Etching apparatus

Abstract

The utility model discloses an etching device, which comprises an etching chamber, a cleaning chamber, a plurality of first rolling shafts and a plurality of second rolling shafts, the etching chamber is provided with a first spraying area, and the cleaning chamber is provided with a second spraying area; the plurality of first rolling shafts are arranged in the etching chamber and the cleaning chamber in parallel at intervals, and each first rolling shaft is used for conveying the plate-shaped element from the first spraying area to the second spraying area; the second rolling shaft is positioned in the etching chamber and is adjacent to the junction area; in the vertical direction, the second rolling shaft is located above the multiple first rolling shafts, a first gap is formed between the second rolling shaft and the multiple first rolling shafts, and the second rolling shaft is a free rolling shaft. When the plate-shaped element passes through the connecting area, at least part of residual etching liquid on the plate-shaped element can be prevented from flowing to the cleaning cavity through the second rolling shaft, the second rolling shaft is easy to disassemble and assemble, manpower and time are saved when the plate-shaped element is replaced and cleaned, and the internal environment of the etching device cannot be damaged.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of semiconductor element manufacturing, especially etching device used in the semiconductor element manufacturing process. BACKGROUND

[0002] With the progress of science and technology, people's demand for electronic products is more and more, various electronic products are developing towards light, thin, small under the premise of guaranteeing performance, and the display screen on the electronic product is basically developing towards wide screen and large screen. Therefore, reducing the thickness of the display screen can effectively reduce the weight and overall thickness of the whole product. Therefore, thinning etching of the plate-shaped element part of the display screen is an effective method to reduce the weight of the display screen. After the display panel in the display screen is completed, it enters the etching chamber of the thinning etching machine. The etching chamber is provided with a spraying assembly. The spraying assembly is connected to a storage container storing etching liquid through a pipeline. The etching liquid is sprayed to the upper and lower surfaces of the display panel through the spraying assembly to achieve the target thickness. Then the display panel is conveyed to the cleaning chamber adjacent to the etching chamber. The spraying assembly in the cleaning chamber sprays cleaning liquid to wash the upper and lower surfaces of the display panel.

[0003] In the prior art, a liquid cutting air knife is installed at the interface between the etching chamber and the cleaning chamber of the thinning etching machine to block the flow direction of the acidic etching liquid and prevent the acidic etching liquid from entering the cleaning chamber. However, due to the small gap of the liquid cutting air knife, it is very easy to be blocked by glass sand or other crystals generated by chemical reaction, losing its original function. Frequent replacement of new liquid cutting air knives wastes time, manpower, cost and damages CDA (Compressed Dry Air or Clean Dry Air).

[0004] Therefore, there is an urgent need for a new thinning etching machine to solve the above problems. UTILITY MODEL CONTENTS

[0005] In view of the problems in the prior art, the utility model provides an etching device to solve the above problems.

[0006] Therefore, the technical problem to be solved by the utility model is to provide an etching device for etching and thinning plate-shaped elements. The etching device comprises:

[0007] An etching chamber, the etching chamber has a first spraying area, and a first spraying assembly in the etching chamber is used to spray etching liquid to the first spraying area;

[0008] A cleaning chamber, the cleaning chamber is adjacent to the etching chamber and has an interface area, the cleaning chamber has a second spraying area, and a second spraying assembly in the cleaning chamber is used to spray cleaning liquid to the second spraying area;

[0009] a plurality of first rollers, the plurality of first rollers being disposed in the etching chamber and the cleaning chamber in a spaced and parallel manner, each first roller extending along a first direction, the plurality of first rollers being configured to transfer the plate-shaped element from the first spray zone to the second spray zone; and

[0010] a second roller, the second roller being located in the etching chamber and adjacent to the interface zone, the second roller extending along the first direction, in a vertical direction, the second roller being located above the plurality of first rollers, the second roller and the plurality of first rollers having a first gap, and the second roller being a free roller.

[0011] As an optional technical solution, the etching chamber further comprises a mounting assembly disposed adjacent to the interface zone, the mounting assembly comprising a mounting shaft and a support frame, the mounting shaft being configured to mount the second roller, and the support frame being located on both sides of the second roller and connected with the mounting shaft.

[0012] As an optional technical solution, the mounting shaft is movably connected with the support frame along the vertical direction, and the mounting assembly is further configured to adjust the height of the second roller.

