Manual four-station wafer full-automatic visual inspection machine

Abstract

The utility model discloses a manual four-station full-automatic visual inspection machine for wafers. The manual four-station full-automatic visual inspection machine comprises a rack, the cover body is arranged on the outer side face of the rack in a covering mode, the length direction of the cover body is transverse, the width direction of the cover body is longitudinal, the front side of the cover body in the longitudinal direction is a detection area, the interior of the cover body is a transfer area, and the rear side of the cover body in the longitudinal direction is a material box area; the material box mechanism is arranged in the material box area and comprises a feeding part used for providing wafers to be detected and a discharging part used for receiving the detected wafers; the transferring mechanism is arranged in the transferring area and comprises a transverse moving part arranged in the transverse direction and a mechanical arm installed on the transverse moving part. The aligner is arranged in the transfer area and located at the end of the cover body in the length direction; the visual inspection mechanism is arranged in the detection area; the driving belt wheel drives the conveying belt to rotate around the driving belt wheel and the driven belt wheel so as to drive the supporting frame to stably move in the transverse direction.

Description

TECHNICAL FIELD

[0001] The utility model relates to a kind of hand four-station wafer full-automatic visual inspection machine. BACKGROUND

[0002] When wafer is finished processing, the micro-particle, scratch, pollution and the like of wafer need to be detected, but in the process of feeding and discharging before detection, manual operation needs to be avoided as far as possible to reduce the risk of scratch, pollution and the like, so the process of taking out, aligning, sending into visual inspection mechanism and retrieving from the magazine should be fully automated, the stability in the transfer process of wafer transfer robot and the precision of stroke are more important for the above process, so how to improve the stability in the transfer process of wafer transfer robot and the precision of stroke is an urgent problem to be solved. SUMMARY

[0003] The utility model aims at providing a kind of hand four-station wafer full-automatic visual inspection machine that is stable in movement and has high stroke precision.

[0004] To achieve the above-mentioned purpose, the technical scheme adopted by the utility model is: a kind of hand four-station wafer full-automatic visual inspection machine, it includes:

[0005] Frame;

[0006] Cover, it is covered on the outer side of the frame, its length direction is transverse, width direction is longitudinal, the front side in the longitudinal direction of cover body is detection area, the inside of cover body is transfer area, the rear side in the longitudinal direction of cover body is magazine area;

[0007] Magazine mechanism, it is located in magazine area, it includes the feeding part for providing wafer to be detected and the discharging part for receiving wafer after detection;

[0008] Transfer mechanism, it is located in the transfer area, it includes the transverse moving part being arranged along transverse, mechanical hand being installed on the transverse moving part;

[0009] Aligner, it is located in the transfer area and is located at the end of the length direction of cover body;

[0010] Visual inspection mechanism, it is located in the detection area;

[0011] The lateral moving part comprises a mounting plate fixed to the frame, a guide rail arranged on the mounting plate in the lateral direction, a support frame slidingly connected to the guide rail, a driven pulley rotatingly connected to the mounting plate and located at one end of the mounting plate in the lateral direction, a driving motor and a speed reducer fixed to the other end of the mounting plate in the lateral direction, a driving pulley connected to the output end of the speed reducer, a transmission belt wound around the driving pulley and the driven pulley, and the support frame is fixedly connected to the upper side of the transmission belt, and the transmission belt rotates around the driving pulley and the driven pulley under the driving of the driving pulley to drive the support frame to move in the lateral direction.

[0012] In another embodiment, the support frame comprises a vertical support frame slidingly connected to the guide rail, and a horizontal support frame connected to the vertical support frame and arranged horizontally, and the horizontal support frame is located at the front side of the vertical support frame, and the mechanical hand is mounted on the horizontal support frame.

[0013] In another embodiment, the support frame further comprises an L-shaped connecting side plate fixedly connected to the vertical support frame and the horizontal support frame and arranged in an L shape, and the L-shaped connecting side plate matches the vertical support frame and the horizontal support frame arranged in an L shape, so that the connection stability of the vertical support frame and the horizontal support frame is improved, and the vibration of the mechanical hand during being driven by the support frame is reduced.

[0014] In another embodiment, a protrusion extending in the lateral direction is arranged on the front side of the guide rail, the lateral moving part comprises sliding blocks fixed to the upper end and the lower end of the rear side of the support frame, the sliding blocks are provided with sliding grooves with large top and small bottom and extending in the lateral direction, the cross section of the protrusion is the same as that of the sliding groove, and the support frame is slidingly connected to the guide rail through the cooperation of the sliding groove and the protrusion and cannot be detached from the guide rail in the front-rear direction.

