Vertically lifting cavity opening device

Abstract

The utility model discloses a vertical lifting cavity opening device. The vertical lifting cavity opening device comprises a supporting assembly and at least two movement modules. The supporting assembly is located on the top of the cavity cover. The multiple motion modules are arranged on the upper surface of the cavity cover and symmetrically distributed with the cavity cover as the center. Each motion module comprises a driving part and a connecting part, the driving part is used for providing driving force in the cavity cover lifting direction, the first end of the driving part is fixedly connected to the supporting assembly, and the second end of the driving part extends in the cavity cover direction; and the connecting part is fixedly connected to the upper surface of the cavity cover, is connected with the second end of the driving part, and can be driven by the driving part to lift the cavity cover. According to the utility model, the problems of head falling and eccentricity of the cavity cover in the lifting process can be effectively prevented, and the safety and the use efficiency of semiconductor equipment are improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment, specifically to a vertically lifting cavity opening device. Background Technology

[0002] During the debugging or production of semiconductor equipment, the upper cavity cover of the semiconductor equipment needs to be opened and closed to facilitate the disassembly, assembly, and maintenance of equipment components. However, existing cavity opening devices for semiconductor equipment have some limitations, particularly in maintaining the stable raising and lowering of the cavity cover.

[0003] Firstly, existing semiconductor equipment's cavity opening devices, designed to avoid the central location of critical components, allow the cavity cover lifting mechanism to be installed only on one side of the cavity cover. Typically, a single electric or pneumatic cylinder is used as the actuating component. However, this type of lifting mechanism causes uneven load on the cavity cover during lifting due to unilateral force, preventing the cover from maintaining a horizontal position and posing a safety hazard to the semiconductor equipment. Furthermore, during cavity closing, the bottom of the cavity cover is prone to colliding with the cavity body, causing the lifting actuator to overload and triggering an alarm in the semiconductor equipment, thus affecting its operational efficiency.

[0004] Secondly, for semiconductor devices that use a flip-type cover operation, this cavity opening method requires a large space, and during the opening or closing process, the cavity cover is prone to collision with important components in the center of the semiconductor device, causing damage to the semiconductor device.

[0005] In summary, existing semiconductor devices exhibit significant technical deficiencies in maintaining stable cavity cover lifting and lowering. These deficiencies lead to cavity cover tilting and eccentricity, affecting the safety and efficiency of the semiconductor device. Therefore, it is necessary to develop a novel cavity opening device to address these issues and achieve stable cavity cover lifting and lowering. Utility Model Content

[0006] The purpose of this invention is to provide a vertically lifting cavity opening device to prevent the cavity cover from drooping and becoming eccentric during the lifting process, thereby improving the safety and efficiency of semiconductor equipment.

[0007] To achieve the above objectives, this utility model provides a vertically lifting cavity opening device, comprising:

[0008] Support components are located on top of the cavity cover;

[0009] At least two motion modules are disposed on the upper surface of the cavity cover and are symmetrically distributed with the cavity cover as the center;

[0010] Each motion module includes:

[0011] A drive unit, which provides driving force along the lifting direction of the cavity cover, has its first end fixedly connected to the support assembly and its second end extending toward the cavity cover.

[0012] The connecting part is fixedly connected to the upper surface of the cavity cover and connected to the second end of the driving part.

[0013] Optionally, the connecting portion includes:

[0014] The base includes a base top and a base bottom. The base top is provided with a through hole, and the base bottom is fixed to the upper surface of the cavity cover. There is an accommodating space between the base top and the base bottom.

[0015] A support block is disposed within the accommodating space. The support block is provided with a connecting rod, which is located in the through hole at the top. The support block reciprocates within the accommodating space along the lifting direction of the cavity cover via the connecting rod. The support block is fixedly connected to the driving unit.

[0016] Optionally, the length of the connecting rod is greater than the length of the accommodating space.

