Rotatable wafer clamp

Abstract

The utility model relates to the technical field of wafers, in particular to a rotatable wafer clamp, which comprises a frame body and a structural assembly. The structure assembly comprises a wafer, a placing rod, a limiting rod, a cross rod, a sliding rod, a block body, a base body and an adjusting component, the placing rod is fixedly installed on one side of the frame body, the cross rod is fixedly installed on the side, away from the placing rod, of the frame body, the sliding rod is slidably connected with the frame body and located on the side, away from the cross rod, of the frame body, and the limiting rod is fixedly connected with the sliding rod and slidably connected with the frame body; the block body is fixedly connected with the sliding rod and located on the side, away from the limiting rod, of the sliding rod, the base body is fixedly connected with the frame body and located on the side, close to the block body, of the frame body, the adjusting component is connected with the base body and connected with the block body, the wafer is detachably connected with the containing rod and detachably connected with the limiting rod, and therefore the wafers of different specifications and sizes can be conveniently taken and placed. Therefore, the use effect of the device is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer technical field especially relates to a wafer rotatable clamp. BACKGROUND

[0002] Wafer refers to the silicon wafer used for making silicon semiconductor integrated circuit, and various circuit element structures can be processed on the silicon wafer to become IC products with specific electrical function. Since the single wafer is thin, the device is prone to falling or breaking during taking and placing when clamping and disassembling the wafer, thereby affecting the use effect of the device.

[0003] The prior art CN109712929A discloses a single wafer chuck and a using method, which comprises a first limiting column, a base, a pressing plate, a single wafer, a supporting column and a second limiting column. The two ends of the first limiting column are connected with the base and the pressing plate through screws, so that the single wafer chuck is convenient to assemble and disassemble, and the screw connection facilitates the repeated use of the single wafer chuck. Only by rotating out the screw can the connection between the pressing plate and the first limiting column be disconnected. After placing the single wafer, the screw is screwed into the threaded hole at the end of the first limiting column through the pressing plate to complete the connection between the pressing plate and the first limiting column. The single wafer is installed between the supporting column and the second limiting column, thereby improving the use effect of the device.

[0004] In normal use, since the specifications and sizes of wafers are different, the existing technology needs to assemble and disassemble wafers of different specifications and sizes, which is inconvenient to take and place wafers of different specifications and sizes, thereby affecting the use effect of the device. UTILITY MODEL CONTENTS

[0005] The utility model discloses a wafer rotatable clamp, which solves the problem that the existing technology needs to assemble and disassemble wafers of different specifications and sizes, which is inconvenient to take and place wafers of different specifications and sizes, thereby affecting the use effect of the device.

[0006] To achieve the above-mentioned purpose, the utility model provides a wafer rotatable clamp, which comprises a frame body and a structural assembly. The structural assembly comprises a wafer, a setting rod, a limiting rod, a cross rod, a sliding rod, a block, a seat and an adjusting member. The setting rod is fixedly installed on one side of the frame body. The cross rod is fixedly installed on the side of the frame body away from the setting rod. The sliding rod is slidably connected with the frame body and located on the side of the frame body away from the cross rod. The limiting rod is fixedly connected with the sliding rod and slidably connected with the frame body. The block is fixedly connected with the sliding rod and located on the side of the sliding rod away from the limiting rod. The seat is fixedly connected with the frame body and located on the side of the frame body close to the block. The adjusting member is connected with the seat and the block. The wafer is detachably connected with the setting rod and the limiting rod.

[0007] The adjusting member comprises an adjusting screw rod and a rotating block, the adjusting screw rod is rotationally connected with the seat body and is threadedly connected with the block body, and the rotating block is fixedly connected with the adjusting screw rod and is located on the side of the adjusting screw rod away from the block body.

[0008] The frame body is provided with a sliding groove, and the sliding groove is located on the side of the frame body close to the sliding rod and is matched with the sliding rod.

[0009] The limiting rod is provided with a limiting groove, and the limiting groove is located on the side of the limiting rod close to the wafer and is matched with the wafer.

[0010] The placing rod is provided with a placing groove, and the placing groove is located on the side of the placing rod close to the wafer and is matched with the wafer.

[0011] The wafer rotatable clamp of the utility model, rotating the rotating block, driving the adjusting screw rod to rotate on the seat body, the adjusting screw rod drives the block body to move on the frame body when rotating, the block body drives the sliding rod to move on the sliding groove of the frame body when moving, the sliding rod drives the limiting rod to move on the frame body when moving, the interval between the two limiting rods is adjusted, the placing groove of the placing rod is matched with the limiting groove of the limiting rod, the wafer is installed on the placing rod and the limiting rod, and then it is convenient to take and place wafers of different specifications and sizes, so that the use effect of the device is improved. BRIEF DESCRIPTION OF DRAWINGS

[0012] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings required to be used in the embodiment or prior art description will be briefly introduced below.