[0015] In another embodiment, the lateral moving part comprises a first displacement sensor and a second displacement sensor arranged on the mounting plate, and the first displacement sensor and the second displacement sensor are respectively located at the two sides of the support frame and on the extension line of the moving path of the support frame. In order to determine the translation stroke of the mechanical hand, most of the transfer mechanisms now adopt an encoder connected to the driving wheel or the motor or the speed reducer to calculate the stroke, but this kind of way has certain error. In order to solve the above problem, the first displacement sensor and the second displacement sensor located at the two sides of the support frame in the moving direction are used to detect the stroke of the support frame in real time, the change of the values detected by the first displacement sensor and the second displacement sensor is the stroke of the support frame, and the change of the values detected by the first displacement sensor and the second displacement sensor should be consistent, otherwise the movement of the support frame deviates, and the action of the inspection machine should be stopped in time and checked.

[0016] Another embodiment, the mounting plate includes a first mounting side plate arranged transversely, and end side plates arranged on the transverse two ends of the first mounting side plate, the end side plates extend to the front side, wherein the first mounting hole is arranged on the end side plate, the second mounting hole is arranged on the other end side plate, the first mounting hole and the second mounting hole are located on the extension line of the moving path of the support frame, the first displacement sensor is arranged in the first mounting hole, and the second displacement sensor is arranged in the second mounting hole. The end side plate not only forms a protective cover for the guide rail and other components, but also serves as a physical limit for the support frame to prevent the support frame from falling off the guide rail.

[0017] Another embodiment, the reducer is fixed on the first mounting side plate, the reducer is located below the first mounting hole, and the first displacement sensor is mounted on the housing of the reducer and penetrates the first mounting hole. The housing of the reducer is used to mount the first sensor, which effectively utilizes the space, does not need to separately provide a mounting structure on the mounting plate, saves space and simplifies the structure.

[0018] Another embodiment, the transverse moving part further comprises a sensor mounting seat fixed on the housing of the reducer, the sensor mounting seat is provided with an arc-shaped mounting slot with a large belly and a small mouth, and the first displacement sensor is adjustably clamped in the mounting slot in the transverse direction.

[0019] Another embodiment, the visual inspection mechanism has a plurality of visual inspection mechanisms, and the plurality of visual inspection mechanisms and the plurality of feeding parts and the plurality of discharging parts are matched to meet the needs of different detection conditions. One feeding part can match one visual inspection mechanism and one discharging part, or three feeding parts can match two visual inspection mechanisms and one discharging part.

[0020] Another embodiment, the cover body is provided with an alarm mechanism and oppositely arranged first and second observation windows on the side wall on one side of the magazine area. The front end of the first observation window and the second observation window is fixedly connected with the cover body, and the rear end of the opposite side wall of the first observation window and the second observation window is provided with a light curtain. When the visual inspection machine is in a working state and an object enters the magazine area, the visual inspection machine sends an alarm.

[0021] The utility model discloses the following advantages compared with prior art by the above technical scheme: the utility model discloses the driving of the driving pulley and the driving pulley and driven pulley rotation of the conveyer belt and drive the stable lateral movement of the support frame, in order to determine the translation of the robot, now most transfer mechanism adopts the encoder connected with the driving wheel or motor or speed reducer to calculate the stroke, but the error exists in this way, in order to solve this problem, the first displacement sensor and the second displacement sensor in the moving direction of the support frame and located at its both sides real -time detection support frame's stroke, the change of the value measured by the first displacement sensor and the second displacement sensor is the stroke of the support frame, and this is used as the translation stroke of the robot more accurate, and the change of the value measured by the first displacement sensor and the second displacement sensor should be consistent, otherwise the deviation of the movement of the support frame, should stop the action of the inspection machine in time and check, multiple inspection mechanism and multiple feeding part and unloading part cooperate, realize the need of different detection conditions, can match one feeding part one inspection mechanism and one unloading part, also can match three feeding parts two inspection mechanisms and one unloading part, the light curtain can detect whether there is object into the material box area when the inspection machine is in working condition, thereby timely machine sends out the alarm. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 It is the perspective view of the utility model;

[0023] Figure 2 It is another perspective view of the utility model;

[0024] Figure 3 It is the explosion view of the utility model;

[0025] Figure 4 It is another perspective view of the utility model;

[0026] Figure 5 It is the perspective view of the transfer mechanism in the utility model;

[0027] Figure 6 It is another perspective view of the transfer mechanism in the utility model;

[0028] Figure 7 It is the perspective view of the transfer mechanism in the utility model after removing the conveyer belt, driven pulley and one connecting side plate;

[0029] Figure 8 It is the perspective view of the support frame and robot in the utility model. DETAILED DESCRIPTION

[0030] The utility model will be further described in connection with the embodiment shown in the drawings.