[0017] Optionally, the driving unit includes:

[0018] An electric motor, fixed to the support assembly, is used to provide torque kinetic energy;

[0019] The coupling is fixed to the output end of the motor;

[0020] The lead screw is connected to the coupling and to the support block via a translation component.

[0021] Optionally, the motors in each motion module operate synchronously.

[0022] Optionally, in each drive unit, a speed reducer is provided between the motor and the coupling.

[0023] Optionally, the support component includes:

[0024] A support frame is located on top of the cavity cover;

[0025] Several guide rails are placed horizontally and fixed on the support frame;

[0026] Several fixed plates are slidably connected to a guide rail, and each fixed plate is fixedly connected to the motor, which drives the cavity cover connected to the motor to move along the guide rail.

[0027] Optionally, each of the connecting parts further includes:

[0028] The support member has its first end fixed to the fixing plate and its second end extending vertically downward, so that the support member is located outside the support block;

[0029] An upper limit block is provided protruding from the surface of the support member, and the upper limit block is located directly above the support block;

[0030] A lower limit block is provided protruding from the side wall of the accommodating space, and the lower limit block is located directly below the support block.

[0031] Optionally, the upper limit block is provided with a first sensor for detecting whether the support block is in contact with the upper limit block; the lower limit block is provided with a second sensor for detecting whether the support block is in contact with the lower limit block.

[0032] Optionally, both the first sensor and the second sensor are communicatively connected to the motor; when the first sensor detects that the support block contacts the upper limit block, the first sensor sends a signal to the motor to control the motor to stop moving; when the second sensor detects that the support block contacts the lower limit block, the second sensor sends a signal to the motor to control the motor to stop moving.

[0033] Compared with the prior art, the technical solution of this utility model has at least the following beneficial effects:

[0034] This invention achieves uniform force distribution on the cavity cover by symmetrically arranging motion modules around the cavity cover, preventing the cavity cover from sagging and becoming eccentric, and improving the safety of semiconductor devices.

[0035] This invention prevents the cavity cover from colliding by setting a limiting block and a sensor that transmits signals to the motor, thereby improving the safety and efficiency of the semiconductor.

[0036] By connecting the base with the accommodating space and the support block connected to the drive unit, a buffer space is provided for the cavity cover to descend, preventing collisions between the cavity cover and the cavity and improving the safety of the semiconductor device.

[0037] This invention improves the stability of the support block during the lifting and lowering process along the screw by adding slide rails on the left and right sides of the support member and adding a sliding block on the outer side of the support block, so that the sliding block can slide along the slide rails, thereby ensuring the smooth lifting and lowering of the cavity cover. Attached Figure Description

[0038] Figure 1 This is a schematic diagram of the vertical lifting cavity opening device described in this utility model.

[0039] Figure 2 for Figure 1 Side view.

[0040] Figure 3 This is a schematic diagram showing the connection between the support block and the base in the vertical lifting cavity device of this utility model.

[0041] Figure 4 This is a top view of the motion module connection part in the vertical lifting cavity device of this utility model.

[0042] In the diagram, 11-motor, 12-coupling, 13-lead screw, 21-base, 211-bottom end of base, 212-top end of base, 22-support block, 23-connecting rod, 24-translation component, 25-sliding block, 251-left end face of sliding block, 252-right end face of sliding block, 31-fixed plate, 32-support frame, 33-connecting block, 34-mounting hole, 35-slide rail, 36-support component, 4-cavity cover, 51-lower limit block, 52-upper limit block. Detailed Implementation

[0043] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0044] In the description of this utility model, it should be noted that the terms "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0045] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0046] See Figure 1 and Figure 2This utility model provides a vertically lifting cavity opening device, disposed on the top of the cavity cover 4, for lifting the cavity cover 4 of a semiconductor device. The cavity opening device includes: a support assembly and at least two motion modules. The support assembly is located on the top of the cavity cover 4 and is used to install the motion modules; multiple motion modules are disposed on the upper surface of the cavity cover 4 and symmetrically distributed around the cavity cover 4 to prevent uneven force on the cavity cover 4.

