Basket capable of preventing wafer from being scratched

Abstract

The utility model discloses a lifting basket capable of preventing a wafer from being scratched, which is applied to the field of semiconductor lifting basket jigs and comprises a lifting basket, two side plates are arranged in the lifting basket, the length of the side plates is larger than that of the lifting basket, and a plurality of baffles are fixedly connected to the opposite sides of the two side plates. One side of the lifting basket is fixedly connected with an outer connecting shell, and the interior of the outer connecting shell is rotationally connected with a two-way threaded rod through a bearing; according to the utility model, the length of the side plates is increased, so that a runway with enough length is provided when a wafer is put in and drawn out, thereby avoiding the conditions of inclination, contact, friction and the like when the wafer is put in or drawn out, and ensuring the quality integrity of the wafer during spot check. The two-way threaded rod rotates clockwise or anticlockwise to drive the two threaded blocks to drive the two side plates to get close to each other and get away from each other, so that wafers of different sizes can be stored between the two side plates.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of semiconductor basket jig, especially to a basket for preventing wafer from being scratched. BACKGROUND

[0002] At present, the wafer from the front wafer factory is a whole connected by multiple ICs. The wafer is fixed on the ring iron ring through the adhesive film by the mount machine. The product with the iron ring is placed in the metal basket. In the subsequent operation process, considering the monitoring of the operation quality, the product with the iron ring is subjected to the sampling inspection. The existing metal basket has a small length for putting in and taking out. When the wafer is put in or taken out, the wafer may be inclined, contacted and rubbed, which may affect the quality of the wafer. In order to solve the above problems, the utility model provides a basket for preventing wafer from being scratched. SUMMARY

[0003] The utility model discloses a basket for preventing wafer from being scratched, which can prevent wafer from being scratched.

[0004] The utility model discloses a basket for preventing wafer from being scratched, which can prevent wafer from being scratched.

[0005] The length of the side plate is extended, so that the wafer has enough length runway when being put in and taken out, thereby avoiding the inclination, contact and friction of the wafer when being put in or taken out, and ensuring the quality of the wafer during the sampling inspection. The two side plates are driven to move close to or away from each other by the clockwise or counterclockwise rotation of the bidirectional threaded rod, so that the two side plates can be used to store wafers of different sizes.

[0006] The utility model further provides that one side of the basket inner cavity is provided with a sliding groove, and one side of the side plate close to the sliding groove is fixedly connected with a sliding block in sliding connection with the sliding groove.

[0007] The sliding groove and the sliding block are used to linearly guide the side plate.

[0008] The utility model further provides that one side of the outer connecting shell inner cavity is provided with a guide groove, and the guide groove is in sliding connection with the two threaded blocks.

[0009] By means of the technical scheme, the guide groove is arranged to linearly guide the reciprocating movement of the two threaded blocks.

[0010] The utility model further provides: the bottom of basket inner chamber is fixedly connected with buffer pad, the top of buffer pad does not contact with the bottom of side plate.

[0011] By means of the technical scheme, the buffer pad is arranged to buffer the wafer falling, and reduce the impact force generated by the wafer falling.

[0012] The utility model further provides: the baffle and baffle do not contact, the baffle and baffle are equipped with gap.

[0013] By means of the technical scheme, the gap between the baffle and the baffle is used to place the wafer, the wafer is disc-shaped, and when placed, the wafer slides into the inside of the basket through the gap between the baffle and the baffle, and after the wafer is placed in the gap between the baffle and the baffle, the baffle and the baffle can limit the wafer from tilting.

[0014] The utility model further provides: the both ends of bidirectional screw rod all are through to the outside of outer connecting shell, the both ends of bidirectional screw rod all are fixedly connected with the hand.

[0015] By means of the technical scheme, the hand is arranged to facilitate the user to rotate the bidirectional screw rod.

[0016] In summary, the utility model has the following beneficial effects:

[0017] The utility model prolongs the length of the side plate, so that the wafer has sufficient length runway when placed and taken out, thereby avoiding the wafer from tilting, contacting and rubbing when placed and taken out, and ensuring the quality of the wafer during the sampling inspection. The clockwise or counterclockwise rotation of the bidirectional screw rod drives the two threaded blocks to drive the two side plates to move closer to or away from each other, so that the two side plates can be used to store wafers of different sizes. DETAILED DESCRIPTION

[0018] Figure 1 It is a structural perspective view of the utility model;

[0019] Figure 2 It is a sectional view of the outer connecting shell of the utility model;

[0020] Figure 3 It is a structural enlarged view of A in the utility model. Figure 2

[0021] ​Reference signs: 1, basket; 2, side plate; 3, baffle; 4, outer connecting shell; 5, two-way threaded rod; 6, threaded block; 7, sliding groove; 8, sliding block; 9, guide groove; 10, buffer pad; 11, rotating hand. DETAILED DESCRIPTION

[0022] The utility model will be made further detailed explanation in combination with the drawings.

[0023] Example 1:

[0024] Reference Figure 1 、 Figure 2 and Figure 3 A kind of basket for preventing wafer scratch, including basket 1, the inside of basket 1 is equipped with two side plates 2, the length of side plate 2 is greater than the length of basket 1, the opposite side of two side plates 2 is fixedly connected with several baffles 3;One side of basket 1 is fixedly connected with outer connecting shell 4, outer connecting shell 4 is rotatably connected with two-way threaded rod 5 in the inside by bearing, the surface of two-way threaded rod 5 is threadedly connected with two threaded blocks 6, and two threaded blocks 6 are fixedly connected with two side plates 2 respectively;By lengthening the length of side plate 2, there is enough length runway when wafer is put in and taken out, so as to avoid the occurrence of inclination, contact, friction and other situations when wafer is put in or taken out, guarantee the quality intactness of wafer during spot check.The clockwise or counterclockwise rotation of two-way threaded rod 5 is used to drive two threaded blocks 6 to drive two side plates 2 to approach and move away from each other respectively, so that two side plates 2 can be used to store wafers of different sizes.