[0031] As Figures 1-4As shown, the manual four-station wafer full-automatic visual inspection machine comprises a rack 5, a cover body 4, a magazine mechanism 3, a transfer mechanism 1, an aligner 2 and a visual inspection mechanism 6. The cover body 4 is arranged on the outer side of the rack 5, the length direction of which is transverse, and the width direction is longitudinal. The front side of the cover body 4 in the longitudinal direction is a detection area C, the inside of the cover body 4 is a transfer area B, and the rear side of the cover body 4 in the longitudinal direction is a magazine area A. The magazine mechanism 3 is arranged in the magazine area A and comprises a feeding part 31 for providing the wafer to be detected and a discharging part 32 for receiving the wafer after detection. The transfer mechanism 1 is arranged in the transfer area B and comprises a transverse moving part 11 arranged in the transverse direction and a mechanical hand 12 mounted on the transverse moving part 11. The aligner 2 is arranged in the transfer area B and located at the end of the length direction of the cover body 4. The visual inspection mechanism 6 is arranged in the detection area C. The aligner manufacturer is TAZMO, and the model is MAF-SJKZ. The mechanical hand manufacturer is TAZMO, and the model is TT301-WAANGN-HBR. The magazine structure manufacturer is Fuchuangde, and the model is PLM-200W-OHT. The visual inspection mechanism can adopt the manual detection device of the wafer visual inspection machine disclosed in the patent CN218482201U.

[0032] Specifically,

[0033] As Figures 3-4 The visual inspection mechanism 6 is multiple, and the multiple visual inspection mechanisms 6 cooperate with the multiple feeding parts 31 and discharging parts 32 to meet the needs of different detection conditions. One feeding part 31 can match one visual inspection mechanism 6 and one discharging part 32, or three feeding parts 31 can match two visual inspection mechanisms 6 and one discharging part 32. The cover body 4 is provided with an alarm mechanism 43 on the side wall located on one side of the magazine area A, and a first observation window 41 and a second observation window 42 are oppositely arranged. The front end of the first observation window 41 and the second observation window 42 is fixedly connected with the cover body 4, and the rear end of the opposite side wall of the first observation window 41 and the second observation window 42 is provided with a light curtain 44. When the visual inspection machine is in a working state, an object enters the magazine area A, and the visual inspection machine issues an alarm.

[0034] As Figures 5-8As shown, the transverse moving part 11 comprises a mounting plate 111 fixed on the frame 5, a guide rail 112 arranged on the mounting plate 111 in the transverse direction, a support frame 113 slidably connected to the guide rail 112, a driven pulley 114 rotatably connected to the mounting plate 111 and located at one end of the mounting plate 111 in the transverse direction, a driving motor 115 and a speed reducer 116 fixed on the other end of the mounting plate 111 in the transverse direction, a driving pulley 117 connected to the output end of the speed reducer 116, a transmission belt 118 wound around the driven pulley 114 and the driving pulley 117, a first displacement sensor 119 and a second displacement sensor 110 arranged on the mounting plate 111, a sensor mounting seat 1110, and a plurality of support rollers 1111 arranged on the inner side of the transmission belt 118 and spaced apart. The support frame 113 is fixedly connected to the upper side of the transmission belt 118, and the transmission belt 118 rotates around the driving pulley 117 and the driven pulley 114 under the driving of the driving pulley 117 to drive the support frame 113 to move in the transverse direction, and the outer periphery of the support roller 1111 is attached to the inner side of the transmission belt 118.

[0035] The support frame 113 comprises a vertical support 1112 slidably connected to the guide rail 112, a horizontal support 1113 connected to the vertical support 1112 and arranged horizontally, a connecting side plate 1114 fixedly connected to the vertical support 1112 and the horizontal support 1113 and in the shape of L, the horizontal support 1113 is located at the front side of the vertical support 1112, and the manipulator 12 is mounted on the horizontal support 1113. The connecting side plate 1114 in the shape of L matches the vertical support 1112 and the horizontal support 1113 which are connected in the shape of L, which can improve the connection stability of the vertical support 1112 and the horizontal support 1113 and reduce the vibration of the manipulator 12 during being driven by the support frame 113.