[0047] The support assembly includes a support frame 32 and a fixing plate 31. The support frame 32 is fixed to the top of the cavity cover 4. The fixing plate 31 is fixed to the support frame 32 to provide support for the motion module.

[0048] Each of the motion modules includes a connecting part and a driving part. The driving part provides a driving force in the lifting direction for the cavity cover 4. Its first end is fixed to the support assembly, and its second end extends toward the cavity cover 4. The connecting part is fixedly connected to the upper surface of the cavity cover 4 and connected to the second end of the driving part, so that it can be driven by the driving part, thereby driving the cavity cover 4 to lift and lower.

[0049] Specifically, the drive unit includes a motor 11, a lead screw 13, and a coupling 12. The motor 11 is fixed on the fixed plate 31 and is capable of outputting torque kinetic energy; the coupling 12 is fixed to the output end of the motor 11 and is used to transmit the torque kinetic energy of the motor 11; the lead screw 13 is connected to the coupling 12 and is used to output the torque kinetic energy of the motor 11.

[0050] The connecting part is connected to the lead screw 13 and can move up and down with the lead screw 13. The connecting part includes: a base 21, a support block 22, and a support rod 36. The first end of the support member 36 is fixed to the fixing plate 31, and the second end of the support member 36 extends vertically downward and is located outside the cavity cover 4; the support member 36 has a vertically downward mounting hole 34 in the middle, and the lead screw 13 is placed in the mounting hole 34. Please refer to... Figure 3 and Figure 4The base 21 has a concave structure, including a base top 212 and a base bottom 211. The base bottom 211 is fixed to the upper surface of the cavity cover 4. There is an accommodating space between the base bottom 211 and the base top 212, and the surface of the base top 212 is provided with several through holes. The support block 22 has an L-shaped structure. The bottom end of the support block 22 is located in the accommodating space of the base, and the bottom end of the support block 22 is provided with several connecting rods 23 that match the through holes on the base top 212. The top ends of the connecting rods 23 are located in the through holes of the base top 212, and the support block 22 is slidably connected to the base top 212 through the connecting rods 23, so that the support block 22 reciprocates in the planting space along the lifting direction of the cavity cover through the connecting rods 23. The outer side of the support block 22 is provided with a translation component 24, which is located in the mounting hole 34 of the support member 36 and is passed through by the lead screw 13. The support block 22 is connected to the lead screw 13 via the translation component 24, and can move up and down as the lead screw 13 rotates. In a preferred embodiment, the translation component 24 is a lead screw nut.

[0051] When the starter motor 11 controls the cavity cover 4 to rise and open the cavity, the support block 22 moves upward along the lead screw 13 via the translation component 24. Simultaneously, the connecting rod 23 on the support block 22 moves upward through the through hole at the top of the base 212 until the bottom end of the support block 22 contacts the top of the base 212. (See also...) Figure 3 As the support block 22 rises further, the bottom end of the support block 22 applies an upward driving force to the top end 212 of the base, causing the base 21 and the support block 22 to rise simultaneously, thereby driving the cavity cover 4 connected to the bottom end 211 of the base to rise, thus completing the opening operation of the cavity cover 4.

[0052] When the start motor 11 controls the cavity cover 4 to descend and complete the cavity closing operation, the support block 22 moves downward along the lead screw 13 via the translation component 24. Since the bottom end of the support block 22 contacts the top end 212 of the base, the base 21 descends synchronously with the support block 22, thereby causing the cavity cover 4 to descend synchronously with the base 21 until the cavity cover 4 contacts the chamber of the semiconductor device, completing the cavity closing operation. If the motor 11 fails to shut off in time, the support block 22 will continue to move downward with the rotation of the lead screw 13, causing the bottom end of the support block 22 to separate from the top end 212 of the base, and continue to move downward within the accommodating space of the base 21. Because the base 21 has accommodating space, the continued downward movement of the support block 22 will not cause excessive pressure on the cavity cover 4, thus preventing damage to the semiconductor device. This provides buffer space for the idling of the motor 11, improving the safety of the semiconductor device.