[0025] Further, one side of the inner cavity of basket 1 is provided with a sliding groove 7, and one side of the side plate 2 close to the sliding groove 7 is fixedly connected with a sliding block 8 in sliding connection with the sliding groove 7. Through the setting of the sliding groove 7 and the sliding block 8, the side plate 2 is linearly guided.

[0026] Further, a guide groove 9 is formed in one side of the inner cavity of the outer connecting shell 4, and the guide groove 9 is in sliding connection with the two threaded blocks 6 in the inside. Through the setting of the guide groove 9, the reciprocating movement of the two threaded blocks 6 is linearly guided.

[0027] Further, a buffer pad 10 is fixedly connected to the bottom of the inner cavity of the basket 1, and the top of the buffer pad 10 is not in contact with the bottom of the side plate 2. Through the setting of the buffer pad 10, the falling of the wafer is buffered, and the impact force generated by the falling of the wafer is reduced.

[0028] Further, the baffles 3 and the baffles 3 are not in contact, and a gap is provided between the baffles 3 and the baffles 3. The gap between the baffles 3 and the baffles 3 is used to place the wafer. The wafer is disc-shaped, and is slid into the inside of the basket 1 through the gap between the baffles 3 and the baffles 3 when placed. After the wafer is placed in the gap between the baffles 3 and the baffles 3, the baffles 3 and the baffles 3 can limit the inclination of the wafer.

[0029] Further, the two ends of the bidirectional threaded rod 5 are both penetrated to the outside of the outer connecting shell 4, and the two ends of the bidirectional threaded rod 5 are both fixedly connected with the rotating handle 11, and through the arrangement of the rotating handle 11, the rotation of the bidirectional threaded rod 5 is facilitated.

[0030] Brief description of the use process: when used, the wafer is pushed into the inside of the basket 1 along the gap (runway) between the two baffles 3; when extracted and detected, the extracted wafer is moved downward along the wafer between the two baffles 3, and during the moving process, the wafer will not be inclined due to the limiting of the two baffles 3, so that the scratch condition is avoided.

[0031] And for wafers of different diameters, the rotating handle 11 can be rotated clockwise or counterclockwise, and when the rotating handle 11 is rotated, the bidirectional threaded rod 5 will be rotated, and since the two side plates 2 are limited by the sliding groove 7 and the sliding block 8 and the guide groove 9 and the threaded block 6 and cannot be rotated;

[0032] When the bidirectional threaded rod 5 rotates clockwise, the bidirectional threaded rod 5 will drive the two threaded blocks 6 to move close to each other, and at this time, the two threaded blocks 6 will drive the two side plates 2 to move close to each other, and at this time, the distance between the two side plates 2 is reduced, and the wafer of small size can be placed;

[0033] When the bidirectional threaded rod 5 rotates counterclockwise, the bidirectional threaded rod 5 will drive the two threaded blocks 6 to move away from each other, and at this time, the two threaded blocks 6 will drive the two side plates 2 to move away from each other, and at this time, the distance between the two side plates 2 is increased, and the wafer of large size can be placed.

[0034] The specific embodiment is only an explanation of the utility model, and is not a limitation of the utility model, and those skilled in the art can make modifications without creative contribution according to the needs after reading the specification, but as long as it is within the scope of the claims of the utility model, it is protected by the patent law.

Claims

1. A basket for preventing wafer scratches, comprising a basket (1), characterized in that: The basket (1) has two side plates (2) inside, the length of which is greater than the length of the basket (1). Several baffles (3) are fixedly connected to the opposite side of the two side plates (2). An outer connecting shell (4) is fixedly connected to one side of the basket (1). A bidirectional threaded rod (5) is rotatably connected to the inside of the outer connecting shell (4) through a bearing. Two threaded blocks (6) are threadedly connected to the surface of the bidirectional threaded rod (5). The two threaded blocks (6) are fixedly connected to the two side plates (2) respectively.

2. The basket for preventing wafer scratches according to claim 1, characterized in that: A sliding groove (7) is provided on one side of the inner cavity of the basket (1), and a slider (8) that is slidably connected to the sliding groove (7) is fixedly connected to the side plate (2) near the sliding groove (7).

3. The basket for preventing wafer scratches according to claim 1, characterized in that: A guide groove (9) is provided on one side of the inner cavity of the outer connecting shell (4), and the inside of the guide groove (9) is slidably connected to two threaded blocks (6).

4. The basket for preventing wafer scratches according to claim 1, characterized in that: A buffer pad (10) is fixedly connected to the bottom of the inner cavity of the basket (1), and the top of the buffer pad (10) does not contact the bottom of the side plate (2).

5. A basket for preventing wafer scratches according to claim 1, characterized in that: The baffles (3) do not contact each other, and there is a gap between the baffles (3) and the baffles (3).

6. The basket for preventing wafer scratches according to claim 1, characterized in that: Both ends of the bidirectional threaded rod (5) extend to the outside of the outer connecting shell (4), and both ends of the bidirectional threaded rod (5) are fixedly connected with a handle (11).

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