[0036] A convex strip 1115 extending in the transverse direction is arranged on the front side of the guide rail 112, the transverse moving part 11 comprises a sliding block 1116 fixed on the upper end and the lower end of the rear side of the support frame 113, a slide groove 1117 with a large opening and a small opening and extending in the transverse direction is arranged on the sliding block 1116, the cross section of the convex strip 1115 is the same as that of the slide groove 1117, and the support frame 113 is slidably connected to the guide rail 112 through the cooperation of the slide groove 1117 and the convex strip 1115 and cannot fall off the guide rail 112 in the front-rear direction.

[0037] The first displacement sensor 119 and the second displacement sensor 110 are respectively located on both sides of the support frame 113 and on the extension line of the moving path of the support frame 113. In order to determine the stroke of the manipulator 12 translation, most of the transfer mechanisms 1 now adopt an encoder connected with the driving wheel or motor or speed reducer 116 to calculate the stroke, but there is a certain error in this way, in order to solve this problem, the first displacement sensor 119 and the second displacement sensor 110 on both sides of the support frame 113 in the moving direction are used to detect the stroke of the support frame 113 in real time, and the change of the detected value of the support frame 113 at the first displacement sensor 119 and the second displacement sensor 110 is the stroke of the support frame 113, which is used as the translation stroke of the manipulator 12, which is more accurate, and the change of the value measured by the first displacement sensor 119 and the second displacement sensor 110 should be consistent, otherwise the movement of the support frame 113 deviates, the action of the inspection machine should be stopped in time and checked.

[0038] The mounting plate 111 includes a first mounting side plate 1118 arranged transversely, and end side plates 1119 arranged on the transversely two ends of the first mounting side plate 1118, the end side plates 1119 extend to the front side, wherein the first mounting hole 1120 is formed on one of the end side plates 1119, and the second mounting hole 1121 is formed on the other end side plate 1119, the first mounting hole 1120 and the second mounting hole 1121 are located on the extension line of the moving path of the support frame 113, the first displacement sensor 119 is arranged in the first mounting hole 1120, and the second displacement sensor 110 is arranged in the second mounting hole 1121, the end side plates 1119 not only form a covering protection for the guide rail 112 and other components, but also serve as a physical limit for the support frame 113 to prevent the support frame 113 from falling off the guide rail 112.

[0039] The speed reducer 116 is fixed on the first mounting side plate 1118, and the speed reducer 116 is located below the first mounting hole 1120, the first displacement sensor 119 is arranged on the housing of the speed reducer 116 and penetrates the first mounting hole 1120, the housing of the speed reducer 116 is used to install the first sensor, the space is effectively utilized, and a separate mounting structure does not need to be arranged on the mounting plate 111, thereby saving space and simplifying the structure.

[0040] The sensor mounting seat 1110 is fixed on the housing of the speed reducer 116, the sensor mounting seat 1110 is provided with an arc-shaped mounting groove 1122 with a large opening and a small opening, and the first displacement sensor 119 is adjustably clamped in the mounting groove 1122 in the transverse direction.

[0041] The wafer-loaded magazine is placed to the loading part 31, the loading part 31 reads the current magazine bar code information upload, the loading part 31 automatically scans the wafer in the magazine, records the wafer position, and records the relevant data.Mechanical hand 12 automatically takes out the wafer, the horizontal moving part 11 drives the mechanical hand 12 to travel to the vicinity of the aligner 2, the mechanical hand 12 places the wafer on the aligner 2 and patrols the edge, completes the adjustment of the wafer position, then the mechanical hand 12 is placed in the inspection mechanism 6 with the horizontal moving part 11 after horizontal movement, the detection personnel observe with the hand-held tool, after the detection is completed, it is placed in the original position, the mechanical hand 12 takes back the wafer and places it in the designated position, and records the relevant data.

[0042] The above embodiment is only for illustrating the technical concept and characteristics of the present application, and the purpose is to enable the person skilled in the art to understand the content of the present application and to implement it, and cannot limit the protection scope of the present application. Any equivalent changes or modifications made according to the spirit and essence of the present application shall be covered within the protection scope of the present application.