[0013] As an optional technical solution, a vertical projection of the second roller in the vertical direction corresponds to one of the plurality of first rollers.

[0014] As an optional technical solution, the plurality of first rollers have a first diameter, the second roller has a second diameter, and the first diameter is equal to the second diameter.

[0015] As an optional technical solution, the second roller has a smooth surface.

[0016] As an optional technical solution, the second roller is a detachable composite roller.

[0017] As an optional technical solution, the second roller comprises a roller body and a protective film layer detachably wrapped on the roller body.

[0018] As an optional technical solution, the protective film layer is a PFA film layer.

[0019] As an optional technical solution, when the plate-shaped element is transferred to the interface zone by the plurality of first rollers, in the vertical direction, a second gap is formed between the upper surface of the plate-shaped element and the second roller without contact, and the second gap is smaller than the thickness of the plate-shaped element.

[0020] Compared with the prior art, the etching device has the second roller arranged in the etching chamber and adjacent to the intersection area between the etching chamber and the cleaning chamber, the second roller is a free roller, and a gap is formed between the second roller and the first rollers for conveying the plate-shaped element, so that at least part of the etching liquid remaining on the plate-shaped element can be blocked from flowing to the cleaning chamber when the plate-shaped element passes through the intersection area, and the second roller of the utility model is simple to disassemble and reassemble, saves labor time during replacement, and does not damage the internal environment of the etching device.

[0021] The utility model is described in detail below in combination with the drawings and specific embodiments, but is not limited to the utility model. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 It is a simplified structure diagram of the etching device of the utility model.

[0023] Figure 2 It is a schematic diagram of the second roller and its mounting assembly. DETAILED DESCRIPTION

[0024] In order to further understand the purpose, structure, features and functions of the utility model, the following detailed description is provided in combination with the embodiments.

[0025] Please refer to Figure 1 , Figure 1 It is a simplified structure diagram of the etching device of the utility model. The etching device 100 in the utility model includes an etching chamber 110, a cleaning chamber 120, a plurality of first rollers 130 and a second roller 140. The etching chamber 110 is used for spraying etching liquid, and a first spraying area A is defined in the etching chamber 110. A first spraying assembly 150 in the etching chamber 110 is used for spraying etching liquid to the first spraying area A, and the plate-shaped element 200 is thinned by etching in the first spraying area A. In an embodiment, the first spraying assembly 150 can be located at the top and / or bottom of the etching chamber 110, and the first spraying assembly 150 can be multiple groups, not limited to one group as shown in the figure. Figure 1 The cleaning chamber 120 is adjacent to the etching chamber 110 and has an intersection area C. A second spraying area B is defined in the cleaning chamber 120, and a second spraying assembly 160 in the cleaning chamber 120 is used for spraying cleaning liquid to the second spraying area B. After the plate-shaped element 200 is conveyed to the second spraying area B, the plate-shaped element 200 is cleaned by spraying the cleaning liquid. In an embodiment, the second spraying assembly 160 can be located at the top and / or bottom of the cleaning chamber 120, and the second spraying assembly 160 can be multiple groups, not limited to one group as shown in the figure. Figure 1 In an embodiment, the cleaning liquid is pure water.

[0026] In one embodiment, a plurality of first rollers 130 are spaced apart and parallel to each other in the etching chamber 110 and the cleaning chamber 120. Each first roller 130 extends along a first direction, such as a direction perpendicular to the paper surface. The plurality of first rollers 130 are used to convey the plate-shaped element 200 from the first spray zone A to the second spray zone B, so that the plate-shaped element 200 undergoes thinning etching and cleaning. In one embodiment, the plate-shaped element 200 is a display panel, but is not limited thereto.

[0027] In one embodiment, the second roller 140 is located in the etching chamber 110 and adjacent to the aforementioned junction area. The second roller 140 extends along the aforementioned first direction. In the vertical direction, the second roller 140 is located above a plurality of first rollers 130. The second roller 140 and the plurality of first rollers 130 have a first gap G1. The second roller 140 is a free roller and is not connected to any related drive components.