[0013] Figure 1 is the overall structure schematic view of the wafer rotatable clamp of the first embodiment of the utility model.

[0014] Figure 2 is the overall structure schematic view of the wafer rotatable clamp of the second embodiment of the utility model. Figure 1 is the enlarged view of B.

[0015] Figure 3 is the enlarged view of A. Figure 1

[0016] In the figure: 101-frame body, 102-wafer, 103-placing rod, 104-limiting rod, 105-cross rod, 106-sliding rod, 107-block body, 108-seat body, 109-adjusting screw rod, 110-rotating block, 111-sliding groove, 112-limiting groove, 113-placing groove. DETAILED DESCRIPTION

[0017] ​The embodiments of the present invention are described in detail below. Examples of the embodiments are shown in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, but should not be construed as limiting the present invention.

[0018] The first embodiment of this application is as follows:

[0019] Please see Figures 1-3 , Figure 1 This is a schematic diagram of the overall structure of the wafer rotatable clip according to the first embodiment of this utility model. Figure 2 This is a utility model Figure 1 Enlarged view at point B Figure 3 This is a utility model Figure 1 The enlarged view at point A shows that this utility model provides a rotatable wafer 102 clamp, including a frame 101 and structural components. The structural components include a wafer 102, a placement rod 103, a limiting rod 104, a crossbar 105, a sliding rod 106, a block 107, a base 108, and an adjustment component. The adjustment component includes an adjustment screw 109 and a rotating block 110. The frame 101 has a sliding groove 111, the limiting rod 104 has a limiting groove 112, and the placement rod 103 has a placement groove 113. The aforementioned solution solves the problem in the prior art where it is inconvenient to pick up and put down wafers 102 of different sizes when assembling and disassembling them, thus affecting the use of the device. It is understood that the aforementioned solution can be used in situations where the prior art requires the assembly and disassembly of wafers 102 of different sizes due to their different dimensions.

[0020] In this specific embodiment, the block 107 is driven to move on the frame 101 by the adjusting component. When the block 107 moves, it drives the slide rod 106 to move on the slide groove of the frame 101. When the slide rod 106 moves, it drives the limiting rod 104 to move on the frame 101, thereby adjusting the distance between the two limiting rods 104. The placement groove of the placement rod 103 cooperates with the limiting groove of the limiting rod 104 to install the wafer 102 on the placement rod 103 and the limiting rod 104, thereby facilitating the handling of wafers 102 of different sizes and improving the usability of the device.

[0021] The rod 103 is fixedly installed on one side of the frame body 101, the cross rod 105 is fixedly installed on the side of the frame body 101 away from the rod 103, the slide rod 106 is in sliding connection with the frame body 101 and is located on the side of the frame body 101 away from the cross rod 105, the limiting rod 104 is fixedly connected with the slide rod and is in sliding connection with the frame body 101, the block 107 is fixedly connected with the slide rod 106 and is located on the side of the slide rod 106 away from the limiting rod 104, the seat 108 is fixedly connected with the frame body 101 and is located on the side of the frame body 101 close to the block 107, the adjusting member is connected with the seat 108 and the block 107, the wafer 102 is detachably connected with the rod 103 and is detachably connected with the limiting rod 104, the frame body 101 has a plurality of left upper front and rear ends, the outer side of the rod 103 is designed with a plurality of placing grooves, the two ends of the rod 103 are fixedly connected with the lower sides of the two frame bodies 101 respectively, the cross rod 105 has a plurality of ends, the ends of the two cross rods 105 are fixedly connected with the lower sides of the two frame bodies 101 respectively, the limiting rod 104 has a plurality of limiting grooves on the outer side, the end of the block 107 is designed with a through threaded hole, the block 107 has a plurality of ends, the slide rod 106 has a plurality of ends, one end of the slide rod 106 is fixedly connected with the outer side of the block 107, the other end of the slide rod 106 is fixedly connected with the end of the limiting rod 104 through the sliding groove of the frame body 101, the seat 108 has a plurality of ends, the end of the seat 108 is designed with a rotating hole, the adjusting member has a plurality of ends, the adjusting member drives the block 107 to move the slide rod 106 on the sliding groove of the frame body 101 through the rotating hole of the seat 108, the block 107 is driven to move on the frame body 101 by the adjusting member, the block 107 drives the slide rod 106 to move on the sliding groove of the frame body 101 when moving, the slide rod 106 drives the limiting rod 104 to move on the frame body 101 when moving, the distance between the two limiting rods 104 is adjusted, the placing groove of the rod 103 cooperates with the limiting groove of the limiting rod 104, the wafer 102 is installed on the rod 103 and the limiting rod 104, and then it is convenient to take and place wafers 102 of different specifications and sizes, thereby improving the use effect of the device.