Claims

1. A manual four-station fully automatic wafer visual inspection machine, comprising: frame; The cover is installed on the outer side of the frame. Its length direction is transverse and its width direction is longitudinal. The front side of the cover in the longitudinal direction is the detection area, the inside of the cover is the transfer area, and the rear side of the cover in the longitudinal direction is the material box area. The cassette mechanism, located in the cassette area, includes a loading section for providing wafers to be inspected and a unloading section for receiving wafers that have completed inspection. A transfer mechanism, located in the transfer area, includes a transversely moving part arranged laterally and a robotic arm mounted on the transversely moving part; Aligner, which is located within the transfer area and at the end of the cover along its length; A visual inspection unit is located in the inspection area; The lateral moving part is characterized by comprising: a mounting plate fixed to the frame; a guide rail arranged laterally on the mounting plate; a support frame slidably connected to the guide rail; a driven pulley rotatably connected to the mounting plate and located at one end of the lateral direction of the mounting plate; a drive motor and a reducer fixed to the other end of the mounting plate in the lateral direction; a driving pulley connected to the output end of the reducer; a conveyor belt wrapped around the driven pulley and the driving pulley; the support frame being fixedly connected to the upper side of the conveyor belt; and the conveyor belt rotating around the driving pulley and the driven pulley under the drive of the driving pulley, thereby driving the support frame to move laterally.

2. The manual four-station fully automatic wafer visual inspection machine according to claim 1, characterized in that: The support frame includes a vertical bracket slidably connected to the guide rail and a horizontal bracket connected to the vertical bracket and arranged horizontally. The horizontal bracket is located in front of the vertical bracket, and the robotic arm is mounted on the horizontal bracket.

3. The manual four-station fully automatic wafer visual inspection machine according to claim 2, characterized in that: The support frame also includes an L-shaped connecting side plate that is fixedly connected to both the vertical support and the horizontal support.

4. The manual four-station fully automatic wafer visual inspection machine according to claim 1, characterized in that: The front side of the guide rail is provided with a convex strip extending laterally. The lateral moving part includes a slider fixed to the upper and lower ends of the rear side of the support frame. The slider is provided with a groove that is wide at the bottom and narrow at the top and extends laterally. The cross-section of the convex strip is the same as the cross-section of the groove. The support frame is slidably connected to the guide rail through the cooperation of the groove and the convex strip, and will not fall off the guide rail in the front-back direction.

5. The manual four-station fully automatic wafer visual inspection machine according to claim 1, characterized in that: The lateral movement part includes a first displacement sensor and a second displacement sensor disposed on the mounting plate. The first displacement sensor and the second displacement sensor are respectively located on both sides of the support frame and on the extension line of the movement path of the support frame.

6. The manual four-station fully automatic wafer visual inspection machine according to claim 5, characterized in that: The mounting plate includes a first mounting side plate arranged laterally and end side plates arranged at the two lateral ends of the first mounting side plate. The end side plates extend forward. A first mounting hole is provided on one end side plate and a second mounting hole is provided on the other end side plate. The first mounting hole and the second mounting hole are located on the extension line of the movement path of the support frame. The first displacement sensor is provided in the first mounting hole and the second displacement sensor is provided in the second mounting hole.

7. The manual four-station fully automatic wafer visual inspection machine according to claim 6, characterized in that: The speed reducer is fixed to the first mounting side plate, the speed reducer is located below the first mounting hole, and the first displacement sensor is mounted on the housing of the speed reducer and passes through the first mounting hole.

8. The manual four-station fully automatic wafer visual inspection machine according to claim 7, characterized in that: The lateral movement part also includes a sensor mounting base fixed to the housing of the reducer. The sensor mounting base has an arc-shaped mounting groove with a wide belly and a narrow opening. The first displacement sensor is laterally adjustable and locked in the mounting groove.

9. The manual four-station fully automatic wafer visual inspection machine according to claim 1, characterized in that: There are multiple visual inspection agencies.

10. The manual four-station fully automatic wafer visual inspection machine according to claim 1, characterized in that: An alarm mechanism and a first observation window and a second observation window are provided on the side wall of the cover and located on the side of the material box area. The front ends of the first observation window and the second observation window are fixedly connected to the cover. A light curtain is provided on the rear ends of the side walls opposite to the first observation window and the second observation window. When the visual inspection machine is in working condition, if an object enters the material box area, the visual inspection machine will sound an alarm.

Images