member (250) is partially located in the positioning grooves (280).

10. A chip cleaning apparatus, characterized in that, Includes the chip cleaning fixture as described in any one of claims 1 to 9.

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