[0028] In one embodiment, a plurality of first mounting drive assemblies (not shown) are provided within the etching chamber 110 corresponding to a plurality of first rollers 130. Each first mounting drive assembly is disposed at both ends of the corresponding first roller 130 to realize the mounting and subsequent driving of each first roller 130. A second mounting assembly (not shown) is provided within the etching chamber 110 corresponding to a second roller 140. The second mounting assembly can be fixedly connected to a first mounting drive assembly on the sidewall of the etching chamber 110 adjacent to the aforementioned junction area. Both ends of the second roller 140 are mounted within the second mounting assembly and can roll relative to the second mounting assembly. Furthermore, the second mounting assembly has a plurality of mounting portions in the vertical direction, that is, the second roller is movably connected to the second mounting assembly in the vertical direction. The user can install the second roller 140 on a suitable mounting portion according to actual needs, so that the second roller 140 and the plurality of first rollers 130 have a desired first gap in the vertical direction.

[0029] Please also refer to Figure 2 , Figure 2 This is a schematic diagram of the second roller and its mounting assembly. In one embodiment, the etching chamber 110 further includes a mounting assembly disposed adjacent to the aforementioned junction area. Specifically, the mounting assembly is disposed on the side wall S of the etching chamber 110 adjacent to the aforementioned junction area. The mounting assembly includes a mounting shaft 111 and a support frame 112. The mounting shaft 111 is used to mount the second roller 140, and the support frame 112 is located on both sides of the second roller 140 and connected to the mounting shaft 111.

[0030] Further, the support frame 112 has a plurality of mounting portions 113 in the vertical direction for selectively connecting with the mounting shaft 111, and a user can mount the mounting shaft 111 to different mounting portions 113 of the support frame 112 according to actual needs, so that the second roller 140 can be mounted at different positions in the vertical direction of the support frame 112, thereby allowing the mounting assembly to adjust the height of the second roller 140. By adjusting the height of the second roller 140 in the vertical direction, the first gap G1 between the second roller 140 and the plurality of first rollers 130 is changed, so that the etching device of the present application can be applied to plate-shaped elements of various models / thicknesses.

[0031] In an embodiment, when the plate-shaped element 200 is conveyed to the transfer area C by the plurality of first rollers 130, the upper surface of the plate-shaped element 200 remains with etching liquid, and the upper surface of the plate-shaped element 200 and the second roller 140 have a second gap G2 in the vertical direction without being in contact. Through the arrangement of the second roller 140 and the second gap G2, the flow of etching liquid on the surface of the plate-shaped element 200 towards the second spraying area B can be limited, the etching liquid brought into the second spraying area B by the plate-shaped element 200 is reduced, and the cleaning burden of the second spraying area B is reduced. Moreover, the use of the roller instead of the liquid-cutting air knife is easy to disassemble and replace, and convenient to operate.

[0032] In actual application, when the plate-shaped element 200 is conveyed to the transfer area C, the second roller 140 is contacted by the etching liquid, and the second roller 140 as a free roller rotates under the action of the etching liquid and the plate-shaped element 200. At this time, on the one hand, the small second gap G2 between the second roller 140 and the plate-shaped element 200 changes the flow direction of part of the etching liquid between the upper surface of the plate-shaped element 200 and the second roller 140, thereby limiting the flow of at least part of the etching liquid on the surface of the plate-shaped element 200 towards the second spraying area B, so as to reduce the flow of the etching liquid into the second spraying area B with the plate-shaped element 200. In actual application, the second gap G2 is smaller than the thickness of the plate-shaped element 200, and the second gap G2 is much smaller than the diameter of the second roller 140, for example, 0.2mm or 0.5mm, etc., which can be set by a user according to actual needs. In this way, the large gap is avoided to allow too much etching liquid to flow into the second spraying area B, thereby reducing the effectiveness of the second roller 140. On the other hand, the second roller 140 rotates under the action of the etching liquid and the plate-shaped element 200, thereby reducing the resistance of the plate-shaped element 200 moving towards the second spraying area B, and ensuring the smooth conveyance of the plate-shaped element 200.

[0033] In an embodiment, the vertical projection of the second roller 140 in the vertical direction corresponds to one of the first rollers 130, so that the corresponding first roller 130 can provide corresponding support force when the plate-shaped element 200 passes through the second roller 140. In an embodiment, the first rollers 130 have a first diameter, and the second roller 140 has a second diameter, and the first diameter is equal to the second diameter. For example, the first diameter and the second diameter can be 30 mm.