[0022] Secondly, the adjusting screw rod 109 is rotationally connected with the seat body 108 and threadedly connected with the block body 107; the rotating block 110 is fixedly connected with the adjusting screw rod 109 and located at a side of the adjusting screw rod 109 away from the block body 107; the middle part of the outer side of the adjusting screw rod 109 is designed with external threads; the end of the adjusting screw rod 109 is fixedly connected with the rotating block 110 through the rotating hole of the seat body 108; the rotating block 110 is rotated to drive the adjusting screw rod 109 to rotate on the seat body 108; the adjusting screw rod 109 drives the block body 107 to move on the frame body 101 when rotating, so that the block body 107 is driven to move.

[0023] Then, the frame body 101 is provided with sliding grooves 111 located at a side of the frame body 101 close to the slide rod 106 and matched with the slide rod 106; the sliding grooves 111 are multiple; the sliding grooves 111 are located at the left upper front and rear ends of the frame body 101; the sliding grooves 111 are slidingly connected with the outer side of the slide rod 106; the slide rod 106 is driven to move on the sliding grooves 111, so that the connection between the slide rod 106 and the frame body 101 is realized.

[0024] Meanwhile, the limiting rod 104 is provided with limiting grooves 112 located at a side of the limiting rod 104 close to the wafer 102 and matched with the wafer 102; the limiting grooves 112 are multiple; the limiting grooves 112 are located at the outer side of the limiting rod 104; the limiting grooves 112 are detachably connected with the outer side of the wafer 102; the wafer 102 is placed on the limiting grooves 112, so that the connection between the wafer 102 and the limiting rod 104 is realized.

[0025] Finally, the placing rod 103 is provided with placing grooves 113 located at a side of the placing rod 103 close to the wafer 102 and matched with the wafer 102; the placing grooves 113 are multiple; the placing grooves 113 are located at the outer side of the placing rod 103; the wafer 102 is placed on the placing grooves 113, so that the connection between the wafer 102 and the placing rod 103 is realized.

[0026] When the wafer 102 is rotatable clamped by the wafer 102 of the embodiment, the rotating block 110 is rotated, the adjusting screw rod 109 is driven to rotate on the seat body 108, the block body 107 is driven to move on the frame body 101 when the adjusting screw rod 109 rotates, the sliding rod 106 is driven to move on the sliding groove 111 when the block body 107 moves, the limiting rod 104 is driven to move on the frame body 101 when the sliding rod 106 moves, the interval between the two limiting rods 104 is adjusted, the placement slot 113 cooperates with the limiting slot 112, the wafer 102 is installed on the placement rod 103 and the limiting rod 104, and then different specifications and sizes of the wafer 102 are conveniently taken and placed, so that the use effect of the device is improved.

[0027] The above only discloses one or more preferred embodiments of the application, and cannot limit the scope of the application. Those skilled in the art can understand that the implementation of all or part of the above processes, and the equivalent changes made according to the claims of the application, still belong to the scope covered by the application.

Claims

1. A wafer rotatable clamp, comprising a frame, characterized in that: It also includes structural components; The structural components include a wafer, a placement rod, a limiting rod, a crossbar, a sliding rod, a block, a base, and an adjusting member. The placement rod is fixedly installed on one side of the frame. The crossbar is fixedly installed on the side of the frame away from the placement rod. The sliding rod is slidably connected to the frame and located on the side of the frame away from the crossbar. The limiting rod is fixedly connected to the sliding rod and slidably connected to the frame. The block is fixedly connected to the sliding rod and located on the side of the sliding rod away from the limiting rod. The base is fixedly connected to the frame and located on the side of the frame close to the block. The adjusting member is connected to the base and to the block. The wafer is detachably connected to the placement rod and detachably connected to the limiting rod.

2. The wafer rotatable clamp as described in claim 1, characterized in that: The adjusting component includes an adjusting screw and a rotating block. The adjusting screw is rotatably connected to the base and threadedly connected to the block. The rotating block is fixedly connected to the adjusting screw and is located on the side of the adjusting screw away from the block.

3. The wafer rotatable clamp as described in claim 1, characterized in that: The frame has a sliding groove located on the side of the frame near the sliding rod and cooperating with the sliding rod.

4. The wafer rotatable clamp as described in claim 1, characterized in that: The limiting bar has a limiting groove located on the side of the limiting bar closest to the wafer and engages with the wafer.

5. The wafer rotatable clamp as described in claim 4, characterized in that: The placement bar has a placement groove located on the side of the placement bar closest to the wafer and engages with the wafer.

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