[0053] Furthermore, the motors 11 in each motion module work synchronously to ensure that the cavity cover 4 always remains horizontal.

[0054] In a preferred embodiment, each of the motion modules is disposed at the edge of the upper surface of the cavity cover 4, providing space for an important component located at the top center of the semiconductor device.

[0055] In a preferred embodiment, a speed reducer is provided between the motor 11 of the drive unit and the coupling 12 to increase the output torque of the motor 11 and improve the load capacity of the motor 11.

[0056] To facilitate the horizontal movement of the cavity cover 4 after opening the cavity, in a preferred embodiment, the support assembly further includes: several guide rails, all of which are placed horizontally and fixed parallel to the support frame 32. Each guide rail is connected to the fixing plate 31 via a connecting block 33, allowing the fixing plate 31 to move horizontally along the guide rails and drive the motor 11 fixed on the fixing plate 31 to move horizontally. This, in turn, drives the support block 22 connected to the motor 11 via a lead screw 13 to move horizontally, and finally drives the cavity cover 4, which is connected to the support block 22 via the base 21, to move horizontally.

[0057] Example 1

[0058] To prevent damage to the semiconductor device caused by excessive lifting or lowering of the cavity cover 4 during the lifting and lowering process, the connecting part of the cavity opening device in this embodiment further includes an upper limit block 52 and a lower limit block 51.

[0059] See Figure 1 The upper limit block 52 protrudes from the surface of the support member 36 and is located directly above the support block 22. It limits the upward movement of the support block 22 and prevents the cavity cover 4 from being raised too much and damaging the important component located at the top center of the semiconductor device.

[0060] The lower limit block 51 protrudes from the side wall of the accommodating space of the base 21 and is located directly below the support block 22. It limits the downward movement of the support block 22 and prevents the support block 22 from falling too far and causing damage to the base 21.

[0061] Furthermore, the upper limit block 52 is equipped with a first sensor to detect whether the support block 22 is in contact with the upper limit block 52; the lower limit block 51 is equipped with a second sensor to detect whether the support block 22 is in contact with the lower limit block 51. Both the first and second sensors transmit signals to the motor 11. When the first sensor detects that the support block 22 is in contact with the upper limit block 52, it sends a signal to the motor 11 to stop its movement, preventing the motor 11 from spinning idly and causing the cavity cover 4 to be excessively raised. When the second sensor detects that the support block 22 is in contact with the lower limit block 51, it sends a signal to the motor 11 to stop its movement, preventing the motor 11 from spinning idly and causing the cavity cover 4 to be excessively pressed down.

[0062] Example 2

[0063] Please see Figure 1 and Figure 2 In this embodiment, to improve the stability of the cavity cover 4 during the lifting process, the connecting part of the cavity opening device further includes: two slide rails 35 and a sliding block 25.

[0064] Two slide rails 35 are symmetrically arranged on the left and right sides of the support member 36 along the lifting direction. Please refer to [link / reference]. Figure 4 The sliding block 25 has a concave structure and is fixed to the outer side of the support block 22, located between the support member 36 and the support block 22. The surface of the sliding block 25 is provided with a transition hole, so that the translation member 24 provided on the outer side of the support block 22 can pass through the transition hole and connect with the lead screw 13. The sliding block 25 includes a left end face 251 and a right end face 252. The left end face 251 and the right end face 252 are respectively slidably connected to two slide rails 35, so that the sliding block 25 can move along the slide rails 35 in the lifting direction. When the support block 22 moves up and down along the lead screw 13, the left end face 251 and the right end face 252 of the sliding block 25 can slide along the two slide rails 35.

[0065] When the cavity cover 4 moves up and down, the motor 11 drives the lead screw 13 to rotate, which in turn drives the support block 22 to move up and down through the translation component 24. Since the support block 22 is fixed together with the sliding block 25, the sliding block 25 slides together with the support block 22. At this time, the left end face 251 and the right end face 252 of the sliding block 25 move along the two slide rails 35 to prevent the support block 22 from swinging left and right during the lifting and lowering process, which would affect the stability of the cavity cover 4 during the lifting and lowering process.