[0034] In an embodiment, please continue to refer to Figure 2 In an embodiment, the second roller 140 is a detachable composite roller, for example, the second roller 140 includes a roller body 141 and a protective film layer 142 detachably covered on the roller body 141. In actual application, with the continuous use of the second roller 140, etching liquid may be left on the second roller 140 and form crystals, at which time the second roller 140 needs to be cleaned or replaced. When the second roller 140 needs to be cleaned or replaced, the staff can replace the second roller 140 from the support frame 111 (or the second mounting assembly) at any time according to the needs, or directly replace the protective film layer 142 according to the needs, which is simple and convenient to operate, saves time and manpower compared with the etching device in the prior art, and reduces costs. Compared with the air knife device in the prior art, it can also avoid damaging the CDA (Compressed Dry Air or Clean Dry Air) in the etching device.

[0035] In an embodiment, the second roller 140 has a smooth surface, so that even if the second gap G2 is too small to cause the second roller 140 to contact the surface of the plate-shaped element 200, the smooth surface of the second roller 140 can still prevent the surface of the plate-shaped element 200 from being scratched. Further, the protective film layer 142 covering the roller body 141 is a PFA (Perfluoroalkoxy Vinyl Ether Copolymer) film layer, which has a good smoothness on the surface and can further prevent damage to the plate-shaped element 200. In addition, the PFA film layer also has the advantages of chemical corrosion resistance, high temperature resistance, tensile strength, etc., which increases the durability of the second roller 140.

[0036] In summary, the etching device of the present application has a second roller arranged in the etching chamber and adjacent to the junction between the etching chamber and the cleaning chamber. The second roller is a free roller, and there is a gap between the second roller and the plurality of first rollers for conveying the plate-shaped element. When the plate-shaped element passes through the junction, at least part of the etching liquid remaining on the plate-shaped element is blocked by the second roller from flowing to the cleaning chamber. The second roller of the present application is simple to disassemble and replace, saves manpower and time when cleaning, and does not damage the internal environment of the etching device.

[0037] Of course, the utility model can also have other various embodiments, and the person skilled in the art can make various corresponding changes and deformation according to the utility model without departing from the spirit and essence of the utility model, but these corresponding changes and deformation should all belong to the protection scope of the claims attached to the utility model.

Claims

1. An etching apparatus for etching thinner plate-shaped elements, characterized in that, The etching apparatus includes: An etching chamber having a first spray zone, wherein a first spraying assembly within the etching chamber is used to spray etching liquid onto the first spray zone; A cleaning chamber is adjacent to the etching chamber and has a junction area. The cleaning chamber has a second spray area, and a second spraying component in the cleaning chamber is used to spray cleaning liquid onto the second spray area. Multiple first rollers are spaced apart and arranged in parallel in the etching chamber and the cleaning chamber. Each first roller extends along a first direction. The multiple first rollers are used to convey the plate-shaped element from the first spray zone to the second spray zone. as well as The second roller is located in the etching chamber and adjacent to the junction area. The second roller extends along the first direction and is located above the plurality of first rollers in the vertical direction. The second roller has a first gap with the plurality of first rollers and is a free roller.

2. The etching apparatus as described in claim 1, characterized in that, The etching chamber also includes a mounting assembly disposed adjacent to the junction area. The mounting assembly includes a mounting shaft and a support frame. The mounting shaft is used to mount the second roller, and the support frame is located on both sides of the second roller and connected to the mounting shaft.

3. The etching apparatus as described in claim 2, characterized in that, The mounting shaft is movably connected to the support frame along the vertical direction, and the mounting assembly is also used to adjust the height of the second roller.

4. The etching apparatus as claimed in claim 1, characterized in that, The vertical projection of the second roller in the vertical direction corresponds to one of the plurality of first rollers.

5. The etching apparatus as claimed in claim 1, characterized in that, The plurality of first rollers have a first diameter, the second roller has a second diameter, and the first diameter is equal to the second diameter.

6. The etching apparatus as claimed in claim 1, characterized in that, The second roller has a smooth surface.

7. The etching apparatus as claimed in claim 1, characterized in that, The second roller is a detachable composite roller.

8. The etching apparatus as claimed in claim 7, characterized in that, The second roller includes a roller body and a protective film layer that can be removably covered on the roller body.

9. The etching apparatus as claimed in claim 8, characterized in that, The protective film is a PFA film.

10. The etching apparatus as claimed in claim 1, characterized in that, When the plate-shaped element is conveyed to the junction area by the plurality of first rollers, in the vertical direction, there is a second gap between the upper surface of the plate-shaped element and the second roller, and they do not contact each other. The second gap is smaller than the thickness of the plate-shaped element.

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