[0066] In summary, the cavity opening device provided by this utility model can achieve smooth lifting and lowering of the cavity cover. By symmetrically arranging multiple motion modules around the cavity cover, it prevents the cavity cover from drooping or becoming eccentric. Furthermore, by addressing the issues of excessive lifting or lowering of the cavity cover through the structure and positional relationship of the support block, upper limit block, and lower limit block, it effectively prevents the cavity cover from being bumped or knocked, thereby improving the safety and efficiency of semiconductor equipment.

[0067] Although the present invention has been described in detail through the above preferred embodiments, it should be understood that the above description should not be considered as a limitation of the present invention. Various modifications and substitutions to the present invention will be apparent to those skilled in the art after reading the above content. Therefore, the scope of protection of the present invention should be defined by the appended claims.

Claims

1. A vertically lifting cavity opening device, characterized in that, include: Support components are located on top of the cavity cover; At least two motion modules are disposed on the upper surface of the cavity cover and are symmetrically distributed with the cavity cover as the center; Each motion module includes: A drive unit, which provides driving force along the lifting direction of the cavity cover, has its first end fixedly connected to the support assembly and its second end extending toward the cavity cover. The connecting part is fixedly connected to the upper surface of the cavity cover and connected to the second end of the driving part.

2. The vertical lifting cavity opening device according to claim 1, characterized in that, The connecting part includes: The base includes a base top and a base bottom. The base top is provided with a through hole, and the base bottom is fixed to the upper surface of the cavity cover. There is an accommodating space between the base top and the base bottom. A support block is disposed within the accommodating space. The support block is provided with a connecting rod, which is located in the through hole at the top. The support block reciprocates within the accommodating space along the lifting direction of the cavity cover via the connecting rod. The support block is fixedly connected to the driving unit.

3. The vertically lifting cavity opening device according to claim 2, characterized in that, The length of the connecting rod is greater than the length of the accommodating space.

4. The vertically lifting cavity opening device according to claim 2, characterized in that, The drive unit includes: An electric motor, fixed to the support assembly, is used to provide torque kinetic energy; The coupling is fixed to the output end of the motor; The lead screw is connected to the coupling and to the support block via a translation component.

5. The vertically lifting cavity opening device according to claim 4, characterized in that, Synchronous operation of the motors in each motion module.

6. The vertically lifting cavity opening device according to claim 4, characterized in that, In each drive unit, a speed reducer is provided between the motor and the coupling.

7. The vertically lifting cavity opening device according to claim 4, characterized in that, The support components include: A support frame is located on top of the cavity cover; Several guide rails are placed horizontally and fixed on the support frame; Several fixed plates are slidably connected to a guide rail, and each fixed plate is fixedly connected to the motor, which drives the cavity cover connected to the motor to move along the guide rail.

8. The vertically lifting cavity opening device according to claim 7, characterized in that, Each of the connecting parts further includes: The support member has its first end fixed to the fixing plate and its second end extending vertically downward, so that the support member is located outside the support block; An upper limit block is provided protruding from the surface of the support member, and the upper limit block is located directly above the support block; A lower limit block is provided protruding from the side wall of the accommodating space, and the lower limit block is located directly below the support block.

9. The vertically lifting cavity opening device according to claim 8, characterized in that, The upper limit block is equipped with a first sensor for detecting whether the support block is in contact with the upper limit block; the lower limit block is equipped with a second sensor for detecting whether the support block is in contact with the lower limit block.

10. The vertically lifting cavity opening device according to claim 9, characterized in that, Both the first and second sensors are communicatively connected to the motor. When the first sensor detects that the support block contacts the upper limit block, it sends a signal to the motor to control the motor to stop moving. When the second sensor detects that the support block contacts the lower limit block, it sends a signal to the motor to control the motor to stop moving.

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